JPH06346270A - Electroplating method and split insoluble electrode for electroplating - Google Patents
Electroplating method and split insoluble electrode for electroplatingInfo
- Publication number
- JPH06346270A JPH06346270A JP16520193A JP16520193A JPH06346270A JP H06346270 A JPH06346270 A JP H06346270A JP 16520193 A JP16520193 A JP 16520193A JP 16520193 A JP16520193 A JP 16520193A JP H06346270 A JPH06346270 A JP H06346270A
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- Prior art keywords
- electrode
- anode
- cathode drum
- electroplating
- split type
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、銅箔等の金属箔の電気
めっき方法と、それに使用される分割型不溶性電極の改
良に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for electroplating a metal foil such as a copper foil and an improvement of a split type insoluble electrode used therein.
【０００２】[0002]
【従来の技術】プリント配線基板が多方面にかつ大量に
採用されてる。プリント配線基板には銅箔を必要とする
が、その製造には通常電解銅箔が用いられている。電解
銅箔の製造に際しては、ピンホール・異常析出物等の点
欠陥が発生せず、均一な厚みをもつようにする必要があ
る。2. Description of the Related Art Printed wiring boards are widely used in many fields. A copper foil is required for a printed wiring board, and an electrolytic copper foil is usually used for its manufacture. When manufacturing an electrolytic copper foil, it is necessary to have a uniform thickness without causing point defects such as pinholes and abnormal deposits.
【０００３】従来の電解銅箔の製造では、図９を参照し
て説明するならば、陰極としてＴｉあるいはＳＵＳ製回
転ドラムを用い、陽極として、例えば陰極ドラム７のほ
ぼ１／４円周の断面円弧状の電極１０として鉛板を２枚
下方に設置し、電極１０、１０間から電解液を供給し、
この間隙内にめっき液を流す構造としている。この装置
に直流電流を流し陰極ドラム７に銅を析出させ、この析
出銅８を連続的に剥離し、巻取装置９により巻き取って
いる。In the production of a conventional electrolytic copper foil, referring to FIG. 9, a rotating drum made of Ti or SUS is used as a cathode, and as an anode, for example, a cross section of about 1/4 circle of the cathode drum 7 is used. Two lead plates are installed below the arc-shaped electrode 10, and the electrolytic solution is supplied from between the electrodes 10 and 10.
The structure is such that the plating solution flows in this gap. A direct current is passed through this device to deposit copper on the cathode drum 7, and the deposited copper 8 is continuously peeled off and wound up by a winding device 9.
【０００４】従来一般に用いられている陽極は、Ｐｂ、
あるいはＰｂとＳｂ、Ｓｎ、Ａｇ、Ｉｎ、Ｃａその他の
二元あるいは多元合金である。このため陽極表面に生成
した酸化鉛が、電解浴中にＰｂイオンとして溶け込み、
電解浴中の硫酸イオンと反応して、硫酸鉛を形成し浴中
に懸濁してしまう。この硫酸鉛のスラツジは濾過器を設
置して除去することができるが、この保守作業には多大
な労力を要する。スラツジの除去が不十分であると、ス
ラッジは電解槽や配管の内壁面に堆積して液の流に悪影
響を及ぼす。さらに、陰極ドラムに硫酸鉛のスラツジが
付着すると、その箇所にピンホールもしくは異常析出物
等の点欠陥が発生する。これは前記のとおり銅箔の致命
的欠陥となる。Conventionally commonly used anodes are Pb,
Alternatively, it is a binary or multi-component alloy of Pb and Sb, Sn, Ag, In, Ca or the like. Therefore, the lead oxide formed on the surface of the anode dissolves into the electrolytic bath as Pb ions,
Reacts with sulfate ions in the electrolytic bath, forming lead sulfate and suspending in the bath. The sludge of lead sulfate can be removed by installing a filter, but this maintenance work requires a great deal of labor. If the sludge is not removed sufficiently, the sludge will be deposited on the inner wall surface of the electrolytic cell or the pipe and adversely affect the liquid flow. Further, when lead sulfate sludge adheres to the cathode drum, point defects such as pinholes or abnormal deposits occur at the locations. This is a fatal defect of the copper foil as described above.
【０００５】また鉛系電極を使用すると、電流集中や、
エロージョンにより局部的に鉛が損耗するため極間距離
が場所により異なってくる。この対策として定期的に鉛
陽極の表面を切削しているが、製造稼働率の低下もさる
ことながら、極間の距離の増大のため槽電圧の上昇すな
わち製造コストの上昇につながってしまう。そして、極
間距離の不均一により、銅箔幅方向の厚みむらが生じて
しまう。When lead-based electrodes are used, current concentration and
Erosion locally wears lead, and the distance between the poles varies depending on the location. As a countermeasure against this, the surface of the lead anode is regularly cut. However, the manufacturing operation rate is reduced and the distance between the electrodes is increased, which leads to an increase in cell voltage, that is, an increase in manufacturing cost. Then, due to the non-uniformity of the inter-electrode distance, thickness unevenness occurs in the width direction of the copper foil.
【０００６】このような硫酸塩のスラッジに起因するピ
ンホールや、異常析出物の発生を防止し、鉛の損耗によ
る極間距離の不均一化により生じる銅箔幅方向の厚みむ
らを解決するなどのため、陰極ドラムに対向する円弧板
状陽極として、Ｔｉ、Ｔａ、Ｎｂ、Ｚｒ等の弁金属基体
表面に主として白金族の金属あるいはその酸化物を触媒
として被覆した電極を不溶性陽極として使用する旨の提
案がなされている（特公平１−５６１５３号公報）。It is possible to prevent the occurrence of pinholes and abnormal deposits caused by such sludge of sulfate, and to solve the thickness unevenness in the width direction of the copper foil caused by the nonuniformity of the inter-electrode distance due to lead wear. Therefore, as the arc plate-shaped anode facing the cathode drum, an electrode in which the surface of the valve metal substrate such as Ti, Ta, Nb, Zr or the like is mainly coated with a platinum group metal or its oxide as a catalyst is used as an insoluble anode. Has been proposed (Japanese Patent Publication No. 1-56153).
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、この方
法でも、局部的な陽極の損耗や、陰極側の銅の異常析出
によるショートは生じてしまう。しかし一体化した陽極
円弧板を用いているため、これらの補修は、陽極全体を
取り替えずには行なうことができず、陽極を装置に設置
するハンドリングなど、保守ないし補修作業やそのコス
ト、設備コスト等を高め、めっき設備の稼働率を下げる
要因となっている。However, even with this method, local wear of the anode and short circuit due to abnormal deposition of copper on the cathode side occur. However, since the integrated anode arc plate is used, these repairs cannot be performed without replacing the entire anode, and maintenance or repair work such as handling when installing the anode in the device, its cost, equipment cost. It is a factor that lowers the operating rate of plating equipment.
【０００８】さらに重要なことは、一体化した陽極円弧
板を用いると、通電時に電流密度のいわゆるエッジ効果
が生じる。そして、このエッジ効果は、特にめっき液供
給口付近の陽極板端部付近に電流を集中させ、一体化し
た陽極板の一部分のみの電極触媒被覆層の消耗をひきお
こし、銅箔の幅方向の膜厚が不均一となり、膜厚むらが
生じる。また、膜厚むらは連続運転とともに増大し、や
がて実用に耐えないものとなるので、陽極の寿命も短い
ものとなっている。そして、このような現象は特に２０
μm 以下と膜厚の薄い銅箔の製造において重大なものと
なる。実際、上記特公平１−５６１５３号公報でも、１
８μm の銅箔を得る際に、膜厚むらは２％以内であると
記載されており、膜厚むらを１％以内にはできていな
い。この他、円弧状の基体には被覆形成がしにくく、製
造が困難で被覆厚さも均一化が難しいという欠点もあ
る。More importantly, the use of an integrated anode circular arc plate causes a so-called edge effect of current density during energization. This edge effect concentrates the current especially near the end of the anode plate near the plating solution supply port, causing the electrode catalyst coating layer of only one part of the integrated anode plate to be consumed, and the film in the width direction of the copper foil. The thickness becomes non-uniform, resulting in uneven thickness. In addition, the film thickness unevenness increases with continuous operation and eventually becomes unusable for practical use, so that the life of the anode is shortened. And such a phenomenon is especially 20
It becomes important in the production of copper foil with a thickness of less than μm. In fact, even in the above Japanese Patent Publication No. 1-56153, 1
When obtaining a copper foil of 8 μm, it is described that the film thickness unevenness is within 2%, and the film thickness unevenness is not within 1%. In addition, it is difficult to form a coating on the arc-shaped substrate, and it is difficult to manufacture the coating, and it is difficult to make the coating thickness uniform.
【０００９】本発明の主たる目的は、このような電極の
部分的消耗に対しての保守ないし補修を容易に行なうこ
とができ、しかも膜厚むらが少なく、陽極寿命の長い電
解銅箔等の金属箔を得るための電気めっき方法と、それ
に用いる分割型不溶性電極を提供することにある。The main object of the present invention is to easily perform maintenance or repair against such partial wear of the electrode, and to reduce the unevenness of the film thickness and to prolong the life of the anode. An object of the present invention is to provide an electroplating method for obtaining a foil and a split type insoluble electrode used therefor.
【００１０】[0010]
【課題を解決するための手段】このような目的は、下記
（１）〜（１６）の本発明により達成される。 （１）陰極ドラムの回転駆動方向の所定の位置に、所定
の間隙を隔てて円弧状の陽極を対向配置し、これに通電
して前記陰極ドラムに金属を析出させ、これを剥離して
電解金属箔を得る場合において、白金族の金属またはそ
の酸化物で弁金属基体を被覆して形成した複数の電極短
片を、バックプレート上に、前記陰極ドラムの回転駆動
方向に対して直角方向および平行方向に複数個づつ隙間
無く着脱可能に配置して前記陽極を構成していることを
特徴とする電気めっき方法。 （２）前記隣合った各電極短片の隣接する辺同士の間隔
が、０．５ｍｍ以下に設定されている上記（１）の電気
めっき方法。 （３）前記金属箔が銅箔であり、その厚さが７０μm 以
下である上記（１）または（２）の電気めっき方法。 （４）前記陰極ドラムと前記陽極との間にめっき液を流
す上記（１）ないし（３）のいずれかの電気めっき方
法。 （５）前記陽極と前記陰極ドラムの対向面同士が、実質
的にその全体にわたってほぼ均一に離間されて配置され
ており、その間隔が５mm以下である上記（１）ないし
（４）のいずれかの電気めっき方法。 （６）前記電極短片が、前記バックプレートに対して、
該バックプレート側から導電性固定具によって固定され
ている上記（１）ないし（５）のいずれかの電気めっき
方法。 （７）前記電極短片が、正方形または長方形の平板であ
る上記（１）ないし（６）のいずれかの電気めっき方
法。 （８）前記電極短片は、陰極ドラムの回転駆動方向に沿
う辺が一直線状に並ばないように、千鳥状に配置されて
いる上記７の電気めっき方法。 （９）陰極ドラム上に金属を析出させて剥離して電解金
属箔を製造する際に、陰極ドラムの回転駆動方向の所定
の位置に、所定間隙を隔てて対向配置して用いる円弧状
の陽極であって、白金族の金属またはその酸化物で弁金
属基体を被覆して形成され、バックプレート上に、前記
陰極ドラムの回転駆動方向に対して直角方向および平行
方向に複数個づつ隙間無く導電性固定具により着脱可能
に配置された複数の電極短片を備えているとを特徴とす
る電気めっき用分割型不溶性電極。 （１０）前記隣合った各電極短片の隣接する辺同士の間
隔が、０．５ｍｍ以下に設定されている上記（９）の電
気めっき用分割型不溶性電極。 （１１）前記金属箔が銅箔であり、その厚さが７０μm
以下である上記（９）または（１０）の電気めっき用分
割型不溶性電極。 （１２）前記陰極ドラムと前記陽極との間にめっき液を
流す上記（９）ないし（１１）のいずれかの電気めっき
用分割型不溶性電極。 （１３）前記陰極ドラムの表面に対してほぼ全面にわた
って均一に離間されて配置されており、その間隔が５ｍ
ｍ以下である上記（９）ないし（１２）のいずれかの電
気めっき用分割型不溶性電極。 （１４）前記電極短片が、前記バックプレートに対し
て、該バックプレート側から導電性固定具によって固定
されている上記（９）ないし（１３）のいずれかの電気
めっき用分割型不溶性電極。 （１５）前記電極短片が、正方形または長方形の平板で
ある上記（９）ないし（１４）のいずれかの電気めっき
用分割型不溶性電極。 （１６）前記電極短片は、陰極ドラムの回転駆動方向に
沿う辺が一直線に並ばないように、千鳥状に配置されて
いる上記（１５）の電気めっき用分割型不溶性電極。The above object is achieved by the present invention described in (1) to (16) below. (1) Arc-shaped anodes are opposed to each other at a predetermined position in the rotational driving direction of the cathode drum with a predetermined gap therebetween, and current is applied to the anodes to deposit metal on the cathode drums, which are peeled off to electrolyze. In the case of obtaining a metal foil, a plurality of electrode short pieces formed by coating a valve metal substrate with a platinum group metal or an oxide thereof is formed on a back plate in a direction perpendicular to and parallel to the rotational driving direction of the cathode drum. An electroplating method, characterized in that the anode is formed by arranging a plurality of them in a direction so as to be attachable and detachable without a gap. (2) The electroplating method according to (1) above, wherein the distance between adjacent sides of the adjacent electrode short pieces is set to 0.5 mm or less. (3) The electroplating method according to (1) or (2) above, wherein the metal foil is a copper foil and the thickness thereof is 70 μm or less. (4) The electroplating method according to any one of (1) to (3) above, in which a plating solution is flown between the cathode drum and the anode. (5) Any one of the above (1) to (4), wherein the facing surfaces of the anode and the cathode drum are substantially evenly spaced apart over the entire surface, and the distance is 5 mm or less. Electroplating method. (6) The electrode short piece with respect to the back plate,
The electroplating method according to any one of the above (1) to (5), wherein the electroplating method is fixed from the back plate side with a conductive fixing tool. (7) The electroplating method according to any one of (1) to (6) above, wherein the electrode short piece is a square or rectangular flat plate. (8) The electroplating method as described in 7 above, wherein the short electrode pieces are arranged in a staggered manner so that the sides along the rotational driving direction of the cathode drum are not aligned in a straight line. (9) An arc-shaped anode used when a metal is deposited on the cathode drum and peeled to produce an electrolytic metal foil, and the electrodes are opposed to each other at a predetermined position in the rotational driving direction of the cathode drum with a predetermined gap therebetween. And is formed by coating a valve metal substrate with a platinum group metal or an oxide thereof, and conducts on the back plate in a direction perpendicular to and parallel to the rotational driving direction of the cathode drum without gaps. A split type insoluble electrode for electroplating, comprising a plurality of electrode short pieces that are detachably arranged by a sex fixing tool. (10) The split type insoluble electrode for electroplating according to the above (9), wherein the interval between adjacent sides of the adjacent electrode short pieces is set to 0.5 mm or less. (11) The metal foil is copper foil, and the thickness is 70 μm
The split-type insoluble electrode for electroplating according to the above (9) or (10), which is: (12) The split type insoluble electrode for electroplating according to any one of the above (9) to (11), wherein a plating solution is flown between the cathode drum and the anode. (13) The cathode drum is uniformly spaced over the entire surface of the cathode drum, and the distance is 5 m.
The split type insoluble electrode for electroplating according to any one of the above (9) to (12), which is m or less. (14) The split type insoluble electrode for electroplating according to any one of (9) to (13), wherein the electrode short piece is fixed to the back plate from the back plate side with a conductive fixture. (15) The split type insoluble electrode for electroplating according to any of (9) to (14), wherein the electrode short piece is a square or rectangular flat plate. (16) The split type insoluble electrode for electroplating according to the above (15), wherein the electrode short pieces are arranged in a staggered manner so that the sides along the rotational driving direction of the cathode drum are not aligned.
【００１１】[0011]
【作用】本発明で第１の目的とする電極の部分的な消耗
に対しての保守および補修は、分割型不溶性電極の採用
によって、必要部分のみを交換すればよいので、きわめ
て容易でかつ経済的である。電極の構成の仕方は、陽極
の長さ方向（陰極の回転駆動に沿った方向すなわち回転
駆動方向）長さおよび幅方向長さよりも短い辺を有する
長方形、正方形等の４辺形あるいは三角形等の短片平板
である複数の電極短片を隙間なくバックプレート上に配
置して構成するようにしたので、電極短片の製造も陽極
の組み立ても容易であり、Ｒ型の組み立て精度も高い。
また、電極短片の形状寸法精度や、弁金属基体上に被覆
された白金族の金属またはその酸化物の膜の膜厚の均一
も高い。また、各電極短片の隣接する辺同士の間隔が
０．５ｍｍ以下に設定されるので、めっき膜の長手方向
にすじ状などの膜厚むらが生ずることが極力抑制され、
良好な結果が得られる。この膜厚むらの抑制の効果は、
電極短片を、その陰極ドラムの回転駆動方向に沿う辺が
一直線に並ばないように千鳥状に配置することによって
更に向上される。According to the present invention, the first purpose of the present invention is maintenance and repair for partial wear of the electrode, which is extremely easy and economical because only the necessary part needs to be replaced by employing the split type insoluble electrode. Target. The electrode may be formed in a quadrilateral shape such as a rectangle, a square or the like having a side shorter than the length of the anode (direction along the rotational drive of the cathode, that is, the rotational drive direction) and the width direction. Since a plurality of electrode short pieces, which are short piece flat plates, are arranged on the back plate without any gaps, it is easy to manufacture the short electrode pieces and assemble the anode, and the R-type assembly accuracy is high.
Further, the shape and dimension accuracy of the electrode short piece and the uniformity of the film thickness of the platinum group metal or its oxide film coated on the valve metal substrate are high. Further, since the interval between the adjacent sides of each electrode short piece is set to 0.5 mm or less, it is possible to suppress the occurrence of film thickness unevenness such as streaks in the longitudinal direction of the plated film as much as possible.
Good results are obtained. The effect of suppressing this film thickness unevenness is
This is further improved by arranging the electrode short pieces in a zigzag manner so that the sides along the rotational driving direction of the cathode drum are not aligned.
【００１２】また、第２の目的としての、特に薄い金属
箔を得る際の膜厚むらの低減は、陽極板を複数の電極片
に分割して、陽極表面の端縁長を大とし、エッジを多数
作ることで、エッジ効果を減少させ、電流分布を均一化
することによって達成される。同時に連続運転によるエ
ッジ効果の増大率も減少し、電極片寿命も増大する。そ
して、これらから陽極寿命はきわめて長いものとなる。[0012] Further, as a second object, in order to reduce the film thickness unevenness particularly when obtaining a thin metal foil, the anode plate is divided into a plurality of electrode pieces, and the edge length of the anode surface is increased to increase the edge length. It is achieved by reducing the edge effect and making the current distribution uniform by making a large number of At the same time, the rate of increase in edge effect due to continuous operation also decreases, and the life of the electrode piece also increases. From these, the life of the anode becomes extremely long.
【００１３】ところで、各種電気めっき方法において、
分割型の電極を用いることは従来知られている。例え
ば、実開平１−１４９４６５号公報では、電気めっき鋼
板を製造する際に、めっき槽内にて鋼帯を連続的に直線
的に移動させながら、これに対向して陽極を配置する場
合において、陽極を鋼帯搬送方向に平行に分割したもの
が示されている（同公報第４図、第５図参照）。しか
し、このように、回転する陰極ドラムの回転駆動方向に
平行に分割しようとすると、各分割片は等しく円弧状と
しなければならず、特に弁金属基体上に白金族の金属な
いし酸化物被覆を設けるようなときには、製造がきわめ
て困難である。また被覆厚を均一にすることも難しい。
しかも、これに加えて重要なことは、めっき基体（鋼帯
あるいは陰極ドラム）の搬送ないし回転方向と平行にの
み電極片を分割すると、電流密度の不均一が生じ、めっ
き膜の長手方向にすじ状の欠陥や、幅方向の膜厚むらが
生じてしまい実用には耐えないが、この公報ではこの点
について着眼されていない。By the way, in various electroplating methods,
It is conventionally known to use a split type electrode. For example, in Japanese Utility Model Application Laid-Open No. 1-149465, when an electroplated steel sheet is manufactured, a steel strip is continuously moved linearly in a plating tank, and an anode is arranged opposite to this, It is shown that the anode is divided in parallel to the steel strip conveying direction (see FIGS. 4 and 5 of the same publication). However, in this way, when it is attempted to divide the rotating cathode drum parallel to the rotational driving direction, each divided piece must have an equal arc shape, and in particular, a platinum group metal or oxide coating is provided on the valve metal substrate. When provided, it is extremely difficult to manufacture. It is also difficult to make the coating thickness uniform.
Moreover, in addition to this, if the electrode pieces are divided only parallel to the transport or rotation direction of the plating substrate (steel strip or cathode drum), the current density becomes uneven, and streaks occur in the longitudinal direction of the plating film. Although it is not practical for practical use due to the shape defect and the film thickness unevenness in the width direction, this publication does not pay attention to this point.
【００１４】他方、特開平１−１７６１００号公報、実
開平２−１３６０５８号公報では、鋼帯を連続的に直線
移動させながらめっきを行なう場合において、鋼帯方向
および搬送（長手）方向に複数分割して電極小片を多数
組み合わせて形成した分割型電極が提案されている。し
かし、これらの公報に開示された電極は、平板のもので
あり、本発明の電極のように円弧状でないので、本発明
のような円弧状電極に適用することは困難である。On the other hand, in Japanese Patent Laid-Open No. 1-176100 and Japanese Utility Model Laid-Open No. 2-136058, when plating is performed while continuously moving the steel strip linearly, a plurality of pieces are divided in the strip direction and the transport (longitudinal) direction. Then, a split type electrode formed by combining a large number of electrode pieces has been proposed. However, since the electrodes disclosed in these publications are flat plates and are not arc-shaped like the electrodes of the present invention, it is difficult to apply them to the arc-shaped electrodes of the present invention.
【００１５】さらに、特公昭４９−１８９０２号公報に
は、磁性薄膜の製造において、陰極ローラに沿って、環
状の電解槽を設け、この電解槽を仕切板によって複数個
の分離槽として、各分離槽に個別に陽極を配置した例が
開示されている。このものは、陽極を分離するという点
では本発明と一見類似しているが、陽極を分割一体化し
ていないので、分離陽極の間隙でめっき液のうず流が生
じ膜厚の不均一が生じてしまう。このため、この公報で
は分離槽としているが、かえって液組成の不均一化を招
き、装置が複雑化し、その制御も難しいものとなってい
る。Further, in Japanese Patent Publication No. 49-18902, an annular electrolytic cell is provided along a cathode roller in the production of a magnetic thin film, and the electrolytic cell is divided into a plurality of separating cells by a partition plate. An example in which an anode is individually arranged in a bath is disclosed. This one is similar to the present invention in that the anode is separated, but since the anode is not divided and integrated, a vortex flow of the plating solution occurs in the gap between the separated anodes, resulting in nonuniform film thickness. I will end up. For this reason, in this publication, the separation tank is used, but on the contrary, the liquid composition becomes nonuniform, the apparatus becomes complicated, and its control is difficult.
【００１６】さらにまた、特開平４−３４６６９７号公
報には、電極の分割を、陰極の回転駆動方向と直角な方
向になし、長尺の電極片を上記回転駆動方向に沿って配
置したものが提案されているが、この場合、円弧状の電
極の両サイドあるいは両端などの部分的な損耗であって
も、長尺の電極片全体を交換しなければならず、保守修
繕に多くの費用が必要となる。一方、本発明の短片状の
電極構成部材は、加工も安価で容易であり、保守、修繕
も安価かつ容易なものとなる。Further, in JP-A-4-346697, the electrodes are divided in a direction perpendicular to the rotational driving direction of the cathode, and long electrode pieces are arranged along the rotational driving direction. Although proposed, in this case, even if there is partial wear on both sides or both ends of the arc-shaped electrode, the entire long electrode piece must be replaced, and much cost is required for maintenance and repair. Will be needed. On the other hand, the short-piece electrode constituent member of the present invention is inexpensive and easy to process, and inexpensive and easy to maintain and repair.
【００１７】[0017]
【実施例】以下、本発明の具体的実施例を示し、本発明
をさらに詳細に説明する。EXAMPLES The present invention will be described in more detail below by showing specific examples of the present invention.
【００１８】本発明の不溶性電極（アノード）は不溶性
の電極を複数個に分割した電極片の各々を、形状保持、
補強および導電のためのバックプレートへ導電性固定具
により着脱自在に取り付けている。以下、本発明の分割
不溶性電極について詳述する。The insoluble electrode (anode) of the present invention retains the shape of each of the electrode pieces obtained by dividing the insoluble electrode into a plurality of pieces.
It is detachably attached to the back plate for reinforcement and conductivity by a conductive fixture. Hereinafter, the split insoluble electrode of the present invention will be described in detail.
【００１９】図１には本発明の分割型不溶性電極１０の
実施例が示される。これらの図において不溶性のアノー
ドである電極１０は、複数個の電極短片１に分割されて
おり、その電極短片１各々は、内面が円弧状のバックプ
レート５に導電性の固定具であるボルト・ナット３によ
り着脱自在に取り付けられている。電極短片１は、通常
可撓性材料で形成され、上記バックプレート５の円弧状
の内面に沿って湾曲されて取り付けられる。バックプレ
ート５は、単板であっても、種々の構造をもつものであ
ってもよい。また、その内面は、上記のように、円弧状
の一部であってもよいが、電極１の幅方向すなわち陰極
ドラムの回転駆動方向と直角な方向に延びるストライプ
状平面を、上記回転方向に沿って複数並列配置したもの
であってもよい。このように、ストライプ状平面を用い
る場合には、なるべく、円弧に近い多角形状となるよう
に構成することが望ましい。なお、上記分割型不溶性電
極１０は、従来例を説明した図９に示したように、陰極
ドラム７に対して２個対向配置してもよい。そして、こ
の場合は、２つの電極１０、１０の間からめっき液を供
給し、ドラム−電極間隙間にめっき液を流す。FIG. 1 shows an embodiment of the split type insoluble electrode 10 of the present invention. In these figures, the electrode 10 which is an insoluble anode is divided into a plurality of electrode short pieces 1, and each of the electrode short pieces 1 is a bolt, which is a conductive fixture on a back plate 5 having an arcuate inner surface. It is detachably attached by a nut 3. The electrode short piece 1 is usually formed of a flexible material, and is curved and attached along the arc-shaped inner surface of the back plate 5. The back plate 5 may be a single plate or may have various structures. Further, the inner surface thereof may be a part of an arc shape as described above, but a striped plane extending in the width direction of the electrode 1, that is, the direction perpendicular to the rotational driving direction of the cathode drum is formed in the rotational direction. A plurality of them may be arranged in parallel. As described above, when the striped flat surface is used, it is desirable to configure the polygonal shape as close to an arc as possible. The split type insoluble electrode 10 may be arranged opposite to the cathode drum 7 as shown in FIG. 9 for explaining the conventional example. Then, in this case, the plating solution is supplied from between the two electrodes 10 and 10, and the plating solution is flown between the drum and the electrode gap.
【００２０】不溶性の電極短片１としては、チタン、タ
ンタル、ニオブ、ジルコン等やそれらの合金など、耐食
性を有する弁金属の導電金属板の陰極ドラム７と対向す
る側の面にイリジウムオキサイドなど白金族および／ま
たは酸化物をコーティングしたコーティングタイプのも
のを用いている。電極短片１の陰極ドラム７に対向する
側の表面形状は、単純に平面状にする他、表面積を大に
するために、凹凸状、格子状にすることができる。電極
１０は、例えば、図１および図４ないし図８に示されて
いるように、陰極ドラム７の回転駆動方向に対して直角
方向および平行方向にそれぞれ複数個（２個以上）、好
ましくは３〜１０個程度、また、全体として１０〜１０
０個程度の長方形の電極短片１に分割されている。な
お、電極短片１の向きは、図４ないし図８に示されてい
るように、長辺側が、陰極ドラム７の回転駆動方向に対
して沿う方向に並べられていても、逆であってもよく、
それらが混合していてもよい。そして、図１、図２に示
される例では、電極短片１の各々の陰極ドラムと反対側
（バックプレート側）の面には、チタン等の耐食性を有
する導電性金属のボルト３ａが溶接等によって固定され
ている。また、電極短片１の各々は、取扱いや精度の点
から、上記の図に示したような長方形や正方形の平板で
あることが望ましく、また、図１等に示したように、特
に、各電極短片１の陰極ドラム７の回転駆動方向に沿う
辺が１直線状に連続しないように、千鳥状に配置される
ことがのぞましい。As the insoluble electrode short piece 1, for example, titanium, tantalum, niobium, zircon, etc., or alloys thereof, such as iridium oxide, is used on the surface of the conductive metal plate of a valve metal having corrosion resistance facing the cathode drum 7. And / or a coating type coated with an oxide is used. The surface shape of the electrode short piece 1 on the side facing the cathode drum 7 may be simply flat, or may be uneven or grid to increase the surface area. For example, as shown in FIGS. 1 and 4 to 8, a plurality of electrodes 10 are provided (two or more) in a direction perpendicular to and parallel to the rotational driving direction of the cathode drum 7, and preferably 3 or more. -10 or so, 10-10 as a whole
It is divided into about 0 rectangular electrode short pieces 1. It should be noted that the electrode short pieces 1 may be oriented such that their long sides are arranged in the direction along the rotational driving direction of the cathode drum 7 as shown in FIGS. 4 to 8, or vice versa. Often,
They may be mixed. In the examples shown in FIGS. 1 and 2, bolts 3a made of a conductive metal having corrosion resistance such as titanium are welded to the surface of the short electrode piece 1 on the side opposite to the cathode drum (back plate side). It is fixed. Further, from the viewpoint of handling and accuracy, each of the electrode short pieces 1 is preferably a rectangular or square flat plate as shown in the above figures. Further, as shown in FIG. It is desirable that the short pieces 1 are arranged in a staggered manner so that the sides of the short piece 1 along the rotational driving direction of the cathode drum 7 are not continuous in a straight line.
【００２１】なお、電極１０を陰極ドラム７の回転駆動
方向に沿って細かく分割（したがって、分割線は該回転
駆動方向と直角方向となる）すれば、平板の電極短片１
を曲げることなく設置することができる。If the electrode 10 is finely divided along the rotational driving direction of the cathode drum 7 (therefore, the dividing line is perpendicular to the rotational driving direction), the flat plate electrode short piece 1
Can be installed without bending.
【００２２】バックプレート５は補強、形状寸法維持お
よび導電のための基板で、チタン等の耐食性を有する導
電金属板からなっている。また、バックプレート５は、
間隙内のめっき液流にうず流を生じさせず、膜厚むらを
防止する作用もあわせもつ。バックプレート５と複数の
不溶性電極短片１とは図１、図２に示されるようなボル
ト３ａ等の給電導体で取り付けられている。すなわち、
図１、図２ではバックプレート５には、不溶性の電極短
片１に固定したボルト３ａ位置に対応して、貫通孔が設
けられており、バックプレート５の陰極ドラムと反対側
の所要箇所にて、電極短片１に一体化された給電導体と
してのボルト３ａが、座金６５を介してナット３ｂで締
め付けられている。電極短片１は、電極面への影響がな
く、電流密度が均一になるので、上記のように陰極７と
は反対側に配置されたボルト・ナット３で固定すること
が望ましい。不溶性の電極短片１は、上記のようにボル
ト・ナット３で固定されているので、バックプレート５
から取り外すことができる。取りはずされた電極短片１
は、必要とする補修を施したり、新しい電極短片１と交
換する。なお、図１、図２の例では、バックプレート５
と電極短片１の間には、締め付けによる電極短片１の変
形を防ぐために絶縁性のゴム４を介挿して、電極短片１
の端面とゴム４とを、接触させている。The back plate 5 is a substrate for reinforcement, maintenance of shape and size, and conductivity, and is made of a corrosion-resistant conductive metal plate such as titanium. Also, the back plate 5 is
The eddy current is not generated in the plating solution flow in the gap, and it also has the function of preventing uneven film thickness. The back plate 5 and the plurality of insoluble electrode short pieces 1 are attached by a power supply conductor such as a bolt 3a as shown in FIGS. That is,
In FIGS. 1 and 2, through holes are provided in the back plate 5 corresponding to the positions of the bolts 3a fixed to the insoluble electrode short piece 1, and the back plate 5 is provided at a required position on the side opposite to the cathode drum. A bolt 3a as a power supply conductor integrated with the short electrode piece 1 is fastened with a nut 3b via a washer 65. Since the electrode short piece 1 does not affect the electrode surface and has a uniform current density, it is desirable to fix the short electrode piece 1 with the bolt / nut 3 arranged on the side opposite to the cathode 7. Since the insoluble electrode short piece 1 is fixed by the bolts and nuts 3 as described above, the back plate 5
Can be removed from. Removed electrode short piece 1
Perform necessary repairs or replace with a new electrode short piece 1. In the example of FIGS. 1 and 2, the back plate 5
Insulating rubber 4 is inserted between the electrode short piece 1 and the electrode short piece 1 to prevent deformation of the electrode short piece 1 due to tightening.
And the rubber 4 are in contact with each other.
【００２３】なお、電極短片１のバックプレート５への
固定は、例えば、図３に示したように、バックプレート
５の所定位置に、ボルト３に対応するタップ穴５５を、
また電極短片の所定位置に、ボルト３の貫通を可能と
し、ボルト３の頭部を係止する孔３５を設け、電極短片
１を所定位置に設置して、陰極ドラム側よりボルト３ａ
にて電極短片１を締め付けて固定してもよい。この場合
は、締め付け時に、電極短片１の変形のないように締め
付けトルクを管理する。The short electrode piece 1 is fixed to the back plate 5 by, for example, tap holes 55 corresponding to the bolts 3 at predetermined positions of the back plate 5 as shown in FIG.
Further, a hole 35 that allows the bolt 3 to penetrate therethrough and locks the head of the bolt 3 is provided at a predetermined position of the electrode short piece, and the electrode short piece 1 is set at a predetermined position so that the bolt 3a can be installed from the cathode drum side.
Alternatively, the electrode short piece 1 may be tightened and fixed. In this case, when tightening, the tightening torque is managed so that the electrode short piece 1 is not deformed.
【００２４】このように構成される分割型不溶性電極１
０は、上記図９に示されるように、めっき槽内にて、回
転駆動される陰極ドラム７と所定間隙長隔てて対向配置
され、バックプレート５に接続されたブスバー２から供
電され、めっきが行なわれる。陰極ドラム７上に堆積し
た銅箔８は陰極ドラム７から剥離され、巻き取りドラム
９に巻き取られる。Split type insoluble electrode 1 constructed in this way
As shown in FIG. 9, 0 is arranged facing the cathode drum 7 which is rotationally driven in the plating tank with a predetermined gap length, and is supplied with electricity from the bus bar 2 connected to the back plate 5 to perform plating. Done. The copper foil 8 deposited on the cathode drum 7 is peeled off from the cathode drum 7 and wound on the winding drum 9.
【００２５】なお、以上では、銅箔を例にとって説明し
てきたが、本発明の効果は他の金属箔でも同様に実現す
る。ただ、特に本発明の膜厚むら減少効果は、７０μm
以下、特に２０μm 以下の電解銅箔の作製において顕著
であり、２％以内、特に１％以内の膜厚むらを容易に実
現できる。また、このような小さな膜厚むらを例えば１
年以上にわたって維持できる。In the above description, a copper foil is taken as an example, but the effects of the present invention can be realized in other metal foils as well. However, the effect of reducing the film thickness unevenness of the present invention is 70 μm.
The following is particularly remarkable in the production of an electrolytic copper foil having a thickness of 20 μm or less, and it is possible to easily realize a film thickness unevenness within 2%, particularly within 1%. In addition, such a small thickness unevenness is
Can be maintained for more than a year.
【００２６】[0026]
【発明の効果】本発明の不溶性電極１０は、複数個に分
割した上記電極短片１を用いており、この分割した電極
短片１をバックプレート５に着脱自在に取り付けている
ので、陽極面の局部的な損傷の補修や、陰極ドラム７側
の銅等の金属の異常析出によるショートによる陽極の補
修を、電極短片１ごとに部分的に行なうことができるの
で、従来のようにアノード全体あるいは長尺の電極片全
体を取り替える必要がない。従って、陽極の保守、修理
が容易であり、また、陽極自体の寿命も延びる。The insoluble electrode 10 of the present invention uses the above-mentioned electrode short pieces 1 divided into a plurality of pieces, and the divided short electrode pieces 1 are detachably attached to the back plate 5, so that the anode surface is locally attached. Since it is possible to partially repair the damage of the anode or the anode due to a short circuit due to the abnormal deposition of metal such as copper on the cathode drum 7 side, it is possible to partially perform it for each electrode short piece 1, so that the entire anode or the long anode can be repaired as in the conventional case. There is no need to replace the entire electrode piece. Therefore, maintenance and repair of the anode are easy, and the life of the anode itself is extended.
【００２７】また、電極短片を矩形の平板状とした場合
には、形状加工が容易であり、不溶性電極とするための
触媒被覆のコーティングも容易であり、電極短片の形状
寸法や被覆厚の精度がきわめて高くなる。そして、組み
立てや取りはずし作業も容易であり、組み立ての寸法精
度もきわめて高い。これらから寸法形状や被覆厚の精度
のきわめて高い不溶性電極が実現し、得られる銅箔等の
金属箔の欠陥もきわめて少なく、膜厚や膜質もきわめて
均一となる。また、この際、円周方向に分割するときの
ような膜厚の不均一や欠陥もなく、また円周方向および
それと垂直な方向に多数分割するときのような組み立て
時の労力や組み立て精度の低下も格段と減少し、電解銅
箔等の金属箔の膜質はきわめて良好なものとなる。Further, when the electrode short piece is in the form of a rectangular flat plate, the shape processing is easy and the coating of the catalyst coating for making it an insoluble electrode is also easy, and the accuracy of the shape and size of the electrode short piece and the coating thickness are high. Is extremely high. Moreover, the assembling and removing work is easy, and the dimensional accuracy of the assembling is extremely high. From these, an insoluble electrode with extremely high precision in terms of size and shape and coating thickness is realized, defects in the resulting metal foil such as copper foil are extremely small, and film thickness and film quality are also extremely uniform. In addition, at this time, there is no unevenness in film thickness and defects such as when dividing in the circumferential direction, and labor and assembling accuracy in assembling such as when dividing a large number in the circumferential direction and the direction perpendicular thereto The deterioration is remarkably reduced, and the film quality of the metal foil such as the electrolytic copper foil becomes extremely good.
【００２８】そして、これらに加え、陽極内のエッジ数
を増加することにより、エッジ効果を相対的に減少さ
せ、同時にめっき液のうず流の発生を減少させ、膜厚む
らをきわめて少ないものとし、連続運転による膜厚むら
の増大を減少し、寿命を長いものとすることができる。
このような効果を確認するための実験を以下に示す。In addition to these, by increasing the number of edges in the anode, the edge effect is relatively reduced, at the same time the generation of eddy current of the plating solution is reduced, and the unevenness of film thickness is made extremely small. The increase in film thickness unevenness due to continuous operation can be reduced, and the life can be extended.
An experiment for confirming such an effect is shown below.
【００２９】［実験例］図９に示される構成において、
陽極ドラム７には約２m 径のＴｉ回転円筒体を用いた。
また、アノード電極１０、１０としては、ＩｒＯ2 を主
成分とする被覆をＴｉ基板上に設けたものを用い、これ
を陰極ドラム７の周上に約５mmの間隙で、７５°の円弧
成分長を占めるよう２個配置した。各電極１０、１０
は、図１に示されるように陰極ドラムの回転駆動方向に
対して直角方向および平行方向にに分割し、それぞれ２
８枚の電極短片１で構成した。各電極片１０の隣接した
辺同士の離間距離は０．５mmとした。[Experimental Example] In the configuration shown in FIG.
As the anode drum 7, a Ti rotating cylinder having a diameter of about 2 m was used.
Further, as the anode electrodes 10 and 10, those having a coating containing IrO 2 as a main component provided on a Ti substrate were used, and this was provided on the circumference of the cathode drum 7 with a gap of about 5 mm and an arc component length of 75 °. Two are arranged to occupy. Each electrode 10, 10
Is divided into a direction perpendicular to the rotational driving direction of the cathode drum and a direction parallel to it as shown in FIG.
It was composed of eight electrode short pieces 1. The distance between adjacent sides of each electrode piece 10 was 0.5 mm.
【００３０】めっき液は電極１０、１０間から送液し、
電極間隙を上方に流れるようにして循環した。めっき液
はＣｕＳＯ4 、５Ｈ2 Ｏ ２４０g/l 、Ｈ2 ＳＯ4 １
２０g/l を含み、浴温４５℃、電流密度４０A/m2とし、
１８μm 厚の銅箔を連続製造した。The plating solution is fed from between the electrodes 10 and 10,
It was circulated so as to flow upward through the electrode gap. Plating solution is CuSO 4 , 5H 2 O 240g / l, H 2 SO 4 1
20g / l, bath temperature 45 ℃, current density 40A / m 2 ,
An 18 μm thick copper foil was continuously manufactured.
【００３１】運転開始時の幅方向の膜厚むらを測定した
ところ０．８％以内であり、１年連続運転後も０．８％
以内が維持された。なお、ピンホールや異常析出物等の
膜欠陥は全くなかった。The film thickness unevenness in the width direction at the start of operation was measured and found to be within 0.8%, and 0.8% after one year of continuous operation.
Within maintained. There were no film defects such as pinholes and abnormal deposits.
【００３２】これに対し比較のため、電極１０、１０を
一体化した断面円弧状のものとした他は上記と全く同一
の条件で連続運転を行ったところ、開始時は２％以内の
膜厚むらで、３ケ月後には２％をこえる以上の膜厚むら
となってしまった。これらから、本発明の効果が明らか
である。On the other hand, for comparison, when the continuous operation was carried out under exactly the same conditions as above except that the electrodes 10 and 10 were integrally formed into an arcuate cross section, the film thickness was within 2% at the start. As a result, the unevenness of the film thickness exceeded 3% after 3 months. From these, the effect of the present invention is clear.
【図１】本発明の分割型不溶性電極の１例を示す斜視図
である。FIG. 1 is a perspective view showing an example of a split type insoluble electrode of the present invention.
【図２】図１の電極における固定具部分の断面図であ
る。FIG. 2 is a cross-sectional view of a fixture portion of the electrode of FIG.
【図３】固定具部分の他の例を示す断面図である。FIG. 3 is a cross-sectional view showing another example of a fixture part.
【図４】本発明の分割型不溶性電極の他の例を示す展開
平面図である。FIG. 4 is a developed plan view showing another example of the split type insoluble electrode of the present invention.
【図５】本発明の分割型不溶性電極の他の例を示す展開
平面図である。FIG. 5 is a developed plan view showing another example of the split type insoluble electrode of the present invention.
【図６】本発明の分割型不溶性電極の他の例を示す展開
平面図である。FIG. 6 is a developed plan view showing another example of the split type insoluble electrode of the present invention.
【図７】本発明の分割型不溶性電極の他の例を示す展開
平面図である。FIG. 7 is a developed plan view showing another example of the split type insoluble electrode of the present invention.
【図８】本発明の分割型不溶性電極の他の例を示す展開
平面図である。FIG. 8 is a developed plan view showing another example of the split type insoluble electrode of the present invention.
【図９】本発明における電気めっき法を説明するための
正面図である。FIG. 9 is a front view for explaining the electroplating method in the present invention.
１０ 分割型不溶性電極 １ 電極短片 ２ ブスバー ３ ボルト・ナット ５ バックプレート ７ 陰極ドラム ８ 銅箔 10 split type insoluble electrode 1 electrode short piece 2 bus bar 3 bolts and nuts 5 back plate 7 cathode drum 8 copper foil
Claims (16)
に、所定の間隙を隔てて円弧状の陽極を対向配置し、こ
れに通電して前記陰極ドラムに金属を析出させ、これを
剥離して電解金属箔を得る場合において、 白金族の金属またはその酸化物で弁金属基体を被覆して
形成した複数の電極短片を、バックプレート上に、前記
陰極ドラムの回転駆動方向に対して直角方向および平行
方向に複数個づつ隙間無く着脱可能に配置して前記陽極
を構成していることを特徴とする電気めっき方法。1. An arc-shaped anode is opposed to a predetermined position in the rotational driving direction of the cathode drum with a predetermined gap therebetween, and electricity is applied to the anode to deposit metal on the cathode drum, and the metal is peeled off. In the case of obtaining an electrolytic metal foil, a plurality of electrode strips formed by coating a valve metal substrate with a platinum group metal or its oxide are placed on a back plate in a direction perpendicular to the rotational driving direction of the cathode drum. And an electroplating method characterized in that the anode is constructed by arranging a plurality of them in a parallel direction so that they can be attached and detached without a gap.
士の間隔が、０．５ｍｍ以下に設定されている請求項１
の電気めっき方法。2. The distance between the adjacent sides of the adjacent electrode short pieces is set to 0.5 mm or less.
Electroplating method.
０μm 以下である請求項１または２の電気めっき方法。3. The metal foil is copper foil and has a thickness of 7
The electroplating method according to claim 1 or 2, wherein the thickness is 0 μm or less.
き液を流す請求項１ないし３のいずれかの電気めっき方
法。4. The electroplating method according to claim 1, wherein a plating solution is flown between the cathode drum and the anode.
が、実質的にその全体にわたってほぼ均一に離間されて
配置されており、その間隔が５mm以下である請求項１な
いし４のいずれかの電気めっき方法。5. The opposing surfaces of the anode and the cathode drum are substantially evenly spaced apart from each other over substantially the entire surface thereof, and the distance is 5 mm or less. Electroplating method.
対して、該バックプレート側から導電性固定具によって
固定されている請求項１ないし５のいずれかの電気めっ
き方法。6. The electroplating method according to claim 1, wherein the electrode short piece is fixed to the back plate from the back plate side by a conductive fixture.
平板である請求項１ないし６のいずれかの電気めっき方
法。7. The electroplating method according to claim 1, wherein the electrode short piece is a square or rectangular flat plate.
方向に沿う辺が一直線状に並ばないように、千鳥状に配
置されている請求項７の電気めっき方法。8. The electroplating method according to claim 7, wherein the short electrode pieces are arranged in a staggered manner so that the sides along the rotational driving direction of the cathode drum are not aligned in a straight line.
て電解金属箔を製造する際に、陰極ドラムの回転駆動方
向の所定の位置に、所定間隙を隔てて対向配置して用い
る円弧状の陽極であって、 白金族の金属またはその酸化物で弁金属基体を被覆して
形成され、バックプレート上に、前記陰極ドラムの回転
駆動方向に対して直角方向および平行方向に複数個づつ
隙間無く導電性固定具により着脱可能に配置された複数
の電極短片を備えているとを特徴とする電気めっき用分
割型不溶性電極。9. An arc shape which is used at a predetermined position in the rotational driving direction of the cathode drum so as to face each other at a predetermined gap when a metal is deposited on the cathode drum and peeled to produce an electrolytic metal foil. Of the platinum group metal or its oxide, which is formed on the back plate by forming a plurality of gaps in the direction perpendicular to and parallel to the rotational driving direction of the cathode drum. A split type insoluble electrode for electroplating, characterized in that it is provided with a plurality of electrode short pieces that are detachably arranged by a conductive fixing tool.
同士の間隔が、０．５ｍｍ以下に設定されている請求項
９の電気めっき用分割型不溶性電極。10. The split type insoluble electrode for electroplating according to claim 9, wherein the interval between the adjacent sides of the adjacent electrode short pieces is set to 0.5 mm or less.
７０μm 以下である請求項９または１０の電気めっき用
分割型不溶性電極。11. The split type insoluble electrode for electroplating according to claim 9, wherein the metal foil is a copper foil and the thickness thereof is 70 μm or less.
っき液を流す請求項９ないし１１のいずれかの電気めっ
き用分割型不溶性電極。12. The split type insoluble electrode for electroplating according to claim 9, wherein a plating solution is flown between the cathode drum and the anode.
面にわたって均一に離間されて配置されており、その間
隔が５ｍｍ以下である請求項９ないし１２のいずれかの
電気めっき用分割型不溶性電極。13. The split type insoluble electrode for electroplating according to claim 9, wherein the split type insoluble electrode is arranged so as to be evenly spaced over substantially the entire surface of the cathode drum, and the distance is 5 mm or less.
に対して、該バックプレート側から導電性固定具によっ
て固定されている請求項９ないし１３のいずれかの電気
めっき用分割型不溶性電極。14. The split type insoluble electrode for electroplating according to claim 9, wherein the electrode short piece is fixed to the back plate from the back plate side by a conductive fixture.
の平板である請求項９ないし１４のいずれかの電気めっ
き用分割型不溶性電極。15. The split type insoluble electrode for electroplating according to claim 9, wherein the electrode short piece is a square or rectangular flat plate.
動方向に沿う辺が一直線に並ばないように、千鳥状に配
置されている請求項１５の電気めっき用分割型不溶性電
極。16. The split type insoluble electrode for electroplating according to claim 15, wherein the electrode short pieces are arranged in a staggered manner so that the sides along the rotational driving direction of the cathode drum are not aligned.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16520193A JP3207973B2 (en) | 1993-06-10 | 1993-06-10 | Electroplating method and split type insoluble electrode for electroplating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16520193A JP3207973B2 (en) | 1993-06-10 | 1993-06-10 | Electroplating method and split type insoluble electrode for electroplating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06346270A true JPH06346270A (en) | 1994-12-20 |
| JP3207973B2 JP3207973B2 (en) | 2001-09-10 |
Family
ID=15807763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16520193A Expired - Lifetime JP3207973B2 (en) | 1993-06-10 | 1993-06-10 | Electroplating method and split type insoluble electrode for electroplating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3207973B2 (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997034029A1 (en) * | 1994-12-30 | 1997-09-18 | Ishifuku Metal Industry Co., Ltd. | Compound electrode for electrolysis |
| WO1999067448A1 (en) * | 1998-06-22 | 1999-12-29 | Daiso Co., Ltd. | Freely detachable insoluble anode |
| JP2001164395A (en) * | 2000-02-04 | 2001-06-19 | Mifune Tekkosho:Kk | Apparatus for production of electrolytic copper foil |
| JP2001355091A (en) * | 2000-06-14 | 2001-12-25 | Nikko Materials Co Ltd | Electrolytic copper foil manufacturing device |
| JP2002038291A (en) * | 2001-09-03 | 2002-02-06 | Daiso Co Ltd | Anode for manufacturing metallic foil |
| KR100418404B1 (en) * | 2001-07-23 | 2004-02-11 | 주식회사 포스코건설 | Vertical type electro plating apparatus using insoluble anode |
| JP2016089186A (en) * | 2014-10-30 | 2016-05-23 | 京セラサーキットソリューションズ株式会社 | Electrolytic plating apparatus |
| CN107523854A (en) * | 2017-09-28 | 2017-12-29 | 张家港天工机械制造有限公司 | A kind of cathode roll |
| CN109576739A (en) * | 2017-09-29 | 2019-04-05 | 株式会社大阪曹达 | The manufacturing device of electroplating electrode and electrolytic metal foil |
| CN110241455A (en) * | 2018-03-09 | 2019-09-17 | 李文燦 | Electrolytic deposition cathode roll |
| CN114921840A (en) * | 2022-05-16 | 2022-08-19 | 西安泰金工业电化学技术有限公司 | Large-size cathode roller and manufacturing method thereof |
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-
1993
- 1993-06-10 JP JP16520193A patent/JP3207973B2/en not_active Expired - Lifetime
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997034029A1 (en) * | 1994-12-30 | 1997-09-18 | Ishifuku Metal Industry Co., Ltd. | Compound electrode for electrolysis |
| US6051118A (en) * | 1994-12-30 | 2000-04-18 | Ishifuku Metal Industry Co., Ltd. | Compound electrode for electrolysis |
| CN1100894C (en) * | 1994-12-30 | 2003-02-05 | 石福金属兴业株式会社 | Compound electrode for electrolysis |
| WO1999067448A1 (en) * | 1998-06-22 | 1999-12-29 | Daiso Co., Ltd. | Freely detachable insoluble anode |
| JP2001164395A (en) * | 2000-02-04 | 2001-06-19 | Mifune Tekkosho:Kk | Apparatus for production of electrolytic copper foil |
| JP2001355091A (en) * | 2000-06-14 | 2001-12-25 | Nikko Materials Co Ltd | Electrolytic copper foil manufacturing device |
| KR100418404B1 (en) * | 2001-07-23 | 2004-02-11 | 주식회사 포스코건설 | Vertical type electro plating apparatus using insoluble anode |
| JP2002038291A (en) * | 2001-09-03 | 2002-02-06 | Daiso Co Ltd | Anode for manufacturing metallic foil |
| JP2016089186A (en) * | 2014-10-30 | 2016-05-23 | 京セラサーキットソリューションズ株式会社 | Electrolytic plating apparatus |
| CN107523854A (en) * | 2017-09-28 | 2017-12-29 | 张家港天工机械制造有限公司 | A kind of cathode roll |
| CN109576739A (en) * | 2017-09-29 | 2019-04-05 | 株式会社大阪曹达 | The manufacturing device of electroplating electrode and electrolytic metal foil |
| CN109576739B (en) * | 2017-09-29 | 2022-09-27 | 株式会社大阪曹达 | Electrode for electroplating and apparatus for manufacturing electrolytic metal foil |
| CN110241455A (en) * | 2018-03-09 | 2019-09-17 | 李文燦 | Electrolytic deposition cathode roll |
| CN114921840A (en) * | 2022-05-16 | 2022-08-19 | 西安泰金工业电化学技术有限公司 | Large-size cathode roller and manufacturing method thereof |
| CN117144430A (en) * | 2023-10-30 | 2023-12-01 | 江苏时代新能源科技有限公司 | Electrolytic roll, electrolytic device and battery production system |
| CN117144430B (en) * | 2023-10-30 | 2024-03-22 | 江苏时代新能源科技有限公司 | Electrolytic roll, electrolytic device and battery production system |
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