JPH0634432A - Infrared detector - Google Patents
Infrared detectorInfo
- Publication number
- JPH0634432A JPH0634432A JP4188496A JP18849692A JPH0634432A JP H0634432 A JPH0634432 A JP H0634432A JP 4188496 A JP4188496 A JP 4188496A JP 18849692 A JP18849692 A JP 18849692A JP H0634432 A JPH0634432 A JP H0634432A
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- substrate
- block
- bumps
- transmitting block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、赤外線のエネルギーを
電気信号に変換して検出する赤外線検知器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an infrared detector for converting infrared energy into an electric signal for detection.
【０００２】[0002]
【従来の技術】図２は、従来例の図で(A) は分離した形
で示す斜視図、(B) は断面図である。図において、１
は、サファイア等からなる基板である。2. Description of the Related Art FIG. 2 is a perspective view showing a conventional example in a separated form, and FIG. 2 (B) is a sectional view. In the figure, 1
Is a substrate made of sapphire or the like.
【０００３】２は、基板１の表面に等ピッチで配列形成
した赤外線検出素子である。それぞれの赤外線検出素子
２は、HgCdTe等の角片（一辺が50μm 〜100 μm)で、相
対向する側縁からそれぞれ出力導体パターン３を導出し
ている。Reference numeral 2 is an infrared detecting element arranged on the surface of the substrate 1 at an equal pitch. Each infrared detection element 2 is a square piece (each side is 50 μm to 100 μm) of HgCdTe or the like, and the output conductor pattern 3 is derived from each of the opposite side edges.
【０００４】５は、基板１の表面の左右の端部近傍に、
外線検出素子２に並列するよう、インジュウム等の金属
を蒸着して設けた平面視が短冊形のバンプであって、そ
の高さは約15μm である。Reference numeral 5 indicates near the left and right end portions of the surface of the substrate 1,
The bumps are strip-shaped in plan view and are provided by vapor-depositing a metal such as indium so as to be juxtaposed to the outside line detecting element 2, and the height thereof is about 15 μm.
【０００５】10は、Ｚn S よりなる赤外線透過ブロック
である。赤外線透過ブロック10の底面にアルミニウム等
を蒸着して不透明膜11を形成し、その不透明膜11にそれ
ぞれの赤外線検出素子２に対応して、赤外線が透過する
角形の窓15を設けている。Reference numeral 10 is an infrared transmitting block made of Z n S. An opaque film 11 is formed by vapor-depositing aluminum or the like on the bottom surface of the infrared transmitting block 10, and the opaque film 11 is provided with a rectangular window 15 for transmitting infrared light corresponding to each infrared detecting element 2.
【０００６】この窓15の寸法は、赤外線検出素子２の平
面視寸法にほぼ等しい。また、赤外線透過ブロック10の
左右の長さを、基板１の左右の長さにほぼ等しくしてあ
る。The size of the window 15 is substantially equal to the size of the infrared detecting element 2 in plan view. The left and right lengths of the infrared transmitting block 10 are made substantially equal to the left and right lengths of the substrate 1.
【０００７】左右の一対のバンプ５に架橋するように赤
外線透過ブロック10を載置して、基板１上に重ね、それ
それのバンプ５の外壁と基板１の表面と赤外線透過ブロ
ック10の底面とが構成する空隙に、接着剤20を流し込み
接着剤20を硬化させて基板１と赤外線透過ブロック10と
固着し、赤外線検知器を組立ている。The infrared transparent block 10 is placed so as to bridge the pair of left and right bumps 5 and is stacked on the substrate 1, and the outer walls of the bumps 5, the surface of the substrate 1 and the bottom surface of the infrared transparent block 10 are placed on the infrared transparent block 10. The adhesive 20 is poured into the void formed by the above to cure the adhesive 20 and fix it to the substrate 1 and the infrared transmitting block 10 to assemble the infrared detector.
【０００８】上述のように所望の高さのバンプ５を基板
１に設けることで、赤外線検出素子２の受光面と赤外線
透過ブロック10の窓15間の距離を定め、赤外線検出素子
の視野角を決定するとともに、迷光を防止して赤外線検
知器の空間分解能の向上を計っている。By providing the bumps 5 of a desired height on the substrate 1 as described above, the distance between the light receiving surface of the infrared detection element 2 and the window 15 of the infrared transmission block 10 is determined, and the viewing angle of the infrared detection element is determined. Along with the decision, we are trying to prevent stray light and improve the spatial resolution of the infrared detector.
【０００９】[0009]
【発明が解決しようとする課題】ところで、上述の接着
剤は、基板と赤外線透過ブロックとの狭い間隙（バンプ
の高さに等しい) に流し込むものであるから、硬化する
前は流動性に富む液状である。By the way, since the above-mentioned adhesive is poured into a narrow gap (equal to the height of the bump) between the substrate and the infrared ray transmitting block, it is a liquid having a high fluidity before being cured. Is.
【００１０】したがって、接着剤が硬化する前に、バン
プの上端面と赤外線透過ブロックの底面との間を通って
バンプの内側に流入し、窓を塞いだり赤外線検出素子を
覆い、赤外線検知器の感度を低下させるという問題点が
あった。Therefore, before the adhesive is cured, it flows into the inside of the bump through the space between the upper end surface of the bump and the bottom surface of the infrared ray transmitting block, covers the window or covers the infrared ray detecting element, and There was a problem that sensitivity was lowered.
【００１１】本発明はこのような点に鑑みて創作された
もので、基板と赤外線透過ブロックを固着する接着剤
が、感度を低下させることがない赤外線検知器を提供す
ることを目的としている。The present invention has been made in view of the above points, and an object thereof is to provide an infrared detector in which an adhesive for fixing a substrate and an infrared transmitting block does not reduce the sensitivity.
【００１２】[0012]
【課題を解決するための手段】上記の目的を達成するた
めに本発明は、図１に例示したように、表面に赤外線検
出素子２を並列した基板１と、基板１の表面の左右の端
部近傍のそれぞれに、赤外線検出素子２に並列するよう
内外２列に配設したバンプ55,50 と、底面に形成した不
透明膜11部分に、それぞれの赤外線検出素子２に対応し
て窓15が並列し、基板１に設けた左右の内外バンプ55,5
0 に架橋するよう基板１上に重ねる赤外線透過ブロック
10とを、備え、基板１の表面と赤外線透過ブロック10の
底面と外バンプ50の外側壁とがなす空隙に充満した接着
剤20により、基板１と赤外線透過ブロック10とが固着さ
れという構成とする。In order to achieve the above object, the present invention is, as illustrated in FIG. 1, a substrate 1 on which infrared detection elements 2 are arranged in parallel, and left and right edges of the surface of the substrate 1. In the vicinity of each of the parts, bumps 55 and 50 arranged in two rows inside and outside so as to be in parallel with the infrared detection element 2 and an opaque film 11 portion formed on the bottom surface are provided with windows 15 corresponding to the respective infrared detection elements 2. Left and right inner / outer bumps 55,5 arranged in parallel on the substrate 1
Infrared transparent block overlaid on the substrate 1 so as to bridge to 0
10 is provided, and the substrate 1 and the infrared transmission block 10 are fixed to each other by an adhesive 20 filled in a space formed by the surface of the substrate 1, the bottom surface of the infrared transmission block 10 and the outer wall of the outer bump 50. To do.
【００１３】[0013]
【作用】本発明によれば、基板の表面の左右の端部近傍
に、それぞれ内バンプと外バンプとを２列に配設し、基
板の表面と赤外線透過ブロックの底面と外バンプの外側
壁とがなす空隙に、接着剤を充満させている。According to the present invention, the inner bump and the outer bump are arranged in two rows near the left and right ends of the surface of the substrate, and the front surface of the substrate, the bottom surface of the infrared transmitting block and the outer wall of the outer bump are arranged. The void formed by and is filled with adhesive.
【００１４】したがって、外バンプの上端面と赤外線透
過ブロックの底面との間を通って外バンプの内側に流入
した接着剤は、内バンプにより堰き止められ、内バンプ
の内側に流れこむことがない。Therefore, the adhesive which flows into the inside of the outer bump through the space between the upper end surface of the outer bump and the bottom surface of the infrared ray transmitting block is blocked by the inner bump and does not flow into the inner bump. .
【００１５】したがって、接着剤が赤外線が通過する窓
を塞いだり、或いは赤外線検出素子の受光面を覆うこと
がない。即ち接着剤は赤外線検知器の感度を低下させな
い。接着剤20により、基板１と赤外線透過ブロック10と
が固着されという構成とするTherefore, the adhesive does not block the window through which infrared rays pass, or cover the light receiving surface of the infrared detecting element. That is, the adhesive does not reduce the sensitivity of the infrared detector. The substrate 1 and the infrared ray transmitting block 10 are fixed to each other with an adhesive 20.
【００１６】[0016]
【実施例】以下図を参照しながら、本発明を具体的に説
明する。なお、全図を通じて同一符号は同一対象物を示
す。The present invention will be described in detail with reference to the drawings. The same reference numerals denote the same objects throughout the drawings.
【００１７】図１は、本発明の実施例の図で、(A) は分
離した形で示す斜視図、(B) は断面図である。図におい
て、１は、サファイア等からなる基板１の表面に、HgCd
Te膜を形成しエッチングして、HgCdTeの角片（一辺が50
μm 〜100 μm)よりなる赤外線検出素子２を等ピッチ一
列に配列形成している。FIG. 1 is a diagram of an embodiment of the present invention, in which (A) is a perspective view shown in a separated form, and (B) is a sectional view. In the figure, 1 is HgCd on the surface of the substrate 1 made of sapphire or the like.
A Te film is formed and etched to remove HgCdTe square pieces (50
Infrared detection elements 2 of 100 μm to 100 μm) are arranged in a line at equal pitch.
【００１８】また、それぞれの赤外線検出素子２の相対
向する側縁からそれぞれ出力導体パターン３を導出して
いる。55は、基板１の表面の左右の端部近傍に、外線検
出素子２に並列するよう、インジュウム等の金属を蒸着
して設けた平面視が短冊形の内バンプである。Further, the output conductor patterns 3 are derived from the side edges of the respective infrared detecting elements 2 which face each other. Reference numeral 55 denotes an inner bump which is formed in a strip shape in a plan view and is provided in the vicinity of the left and right ends of the surface of the substrate 1 so as to be juxtaposed with the external line detection element 2 by vapor-depositing metal such as indium.
【００１９】50は、それぞれの内バンプ55の外側に平行
に、所望の間隔を隔てて配設した、インジュウム等の金
属を蒸着して設けた平面視が短冊形の外バンプである。
なお、内バンプ55及び外バンプ50は同時に配列形成した
もので、その高さは等しく、約15μm である。Reference numeral 50 denotes an outer bump which is parallel to the outer side of each inner bump 55 and is provided at a desired interval by vapor deposition of a metal such as indium, and has a rectangular shape in plan view.
The inner bumps 55 and the outer bumps 50 are formed in an array at the same time, and their heights are the same and are about 15 μm.
【００２０】Ｚn S よりなる赤外線透過ブロック10のの
底面に、アルミニウム等を蒸着して不透明膜11を形成
し、その不透明膜11にそれぞれの赤外線検出素子２に対
応して、赤外線が透過する角形の窓15を設けてある。On the bottom surface of the infrared transmitting block 10 made of Z n S, an opaque film 11 is formed by vapor-depositing aluminum or the like, and infrared rays are transmitted to the opaque film 11 corresponding to each infrared detecting element 2. A rectangular window 15 is provided.
【００２１】基板１に設けた左右の内外バンプ55,50 に
架橋するよう、赤外線透過ブロック10を載置すること
で、赤外線透過ブロック10を基板１に重ねている。そし
て、基板１の表面と赤外線透過ブロック10の底面と外バ
ンプ50の外側壁とがなす空隙に、接着剤20を充満し硬化
させて、接着剤20により基板１と赤外線透過ブロック10
とを固着している。The infrared transmitting block 10 is placed on the substrate 1 so as to bridge the left and right inner and outer bumps 55, 50 provided on the substrate 1. Then, the space between the surface of the substrate 1, the bottom surface of the infrared ray transmitting block 10 and the outer wall of the outer bump 50 is filled with the adhesive 20 and cured, and the substrate 20 and the infrared ray transmitting block 10 are cured by the adhesive 20.
And are fixed.
【００２２】上述のように構成された赤外線検知器は、
赤外線検出素子２の受光面と赤外線透過ブロック10の窓
15間の距離がバンプの高さにより所定に設定されている
ので、赤外線検出素子の視野角が所望に定まり、且つ迷
光が防止されて、赤外線検知器の空間分解能が高い。The infrared detector constructed as described above is
Light receiving surface of infrared detecting element 2 and window of infrared transmitting block 10
Since the distance between the 15 is set to a predetermined value by the height of the bump, the viewing angle of the infrared detecting element is set as desired, stray light is prevented, and the spatial resolution of the infrared detector is high.
【００２３】一方、接着剤20が硬化する前に、外バンプ
50の上端面と赤外線透過ブロック10の底面との間を通っ
て、外バンプ50の内側に流入した接着剤は、内バンプ55
により堰き止められるので、内バンプ55の内側に流れこ
むことがない。Meanwhile, before the adhesive 20 is cured, the outer bump
The adhesive that has flowed into the inside of the outer bump 50 through the space between the upper end surface of the infrared ray transmitting block 10 and the bottom surface of the infrared ray transmitting block 10 forms the inner bump 55
Since it is dammed by this, it does not flow into the inner bump 55.
【００２４】即ち、接着剤20が赤外線が通過する赤外線
透過ブロック10の窓15を塞いだり、或いは赤外線検出素
子２の受光面を覆うことがないので、赤外線検知器の感
度が低下することがない。That is, since the adhesive 20 does not block the window 15 of the infrared transmitting block 10 through which infrared rays pass or cover the light receiving surface of the infrared detecting element 2, the sensitivity of the infrared detector does not decrease. .
【００２５】[0025]
【発明の効果】以上説明したように本発明の赤外線検知
器は、基板の表面の左右の端部近傍のそれぞれに、赤外
線検出素子に並列するよう内外２列にバンプを配設した
ことにより、基板と赤外線透過ブロックとを固着する接
着剤が、赤外線が通過する赤外線透過ブロックの窓を塞
いだり、或いは赤外線検出素子の受光面を覆うことがな
くなり、赤外線検知器の感度低下が阻止されるという、
実用上で優れた効果を奏する。As described above, according to the infrared detector of the present invention, the bumps are arranged in two rows inside and outside so as to be arranged in parallel with the infrared detecting elements near the left and right ends of the surface of the substrate. It is said that the adhesive that fixes the substrate and the infrared transmitting block does not block the window of the infrared transmitting block through which infrared rays pass or does not cover the light receiving surface of the infrared detecting element, which prevents the sensitivity of the infrared detector from decreasing. ,
It has excellent practical effects.
【図１】 本発明の実施例の図で (A) は分離した形で示す斜視図 (B) は断面図FIG. 1 is a perspective view showing an embodiment of the present invention in a separated form (A) and a sectional view (B).
【図２】 従来例の図で (A) は分離した形で示す斜視図 (B) は断面図FIG. 2 is a perspective view showing a conventional example (A) in a separated form, and (B) is a sectional view.
１ 基板 ２ 赤外線検出素子 ３ 出力導体パターン ５ バンプ 10 赤外線透過ブロック 11 不透明膜 15 窓 20 接着剤 50 外バンプ 55 内バンプ 1 substrate 2 infrared detecting element 3 output conductor pattern 5 bump 10 infrared transmitting block 11 opaque film 15 window 20 adhesive 50 outer bump 55 inner bump
Claims (1)
板(1) と、 該基板(1) の表面の左右の端部近傍のそれぞれに、該赤
外線検出素子(2) に並列するよう内外２列に配設したバ
ンプ(55,50) と、 底面に形成した不透明膜(11)部分に、それぞれの該赤外
線検出素子(2) に対応して窓(15)が並列し、左右の該内
外バンプ(55,50) に架橋するよう該基板(1) 上に重ねる
赤外線透過ブロック(10)とを備え、 該基板(1) の表面と該赤外線透過ブロック(10)の底面と
該外バンプ(50)の外側壁とがなす空隙に充満した接着剤
(20)により、該基板(1) と該赤外線透過ブロック(10)と
が固着されてなることを特徴とする赤外線検知器。1. A substrate (1) having an infrared detection element (2) arranged in parallel on its surface, and a substrate (1) arranged in parallel with the infrared detection element (2) near each of the left and right ends of the surface of the substrate (1). The windows (15) are juxtaposed corresponding to the infrared detection elements (2) on the bumps (55, 50) arranged in two rows inside and outside and the opaque film (11) formed on the bottom surface. An infrared ray transmitting block (10) which is superposed on the substrate (1) so as to bridge the inner and outer bumps (55, 50), the surface of the substrate (1), the bottom surface of the infrared ray transmitting block (10), and the outer side. Adhesive that fills the space between the outer wall of the bump (50)
An infrared detector characterized in that the substrate (1) and the infrared transmission block (10) are fixed to each other by (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4188496A JPH0634432A (en) | 1992-07-16 | 1992-07-16 | Infrared detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4188496A JPH0634432A (en) | 1992-07-16 | 1992-07-16 | Infrared detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0634432A true JPH0634432A (en) | 1994-02-08 |
Family
ID=16224750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4188496A Withdrawn JPH0634432A (en) | 1992-07-16 | 1992-07-16 | Infrared detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634432A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012255782A (en) * | 2011-06-09 | 2012-12-27 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Infrared imaging device having integrated shield against parasite infrared radiation, and method for manufacturing device |
-
1992
- 1992-07-16 JP JP4188496A patent/JPH0634432A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012255782A (en) * | 2011-06-09 | 2012-12-27 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Infrared imaging device having integrated shield against parasite infrared radiation, and method for manufacturing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Application deemed to be withdrawn because no request for examination was validly filed |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19991005 |