JPH0634332A - Method and device for inspection of precision component appearance - Google Patents

Abstract

PURPOSE:To quickly and accurately inspect an electronic precision component about its wire disconnection, shortcircuiting, warping, etc., by casting flash light from a flash light source onto a solid image pick-up element camera, picking up an image of the component to be inspected, and subjecting the obtained image to processing. CONSTITUTION:This inspecting device comprises a flash light source 10 emitting a flash light beam, solid image pick-up element cameras 18, 20 receiving the flash light beam for pick-up the image of an electronic precision component to be inspected, and an image processing device 36 which is fed with electric signals from these cameras 18, 20 and conducts an image processing. A component tape on a supply reel 14 is controlled by a microcomputer 38 and taken up on a takeup reel 16. In compliance with the light emitting time width of the flash light emitted by the source 10 the cameras 18, 20 receive the light, and they pick up an image during this light emitting time while refrain from image pick-up during the non-emissive time zone, so that a shutter speed of 14 to 25 times as high as a usual mechanical shutter is obtained. Accordingly the still image input can be performed with a high measuring resolution and accurateness, and also the processing time for inspection be shortened to a great extent.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and method useful in the visual inspection of electronic precision parts and mechanical precision parts, and more specifically, by using a flash light source such as a strobe discharge tube instead of a shutter, The present invention relates to an inspection device and an inspection method capable of inspecting disconnection, short circuit, etc. of a very small pitch inner lead on a TAB (Tape Automated Bonding) tape, which is useful in density mounting technology, at high speed and accurately.

[0002]

2. Description of the Related Art Recent advances in IC integration technology have been amazing, but for this reason, the chip size is becoming lighter, thinner, shorter, and smaller, and the number of terminals on the chip is increasing.

As the chip size becomes lighter, thinner, shorter, and smaller, and the number of terminals of the chip increases, the high-density mounting technology is required because the electrode interval of the IC becomes narrower. It is the first thing that can be demonstrated.

Due to the lighter, thinner, shorter and smaller chip size and the development of more and more terminals on the chip, the restrictions on the manufacturing technology found in the conventional wire bonding method and the like are increased, and the transfer bump T
As high-density packaging technologies such as AB have been developed, they have become indispensable at the leading edge of the IC industry.

However, the conductor line width (inner lead width) and the gap width in this TAB are also miniaturized,
Conductor line width of 50 μm or 40 μm, 100 μm or 80
A product having a gap width of μm has been mass-produced, and a product having a conductor line or the like having a width shorter than these has come out.

Even in the mass production of this TAB, of course,
The product will be put on the market after inspection of the function, quality, reliability, etc. of the product, but as one method of this inspection, the conductor line width is broken, short-circuited, bent by observing the appearance,
We conduct product quality control by inspecting for defects.

In the TAB, the films of the respective TABs are connected in a tape form and wound on a reel at the time of shipping in order to make the processing and inspection efficient and facilitate the shipping of the TAB products. Conventionally, the following method has been used in the visual inspection of the TAB.

That is, the tape-shaped TAB film wound on one reel is slowly wound on the other empty reel while being optically magnified and inspected by a microscope installed between both reels. It was done.

Alternatively, a solid-state image sensor camera or the like is used instead of the microscope, while the tape-like TAB film wound on one reel is slowly wound on the other empty reel, or the solid-state image sensor is used. It has been practiced to drive a camera to capture an image of TAB, perform image processing, and inspect.

In the present invention, the solid-state image pickup device camera is a CCD (Charge Coupled Device) or BBD (B
ucket Brigade device) and other charge transfer devices, MO
An apparatus for converting an optical video signal into an electric signal by using a solid-state image pickup device such as an S image pickup device.

The CCD as a solid-state image pickup device has the excellent characteristics of being small and lightweight, having no graphic distortion, having no image sticking, having a small afterimage, and having impact resistance. It is widely used as an eye of OA and FA and also in various industrial fields.

[0012]

However, the conventional TAB appearance inspection described above has various problems as described below.

That is, in the method of optically enlarging and inspecting with a microscope, it takes an extremely long time to inspect a large amount of TAB because it is inspected using a human eye, and the accuracy is low. There is a problem in that it is not efficient and causes eye strain, which is not preferable in terms of occupational health.

Further, in the method using a solid-state image pickup device camera or the like, a high measurement resolution is required for inspecting an extremely narrow conductor line having a width of 50 μm or 40 μm. To obtain this high measurement resolution, TAB is required. There is a problem in that it is necessary to stop the solid-state imaging device camera once for imaging each inspected portion of the tape, and thus it takes a long time for the inspection.

Further, in the method using a solid-state image pickup device camera or the like, high speed of image input is required in order to shorten the time required for inspection, but the high speed is limited in the current state of the art, For this reason, the required inspection time has been shortened to the limit, and the above problems have been particularly remarkable.

Further, in the method of inspecting by optically enlarging with a microscope and the method of using a solid-state image pickup device camera, the inspection requires a long time, which consumes a large amount of electric power, is not economical, and causes mechanical abrasion. There is a problem that the repair / maintenance cost of the device increases because it increases with the elapsed time.

The present invention has been made in view of the above circumstances, and by using a flash light source such as a strobe discharge tube instead of a shutter, disconnection, short circuit, bending, or lack of electronic precision parts such as TAB can be achieved at high speed. The present invention also provides an inspection device and an inspection method capable of performing an accurate inspection.

[0018]

In order to achieve the above object, the present invention provides a flash light source for emitting a flash light, a solid-state image pickup device camera for receiving an image of a precision component to be inspected by receiving the flashlight, and the solid-state image pickup device. It is an object of the present invention to provide a visual inspection device for a precision component, the image inspection device including an image processing device that receives an electric signal from an element camera and performs image processing.

Further, according to the present invention, a solid-state image sensor camera receives a flash light from a flash light source to capture an image of a precision component to be inspected, and image processing of an electric signal output from the solid-state image sensor camera is performed. The object is achieved by providing a method for inspecting the appearance of a characteristic precision component.

[0020]

In the appearance inspection apparatus for precision parts and the method therefor according to the present invention, the solid-state image sensor camera receives light corresponding to the emission time width of the flash light emitted from the flash light source, and only the light reception time is imaged for the non-light emission time. It works so that it is not imaged in the band.

Further, in the precision part appearance inspection apparatus and method according to the present invention, the image information can be captured at a high speed by reducing the emission time width of the flash light. A high-resolution still image is input even if the solid-state image sensor is not stopped and the image is picked up every time each imaged part is imaged.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a precision component appearance inspection apparatus and method according to the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a front view showing an embodiment of an appearance inspection apparatus for precision parts according to the present invention, FIG. 2 is a system configuration diagram of the embodiment, and FIG. 3 is a perspective view showing an image pickup section of the embodiment. 4 is a still image diagram after image processing in the embodiment.

As shown in FIGS. 1 to 4, the appearance inspection apparatus for a precision component according to claim 1 of the present invention captures an image of a precision component to be inspected by receiving a flash light source 10 for emitting a flash light and receiving the flash light. The solid-state image pickup device cameras 18 and 20 and the image processing device 36 that receives an electric signal from the solid-state image pickup device cameras 18 and 20 and performs image processing.

In the appearance inspection method for precision parts according to the second aspect of the present invention, as shown in FIGS. 1 to 4, the solid-state image pickup device cameras 18 and 20 are made to receive the flash light from the flash light source 10. To image the inspected precision parts,
The image processing device 36 performs image processing of electric signals output from the solid-state imaging device cameras 18 and 20.

Further, the appearance inspection apparatus and method for precision parts of the present invention will be described in detail and specifically with reference to the drawings.

First, the system configuration of the appearance inspection apparatus for precision parts according to the present invention will be described with reference to FIG.

In this example, the TAB was used as the precision component.

Further, the image processing device 36 in the present embodiment.
In addition to the high-speed image processing section, the CPU has a built-in arithmetic processing section and control device, and also has a function as a so-called central processing unit (CPU).

The flash light source 10 is a strobe discharge tube having a light emission time width of 4 μs to 7 μs (time when light is actually emitted), and the light emission interval is controlled by the microcomputer main body 38 via the image processing device 36. Is configured to.

TA wound around the supply reel 14
The B tape 11 is controlled by the microcomputer main body 38 via the image processing device 36 and the reel controller 26, and is wound around the winding side reel 16 at equal intervals each time the imaging of the TAB tape in a certain range is completed. Is configured.

In order for the TAB to be imaged without distortion,
The TAB tape 11 is configured to be sucked onto the suction surface 48 of the vacuum suction device 12 without slack and to be imaged.

The solid-state image pickup device cameras 18 and 22 include X.
Y. Z robot 22, that is, X axis and Y that are orthogonal to each other
The robot is supported by a robot having a camera support portion 17 that can be driven in the X-axis and Z-axis directions. Y. The Z robot 22
The microcomputer main body 38 is configured to control the driving in the X-axis, Y-axis, and Z-axis directions via the robot controller 30 and the image processing device 36.

The control command can be issued by using the operation panel 44 and issuing it to the image processing device 36 through the interface 28.

In addition, X. Y. The Z robot 22 receives the image processing device 3 via the encoder 32 and the counter 34.
6 and is connected to X.6. Y. The encoder 32 reads the mechanical drive status of the camera support unit 17 of the Z robot 22, and the counter 32 counts it and the image processing apparatus 3
6, and the image processing device 36 issues a light emission command to the flash light source 10 so that the flash light source 10 emits light in association with the count value input state.

The solid-state image pickup device camera 18 is a camera for picking up an image along the X-axis direction of the X-axis and the Y-axis which are orthogonal to each other on the image pickup surface, while the solid-state image pickup device camera 20 is an orthogonal X-axis on the image pickup surface. It is a camera that captures images along the Y-axis direction of the axis and the Y-axis, and both cameras are configured to capture images in mutually orthogonal directions.

At this time, the X. Y. By driving the Z robot 22 in the Z-axis direction, the solid-state imaging device cameras 18, 2 are used.
The focus is set to 0.

Further, the solid-state image pickup device camera 18 and the solid-state image pickup device camera 20 are constructed so that when one camera is picking up an image, the other camera does not output an electric signal. The output of the electric signal to the image processing device 36 is switched by the TAB imaged by the camera.
In conformity with the upper conductor line direction (for example, when the conductor line is along the X-axis direction, the solid-state image sensor camera 18 outputs, and when it is along the Y-axis direction, the solid-state image sensor camera 20 outputs. Is configured to be performed).

In addition, in the appearance inspection apparatus of this embodiment, the images obtained by the solid-state image pickup device cameras 18 and 20 and subjected to the image processing are displayed on the monitor 42 so that the inspection images are sequentially grasped, and the inspection items set in advance are set. According to the inspection content, the inspection image is magnetically recorded and stored, and a defective product is automatically detected in the inspection item / inspection content. The G punch 24 has a mechanism for clearly identifying defective products by punching.

The input of the inspection item / inspection content to the image processing apparatus is configured so as to be performed while looking at the screen of the display 40 using the keyboard 41 and the mouse 43.

Further, while observing the inspection image displayed on the monitor 42, the operation panel 46 can be used to issue an image processing command to the image processing device 36 so that appropriate image processing is performed. Has been done.

Next, the usage method and usage status of the appearance inspection apparatus for precision parts according to the present invention will be described.

At this time, in the same manner as described above, T is used as a precision component.
AB (35 mm width, conductor line width 50 μm, gap width 50 μm) is used, and the inspection items are disconnection, short circuit, bending, lack, protrusion, deviation, and thinness of the conductor line on the TAB.
The field of view of the solid-state imaging device camera is 10 mm × 10 mm square.

Then, the inspection items of the TAB are input to the image processing apparatus while observing the screen of the display 40 using the keyboard 41 and the mouse 43.

Next, the supply-side reel 14 on which the TAB film to be inspected is wound is attached to the supply-side table 4.
5, the leading end of the TAB film 11 is connected to the take-up reel 16 of the take-up table 47 via a plurality of auxiliary discs as shown in FIG. It is placed between the roller 73 and the auxiliary roller 74.

At this time, as shown in FIG.
The AB comes between the auxiliary roller 73 and the auxiliary roller 74, takes an image of the plurality of TABs as one unit, and corresponds to the end of the inspection of the TAB of the one unit, the winding side reel 1
In response to a command from the reel controller 26, the TAB film 11 having a unit length of 6 is wound up, and an uninspected TAB between the auxiliary rollers 73 and 74 is imaged.

This image pickup is performed by sucking the TAB film 11 on the suction surface 48 without any gap by the vacuum suction device 12 so that an image without distortion is captured, and by moving the lens 23 on the TAB film 11. Be seen.

The movement of the lens 23 and thus the solid-state image pickup device cameras 18 and 20 is continuously performed without stopping, and the whole range of one unit of the TAB tape 11 is
The solid-state imaging device cameras 18 and 20 are reciprocally moved so as to enter the visual fields.

In this case, X. Y. Z robot 2
The mechanical drive status of the camera support 17 of the second encoder 2
2 is read, counted by the counter 34 and input to the image processing device 36, and in association with the input state of the count value, the camera support portion 17 is provided at a position where the imaging fields of view of the solid-state imaging device cameras 18 and 20 do not overlap. The flash light source 10 emits light when moved, and the flash light transmitted through the optical fiber is repeatedly emitted from the flash light emission port 21 of the optical receiver.

Then, the solid-state image pickup device cameras 18 and 20 receive light through the lens 23 only for this light emission time, photoelectric conversion is performed, and an electric signal corresponding to the image pickup surface is input to the image processing device 36.

That is, this light emission time width corresponds to the shutter speed of a camera used in daily life, and is 2 when a strobe discharge tube having a light emission time width of 4 μs is used.
When a stroboscopic discharge tube having a light emission time width of 7 μs is used for 1 / 50,000 second, the shutter speed corresponds to 1 / 140,000 second.

Therefore, with a normal mechanical shutter, the limit is 1 / 10,000 second.
The same thing that double shutter speed was obtained,
Conventionally, it was necessary to stop the solid-state image sensor camera once to image each inspection portion of the TAB tape, but the solid-state image sensor cameras 18 and 20 are continuously moved without stopping. Also, since the still image input is performed with a high measurement resolution (4 μm in this embodiment), the time required for the inspection (8 T in this embodiment).
(3 to 4 seconds when AB is one unit) was significantly shortened.

Subsequently, image processing is performed by the image processing apparatus, the inspection image is projected on the monitor 42, magnetically recorded on the floppy disk 72, and printed out by the printer 70.

FIG. 4 shows an example of the inspection image projected on the monitor 42. As shown in FIG. 4, the conductor lines are broken (conductor line 62) and shorted (conductor line 5).
4 and conductor line 56, conductor line 66 and conductor line 6
8), bend (conductor lines 54, 66, 68), lack (conductor line 58), protrusion (conductor line 60), deviation (conductor lines 50, 64), thick (conductor lines 50, 6)
4) is detected.

Such defective products are automatically identified by N. The mark punched by the G-punch 24 is left, and a mark indicating that it is a defective product is left.

When the resolution of the inspection image displayed on the monitor 42 is not preferable, the operation panels 44, 4
6 is operated to control the driving speed of the camera support 17 and the image processing device 36, and the resolution can be flexibly adjusted.

The appearance inspection apparatus for precision parts and the method thereof according to the present invention are not limited to the above configuration and method.

For example, the precision parts are not limited to electronic precision parts such as TAB, but may be mechanical precision parts that have undergone extremely precise processing.

The flash emission time width is 4 to 7 μm as described above.
The light emission time width is not limited to m, and an arbitrary light emission time width may be taken in consideration of the required measurement resolution and the sensitivity (photoelectric conversion characteristic) of the solid-state imaging device camera used, that is, the required light amount. it can.

Further, in the present embodiment, two solid-state image pickup device cameras are used, but the number of the solid-state image pickup device cameras is sufficient. Of course, use of three or more solid-state image pickup devices causes no problem.

Further, in the appearance inspection apparatus and method for precision parts according to the present invention, when the solid-state image pickup device camera is kept in the energized state during the inspection, the light intensity is lower than the photoelectric conversion threshold of the solid-state image pickup device camera or low. It is preferable to carry out in the wavelength range of sensitivity, and it is preferable to carry out the operation with the imaging section dark.

It is also possible to link the emission of flash light and the energization of the solid-state image sensor camera.

[0063]

The appearance inspection apparatus for precision parts and the method therefor according to the present invention are configured as described above, and thus have the following effects.

(1) In the precision part appearance inspection apparatus and method according to the present invention, the solid-state image pickup device camera receives light corresponding to the emission time width of the flash light emitted from the flash light source, and images for that light reception time, No image is taken during non-emission time, so it is 1/10000 with a normal mechanical shutter.
Where the second is the limit, it has an excellent effect that a shutter speed of 14 to 25 times that is obtained.

(2) In the appearance inspection apparatus and method for precision parts according to the present invention, it is possible to capture image information at a high speed by reducing the emission time width of the flash light. It was necessary to stop the solid-state image sensor camera once every time a part was imaged, but even if the solid-state image sensor camera is continuously moved without stopping, high-resolution still image input is possible. -It has an excellent effect that it is performed with accuracy and the time required for inspection is greatly shortened.

(3) In the apparatus and method for visual inspection of precision parts according to the present invention, the processing time required for the inspection is greatly shortened, so that the working efficiency is improved and the eye hygiene and the occupational health are improved. It has an excellent effect.

(4) In the appearance inspection apparatus and method for precision parts according to the present invention, since the inspection-required processing time is greatly shortened, the power consumption can be greatly reduced, and the inspection processing amount per It has an excellent effect that the mechanical wear of the device can be reduced and the repair and maintenance cost of the device can be reduced.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of an appearance inspection apparatus for precision parts according to the present invention.

FIG. 2 is a system configuration diagram of the same embodiment.

FIG. 3 is a perspective view showing an image pickup unit of the embodiment.

FIG. 4 is a still image diagram after image processing in the embodiment.

[Explanation of symbols]

 10 Flash light source 11 TAB film 12 Vacuum suction device 14 Supply side reel 15 Conducting wire line section 16 Winding side reel 17 Camera support section 18 Solid-state image sensor camera 20 Solid-state image sensor camera 21 Flash emission port 22 X. Y. Z robot 23 lens 24 N.V. G. Punch 26 Reel controller 28 Interface 30 Robot controller 32 Encoder 34 Counter 36 Image processing device 38 Microcomputer body 40 Display 41 Keyboard 42 Monitor 43 Mouse 44 Operation panel 45 Supply side table 46 Operation panel 47 Winding side table 48 Adsorption surface 50 Conductor line 52 conductor line 54 conductor line 56 conductor line 58 conductor line 60 conductor line 62 conductor line 64 conductor line 66 conductor line 68 conductor line 70 printer 72 floppy disk 73 auxiliary roller 74 auxiliary roller

Claims (2)

[Claims] 1. A flash light source that emits flash light, a solid-state image sensor camera that captures an image of a precision component to be inspected by receiving the flash light, and image processing that inputs an electric signal from the solid-state image sensor camera and performs image processing. A visual inspection device for precision parts, comprising: 2. A precision characterized in that a solid-state imaging device camera receives flash light from a flash light source to image a precision component to be inspected, and image processing of an electric signal output from the solid-state imaging device camera is performed. Visual inspection method for parts.