JP2008032747A - Film-like product - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film-like product onto which information on defect inspection is recorded or attached while allowing quick and highly precise defect inspection of a film from its inside where fillers such as particles exist. <P>SOLUTION: Two detecting optical systems are provided for oblique illumination and epi-illumination of a film-like inspected object where fillers such as particles different in optical property exist. The illuminating angle of an illumination light and the wavelength of the illumination light are selected to detect a defect and a difference in contrasting density of the fillers existing in the film from a picked-up image. In accordance therewith, the defect is discriminated. Besides, a defect type, a size and a defect detecting coordinate are recorded or attached as detection results, thereby improving the quality control of the film-like product and enhancing its added value. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a defect inspection method and apparatus for a film which is included in a film to be inspected for film and which detects and records or attaches a defect such as a foreign object which causes a product defect, and a film product, and further this film The present invention relates to a product processing method and a processing system thereof.

  Conventionally, for example, as a transparent film defect inspection device, a transparent film in transit is scanned with a one-dimensional CCD camera or laser light to detect a change in the amount of light transmitted through the transparent film or diffused light, thereby detecting defects in the transparent film. It is known that a product is inspected to determine the quality of the product. For example, in the inspection apparatus described in Japanese Patent Laid-Open No. 2000-131245, a transparent film traveling at a speed of several meters per minute is irradiated from below by an illumination device, and a predetermined resolution fixed above the transparent film is obtained. The presence or absence of defects (foreign matter) contained in the transparent film is inspected by the one-dimensional CCD camera having the image of the transmitted light of the transparent film. In addition, many methods for detecting scattered light from a defect by irradiating a film with a laser and detecting a defect in a transparent film are also applied.

Japanese Patent Laid-Open No. 2000-131245

  However, in such an inspection method, it is possible to reveal defects due to transmitted light in a transparent film. However, if fillers such as particles are present in the resin of the film, for example, foreign substances as defects in fillers with low transmittance. If both are present, both the defect and the particle are imaged in the same manner, and it becomes difficult to discriminate the defect from the particle. For example, as shown in FIG. 36, in the film in which the particles 181 are scattered in the resin layer 182 on the base material 183, foreign particles 185 which are defects exist in the film thickness direction as shown in FIG. In this case, when the film is observed with an imaging device (not shown) attached to the side opposite to the illumination light 184, an observation image 186 based on the transmitted light is detected as shown in FIG. Discrimination becomes difficult.

  Furthermore, in the case of a film containing a filler used for an electronic circuit board such as a liquid crystal display device, the particle density in the film tends to increase with the recent miniaturization of the circuit, and detection by transmitted light is possible. There is a problem that it is becoming more difficult.

  In particular, when the defect is extremely small, it is difficult to find it, and a transparent film that should be determined as defective may be determined as a good product. On the other hand, there is a problem that the aggregation of the filler is detected as a defect and a non-defective product is determined as defective. Moreover, in the defect detection using the scattered light of the laser often used in the surface defect inspection of the transparent film or the steel plate, the scattered light is generated from the filler of several μm, and it is difficult to distinguish the scattered light from the defect. There was a problem.

  Moreover, even if a defect was detected, the film was shipped if the occurrence of defects was above the standard, or shipped after removing that part, and discarded if it was below the standard. However, the defect has a size of about several tens to several hundreds μm, and there is no problem in quality except for the portion. That is, there is a problem in that a defect is generated in a product on which a film is mounted due to generation of some foreign matter, or the entire film becomes defective due to some defect and most of the film is discarded.

  The object of the present invention is to solve the above-mentioned problem, even if the filler is present in the film in a size equal to or smaller than the defect, the defect contained therein is detected with high accuracy, and the detected defect It is to provide a defect inspection method and apparatus for a film and a film-like product that can be provided as a film-like product without recording or attaching information on the film and discarding the information.

  Another object of the present invention is to provide a film capable of detecting a defect such as a foreign substance of a metal species contained in a film-like object to be inspected in which fillers are present at regular intervals or in a repeated pattern. It is to be able to provide a film-like product without recording or attaching information regarding the defect inspection method and apparatus and the detected defect and discarding it.

  Still another object of the present invention is to provide a method for processing a film-like product and a processing system therefor, in which a non-defective part is processed based on the provided film-like product.

  In order to achieve the above object, the present invention condenses oblique illumination light from an oblique direction with respect to a traveling process for traveling a film-like object to be inspected and a film-like object to be inspected traveling in the traveling process. The reflected light reflected by the film-like object to be inspected is received from the normal direction of the film-like object to be detected and detected as a first image signal, and based on the detected first image signal A first defect detection step for detecting a first defect and a film-like inspection object that travels in the traveling step is focused and irradiated with normal illumination light from a normal direction, and the film-like inspection is performed. The reflected light reflected by the object is received from the normal direction of the film-like object to be inspected and detected as a second image signal, and a second defect is detected based on the detected second image signal. Two defect detection steps, and the first and second defect detection steps. And a recording or attaching process for recording or attaching information (at least defect position coordinates on the film, etc.) relating to the first and second defects detected by the exiting process to the film-like object to be inspected. Is a defect inspection method and apparatus therefor.

  In the first defect detection step, the first defect may be binarized with a first threshold value lower than a background signal level in the first defect detection step so that the first defect is converted into the first defect. The signal level is detected as a signal level lower than the threshold value.

  In the second defect inspection step, the second image signal may be binarized with a second threshold value that is higher than a background signal level in the second defect inspection step, thereby removing the second defect from the second defect signal. The signal level is detected as a signal level higher than the threshold value.

  According to the present invention, in the first and / or second defect detection step, a determination process for detecting a defect or a candidate thereof based on the first and / or second image signal is performed by the first and / or the second defect detection step. It is characterized by using together the determination threshold value according to the shading degree which shows the defect in a 2nd image signal, and the determination threshold value according to an area.

  In addition, the present invention provides a first foreign matter detection step in which black foreign matter (resin-type foreign matter) inside the film is detected by oblique illumination, and the difference in reflectance between the filler and the metallic-type foreign matter as a defect. And a second foreign matter detection step of detecting a foreign matter of a metal type based on the above, making the foreign matter appear with the intensity of the observation image and simplifying the image processing.

  Further, the present invention is characterized in that in the recording or attaching step, information relating to the film-like object to be inspected (information relating to the production number of the film-like product and the mixed filler) is also recorded or attached.

  In the defect inspection method and apparatus for the film according to the present invention, further, the filler present in the film-like object to be inspected at regular intervals or in a repetitive pattern is detected and detected as an image signal. A filler measuring step for measuring the arrangement state of one or more fillers in the interval, size, and distribution based on the image signal, and the filler measured in the filler measuring step in the recording or attaching step It is characterized by recording or attaching information indicating the arrangement state.

  Further, the present invention provides a defect detection method for detecting a defect as an image signal with respect to a film-like object to be inspected in which a filler is present at regular intervals or a repeated pattern in the defect inspection method and apparatus for the film, A filler present in a film-like object to be inspected at regular intervals or in a repetitive pattern is detected and detected as an image signal. Based on the detected image signal, one or more fillers of any interval, size, and distribution are detected. Record or attach to the film-like object to be inspected a filler measurement step for measuring the arrangement state, information on the defects detected in the defect detection step, and information indicating the arrangement state of the fillers measured in the filler measurement step. A defect inspection method for a film, and a recording or attachment process It is a device.

  Further, the present invention provides a traveling process in which a film-like object to be inspected, in which fillers are present at equal intervals or in a repeating pattern, continuously travels, and a laser beam is applied to the film-like object to be inspected traveling in the traveling process. In the scattered light obtained from the film-like object to be inspected, an image is obtained by removing the scattered light from the filler pattern by the detection optical system having a spatial filter and receiving the scattered light from the defect. A defect inspection method for a film, and a device therefor, comprising a defect detection step of revealing and detecting a defect as a signal.

  The present invention also provides a traveling process in which a film-like object to be inspected, in which fillers are present at regular intervals or in a repeating pattern, is continuously run, and the film-like object to be inspected that is run in the traveling process is between the magnetic sensors. A defect inspection method and apparatus for a film, comprising: a defect detection step of distinguishing and detecting the defect from the filler based on a change in a magnetic field exerted by the filler and the defect by passing through the film.

  The present invention also provides a traveling process in which a film-like object to be inspected in which fillers are present at equal intervals or in a repeating pattern is continuously run, and the film-like object to be inspected that is run in the traveling process is placed between magnetic sensors. A defect detection step of magnetizing the filler and the defect when passing through and detecting the defect by discriminating the defect from the filler based on a difference in magnetic signal between the magnetized filler and the defect. And a defect inspection method for the film to be processed.

  In the defect inspection method and apparatus for the film according to the present invention, the defect detection step further includes a recording or attaching step for recording or attaching information on the defect to the film-like object to be inspected. .

  Further, the present invention is configured so that the oblique illumination has an incident angle of 60 ° or more with respect to the normal of the film-like object to be inspected, and the irradiation light is in a line shape or a spot shape (strip shape) according to the observation region By doing this, the energy density is increased, and the foreign substance detection sensitivity is improved.

  In addition, the present invention is characterized in that, in oblique illumination and epi-illumination, the wavelength and energy density are shortened and the energy density is reduced to such an extent that the resin constituting the film is not altered.

  In addition, in the oblique illumination, in order to reduce the brightness unevenness of the film edge, in addition to the brightness correction (shading correction) of the image processing signal, the inspection light irradiation method is applied from both sides in the film feed direction. It is characterized by suppressing brightness unevenness by irradiation.

  The present invention is characterized in that, in the first and second defect detection steps, a color image for display is obtained using a color imaging device as the imaging device. That is, the present invention uses a color TDI (Time Delay and Integration) or color line sensor to detect defects at high speed without stopping the film and to store images for defect state confirmation (display). The device can be simplified and miniaturized.

  Further, according to the present invention, by monitoring the speed of the transport system, it is possible to change the speed of taking in the camera in accordance with the film feed speed, so that it is possible to detect defects with the same sensitivity even when the speed changes. .

The present invention is also a film-like product characterized in that information relating to the defect inspection result is recorded or attached to the film-like product.
Moreover, the present invention is characterized in that the film-like product contains a filler therein. Further, the present invention is characterized in that the film-like product has fillers present therein at regular intervals or in a repeated pattern. Further, the present invention is characterized in that the film-like product is configured by attaching a film resin layer having a filler therein to a film base material layer.

Further, the present invention is characterized in that the film-like product includes at least one information of a defect occurrence position, a defect size, a defect type, and the number of defects as information on the defect inspection result. Further, the present invention is characterized in that the film-like product further includes information relating to the filler (for example, filler dimensions and pitch) recorded or attached.
Moreover, this invention is characterized by the said film-form product being roll shape.

  In addition, the present invention performs data analysis based on the result of the determination process in the first defect detection step and the result of the determination process in the second defect detection step, Laser marker or inkjet marker together with product information (can be used when adjusting or changing processing conditions such as crimping based on manufacturing history or product information. Therefore, manufacturing history is not required when not used) And recording or attaching the film information with the stylus type marker or the like, or attaching the film information.

  The present invention also provides a traveling process for intermittently or continuously running a film-like product on which product quality information is recorded or attached, and a product quality recorded or attached to the film-like product that is run in the running process. Based on a reading process for reading information, a control process for transmitting information on the location where the film-like product has a defect from the product quality information obtained in the reading process, and a location information on which the malfunction is transmitted by the control process. A processing method and a processing system for the film-like product, characterized in that the processing for the film-like product is stopped and a processing step for processing the film-like product with respect to normal parts other than defects is provided. .

  ADVANTAGE OF THE INVENTION According to this invention, there exists an effect which can be provided as a film product in the state which recorded or attached the result of having test | inspected foreign materials, such as a nonmetallic seed | species (resin seed | species) and a metal seed | species contained in a film with high precision.

  In addition, according to the present invention, even when fillers such as particles are present inside, the result of highly accurate inspection of foreign matters such as non-metal species (resin species) and metal species contained in the film is recorded or attached. With this, there is an effect that can be provided as a film product.

  Embodiments of a defect inspection method and apparatus for a film according to the present invention will be specifically described below with reference to the drawings.

  First, a first embodiment of defect inspection for a film according to the present invention will be described. In the first embodiment, as shown in FIG. 1, a filler of a conductive material, for example, a particle 3 used when connecting an electrode of a semiconductor element to an electrode on an electronic circuit board such as a liquid crystal display device is used. It is for optically inspecting metallic foreign matters mixed in or existing as defects in the densely contained film (resin layer) 2 or non-metallic foreign matters. As shown in FIG. 3, the object to be inspected 10 is obtained by attaching the film resin layer 2 in which the particles 3 are dispersed at a high density to the film base material layer 1. Therefore, the foreign substance inspection for the film according to the present invention is performed in a state where the film resin layer 2 is attached to the film base material layer 1 in order to facilitate handling and continuous feeding.

  Then, for example, the crimping process using the inspected film according to the present invention is performed as shown in FIG. That is, the pressure bonding is performed in a state where the film base material layer 1 is peeled off from the film resin layer 2. This crimping step will be described in detail later.

  Fig.1 (a) is a schematic block diagram which shows one Embodiment of the foreign material inspection apparatus with respect to the film which concerns on this invention. FIG. 1B is a diagram illustrating a case where a film data recording unit is formed at a winding end portion wound by a roll in a foreign matter inspection apparatus for a film. First, as shown in FIG. 3, the foreign matter inspection apparatus for a film according to the present invention continuously sends (moves) a film-like object to be inspected 10 with the film resin layer 2 attached to the film base layer 1. ) Detecting lump foreign matter (black foreign matter) such as a lump of resin species that is provided in the feeding mechanism 20 and the first station St1 and is present in the film resin layer 2 of the object 10 to be inspected. The first optical detector 30 and the second optical unit provided in the second station St2 for detecting the metal type foreign matter (white foreign matter) mixed in or existing in the film resin layer 2 of the inspection object 10 The detection unit 40 includes an inspection / analysis unit 50 that performs image processing based on the image signals detected from the first and second optical detection units 30 and 40 to inspect and analyze foreign matter.

  The feed mechanism 20 is based on the transport pinch rollers 21a and 21b, the drive motor 22 with a rotary encoder that drives the transport pinch rollers 21a and 21b, and the feed coordinates of the object 10 to be inspected based on signals from the rotary encoder. It is comprised from the control part 23 which outputs a value. That is, the control unit 23 manages the feed coordinate value to be inspected based on the signal from the rotary encoder.

  The first optical detection unit 30 uses a feed roller 31 that suppresses vibration of the inspection object 10 and white light 37 obtained from a light source (not shown) such as a halogen lamp, and the inspection object 10 whose vibration is suppressed. In order to increase the irradiation energy density from a direction inclined by 60 ° or more with respect to the detection optical axis (perpendicular to the object to be inspected), the light is condensed symmetrically in a slit shape or a spot shape (strip shape) Scattering from inside through obliquely illuminating optical systems 32a and 32b having condensing lenses for illuminating, and the film resin layer 2 of the object 10 to be inspected obliquely in a slit shape or a spot shape (thin strip shape) with white light An objective lens 36 that collects reflected light (diffracted light other than the 0th order), an optical system (not shown) that forms an image of the collected scattered reflected light, and an image of the formed scattered reflected light image To output an image signal. A detection optical system having an imaging device (line sensor or TDI sensor) 35 is transmitted through the film resin layer 2, and most of the rough surface of the substrate 1 is diffusely reflected and emitted from the surface of the film 2 to be objective. The light enters the lens 36 and is brightly detected as the background 73 as shown in FIG.

In the case of a lump foreign matter (black foreign matter) 4 such as a lump of resin species present in the film resin layer 2, not only has a low reflectance, but also reflected light 38 incident on the pupil of the objective lens 36 as shown in FIG. Becomes smaller and is detected darkly as indicated by 71 in FIG. Further, as shown in FIG. 14, isotropic reflected light 39 is generated from the particles 3 existing in the film resin layer 2 and the metal type foreign matter (white foreign matter) 5, and a part thereof is incident on the objective lens 36. Then, it is detected relatively bright as indicated by 72 in FIG. Therefore, by providing the brightness determination threshold 74, it is possible to detect only the bulk foreign matter (black foreign matter) 4.
The slit-shaped (strip-shaped) illumination includes a case where the condensed spot light is scanned using a rotating mirror, a rotating prism, or the like.

  The second detection optical system 40 uses a wavelength selection filter 43 to select a wavelength of about 550 nm or less for white light obtained from a feed roller 41 that suppresses vibration of the inspection target 10 and a light source 42 such as a halogen lamp. In order to increase the irradiation energy from the direction of the detection optical axis with respect to the inspected object 10 that is reflected by the half mirror 44 and suppressed in vibration, the light is condensed in a slit shape or a spot shape (strip shape). Epi-illumination optical system having a condensing lens to illuminate, and specularly reflected light (0th-order diffracted light) obtained from the object to be inspected 10 that is epi-illuminated with a light 47 having a wavelength of about 550 nm or less in a slit shape or a spot shape (strip shape) ), An optical lens (not shown) that forms an image of light that is close to the collected specularly reflected light, and an optical image that is close to the formed specularly reflected light. Picture A detection optical system having an image pickup device (color line sensor or color TDI sensor) 45 that outputs a signal, and a wavelength region having a large difference in reflectance between the particle 3 and the foreign material 5 such as a metal species, and the inspection light 47 By selecting, the reflected light 48 from the metallic foreign material 5 as shown in FIG. 19 is detected brightly as indicated by 81 in FIG. The reflected light 49 from the particle 3 shown in FIG. 18 is weaker than the reflected light 48 and is detected darker than 81 as indicated by 82 in FIG. In addition, the vertical epi-illumination light illuminating the inspection object 10 passes through the film 2 and passes through the semi-transparent substrate 1, and weak reflected light is obtained from the rough surface of the substrate 1, The background is detected as dark as indicated by 83 in FIG. The lump foreign matter 4 such as a lump of resin species present in the film 2 is detected as dark as the particles 3 because it is irregularly reflected and partially incident on the pupil of the objective lens 46. Therefore, by providing the brightness threshold value 84, it is possible to detect only the foreign matter 5 such as a metal species.

  Further, in this embodiment, the discriminability between the particle 3 and the foreign material 5 such as the metal species is improved by selecting the wavelength of the vertical incident illumination light. However, when the reflectance of the particle 3 is reduced at a short wavelength like Au, Even if white light is used for the inspection light 47 and detection is performed using the short wavelength side color, that is, B of R, G, and B, by the imaging device, the discrimination can be improved.

  That is, in the foreign matter detection step using the second detection optical system 40, when the glossy foreign matter 5 such as a metal species is detected as a defect as a white foreign matter, it is included in the film in order to improve the detection sensitivity of the foreign matter. In other words, the light having a small reflectance of the filler 3 is used as the epi-illumination. FIG. 5 shows an example of the reflectance of the metal. For example, while Cu and Au metals have a reflectivity that decreases in the vicinity of a wavelength of 500 nm 92 as indicated by 90, Al metal has a high reflectivity even in a wavelength region of 500 nm or less, as indicated by 91. Therefore, by irradiating light sources having different reflectivities of the metal constituting the particle and the foreign substance, for example, light having a wavelength of 500 nm or less, it becomes possible to reveal only the foreign substance of the metal type.

The inspection / analysis unit 50 discriminates and determines the lump foreign matter 4 such as a lump of resin species from the resin (film) 2 and the particles 3 based on the image signal obtained from the imaging device 35 of the first detection optical system 30. The first determination processing unit 51a, the first image storage unit 52a that stores an image of the lump foreign material based on the determination result determined by the first determination processing unit 51a, and the imaging of the second detection optical system 40 Based on the image signal obtained from the apparatus 45, the foreign matter 5 such as a metal species is discriminated from the resin (film) 2 or the particle 3 and determined by the second determination processing unit 51b and the second determination processing unit 52b. A second image storage unit 52b for storing an image of a foreign substance such as a metal species based on the determined determination result, the determination result determined by the first and second determination processing units 51a and 51b, and the first and second Stored in the second image storage unit 52a, 52b. A data analyzing unit 53 which aggregates the occurrence of foreign matter analysis based on foreign substance image, and a display device 54 that displays and outputs the result of the analysis by the data analyzer 53. The coordinate data of the foreign object to be inspected 10 determined by the first and second determination processing units 51 a and 51 b is determined based on the film feed coordinate value output from the control unit 23.
With the configuration described above, the inspection target 10 is transported when the transporting pinch rollers 21a and 21b are rotationally driven.

  At this time, the first detection optical system 30 that performs oblique illumination and the second detection optical system 40 that performs vertical epi-illumination are arranged side by side in the feed direction. When inspecting the inspection object 10 intermittently or a part of the inspection object 10 in the width direction, the imaging device of the first detection optical system 30 and the imaging device of the second detection optical system 40 travel. The same coordinates (width direction, feed direction) of the inspected object 10 are inspected. The inspection of the film resin layer 2 in the inspection object 10 is performed at the contact portion with the feed rollers 31 and 41 provided in each station in order to suppress vibration, and the change in sensitivity due to the influence of vibration of the inspection object 10 is suppressed. .

  In this way, when the inspection object 10 is conveyed linearly and there is vibration in the inspection object 10, as shown in FIG. 4, tension is applied to the inspection object 10 at the feed rollers 31 and 41. The transport system is configured so as to be obtained. For example, by providing guide pinch rollers 61 and 62 on the front side and the rear side and applying a brake to the rear pinch roller 62, it is possible to apply tension to the object 10 to be inspected.

  The imaging at each of the stations St1 and St2 is performed at the portions 63 and 64 where the film 2 of the inspection target 10 is flat. If necessary, the first detection optical system 30 and the second detection optical system 40 are used. You may incline and perform in the contact part with the feed rollers 31 and 41 with few vibrations of the test object 10.

  As the illumination light source (not shown) of the first detection optical system 30 and the illumination light source 42 of the second detection optical system 40, a white light source such as a halogen lamp is used, but the particles 3 and resin in the film resin layer 2 are used. Depending on the type, the wavelength selection filter 43 is used to select the wavelength as necessary, so that the discrimination between the foreign substances 4 and 5 and the particles 3 can be enhanced.

  FIG. 5 shows the relationship between the wavelength (nm) of illumination light and the reflectance (%) when the particle 3 is Au and when Al is mixed as the foreign metal 5. Reference numeral 90 denotes the relationship of reflectance to the wavelength of illumination light in the case of Au metal. 91 shows the relationship of the reflectance with respect to the wavelength of illumination light in the case of Al metal as the metallic foreign material 5. As described above, the reflectance of the Au metal decreases in the vicinity of the wavelength of 500 nm, whereas the Al metal maintains a high reflectance even in the wavelength region of 500 nm or less.

  In particular, if a wavelength of 550 nm or less is selected as the wavelength selection filter 43 in the second detection optical system 40, when the particle 3 is an Au particle, the reflectance is greatly reduced to about 60% or less. Thus, in the case where Al is used as the foreign material 5 of the metal species, the reflectance is about 90%. As described above, by selecting a wavelength of 550 nm or less as the wavelength of the illumination light, a large difference occurs in the reflectivity between the mixed Al metal foreign matter and the Au particles. 5 can be improved. In this case, it is effective to use an Hg lamp having an intensity in a short wavelength region as the light source 42.

  The oblique illumination in the first detection optical system 30 is for detecting the lump foreign substance 4 of the resin species in the film resin layer 2 that is difficult to detect in the vertical incident illumination by the second detection optical system 40. And in order to make the particle | grains 3 and the lump foreign material 4 which exist in the resin layer 2 manifest, it is effective to raise the irradiation energy density of a test | inspection area | region. Therefore, a condensing lens (not shown) is provided at the tip of the fiber attached to the oblique illumination devices 32a and 32b to collect white light and irradiate the inspection object 10. The light is condensed in a line shape or a spot shape corresponding to the inspection area, but in any case, the illumination should be the same as or wider than the imaging unit of the imaging device 35. The oblique illumination devices 32a and 32b make the incident angle of the oblique illumination devices 32a and 32b about 60 degrees or more with respect to the perpendicular of the object 10 to be inspected in order to make the foreign particles 4 appear from the particles 3 in the film. It is desirable to set.

  By the way, when the film resin layer 2 of the object to be inspected 10 is a transparent or translucent film, it is a transmissive material having a predetermined thickness, so that as shown in FIG. 6, the oblique illumination devices 33a and 33b When illuminated obliquely perpendicular to the feed direction, the end 93 of the film resin layer 2 becomes brighter than the center portion 94 as shown in FIG. 6, and the illuminance into the film resin layer 2 on the film base material layer 1 is not uniform. become. In order to suppress this, the illumination light is irradiated by the oblique illumination devices 32a and 32b from the feeding direction of the object 10 to be inspected as shown in FIG. 8, thereby obtaining a uniform illuminance distribution 95 as shown in FIG. To be able to.

  By adopting a color line sensor or a color TDI sensor for the imaging devices 35 and 45, an image is stored together with the foreign object detection determination, and the appearance of the part where the foreign object exists can be confirmed. The detection pixel size is set to a detection pixel size of at least one third or less of the particle 3 in the film 2 in order to obtain sensitivity sufficient to distinguish the particle 3 from the foreign substances 4 and 5. The imaging devices 35 and 45 are installed so that the light receiving element rows are arranged in the width direction of the film resin layer 2, that is, in the direction perpendicular to the feeding direction. The imaging devices 35 and 45 capture the entire width of the film 2 and, if necessary, provide a plurality of units to capture the entire width.

  Image processing in each of the first and second determination processing units 51a and 51b is performed, for example, by a processing flow as shown in FIG. The solid line represents the flow of the image, and the wavy line represents the flow of the data signal. First, in step S81, a color image is input from each of the imaging devices 35 and 45, and in step S82, each input color image is provided for each of the first and second image recording units 52a and 52b. The primary storage is performed in each of the primary storage memories. Next, using one color or an average value of the input color image RGB, brightness correction (shading correction) (step S83), smoothing process (step S84), and binarization with a brightness determination threshold value Binarization processing (step S85), contraction processing (processing that contracts a continuous lump signal indicating foreign matter with a binary signal into one foreign matter signal) (step S86), labeling processing (labeling for each foreign matter signal) (Step S87) and the like are performed.

  In the binarization process corresponding to each of the first and second determination processing units 51a and 51b, the determination threshold values 74 and 84 and the area determination threshold value (for example, particle 3 aggregation depending on the area) set in advance. By using together the determination process for erasing the false information due to and revealing the foreign matter, only the foreign matters 4 and 5 are detected from the film resin layer 2 in which the particles (spherical particles) 3 are present (step S88). As described above, the determination processing for detecting the defect or the candidate in the first and second determination processing units 51a and 51b is performed with the determination threshold and the area corresponding to the gray level indicating the defect in the first and second image signals. By using the corresponding determination threshold value in combination, it is possible to detect only the foreign matters 4 and 5 from the film resin layer 2 in which the particles (filler) 3 are present.

  If the foreign objects 4 and 5 are not detected in each step S88, the color image temporarily stored in step S82 is discarded in step S89. If each foreign object 4, 5 is detected in each step S88, the coordinate information obtained from the control device 23 is added to the color image temporarily stored in step S82, and the first and second information are added in step S82. Are stored in each of the image recording units 52a and 52b, and coordinate information obtained from the control device 23 is added to the foreign object detection result and output to the data analysis unit 53 (step S91).

  Next, main image processing modes and output examples of analysis results by the data analysis unit 53 will be described with reference to FIG. The images 90a and 90b captured by the imaging devices 35 and 45 are transferred to the image input boards of the first and second determination processing units 51a and 51b. Each of the first and second determination processing units 51a and 51b performs a binarization process on the observation images 90a and 90b based on brightness / gradation, and a binary image containing only foreign matters from the film resin layer 2 91a and 91b are obtained. Further, by removing noise components, detection images 92a and 92b of only the target foreign objects 4 and 5 are obtained. When a foreign object is detected, as shown in FIG. 10, the image temporarily stored in step S82 is stored in the recording devices 52a and 52b together with the coordinate information, for example, 256 × 256 pixels (step S90), and data analysis is performed after the inspection. The unit 53 is configured to be able to confirm by calling an image from the recording devices 52a and 52b via the first and second determination processing units 51a and 51b and displaying the image on the display device 54, for example. The inspection results are output from the two systems of determination processing units 51a and 51b, respectively, and the data analysis unit 53 collects data, and the foreign matter occurrence coordinates in the width direction and the feeding direction of the film, the foreign matter type, and the detected number of each foreign matter type The detection area or the detection diameter for each type of foreign matter is displayed on the display device 54 as a test result screen 93 as a mapping screen and a data summary table (foreign matter 1: number XX area XXX, foreign matter 2: number XX area XX. ×) is displayed. In the mapping screen of the display device 54, the display resolution can be changed to an arbitrary scale, and the occurrence of partial foreign matter can be confirmed. In short, the data analysis unit 53 can analyze the foreign matter generation coordinates, the foreign matter type, the number of detections for each foreign matter type, the detection area for each foreign matter type, and the like as the foreign matter information as the inspection result. Based on the foreign substance type, the detected number for each foreign substance type, the detection area for each foreign substance type, and the like, the non-defective product region portion and the defective product region portion can be classified.

  A pulse signal is transmitted from the rotary encoder 22 provided in the transport system to the color sensors, which are the imaging devices 35 and 45, and an image is captured in synchronization with the traveling of the inspection target 10, thereby speeding up the inspection target 10. The fluctuation of detection sensitivity is suppressed even during fluctuation. Furthermore, the pulse signal of the encoder 22 is configured to provide coordinate information and speed information to the computers that are the determination processing units 51a and 51b by counting the pulses by the control device 23.

  The inspection is started when the conveyance system pinch rollers 21a and 21b rotate and the inspection object 10 reaches a predetermined conveyance speed. That is, the process starts when the pulse signal of the rotary encoder 22 becomes a predetermined value and the inspection speed information is transferred to the computers of the determination processing units 51a and 51b. In addition, when the feeding speed of the inspection object 10 is accelerated or decelerated, the scan rate or the drive frequency of the imaging devices 35 and 45 can be changed from the signal of the encoder 22 to suppress the change in detection sensitivity. It is possible to synchronize the start of inspection with the start of conveyance.

  Further, as shown in FIG. 1 (a), the inspection result obtained in step S91 (including the coordinate information of the foreign matter from step S92) is transferred from the data analysis unit 53 to the marking device 102, and the inspection object is checked. At the end of a certain film, product information (product product number, etc.) and foreign matter information (foreign matter occurrence position, foreign matter size, foreign matter type, etc.) about the inspected film are recorded, printed or stored on the film or roll (step S93). The marking device 102 prints or records on the recording unit 103 of the film 10 wound up by the winding unit 101a using a laser marker, an inkjet marker, a stylus type marker, or the like. The foreign substance information, which is the inspection result, is printed, recorded, or stored at the end of the inspection of the inspection object 10 at the end. In the case of storing, it becomes possible by forming an element or member to be stored in the winding end portion of the film 10, the roll 110a or the like. That is, as shown in FIG. 1B, the film data recording unit 111a is conveniently located at the end of the film wound on the roll 110a when the film is used for pressure bonding. For example, as shown in FIGS. 32 and 33, the marking is performed using a barcode 253 or characters 251b and 252b such as a product number for 251a and 252a and an inspection result that is foreign object information for 252a and 252b. Print or record. 32 and 33 show that product information and foreign matter information can also be visually recognized. However, the inspection information may not be particularly visually recognized, and may be read by the reading device on the side where the film is purchased. .

  Further, the marking device 102 does not necessarily record the foreign substance information that is the inspection result at the film end portion. For example, when a foreign object is detected during the inspection, as shown in FIGS. Marking 254a or 254b may be performed to indicate that a foreign object 255 is present at the location.

  In addition to marking, the inspection result and product information may be a label or an IC chip on which information such as a barcode is printed as a means or method for attaching to the product.

  As described above, the film manufacturer provides the user with the information on the reliability of the film by providing the film with the foreign substance information as the inspection result recorded (including printing and storage) or attached together with the product information. The added value of the product as a film can be improved. The case of attachment includes the case where foreign object information is provided via a network using product information (product number) as a key. However, when recording, foreign matter information as inspection information is recorded on the film itself to be provided or the roll on which the film is wound, so that the foreign matter information as inspection information can be simply installed by the user side. Can be grasped.

  The film-like object to be inspected must be wound up after the inspection is completed. Usually, the winding roller is provided with a power such as a motor and a control device, and the rotation speed must be changed according to the winding amount. As shown in FIG. 34, the film take-up mechanism in the present invention is taken up by the roller take-up unit 304 after the film is conveyed by the pinch rollers 301 and 302 for film feeding. The winding unit 304 circumscribes the pinch roller driving unit 302, and the shaft of the winding unit 304 is always pressed against the driving unit 302 of the pinch roller by a spring 305, for example. Therefore, as shown in FIG. 35, even if the diameter of the winding part 304 is increased by winding the film, the winding part 304 rotates at the same speed as the outer peripheral speed of the pinch roller 302 where the diameter does not change. Winding is possible without controlling the rotation speed of the part 304.

  Hereinafter, specific examples of the present invention will be described. Here, a foreign object detection by software using a PC (Personal Computer) as the determination processing units 51a and 51b will be described as an example.

  The first embodiment is an example of foreign matter inspection on an inspection object 10 in which fillers, for example, particles 3 are scattered in a film 2 attached on a substrate 1. As foreign matter types, black foreign matter 4 such as a lump of resin species detected darker than the background (black determination) as shown in FIG. 13 and metallic foreign matter (hereinafter referred to as brighter than the background shown in FIG. 17). White foreign matter) 5.

  First, a first embodiment for detecting the black foreign object 4 at the first station St1 will be described. In the detection of the black foreign matter 4, the light 37 penetrates into the film resin layer 2 by the oblique illumination devices 32a and 32b, so that the low-transmittance particles 3 and the black foreign matter 4 that exist in the film resin layer 2 are used as the background. The portions 71 and 72 that are darker than 73 appear.

  FIG. 12 shows an example of detection of the black foreign object 4. The particles (filler) 3 and the black foreign matter 4 existing in the resin layer 6 that is the film resin layer 2 of the inspection object 10 are shown in FIG. 13 by oblique illumination devices 32a and 32b that irradiate the inspection light 37 obliquely. Thus, the cross-sectional gray waveform of AA in FIG. 12 is obtained. If the film resin layer 2 is a transparent or translucent material that is transparent to the visible region, sufficient inspection light can be obtained by condensing a halogen light source of about 150 W, but in the case of a material with low transmittance In this case, the foreign matter detection rate in the film resin layer can be improved by using a high-power Hg lamp or Xe lamp light source or selecting and adopting a wavelength region having a high film transmittance.

  The imaging device 35 images the particles (filler) 3 and the black foreign matter 4 that are made visible by oblique illumination. The captured image is input to the first determination processing unit 51a together with the coordinate information from the rotary encoder 22 via an image input board provided in the first determination processing unit 51a. The rotary encoder 22 is assumed to have a resolution of at least 100 μm or less in the coordinate in the feed direction. As shown in FIG. 11, the captured image (observed image) input to the first determination processing unit 51a temporarily stores an image for one frame, for example, 2048 × 2048 pixels (step S82), and RGB Image processing is performed using any one color or average value. As a feature of this apparatus, unlike the inspection apparatus using the transmission illumination apparatus, the oblique illumination apparatuses 32a and 32b can make a difference in the brightness and shade of the particle 3 and the black foreign object 4, and thus a complicated image. There is no need to perform processing, and the image processing time can be shortened.

  That is, as shown in FIG. 13, the particles 3 in the resin layer 6 are detected as black as indicated by 72 by the oblique illumination devices 32 a and 32 b, but the intensity is higher than that of the black foreign substance 4 indicated by 71. Since the difference from the resin layer 6 indicated by 73 is small, only black foreign matter can be detected by the black determination by the determination threshold 74. As shown in FIG. 14, when the particle 3 is irradiated with the oblique illumination 37 which is the inspection light from the oblique illumination devices 32a and 32b, the particle 3 is nearly spherical, and thus isotropically reflected light. 39 is generated, and a part of the reflected light 39 passes through the objective lens 36 and is imaged by the imaging device 35. At the time of this imaging, only the vertex part of the particle 3 is observed as a reflection part that generates reflected light, so that the size thereof is small with respect to the pixel, the other part is a dark part, and the intensity per pixel is By merging, the light and shade waveform 72 of the particle 3 is obtained. In the case of the black foreign substance 4, not only the reflectance is small, but also the reflected light 38 that passes through the lens 36 and enters the imaging device 35 is small as shown in FIG. By providing the brightness determination threshold 74, only black foreign matter can be detected.

  Further, even when the particle 3 has a lightness equivalent to that of the black foreign matter 4, these foreign matter candidates are picked up by binarization processing, and only the black foreign matter 4 of the detection target size is labeled by labeling among these foreign matter candidates. Is removed (by performing threshold processing based on the area), and the false information generated from the aggregation of the noise and the particles 3 is removed, and only the black foreign matter 4 is detected.

  When the first detection optical system 30 employs a detection system having a high-definition detection resolution, the particle 3 and the particle 3 in an observation image (in a pixel unit having a high-definition detection resolution) captured by the imaging device 35 are used. Although the difference in the shade of the black foreign object 4 may be small, in addition to the above processing method, only the black foreign object 4 can be revealed by merging images by smoothing processing.

  As described above, when the black foreign object 4 is detected, the first determination processing unit 51 a transfers the inspection result data together with the coordinate information from the control device 23 to the data analysis unit 53. This black foreign matter data is composed of foreign matter occurrence position coordinates, foreign matter type, foreign matter area (or foreign matter long diameter), foreign matter count, inspection length, etc., and is displayed on the display device 54 as appropriate. At the same time, the image for one frame temporarily stored in step S82 in the first determination processing unit 51a is stored in the recording device 52a from the first determination processing unit 51a together with the coordinate information (step S90). After the inspection is completed, the state of the foreign matter can be observed. If there is no black foreign object, the image of that frame is discarded (step S89).

  Next, a first example of the detection of the white foreign object 5 at the second station St2 will be described. FIG. 16 shows a detection example of the metal foreign object (white foreign object) 5 detected brighter than the background. While the oblique illumination devices 32 a and 32 b are effective for the manifestation of the black foreign matter 4, the vertical epi-illumination by the vertical epi-illumination devices 42 to 44 applies to the white foreign matter 5 scattered in the thickness direction of the film resin layer 2. Thus, high detection sensitivity can be obtained. In the cross-sectional gray waveform of B-B in FIG. 16, a difference occurs in the gray level 81 of the white foreign material 5 with respect to the gray level 82 of the particle 3. Note that reference numeral 83 denotes the intensity detected from the background. The difference in the reflected light of the particle 3 and the white foreign material 5 by the vertical incident illumination 47 is shown in FIGS. A wavelength selection filter 43 is inserted into the vertical epi-illumination devices 42 to 44 using the difference in reflectance between the particles 3 and the white foreign matter 5, and the reflectance of the particles 3 and the metallic foreign matter 5 that is white foreign matter is reduced. By selecting a wavelength region having a large difference as the inspection light 47, it is possible to obtain a difference between the reflected light 48 from the white foreign material 5 and the reflected light 49 from the particle 3 and improve detection sensitivity. It is.

  The image processing in the second determination processing unit 51b performs a series of image processing according to the process flow of FIG. In step S85, the second determination processing unit 51b raises the white foreign object 5 candidates by whitening binarization processing using the determination threshold 84, and in step S87, the size of the detection target (for example, the same labeling processing is performed). The white foreign matter 5 is discriminated and detected from the detected area), and the detection result is output to the data analysis unit 53.

  As described above, when the white foreign object 5 is detected, the second determination processing unit 51 b transfers the inspection result data to the data analysis unit 53 together with the coordinate information from the control device 23. This white foreign matter data is composed of foreign matter occurrence position coordinates, foreign matter type, foreign matter area (or long diameter), foreign matter count, inspection length, and the like, and is appropriately displayed on the display device 54. At the same time, the image for one frame temporarily stored in step S82 is stored together with the coordinate information from the second determination processing unit 51b to the recording device 52b (step S90). The structure is such that it can be observed. If no white foreign object exists, the image of the frame is discarded (step S89).

  A second embodiment for detecting the white foreign object 5 at the first station St1 will be described. That is, by selecting a wavelength region in which the reflectance difference between the particle 3 and the metal foreign material 5 which is a white foreign material is large as the inspection light 37, the metal foreign material (white foreign material) 5 existing in the vicinity of the surface of the film resin layer 2 is selected. Since the oblique illumination devices 32a and 32b can obtain reflected light more sufficiently than the background, it is possible to detect not only the black foreign object 4 but also white determination using a determination threshold brighter than the background.

  In this case, since foreign matter may be detected by being overlapped by the determination processing units 51 a and 51 b of both the vertical epi-illumination system 40 and the oblique illumination system 30, the data analysis unit 53 removes foreign matter having the same coordinate information. By determining that they are the same foreign matter, it is possible to prevent the foreign matter from being superimposed and output the determination result.

  As described above, the inspection result (product product number, foreign material occurrence position, foreign material size, foreign material type, etc.) in step S91 is transferred from the data analysis unit 53 to the inspection result recording apparatus 102, and the inspection result is recorded on the film 10 to be inspected. For example, the end portion is marked (step S93).

  As described above, by providing the foreign substance information, which is the inspection result relating to the film 10, together with the product information (including printing and storage) or providing the information, reliability information regarding the film is provided to the user, The added value of the product can be improved.

  Next, a second embodiment of the foreign matter inspection for the film according to the present invention will be described. The second embodiment is a case where a polyimide film which is a translucent film is used as the inspection object 10. Polyimide films are used in semiconductor packages and flexible substrates, and their insulating properties greatly affect device characteristics.

  The foreign matter inspection apparatus of the second embodiment uses the oblique illumination devices 32a and 32b and the vertical epi-illumination devices 42 to 44 according to the first embodiment, thereby revealing the foreign material 5 of the metal type and quality. It is possible to discriminate between the insulative foreign matter 4 that does not cause the above problem and the foreign metal 5 that is a fatal defect. The polyimide film is transported by the transport systems 21a and 21b shown in FIG. 1, and the first detection optical system 30 having the upstream oblique illumination devices 32a and 32b is inspected for the presence of the black foreign matter 4, and the downstream vertical incident light is detected. The second detection optical system 40 having the illuminating devices 42 to 44 inspects for the presence or absence of the metal species foreign matter (white foreign matter) 5. When the inspection data is transferred to the data analysis unit 53 via the first and second determination processing units 51a and 51b of the respective detection systems, and foreign matter is detected by the second detection optical system 40, It is determined that a foreign metal 5 is present. When a foreign object other than metal is set as a detection target, a non-metallic foreign object is detected only from the first detection optical system 30. When the foreign material 4 of the resin type different from the polyimide film is detected, it is possible to discriminate using the difference in reflection / absorption characteristics between the polyimide and the resin type foreign material 4 as in the first embodiment. it can.

  Next, a third embodiment of the foreign matter inspection for the film according to the present invention will be described. The third embodiment is a case where the film-like object to be inspected 200 in which the internal fillers, for example, the particles 202 are present at regular intervals or in a repeated pattern is continuously run. In addition, the to-be-inspected object 200 is obtained by attaching a film resin layer 201 in which particles 202 are present at equal intervals or a repeating pattern to a film base layer 204 as shown in FIG. Accordingly, in the foreign matter inspection for the film 200 according to the present invention, as in the first and second embodiments, the film resin layer 201 is applied to the film base layer 204 in order to facilitate handling and continuous feeding. It is done in the pasted state.

  Then, as shown in FIGS. 20 and 21, in the case of the inspection target 200 in which the particles 202 are arranged at equal intervals in the film 201, this particle pattern signal is preliminarily used for the first and second determination processing units 51a. , 51b, it is possible to recognize the object deviating from the particle pattern as the foreign matter 203 during image processing by the oblique illumination optical systems 32a, 32b. Further, whether the foreign material 203 is a fatal metal foreign material 5 that causes a short circuit when used in an electronic device or a resin mass foreign material 4 that does not affect the short circuit is located downstream of the transport system. Imaging is performed by the vertical epi-illumination optical systems 42 to 45, and the data analysis unit 53 determines through the second determination processing unit 51 b.

  By the way, when the particles 202 are arranged at equal intervals, the first station St1 may be configured by a transmission illumination optical system as shown in FIGS. 21 and 22 instead of the oblique illumination optical system. . Of course, a transmission illumination optical system shown in FIGS. 21 and 22 may be provided separately from the oblique illumination optical system. That is, in the case of a transmissive illumination optical system, transmissive illumination 205 is performed from the back side of the film 200 through the guide roller 209, and the transmitted light is condensed by the objective lens 207, and an imaging device (CCD image sensor, TDI image sensor, etc. ) 206 to receive light and output an image signal. As a result, as shown in FIG. 23, the image signal obtained by imaging from the imaging device 206 is converted from the image signal to the particle 202 by an image processing system (may be the data analysis unit 53) different from the foreign object detection. Aggregate data. That is, by inputting an image obtained by imaging from the imaging device 206 in step S201 and binarizing with a predetermined threshold value in step S202, the particles 202 and foreign matters such as metal species are black as shown in FIG. It can be detected as an image. In this way, the binarized image obtained in step S202 is divided into step S205 for detecting foreign matter and step S203 for examining the state of the particles 202.

  In step S205 for performing foreign object detection, the particle pattern signal is obtained by performing mask processing (pattern matching) based on the above-described binarized image signal, for example, by taking a logic with a reference binarized image signal shifted by the particle pitch. Obtainable. By inputting this particle pattern signal to the first and second determination processing units 51a and 51b, the foreign matter 203 is converted into an electron in the data analysis unit 53 via the first and second determination processing units 51a and 51b. It is possible to determine whether it is a fatal metal seed foreign material 5 that causes a short circuit when used in a device or a resin mass foreign material 4 that does not affect the short circuit (S206). In particular, the metal type foreign matter 5 is detected from the second determination processing unit 51b.

  In step S203, data such as the particle size 211 (and shape) of the particles 202, the pitch 212, and the missing portion 214 of the particles 202 are measured from, for example, a binarized image signal. These measurement results are statistically processed in step S204, and the particle size and pitch distribution are analyzed as data. As an analysis result, for example, as shown in FIG. 25, a distribution 217 of particle diameters 211 and pitches 212 is displayed. In addition to the overall statistical processing, statistical distribution processing is performed in an arbitrary area, and the defective position is recorded or attached to the inspection target 200 in the same manner as when a foreign object is generated. Thus, not only the presence / absence of the foreign matter 203 so far, but also a quality inspection from the viewpoint of poor connection due to the missing 214 of the particles 202 is possible.

These data are recorded or attached with the product number, the film inspection result, and the particle data at the end of the film by the marking device 102, as in the case of the film inspection without the particle pattern. In this way, by providing the foreign substance information, which is the inspection result relating to the film 200, together with product information (including particle data) recorded (including printing and storage) or attached, information on reliability regarding the film is provided to the user. The added value of the product as a film can be improved.
Even in the case of a film having a repetitive pattern, a foreign matter inspection can be performed by the same processing, and the result can be recorded or attached to the film.

  Next, a fourth embodiment of the foreign matter inspection for the film according to the present invention will be described. The fourth embodiment is a case where the film-like object to be inspected 200 in which internal fillers and particles are present at regular intervals or in a repeating pattern is continuously run. In this case, an optical system having the configuration shown in FIG. 26 may be installed in the first station St1. That is, the laser beam 222 is obliquely illuminated on the film-like object 200 in which the internal particles 202 exist at equal intervals or in a repeated pattern. When the inspection target 200 is irradiated with the laser beam 222, the incident light is diffracted and scattered. The diffracted light and scattered light pass through the objective lens 221, pass through the spatial filter 220 and the polarizing plate, and enter the photodetector (image sensor or the like) 219. The presence or absence of foreign matter in the film can be detected based on the amount of light incident on the detector 219. That is, when a foreign substance is present in the film, scattered light from other than the pattern is generated. Therefore, the increase in the amount of scattered light can be detected by the photodetector 219 to detect the presence of the foreign substance. However, since the incident light to the photodetector 219 includes not only scattered light due to foreign matter but also diffracted light due to particles and repetitive patterns, a spatial filter is used to improve the detection sensitivity of foreign matter by removing this diffracted light. 220 and a polarizing plate are used. As a result, as shown in FIG. 27, a scattered light signal 226 indicating the metallic foreign material 3 in the foreign material 203 is obtained from the detection signal 225 corresponding to the scan position.

  Furthermore, when detecting the metal seed | species foreign material 5 as the foreign material 203 in the film resin layer 201, the vertical epi-illumination system provided in 2nd station St2 is used. In this way, it is possible to detect the foreign matter 203 present in the inspection target 200 where the particles 202 exist at equal intervals or in a repeated pattern, and record or attach the inspection result to the inspection target 200. .

  Next, a fifth embodiment of the foreign material inspection for the film according to the present invention will be described. In the fifth embodiment, the film-like object to be inspected 10 in which the internal filler and particles 3 are present arbitrarily or the film-like inspected object 200 in which the particles 202 are present at equal intervals or in a repeating pattern are continuously run. It is. That is, in the fifth embodiment, as shown in FIGS. 28 and 29, the feeding mechanism 20 that continuously feeds (moves) the test objects 10 and 200, and the magnetic sensor unit 220 that observes the change in the magnetic field. And an inspection / analysis unit 50 that performs signal processing based on a signal from the magnetic sensor unit 220 to inspect / analyze a metal foreign object, a marking device 102, and the like. The inspection / analysis unit 50 obtains, from the control device 23, a determination processing unit 51 that discriminates the foreign material 5 such as a metal species from the particles 3 and 202, and a signal indicating the foreign material determined by the determination processing unit 51. The storage unit 52 that stores the coordinate information and sequentially stores the result, the result of determination by the determination processing unit 51, the signal (including the coordinate information) stored in the storage unit 52, and the like are aggregated The data analysis unit 53 that analyzes the data and the display device 54 that outputs and displays the result analyzed by the data analysis unit 53. The magnetic sensor unit 220 includes magnetic sensors 227a and 227b that detect a change in the magnetic field exerted by the metal foreign object 5 and detect the metal foreign object 5 when the test objects 10 and 200 pass through.

  When the particles 202 are present at equal intervals, the magnetic sensors 227a and 227b observe a certain change in the magnetic field. However, if the metal foreign object 5 is present between them, the magnetic field is disturbed, and the signal processing unit 230 As shown in FIG. 30, the magnetic foreign matter signal 242 is observed when the magnetic signal 241 is weakened, and the presence of the metallic foreign matter 5 can be detected from the disturbance.

  Further, recording units (magnetization units) 227a and 227b and a reading unit 228 are provided as the magnetic sensor unit 220. In the determination processing unit 51, a foreign substance of a metal type is detected from a change in signal intensity due to a metal type read by the reading unit 228. Can also be discriminated. The presence of a foreign substance can be recognized if the metal species has a magnetic susceptibility higher or lower than that of the particles 3 and 202. Further, as indicated by 244 and 245 in FIG. 31, the magnetic susceptibility differs greatly even with the metal type, and therefore it is possible to discriminate which metal type is mixed as a foreign substance from the signal intensity 243 in the determination processing unit 51.

  As described above, the information regarding the metal foreign object 5 mixed in the film-like objects 10 and 200 is determined by the determination processing unit 51 and sequentially stored in the storage unit 52. Therefore, the data analysis unit 53 aggregates information about the metal foreign object 5 for one inspection target based on the information about the metal foreign object 5 determined by the determination processing unit 51 and the signal stored in the storage unit 52. Then, the result can be output to the marking device 102 and recorded or attached.

In addition to the first to fifth embodiments described above, the same method is applied to the inspection of metal foreign substances contained in food wraps and the inspection of foreign substances present in resin materials used for medical catheters. be able to.
In the first to fifth embodiments, software processing using a PC has been described as an example. However, image processing is not limited to this, and hardware processing using an image processing board is the same.

Further, in the first to fifth embodiments, a film made of resin or the like is an object to be inspected, but the process of inspecting and recording the inspection result in the inspection of a long object such as a steel plate is the same. .
In the embodiment, the filler is described as being in the form of particles. However, the present invention can also be applied to a rectangular shape.
Moreover, although the embodiment is an embodiment in the whole film inspection, it can be used as product quality and information management information also in the partial inspection.

  Next, an embodiment in which products such as films 10 and 200 receive product information and foreign substance inspection result information recorded or attached and used for a processing step such as a crimping step will be described with reference to FIG. Will be described. That is, as shown in FIG. 10, in the marking process S93, for example, in the crimping process S94, which is a processing process, for the films 10 and 200 which are recorded or attached with the defect information such as foreign matter which is the quality information of the film. The above recorded or attached defect information is read, and based on the read defect information, only normal parts where no foreign matter is mixed are applied to the product. That is, the overall control unit 105 reads the defect information that has been recorded or attached to the film 10 or 200 that has been recorded or attached with defect information such as foreign matter that is quality information and received, and the read defect information. Based on the above, it is managed not to apply the product to the film at the defective portion, and the occurrence of the defect of the electronic device due to the film is prevented by controlling the crimping apparatus which is a processing apparatus. In the case of a repetitive pattern, the product is applied by the same process.

  For example, the crimping system in the crimping step S94 is recorded in the marking step S93 on the supply unit 101b on which the roll-shaped films 10 and 200 provided as described above are installed and the films 10 and 200 sent out from the supply unit 101b. A reading unit 104 that reads defect information such as foreign matter and product information that is an attached inspection result, a general control unit 105 that receives the defect information and product information read by the reading unit 104, and the supply unit 101b The film resin layers 2 and 201 to be fed by peeling off the film base layers 1 and 204 from the films 10 and 200 fed from the rolls by the feed rollers 121a and 121b and 124a and 124b are cut into predetermined dimensions and subjected to processing such as pressure bonding. Based on commands from the processing device 130 and the overall control unit 105, the processing device 1 It constituted by the processing control unit 106 for controlling the 0. In the case of pressure bonding, the processing device 130 includes pressure bonding devices 131a and 131b. The feeding mechanism 120 for feeding out the film is based on the conveying pinch rollers 121a and 121b, the drive motor 122 with a rotary encoder that drives the conveying pinch rollers 121a and 121b, and a signal from the rotary encoder. , 200 that outputs 200 feed coordinate values.

  The reading unit 104 reads defect information such as a foreign substance as an inspection result recorded or attached in the marking step S93 from the recording unit 111b at the starting end of the film unwound from the roll 110b and sent out. By feeding back the information to the processing apparatus 130 that performs processing such as crimping, it is possible to avoid the occurrence of a defect in the film and use it for a product. This makes it possible to use a film that has been discarded due to the presence of defects such as foreign matter 4 and 5 in the product.

  That is, the roll-shaped film products 10 and 200 on which product quality information such as defect information such as foreign matters is recorded or attached are intermittently or continuously sent out by the feed rollers 121a, 121b and 124a, 124b. 10, the product quality information recorded or attached to 200 or 200 is read by the reading unit 104 and decoded, and the part of the film that causes a defect in the product is recognized by the overall control unit 105 from the decoded product quality information. When the film portion is fed by the feed mechanism 120 based on the feed coordinate value obtained from the control unit 123, the processing control device 106 controls the processing device (for example, the crimping device) 130 not to operate, As a result, it is possible to process only the non-defective parts by excluding defective parts. Product processing defect due to the film due to (for example, crimping failure) to prevent, moreover, without discarding the entire film, it is possible to apply the product.

  In addition, as information to be recorded or attached to the film, by including film manufacturing conditions such as filler dimensions and filler pitch to be arranged in the film, processing conditions such as pressure bonding are provided on the receiving side of the film product. It is also possible to control the film so as to suit the production conditions of the film.

It is a perspective view which shows one Embodiment of the defect detection apparatus with respect to the film which concerns on this invention. It is a perspective view which shows one Embodiment of the processing system of the film-form product which concerns on this invention. It is sectional drawing which shows one Example of the film-form to-be-inspected object which concerns on this invention. It is a figure for demonstrating the observation position of the film-form to-be-inspected object which concerns on this invention. It is a figure for demonstrating the difference with the reflectance of the particle | grains which concern on this invention, and the reflectance of the foreign material of a metal seed | species. It is a figure for demonstrating the case where oblique illumination is made into the orthogonal | vertical direction with the feed direction. It is a figure which shows the illumination intensity distribution at the time of obliquely illuminating by the method shown in FIG. It is a figure for demonstrating the case where oblique illumination is made from the sending direction. It is a figure which shows the illumination intensity distribution at the time of performing oblique illumination by the method shown in FIG. It is a figure which shows the flow which utilizes the image processing and inspection result recording in the defect inspection apparatus with respect to the film which concerns on this invention. It is a figure for demonstrating one Example of the image processing and test result output which concern on this invention. It is a figure explaining the state of the black foreign material (the lump foreign material of the resin seed | species) in the film which concerns on this invention. It is a figure which shows the intensity | strength waveform obtained from the detection image by the oblique illumination in the AA cross section shown in FIG. It is a figure explaining the generation | occurrence | production condition of the reflected light from the particle | grains by the oblique illumination which concerns on this invention, and a white foreign material. It is a figure explaining the generation | occurrence | production state of the reflected light from the black foreign material (bump foreign material of resin seed | species) by the oblique illumination which concerns on this invention. It is a figure explaining the state of the white foreign material (metal type foreign material) in the film which concerns on this invention. It is a figure which shows the intensity | strength waveform obtained from the detection image by the epi-illumination in the BB cross section shown in FIG. It is a figure explaining the generation | occurrence | production condition of the reflected light from the particle | grains by epi-illumination which concerns on this invention. It is a figure explaining the generation | occurrence | production state of the reflected light from the white foreign material (metal type foreign material) by the epi-illumination which concerns on this invention. It is a figure which shows one Example when the particle | grains of the film-shaped to-be-inspected object which concern on this invention exist at equal intervals or a repeating pattern (at the time of alignment). It is sectional drawing which shows one Example of the transmitted light by the back surface irradiation at the time of the particle | grains of the film-shaped to-be-inspected object based on this invention being aligned. It is a figure which shows the detection system in the case of detecting FIG. 21 by transmitted light. It is a figure which shows the flow which processes the image processing and the measurement data of a particle | grain in the defect inspection apparatus with respect to the film which the particle | grains arranged in accordance with the present invention are aligned. It is a figure which shows the data measurement position of the particle | grains at the time of the particle | grains of the film-shaped to-be-inspected object concerning this invention aligning. It is a figure which shows an example of the data processing result of the particle | grains at the time of the film-shaped to-be-inspected object particle | grains based on this invention aligned. It is the figure which showed the defect detection by a laser scattered light detection system at the time of the particle | grains of the film-form to-be-inspected object which concerns on this invention aligning. It is a figure which shows the change of the signal strength when the foreign material in FIG. 26 is detected. It is the figure which showed the defect detection by a magnetic change at the time of the particle | grains of the film-form to-be-inspected object which concerns on this invention align. It is the figure which showed the state through which the to-be-inspected film passes between magnetic fields. It is a figure which shows the change of the signal strength of the magnetic field when the foreign material in FIG. 28 is detected. It is a figure which shows the change of the recorded magnetic signal intensity | strength when the foreign material in FIG. 28 is detected. It is a figure which shows an example of the product information to a film-form to-be-inspected object, the example of a recording of a test result, and the marking to a foreign material location. FIG. 33 is a diagram illustrating an example of recording product information and inspection results on a film-like object to be inspected in a form different from that in FIG. It is the figure which showed the mechanism of the winding-up part of a film. It is a figure explaining the state by which the film was wound around the film winding part of FIG. 34, and the outer periphery of the winding part changed. It is a figure explaining the state of the particle | grains which exist in a film. It is sectional drawing explaining the state of the foreign material which exists in a film. It is a figure for demonstrating a mode at the time of observing FIG. 36 and FIG. 37 with transmitted light.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,204 ... Film base material layer, 2, 201 ... Film resin layer, 3, 202 ... Particle | grain (filler), 4 ... Resin-type lump foreign material (black foreign material), 5 ... Metal-type foreign material (white foreign material), 6 DESCRIPTION OF SYMBOLS ... Resin layer 10, 200 ... Test object, 20 ... Feed mechanism, 21a, 21b ... Conveying pinch roller, 22 ... Drive motor with rotary encoder, 23 ... Control device, 30 ... 1st optical detection part (detection optics) System), 31 ... feed roller, 32a, 32b ... oblique illumination optical system, 35 ... imaging device, 36 ... objective lens, 40 ... second optical detector (detection optical system), 41 ... feed roller, 42 ... light source 43 ... Wavelength selection filter, 44 ... Half mirror, 45 ... Imaging device, 46 ... Objective lens, 51a ... First determination processing unit, 51b ... Second processing determination unit, 52a ... First image storage unit, 52b ... second image storage unit, 53 ... Data analysis unit, 54 ... display device, 73 ... background, 74 ... brightness determination threshold, 84 ... brightness determination threshold, 83 ... background, 90a, 90b ... observation image, 91a, 91b ... binarized image, 92a, 92b ... detected image, 101a ... winding unit, 101b ... supplying unit, 103 ... recording unit, 104 ... reading unit, 105 ... overall control unit, 106 ... processing control device, 110b ... roll, 111a, 111b ... recording unit, 120 ... Feed mechanism, 121a, 121b and 124a, 124b ... Feed roller, 130 ... Processing device, 131a, 131b ... Crimping device, 122 ... Drive motor with rotary encoder, 123 ... Control unit, 201 ... Film, 203 ... Foreign matter, 211 ... Particle size, 212 ... Pitch, 214 ... Missing, 217 ... Distribution, 218 ... Threshold, 220 ... Magnetic sensor part, 227a, 227b ... Recording part Magnetized portion), 228 ... reading unit.

Claims (7)

  A film-like product comprising information relating to a defect inspection result recorded or attached to a film-like product.   The film-like product according to claim 1, wherein the film-like product contains a filler therein.   The film-like product according to claim 1, wherein the film-like product contains fillers at regular intervals or in a repeating pattern.   The film-like product according to claim 1, wherein the film-like product is constituted by attaching a film resin layer having a filler therein to a film base material layer.   5. The film according to claim 1, wherein the information on the defect inspection result includes at least one of a defect occurrence position, a defect size, a defect type, and the number of defects. Product.   Furthermore, the film-like product according to any one of claims 1 to 5, wherein information relating to the filler is recorded or attached.   The film-like product according to any one of claims 1 to 6, wherein the film-like product has a roll shape.

Images