JPH06339658A - Liquid applicator - Google Patents

Abstract

PURPOSE:To provide a liquid applicator that facilitates changing liquids to be applied and enables overcoating. CONSTITUTION:In a slot type spray for viscous fluid for feeding different kinds of liquids to be applied 12a, 12b which are adjusted to have a given film thickness by a slot to the surface of an object 11 to be coated, two application heads 55a, 55b for applying the different kinds of liquids 12a, 12b are installed, and the heads are arranged to be able to drive independently. The respective heads 55a, 55b can not only be operated individually but also be operated synchronously for covercoating.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a fluid application device.
Specifically, the present invention relates to a slot-type fluid application device for applying a fluid with a uniform film thickness to the surface of an object to be applied.

[0002]

2. Description of the Related Art In a manufacturing process of a liquid crystal display (LCD), a semiconductor optical element, a semiconductor element, a semiconductor integrated circuit, a printed wiring board, etc., various coating liquids such as a photoresist, an insulating material, a solder resist, etc. For example, it is necessary to apply it to the surface of a glass substrate, a semiconductor wafer, etc.) to form a very thin coating film of about several microns.
For example, in the manufacturing process of a liquid crystal display, it is necessary to coat the surface of a glass substrate with a uniform photoresist having a dry thickness of about 1 to 3 microns.

In such a case, it is necessary to form a coating film having an extremely uniform film thickness, and moreover, it is necessary to control the film thickness with high precision. Therefore, conventionally, a spin coater or a roll is used as a coating device. A coater or the like is generally used.
For example, in a spin coater, a coating solution set on a rotary table is rotated at a constant number of rotations to drop the coating solution onto a base layer from a discharge nozzle, and the coating solution is spread thinly by a centrifugal force to apply the coating solution. A coating film having a film thickness determined by the viscosity of the liquid and the number of revolutions is formed on the surface of the object to be coated. Also,
The roll coater makes a roller whose surface is supplied with a coating liquid contact the surface of an object to be coated, and transfers the coating liquid from the roller to the surface of the object to be coated.

[0004]

However, all of the conventional fluid coating devices can coat only one type of coating liquid at a time. That is, the conventional spin coater has only one discharge nozzle, and the conventional roll coater has only one roller. For this reason, in order to change the type of the coating liquid, it is necessary to wash the coating nozzle of the spin coater, the roller of the roll coater, and the like to replace the coating liquid, and it takes a lot of time to change the setup.

Further, in the past, it was not possible to apply the coating liquid repeatedly by one fluid coating device. For example, in the case of a spin coater, if a plurality of ejection nozzles are provided, the first ejection nozzle forms a first-layer coating film on the surface of the coating object, and then the second coating object is rotated while rotating the coating object. Discharge another coating liquid from the discharge nozzle 1
It is conceivable to form a second-layer coating film on the first-layer coating film. However, when the coating liquid of the second layer spreads to the whole by centrifugal force, the coating film of the first layer and the coating film of the second layer which are still wet are mixed with each other and the coating films of the first layer and the second layer are mixed. There is a problem in that the film thickness of each layer varies and the quality of the coating film of each layer is impaired. In addition, there is a risk that the coating film of the first layer may be peeled off from the surface of the object to be coated due to the centrifugal force when the coating liquid of the second layer is applied.

Similarly, in the case of a roll coater, it is considered that the coating liquid can be overcoated by providing a plurality of rollers, but when the second layer coating liquid is applied, one layer is applied. Since the roller is pressed against the surface of the first coating film to form the second coating film, in the case of the first coating film which has not been sufficiently dried,
The pressure of the roller crushes the coating film of the first layer,
There is a drawback that the quality of the coating film is deteriorated because the coating films of the layers are mixed with each other and the film thickness of each coating film is not uniform. Therefore, conventionally, there has been no fluid coating device such as a spin coater having a plurality of discharge nozzles or a roll coater having a plurality of rollers.

Therefore, in a manufacturing process of a color liquid crystal display panel, for example, as shown in FIG. 12, a coating line 142A including a coating device 141a for forming a black matrix on the surface of a glass substrate and a red filter are formed. Line 14 including a coating device 141b for
2B and coating device 141 for forming a green filter
A coating line 142C including c and a coating line 142D including a coating device 141d for forming a blue filter are arranged in parallel, and each coating line 142A.
In 142D, a black matrix or filters of respective colors are sequentially formed. Therefore, a cleaning device, a mask aligner or the like is required for each of the coating lines 142A to 142D, which causes a problem that the equipment cost is high and the area occupied by the equipment is large.

The present invention has been made in view of the above-mentioned drawbacks of the conventional examples, and an object of the present invention is to easily switch the coating liquids and to enable a fluid coating device capable of overcoating. To provide.

[0009]

A fluid application device of the present invention comprises a fluid injection port for injecting a fluid, a cavity for diffusing the fluid injected from the fluid injection port in the width direction, A fluid coating device having a coating head in which a slot for allowing a fluid in a hollow portion to have a constant thickness and flowing out, is provided, wherein at least two coating heads are provided.

[0010]

In the present invention, since a plurality of coating heads are provided, if different fluids are supplied to each coating head, the type of fluid can be easily changed by selecting the coating head to be used. be able to. Therefore, it is possible to save the trouble of cleaning the coating head each time the fluid is changed, and to save the trouble of setup change when changing the type of fluid.

Further, since two or more coating heads are provided, the fluids of different types can be repeatedly coated by successively coating different kinds of fluids onto the surface of the coating object by different coating heads.

Moreover, this coating head is a coating head of the coating method by the slot coating method, and is not intended to make the film thickness of the fluid to a desired thickness on the surface of the coating object such as a spin coater or a roll coater. Since the fluid in the coating head is adjusted to have a uniform film thickness on the surface of the object to be coated, even if the fluid is repeatedly applied, the quality of the coating film will not be impaired. Multiple coating films and the like can be obtained.

[0013]

1 is a perspective view showing the external appearance of a fluid applying apparatus A according to an embodiment of the present invention. This fluid applying device A is
A cabinet 2 having a door 3 and an apparatus main body 1 are provided. A tank and a controller for accumulating a coating liquid are stored in the cabinet 2, and the apparatus main body 1 is installed on the cabinet 2. The apparatus main body 1 mainly includes a feed mechanism unit 21 that horizontally feeds the coating target object, and two coating mechanism units 51a and 51b that coat the surface of the coating target object fed by the feeding mechanism unit 21 with the coating liquid.
Measuring head 81 for measuring the plate thickness of the object to be coated immediately before coating
It consists of and. Further, on the front surface of the apparatus main body 1, there is provided an operation unit 4 in which a display panel, dials, meters, various switches and the like are concentrated. The upper part of the apparatus main body 1 can be covered with an openable / closable cover 5.

The feed mechanism portion 21 sucks the coating object 11 such as a glass substrate and conveys it horizontally at a constant speed, and its structure will be described in detail with reference to the sectional view of FIG. A pair of parallel guide rails 23 are provided on the upper surface of the base 22 and 4 provided on the lower surface of the table 24.
One slider 25 is slidably supported by a guide rail 23, and the table 24 runs smoothly along the guide rail 23. Further, a male screw shaft 26 is arranged in parallel with the guide rail 23 in the center of the base 22, and both ends of the male screw shaft 26 are rotatably supported by the base 22 via angular bearings 27. A female screw tube 28 fixed to the lower surface of 24 and a male screw shaft 26 are screwed together to form a ball screw mechanism. A servo motor 29 is fixed to the end of the base 22.
The output shaft of is connected to the male screw shaft 26 via a joint 30. Therefore, the table 24 can be moved at a constant speed along the guide rail 23 by rotating the male screw shaft 26 at a constant rotation speed by the servo motor 29. In this embodiment, the table 24
Although the servo motor 29 is used as the power for moving the table 24, when a flammable coating liquid is used, the table 24 may be moved by a non-electrical means such as an air mechanism.

The table 24 has a large number of vacuum suction holes 3
The suction plate 32 having the holes 1 is placed on the table body 33, and a vacuum chamber 34 is formed between the suction plate 32 and the table body 33. Then, the air in the vacuum chamber 34 is exhausted to make the inside of the vacuum chamber 34 a vacuum or a negative pressure so that the lower surface of the coating object 11 such as the glass substrate placed on the suction plate 32 is sucked. Thus, the object 11 to be coated can be fed at a constant speed together with the table 24. At this time, the table 24 also has an effect of correcting the warp of the application target 11 by adsorbing the application target 11. Also,
A detachable pin and an alignment pin (not shown) are housed in the table 24. After the inside of the vacuum chamber 34 is opened to normal pressure, the detachable pin is removed from the pin projecting hole 35 of the suction plate 32. By projecting, the lower surface of the coating object 11 is pushed up, and the coating object 11
Can be forcibly peeled from the table 24.

The two coating mechanism parts 51a and 51b are driven independently of each other, and as shown in FIG. It is provided in. FIG. 3 is a diagram showing the coating mechanism parts 51a and 51b in detail from the side. In any of the coating mechanism parts 51a and 51b, the coating arms 54a and 54b are horizontally mounted between the upper ends of a pair of lifting rods 53 which are held by the lifting holder 52 so as to be slidable up and down. Application heads 55a and 55b are fixed to the front surface or the back surface.
The elevating holder 52 is fixed to a shelf portion 56 projecting laterally from the base 22, and air cylinders 57a and 57b are installed directly below the elevating rod 53, so that the air cylinder 5
The upper end surface of the output shaft 58 of 7a, 57b faces the lower end surface of the lifting rod 53. Reference numeral 60 is a bellows that covers the lifting rod 53. Therefore, when the output shafts 58 of the air cylinders 57a and 57b are projected upward and the lower end surface of the elevating rod 53 is pushed up, the coating arms 55a and 54b as well as the coating heads 55a and 55b rise. When the output shafts 58 of the air cylinders 57a and 57b are retracted downward, the coating heads 55a and 55b descend together with the output shafts 58 due to their own weight.

Further, numerical control type linear actuators 61 are installed directly below the coating nozzles 55a and 55b or the coating arms 54a and 54b, respectively. The linear actuator 61 is connected to a motor 63 such as a servo motor or a pulse motor via a joint 62. When the input shaft 64 on the bottom surface is rotated by the motor 63, the stopper rod 65 on the top surface projects upward. Moreover, each linear actuator 61 has a screw mechanism inside, and the stopper rod 65 projects by a distance proportional to the rotation speed of the input shaft 64. Then, when the stopper rod 65 of the linear actuator 61 projects, when the output shafts 58 of the air cylinders 57a and 57b are retracted and the coating heads 55a and 55b are lowered, the coating heads 55a and 55b or the coating arms 54a and 5b.
At the moment when the lower surface of 4b abuts on the upper end of the stopper rod 65, the lower end surface of the elevating rod 53 becomes the air cylinders 57a, 5a.
7b is separated from the output shaft 58 and each coating head 5 is placed at that position.
5a and 55b are supported and positioned by the linear actuator 61.

The protrusion distance of the stopper rod 65 of the linear actuator 61 is controlled by the output of the measuring head 81. That is, when the measuring head 81 measures the plate thickness of the coating object 11, the coating heads 55a and 55b
The protrusion length of the stopper rod 65 of each linear actuator 61 is set so as to support and position the coating heads 55a and 55b at a position where the gap between the coating object 11 and the coating object 11 is an optimum distance (for example, several tens of microns to several hundreds of microns). Can be decided

A measuring head 81 for detecting the plate thickness of the coating object 11 is provided at the center of a measuring arm 82 arranged in parallel with the coating arms 54a and 54b. As the measuring head 81, a non-contact type and non-electric measuring means such as an air micrometer is preferable, but a linear scale may be used, and an electric sensor may be used when a non-flammable coating solution is used. Alternatively, an optical sensor, a contact sensor, or the like may be used depending on the application target 11.

FIG. 4 shows a sectional view of the coating heads 55a and 55b. This has a structure for preventing the coating film from being thin at the central portion and thick at both end portions in the width direction. The coating heads 55a and 55b are composed of two divided heads 101 and 102 and one shim 103, and a front view and an exploded perspective view from the inner surface side of these are shown in FIGS. . One split head 10
On the inner wall surface of No. 1, as shown in FIG. 5, a fluid reservoir 104 having a hollow shape is provided across the left and right. The fluid reservoir 104 is horizontally recessed inward from the inner wall surface of the split head 101, and the coating solution injection port 105 is bored from the upper surface of the split head 101 toward the center of the fluid reservoir 104. Further, the coating liquid discharge port 106 is bored from the upper surface of the divided head 101 toward both ends of the fluid reservoir 104. The other split head 102
Has a protruding portion 107 for positioning which protrudes from the upper edge of the inner wall surface, and the divided head 10 facing this protruding portion 107.
When the coating head 55a,
The two divided heads 101 and 102 can be aligned with each other when the 55b is assembled. The inner wall surface of the divided head 102 is formed flat except for the through holes 108. Further, a tapered portion 109 having a triangular cross-section is projected over the entire width of the left and right sides on the inner wall side edges of the lower surfaces of the split heads 101 and 102, and a fluororesin 110 such as polytetrafluoroethylene (PTFE) is formed on the entire lower surface. It is coated. The shim 103 is a thin metal plate, and has leg pieces 111 at both ends thereof, and notch-shaped recesses 112 are formed between the leg pieces 111.

Therefore, as shown in FIG. 6, the divided heads 101, 101 are formed by sandwiching the shim 103 between the inner wall surfaces.
102, a split head 102 and a shim 103.
The bolt 114 inserted through the through holes 108 and 113 of the
The application heads 55a and 55b as shown in FIG. In the coating heads 55a and 55b assembled in this manner, the shim 103
The split heads 101, 102
A slot 116 for shaping the coating liquid is formed between the inner wall surfaces of the coating heads, and the lower ends of the slots 116 have coating heads 55a and 55b.
The lower surface opens as a nozzle opening 117, and the fluid reservoir 10
The opening of slot 4 faces the upper end of slot 116, and slot 1
16 It communicates with the inside.

FIG. 7 is a view showing a coating liquid supply means for supplying the coating liquids 12a and 12b to the coating heads 55a and 55b. The coating liquids 12a and 12b are respectively stored in airtight tanks 119a and 119b, and the liquid supply pipe 121 is provided between the coating liquid inlet 105 of the coating heads 55a and 55b and the lower portions inside the tanks 119a and 119b.
The liquid supply pipe 121 is provided with an opening / closing valve 122 and a flow rate adjusting valve 123. Alternatively, instead of the flow rate adjusting valve 123, the pump 120
An air regulator 124 may be provided on the exhaust side.
Since the tanks 119a and 119b are pressurized by the pump 120, the application of the coating liquids 12a and 12b can be started or stopped by opening and closing the opening / closing valve 122. In addition, the coating liquids 12a, 1
The supply amount of 2b to the coating heads 55a and 55b can be adjusted by the flow rate adjusting valve 123 or the air regulator 124. Then, when the open / close valve 122 is opened, the coating liquid 12 in the tanks 119a and 119b is opened.
a and 12b are from the coating liquid injection port 105 to the fluid reservoir 10
4, the coating liquids 12a and 12b fill the fluid reservoir 104 and spread over the entire width of the fluid reservoir 104. Further, the coating liquids 12a and 12b flow out from the fluid reservoir 104 into the slots 116 by the supply pressure, are adjusted to have a uniform film thickness in the slots 116, and flow out from the nozzle openings 117 at the lower end as the coating liquids 12a and 12b having a uniform film thickness. Then, a film is formed on the surface of the coating object 11. Here, there is a fixed relationship between the flow rate of the coating liquid 12 and the feed speed of the coating object 11, and the feed speed of the coating object 11 is larger than the flow rate (ejection speed) of the coating liquid 12. . Therefore, the coating liquid 12 having a uniform film thickness ejected from the nozzle port 117 is thinly spread when being applied to the surface of the object 11 to be coated, and is even thinner than the film thickness given by the slot 116. Coating film is formed on the surface of the coating object 11.

The coating liquid discharge ports 106 of the coating heads 55a and 55b are connected to a recovery tank 128 by a liquid discharge pipe 127, and the liquid discharge pipe 127 is provided with an opening / closing valve 125 and a flow rate adjusting valve 126. ing. When the opening / closing valve 125 is opened while the pump 124 is operating, the coating liquids 12a and 12b in the fluid reservoir 104 are forcibly discharged from the coating liquid discharge port 106,
The coating liquids 12a and 12 discharged from the fluid reservoir 104
b is recovered in the liquid recovery tank 128. The discharge rate of the coating liquids 12a and 12b can be adjusted by the flow rate adjusting valve 126. As a result, the liquid pressures of the coating liquids 12a and 12b at both ends in the fluid reservoir 104 are lowered, so that a pressure loss is generated in the central portion of the slot 116, so that the distribution of the liquid pressure becomes substantially uniform, and the coating liquid is applied. Coating liquids 12a, 1 from the liquid discharge port 106
By adjusting the discharge speed of 2b, the coating head 55
The film thickness of the coating film applied to the surface of the application target 11 from a and 55b can be made uniform in the width direction.

FIG. 8 shows the structure of the coating head drying preventers 91a and 91b provided near the coating heads 55a and 55b. This coating head drying prevention device 91a, 9
1b is a beam 9 for preventing drying between a pair of rotating arms 92.
3, the wetting groove 94 having a V-shaped cross section for accommodating the nozzle openings 117 of the coating heads 55a and 55b is provided on the upper surface of the anti-drying beam 93. The bottom surface of the groove 94 is provided with one or a plurality of outlets 95. The coating head dry preventers 91a and 91b are rotatably supported by a dry preventer supporting portion 96 at the base end portion of a rotating arm 92, and the coater head dry preventers 91a and 91b have an angle of about 180 degrees. It can be rotated with. In addition, the air outlets 95 of the coating head drying preventers 91a and 91b and the closed tank 97 are also provided.
Are connected to each other by a flexible tube 98, and an organic solvent 100 such as thinner is placed in the closed tank 97.
A container 99 in which is stored is stored, and air is sent into the closed tank 97. Then, when air is sent into the closed tank 97, vaporized gas volatilized from the organic solvent 100 in the container 99 rides on the air and the coating head drying prevention device 9
1a, 91b, the organic solvent 1 from the outlet 95
00 vaporized gas is blown out. Therefore, by coating the nozzle openings 117 of the coating heads 55a and 55b in the standby state with the coating head drying preventers 91a and 91b, it is possible to prevent the coating liquids 12a and 12b from being dried.

9 (a), (b), (c) and (d) are explanatory views showing a coating operation by the fluid coating apparatus A. First,
When the coating object 11 is supplied onto the table 24, the coating object 11 is attracted to the table 24 and fixed on the upper surface of the table 24. As shown in FIG. 9A, when the coating object 11 fixed to the table 24 is fed below the measuring head 81 by the feeding mechanism section 21, the plate thickness of the coating object 11 by the measuring head 81 ( Alternatively, variation in plate thickness) is measured. When the plate thickness is measured, the descending positions of the coating heads 55a and 55b are determined, and the protruding length of each stopper rod 65 for stopping the coating heads 55a and 55b at that position is calculated. Next, the stopper rod 65 of each linear actuator 61 projects by a calculated amount, the output shaft 58 of the air cylinders 57a and 57b retracts, both coating heads 55a and 55b descend, and the lowered coating heads 55a and 55b stop. As shown in FIG. 9B, the nozzle openings 117 of the coating heads 55a and 55b are positioned at positions facing the surface of the object 11 to be coated with a minute distance, respectively. When the coating start point of the coating object 11 reaches the nozzle opening 117, each coating nozzle 55
a and 55b, the on-off valves 122 and 125 are opened to supply the coating liquids 12a and 12b into the fluid reservoir 104, and at the same time, the coating liquids 12a and 12b inside the fluid reservoir 104.
Part of each slot 1 is collected from the coating liquid outlet 106, and each slot 1
Coating liquids 12a, 12 adjusted to a constant film thickness by 16
b is made to flow out from the nozzle opening 117, and the surface of the coating object 11 being fed at a constant speed is coated with the coating liquids 12a and 12b. That is, as shown in FIG. 9C, the surface of the coating object 11 is coated with the first layer coating liquid 12a,
Next, the second layer coating liquid 12 is applied on the first layer coating liquid 12a.
b is applied. At this time, the coating head 55b does not contact the coating film of the first layer, and the coating liquid 12a adjusted to have a constant film thickness by the slot 116 is applied to the coating liquid 1 of the first layer.
Since it is simply placed on top of 2a, a wet coating liquid 12
It is possible to obtain a uniform two-layer coating without causing the first and second coatings to be crushed even if they are the same. When the application is completed in this way, FIG.
As shown in (d), the coating heads 55a and 55b are again raised by the air cylinders 57a and 57b, and the coating object 11 on the table 24 is separated from the table 24 by the attachment / detachment pins and is carried out.

Further, in FIG. 9C, two coating heads 5 are provided.
5a and 55b were used at the same time, as shown in FIGS. 10A and 10B, if only one of the coating heads 55a or 55b is lowered to perform the coating operation, the coating liquid 12a or It is also possible to apply only one of the coating liquids 12b to the coating object 11. Therefore, when changing the type of the coating liquid, it is possible to omit setup changes such as cleaning the coating heads 55a and 55b. Furthermore, if the first layer coating liquid 12a is applied to the object to be coated 11 and dried, and then the second layer coating liquid 12b is applied on the dried first layer coating film, two steps are performed. A two-layer coating film can be formed separately.

FIG. 11 shows the above fluid applying device A.
FIG. 3 is a schematic plan view showing a coating line B for forming a coating film applied by means of a photolithography technique into a predetermined pattern, which is a cleaning machine 131, a fluid coating device A, a prebaking device 132, a mask aligner 133. The developing / rinsing processing device 134 and the post-baking device 135 are annularly arranged, and a loader 136 and an unloader 137 are installed at the loading / unloading position of the coating object 11. Thus, for example, in the case of applying the coating liquids 12a and 12b such as photoresist to the coating object 11 in two colors,
The coating object 11 is sent to the cleaning machine 131 by the loader 136, and the surface of the coating object 11 is cleaned with a solvent, pure water, or the like to remove dust and dirt from the surface. Then, as shown in FIG. 9, the coating liquids 12a and 1a are applied to the surface of the coating object 11.
Apply 2b. The applied coating liquids 12a and 12b are pre-baked by a pre-baking device 132 and dried, and then exposed to a predetermined pattern by a mask aligner 133. Thereafter, the exposed coating film is developed and rinsed by the developing / rinsing processing device 134, the first and second coating films are patterned into a predetermined pattern, and post-baking is performed by the post-baking device 135 to be cured. In this way, when the processing is completed, the coating object 11 is carried out to the outside by the unloader 137.

When the first layer coating film and the second layer coating film have different etching patterns, first, the cleaning machine 13 is used.
The coating liquid 11a of the first layer is applied to the coating object 11 washed in step 1 by the coating head 55a of the fluid coating apparatus A, prebaked, and then the first layer coating film is applied by the mask aligner 133 and the developing / rinsing processing device 134. Is patterned and post-baked. After the coating object 11 on which the first-layer coating film is formed is washed again by the washing machine 131,
The coating head 55b of the fluid coating apparatus A applies the second layer coating liquid 12b on the first layer coating film. Next, after pre-baking the coating object 11, the second aligning film is patterned by the mask aligner 133 and the developing / rinsing processing device 134, and post baking is performed to dry the second coat, and the unloader 137 is used. Carry out to the outside. Here, the fluid coating device A has two coating heads 55.
The case of forming a two-layer coating film on the surface of the coating object 11 by using the coating heads 55a and 55b has been described. However, four coating heads are provided, and a black matrix and a red filter are provided by each coating head. By forming the green filter and the blue filter, it is possible to configure a part of the manufacturing process of a compact color liquid crystal display panel.

The fluid applying apparatus according to the present invention is not limited to the above embodiment, and various embodiments other than the above embodiment are possible. For example, in the above embodiment, the coating liquid is applied to the upper surface of the coating object that is being conveyed horizontally, but the coating head is disposed on the lower surface side or the side surface side of the coating target, Alternatively, the coating liquid may be applied to the side surface. It is also possible to dispose the coating heads on both sides of the object to be coated and simultaneously apply the coating liquid to, for example, the upper surface and the lower surface of the object to be coated. Further, the type of the coating object is not particularly limited, and the surface is not particularly limited to the one having a smooth surface, and the fluid coating device of the present invention may be a coating object such as a printed wiring board having a copper pattern wiring formed thereon. Can be used. The type of fluid to be applied is not limited to a liquid, and any fluid having a fluidity such as slurry, powder, liquid emulsion may be used.

[0030]

According to the present invention, if different fluids are supplied to each coating head, the type of coating film can be easily changed by selecting the coating head to be used.
Therefore, it is possible to save the trouble of cleaning the coating head each time the type of fluid is changed, and to save the time and effort for setup change when changing the type of fluid. Moreover, since two or more coating heads are provided, multiple coating and multicolor coating of fluids are possible by sequentially coating different fluids from different coating heads onto the surface of the coating object.

Moreover, this coating head is not a coating head of a coating system based on the slot coating method, and is not intended to make the film thickness of the fluid uniform on the surface of the coating object such as a spin coater or a roll coater. Since the fluid in the coating head is adjusted to have a uniform film thickness on the surface of the object to be coated, even if the fluid is repeatedly applied, the quality of the coating film will not be impaired. Multiple coatings can be obtained.

Further, since one fluid coating device can perform multiple coating, it is possible to simplify the equipment for multiple coating such as for a color liquid crystal display panel and reduce the equipment cost. You can Further, since the coating equipment can be integrated, the installation space can be made compact, and a fluid coating device that is effective especially in a small-scale line can be manufactured.

[Brief description of drawings]

FIG. 1 is an external perspective view showing a fluid application device according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a feeding mechanism portion in the above fluid applying apparatus.

FIG. 3 is a side view showing a coating mechanism section and a measuring head in the above fluid coating apparatus.

FIG. 4 is a cross-sectional view of a coating head in the coating mechanism section of the above.

FIG. 5 is a front view showing each component of the above coating head.

FIG. 6 is an exploded perspective view of the coating head of the above.

FIG. 7 is a schematic view showing a means for supplying a coating liquid to the coating head of the above.

FIG. 8 is a schematic cross-sectional view showing the coating head drying preventer of the above.

9 (a), (b), (c), and (d) are operation explanatory views of the fluid applying apparatus of the above.

10 (a) and 10 (b) are explanatory views showing another operation of the above fluid applying apparatus.

FIG. 11 is a schematic plan view showing a coating line including the above fluid coating device.

FIG. 12 is a schematic plan view showing a part of a conventional production line for a color liquid crystal display panel.

[Explanation of symbols]

 12a, 12b coating liquid 55a, 55b coating head 104 fluid reservoir (cavity) 105 coating liquid inlet (fluid inlet) 116 slot

Claims (1)

[Claims] 1. A fluid injection port for injecting a fluid, a cavity for diffusing the fluid injected from the fluid injection port in the width direction, and a fluid in the cavity part having a constant thickness to flow out. And a slot for use in the application head, the fluid application apparatus comprising at least two application heads.