JPH0632873Y2 - 自動シリコン塗布装置 - Google Patents

自動シリコン塗布装置

Info

Publication number
JPH0632873Y2
JPH0632873Y2 JP1989112654U JP11265489U JPH0632873Y2 JP H0632873 Y2 JPH0632873 Y2 JP H0632873Y2 JP 1989112654 U JP1989112654 U JP 1989112654U JP 11265489 U JP11265489 U JP 11265489U JP H0632873 Y2 JPH0632873 Y2 JP H0632873Y2
Authority
JP
Japan
Prior art keywords
coating
nozzle
silicon
discharge
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989112654U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354774U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
充 山田
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP1989112654U priority Critical patent/JPH0632873Y2/ja
Publication of JPH0354774U publication Critical patent/JPH0354774U/ja
Application granted granted Critical
Publication of JPH0632873Y2 publication Critical patent/JPH0632873Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Nozzles (AREA)
JP1989112654U 1989-09-26 1989-09-26 自動シリコン塗布装置 Expired - Lifetime JPH0632873Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989112654U JPH0632873Y2 (ja) 1989-09-26 1989-09-26 自動シリコン塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989112654U JPH0632873Y2 (ja) 1989-09-26 1989-09-26 自動シリコン塗布装置

Publications (2)

Publication Number Publication Date
JPH0354774U JPH0354774U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-27
JPH0632873Y2 true JPH0632873Y2 (ja) 1994-08-31

Family

ID=31661097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989112654U Expired - Lifetime JPH0632873Y2 (ja) 1989-09-26 1989-09-26 自動シリコン塗布装置

Country Status (1)

Country Link
JP (1) JPH0632873Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719999B1 (ko) * 2005-12-09 2007-05-21 두영전자 주식회사 실리콘 도포장치 및 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63193545U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-05-30 1988-12-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100719999B1 (ko) * 2005-12-09 2007-05-21 두영전자 주식회사 실리콘 도포장치 및 방법

Also Published As

Publication number Publication date
JPH0354774U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-27

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