JPH0632689Y2 - ウエーハバスケット - Google Patents

ウエーハバスケット

Info

Publication number
JPH0632689Y2
JPH0632689Y2 JP15024389U JP15024389U JPH0632689Y2 JP H0632689 Y2 JPH0632689 Y2 JP H0632689Y2 JP 15024389 U JP15024389 U JP 15024389U JP 15024389 U JP15024389 U JP 15024389U JP H0632689 Y2 JPH0632689 Y2 JP H0632689Y2
Authority
JP
Japan
Prior art keywords
wafer
handle
wafer basket
side wall
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15024389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0390446U (enrdf_load_stackoverflow
Inventor
直樹 内藤
直之 高松
俊雄 石川
和則 越川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Dainichi Shoji KK
Original Assignee
Shin Etsu Handotai Co Ltd
Dainichi Shoji KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd, Dainichi Shoji KK filed Critical Shin Etsu Handotai Co Ltd
Priority to JP15024389U priority Critical patent/JPH0632689Y2/ja
Publication of JPH0390446U publication Critical patent/JPH0390446U/ja
Application granted granted Critical
Publication of JPH0632689Y2 publication Critical patent/JPH0632689Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP15024389U 1989-12-28 1989-12-28 ウエーハバスケット Expired - Lifetime JPH0632689Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15024389U JPH0632689Y2 (ja) 1989-12-28 1989-12-28 ウエーハバスケット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15024389U JPH0632689Y2 (ja) 1989-12-28 1989-12-28 ウエーハバスケット

Publications (2)

Publication Number Publication Date
JPH0390446U JPH0390446U (enrdf_load_stackoverflow) 1991-09-13
JPH0632689Y2 true JPH0632689Y2 (ja) 1994-08-24

Family

ID=31696602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15024389U Expired - Lifetime JPH0632689Y2 (ja) 1989-12-28 1989-12-28 ウエーハバスケット

Country Status (1)

Country Link
JP (1) JPH0632689Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0390446U (enrdf_load_stackoverflow) 1991-09-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term