JPH0632687Y2 - シリコンウエハ用バスケット - Google Patents

シリコンウエハ用バスケット

Info

Publication number
JPH0632687Y2
JPH0632687Y2 JP1984148515U JP14851584U JPH0632687Y2 JP H0632687 Y2 JPH0632687 Y2 JP H0632687Y2 JP 1984148515 U JP1984148515 U JP 1984148515U JP 14851584 U JP14851584 U JP 14851584U JP H0632687 Y2 JPH0632687 Y2 JP H0632687Y2
Authority
JP
Japan
Prior art keywords
wafer
side wall
ribs
basket
silicon wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984148515U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6163840U (OSRAM
Inventor
武美 柿崎
Original Assignee
株式会社柿崎製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社柿崎製作所 filed Critical 株式会社柿崎製作所
Priority to JP1984148515U priority Critical patent/JPH0632687Y2/ja
Publication of JPS6163840U publication Critical patent/JPS6163840U/ja
Application granted granted Critical
Publication of JPH0632687Y2 publication Critical patent/JPH0632687Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Weting (AREA)
JP1984148515U 1984-10-02 1984-10-02 シリコンウエハ用バスケット Expired - Lifetime JPH0632687Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984148515U JPH0632687Y2 (ja) 1984-10-02 1984-10-02 シリコンウエハ用バスケット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984148515U JPH0632687Y2 (ja) 1984-10-02 1984-10-02 シリコンウエハ用バスケット

Publications (2)

Publication Number Publication Date
JPS6163840U JPS6163840U (OSRAM) 1986-04-30
JPH0632687Y2 true JPH0632687Y2 (ja) 1994-08-24

Family

ID=30706721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984148515U Expired - Lifetime JPH0632687Y2 (ja) 1984-10-02 1984-10-02 シリコンウエハ用バスケット

Country Status (1)

Country Link
JP (1) JPH0632687Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2897549B1 (fr) 2006-02-20 2009-02-06 Air Liquide Procede de fabrication de tubes remplis de poudres, tels des fils fourres de soudage

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147436A (en) * 1980-04-18 1981-11-16 Hitachi Ltd Jig carrier

Also Published As

Publication number Publication date
JPS6163840U (OSRAM) 1986-04-30

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