JPH06325419A - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JPH06325419A
JPH06325419A JP11156893A JP11156893A JPH06325419A JP H06325419 A JPH06325419 A JP H06325419A JP 11156893 A JP11156893 A JP 11156893A JP 11156893 A JP11156893 A JP 11156893A JP H06325419 A JPH06325419 A JP H06325419A
Authority
JP
Japan
Prior art keywords
layer
magneto
film
recording medium
artificial lattice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11156893A
Other languages
Japanese (ja)
Inventor
Isao Moriya
勲 森谷
Tsutomu Takahata
努 高畑
Akio Kondo
昭夫 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tosoh Corp
Original Assignee
Tosoh Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tosoh Corp filed Critical Tosoh Corp
Priority to JP11156893A priority Critical patent/JPH06325419A/en
Publication of JPH06325419A publication Critical patent/JPH06325419A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a satisfactory magneto-optical recording medium having a large angle of Kerr rotation and high perpendicular magnetic anisotropy by disposing an artificial lattice film formed by alternately laminating prescribed metallic layers. CONSTITUTION:When a dielectric layer 2, an artificial lattice film 3, a dielectric layer 4 and a reflecting film 5 are laminated on a transparent substrate 1 to obtain a magneto-optical recording medium, the film 3 is formed by grouping a Co layer of 1-5Angstrom thickness, an Ni layer of 1-8Angstrom thickness and a Pt layer of 4-20Angstrom thickness and laminating plural such groups. The objective magneto- optical recording medium capable of maintaining a large angle of Kerr rotation in a short wavelength region peculiar to a Co/Pt artificial lattice and having a moderate Curie temp. and high perpendicular magnetic anisotropy is obtd.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光を用い情報の記録、再
生、消去を行う光磁気記録媒体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magneto-optical recording medium for recording, reproducing and erasing information by using light.

【0002】[0002]

【従来の技術】光磁気記録媒体を高密度化する手段の一
つとして、記録再生に短波長の光源を用いる方法があ
り、このような方法に用いる媒体として、短波長域で大
きな磁気光学効果を示す、Co層とPt層を交互に積層
した人工格子膜を用いた光磁気記録媒体が提案されてい
る。しかしながら、このような媒体に用いられる膜は大
きなカー回転角を示す組成領域ではキュリー温度が高
く、記録パワーの増大や媒体の耐久性が低下するという
問題点があった。
2. Description of the Related Art As one of means for increasing the density of a magneto-optical recording medium, there is a method of using a light source of short wavelength for recording / reproducing. As a medium used in such a method, a large magneto-optical effect is obtained in a short wavelength region. , A magneto-optical recording medium using an artificial lattice film in which Co layers and Pt layers are alternately laminated has been proposed. However, a film used for such a medium has a problem that the Curie temperature is high in a composition region showing a large Kerr rotation angle, the recording power is increased and the durability of the medium is lowered.

【0003】この問題点を解決する為にCo層に第三成
分を添加して得たCo合金とPtからなる人工格子膜が
検討されている(橋本、落合、1990年度日本応用磁
気学会学術講演概要集67ページ)。
In order to solve this problem, an artificial lattice film composed of Co alloy and Pt obtained by adding a third component to the Co layer has been studied (Hashimoto, Ochiai, 1990 Japan Society for Applied Magnetics Science). Summary page 67).

【0004】しかしこの様な第三成分を添加して構成し
た人工格子膜は、キュリー温度はある程度低下するもの
の、その低下にともない垂直磁気異方性も低下するとい
う問題点がある。
However, the artificial lattice film formed by adding such a third component has a problem that although the Curie temperature is lowered to some extent, the perpendicular magnetic anisotropy is also lowered with the decrease.

【0005】[0005]

【発明が解決しようとする課題】本発明の目的は、大き
な垂直磁気異方性と、大きなカー回転角、及び適度なキ
ュリー温度を有する人工格子膜を用いた、良好な光磁気
記録再生特性を有する光磁気記録媒体を提供することに
ある。
An object of the present invention is to obtain good magneto-optical recording / reproducing characteristics using an artificial lattice film having a large perpendicular magnetic anisotropy, a large Kerr rotation angle, and an appropriate Curie temperature. Another object is to provide a magneto-optical recording medium having the same.

【0006】[0006]

【課題を解決するための手段】本発明者らは上記した点
に鑑み鋭意研究を重ねた結果、Co、Ni、Ptの3層
を1組(1積層周期)とする人工格子膜を複数組積層し
た膜は、良好な垂直磁気異方性と大きなカー回転角を保
持したままキュリー温度を低下させることができること
を見出だした。
Means for Solving the Problems As a result of intensive studies conducted by the present inventors in view of the above points, a plurality of artificial lattice films having three layers of Co, Ni, and Pt (one lamination period) are formed. It has been found that the laminated films can lower the Curie temperature while maintaining good perpendicular magnetic anisotropy and a large Kerr rotation angle.

【0007】即ち本発明は、少なくとも情報記録読み出
し層が、Co層とNi層とPt層の3層を1組として、
複数組積層した人工格子膜からなることを特徴とする光
磁気記録媒体に関する。以下、本発明を更に詳細に説明
する。
That is, according to the present invention, at least the information recording / reading layer comprises three layers of Co layer, Ni layer and Pt layer as one set,
The present invention relates to a magneto-optical recording medium comprising a plurality of artificial lattice films laminated. Hereinafter, the present invention will be described in more detail.

【0008】本発明は、上記したCo、Ni、Ptの3
層構造の人工格子膜からなることが特徴であるが、夫々
の層の層厚は、Co層が1〜5A、Ni層が1〜8A、
Pt層が4〜20Aの範囲が好適である。各層の厚さを
上記した範囲外に変化させても、例えばCo層厚が5A
より厚い場合、積層した膜のキュリー温度が高くなり過
ぎ、又、Ni層厚が8Aより厚い場合、垂直磁気異方
性、言い換えれば保磁力が低下し、微小ビットの記録が
困難になる。又、Pt層厚が20Aを越えるとカー回転
角が不十分であり、同じく4A未満では角型比の低下や
キュリー温度の上昇により良好な記録再生特性が得られ
ず、本発明の効果が十分に得られない。
The present invention is based on the above-mentioned Co, Ni and Pt 3
It is characterized in that it is made of an artificial lattice film having a layered structure, but the layer thickness of each layer is 1 to 5 A for the Co layer, 1 to 8 A for the Ni layer,
The Pt layer is preferably in the range of 4 to 20A. Even if the thickness of each layer is changed outside the above range, for example, the Co layer thickness is 5 A
When the thickness is thicker, the Curie temperature of the laminated film becomes too high, and when the thickness of the Ni layer is thicker than 8 A, the perpendicular magnetic anisotropy, in other words, the coercive force is lowered, and it becomes difficult to record a minute bit. On the other hand, if the Pt layer thickness exceeds 20 A, the Kerr rotation angle is insufficient, and if it is less than 4 A, good recording / reproducing characteristics cannot be obtained due to a decrease in squareness ratio and an increase in Curie temperature. Can't get to.

【0009】次に本発明を図面により更に説明する。図
1に、本発明の一実施態様の断面図を示した。図中1は
透明基板で、通常ガラス又は高分子材料からなる。2は
光の干渉効果により磁気光学効果を高めるための誘電体
層であり通常SiN、SiO、ZnS、ZnOなどを用
いる。3は本発明を特徴付ける人工格子膜で、Co層と
Ni層とPt層の3層を1組として少なくとも2組(2
周期)積層されたものである。
The present invention will now be further described with reference to the drawings. FIG. 1 shows a sectional view of one embodiment of the present invention. In the figure, 1 is a transparent substrate, which is usually made of glass or a polymer material. Reference numeral 2 is a dielectric layer for enhancing the magneto-optical effect due to the interference effect of light, and is usually made of SiN, SiO, ZnS, ZnO or the like. Reference numeral 3 is an artificial lattice film that characterizes the present invention, and at least two sets (2 sets) each including three layers of Co layer, Ni layer, and Pt layer
Cycle) stacked.

【0010】この場合、Co層、Ni層、Pt層の積層
の順序は特に制限されるものでなく、又、夫々の組(周
期)内の各層の積層順序も同一でなくても良い。しか
し、少なくともこの3層を1組(1周期)として構成さ
れており同種の金属が重複する状態で積層されなければ
よい。又、この人工格子膜の全体の厚さは、50〜30
0オングストローム程度である。
In this case, the order of stacking the Co layer, the Ni layer and the Pt layer is not particularly limited, and the order of stacking each layer in each set (cycle) may not be the same. However, it is sufficient that at least these three layers are configured as one set (one cycle), and the metals of the same type are not stacked in an overlapping state. The total thickness of this artificial lattice film is 50 to 30.
It is about 0 angstrom.

【0011】4はSiN、SiO、ZnS、ZnOなど
で代表される誘電体層、5は通常Alを主成分とする合
金が用いられる反射膜層である。上記した人工格子膜以
外の各層の厚さは、用いる光の波長等の記録再生条件に
よって適宜決められるものである。
Reference numeral 4 is a dielectric layer typified by SiN, SiO, ZnS, ZnO and the like, and 5 is a reflective film layer in which an alloy containing Al as a main component is usually used. The thickness of each layer other than the above-mentioned artificial lattice film is appropriately determined according to recording / reproducing conditions such as the wavelength of light used.

【0012】本発明の各層の基板への積層方法は特に制
限されるものではないが、スパッタリング法や真空蒸着
法等の通常の薄膜形成法が利用でき、その際の条件は特
に制限されない。さらに、該人工格子膜をオーバーライ
ト等の目的で希土類遷移金属膜やその他の磁性膜と磁気
的に結合させることも可能である。この場合、本発明を
構成する人工格子膜は情報記録読出し層として機能す
る。
The method of laminating each layer on the substrate of the present invention is not particularly limited, but a usual thin film forming method such as a sputtering method or a vacuum deposition method can be used, and the conditions therefor are not particularly limited. Further, the artificial lattice film can be magnetically coupled to a rare earth transition metal film or other magnetic film for the purpose of overwriting. In this case, the artificial lattice film constituting the present invention functions as an information recording / reading layer.

【0013】[0013]

【実施例】次に、実施例で本発明を更に詳述する。EXAMPLES Next, the present invention will be described in more detail with reference to Examples.

【0014】実施例 表1に示すように、カ−回転角がほぼ同じになるように
Co、Ni、Pt各層厚を制御し、同表のa〜cに示す
組成のCo/Ni/Pt人工格子を形成した。又、比較
のために、表2のd、eに従来型のCo/PtおよびC
o50Ni50/Pt人工格子の特性を示した。a〜d
の試料はCo、Ni、Ptの3つの単体ターゲットを同
時スパッタしながら、基板が各ターゲット上をCo、N
i、Ptの順に通過させるように回転させることで人口
格子膜を作成した。
Example As shown in Table 1, Co, Ni, and Pt layer thicknesses were controlled so that the car rotation angles were almost the same, and Co / Ni / Pt artificial materials having the compositions shown in a to c of the table were prepared. Formed a grid. For comparison, the conventional Co / Pt and C are shown in d and e of Table 2.
The characteristics of the o50Ni50 / Pt artificial lattice are shown. a-d
The sample of Co., Co, Ni, and Pt are simultaneously sputtered on three targets, and the substrate is Co, N
An artificial lattice film was prepared by rotating so as to pass i and Pt in this order.

【0015】eはCo50Ni50合金およびPt単体
ターゲットの同時スパッタを行い、基板が各ターゲット
上を交互に通過するように回転させることで人工格子膜
を作成した。全ての試料は強磁性体はDCマグネトロン
スパッタ、PtはRFマグネトロンスパッタ法を用いて
ガラス基板上に成膜し、総膜厚は約200オングストロ
ームに統一した。
For e, a Co50Ni50 alloy and a Pt simple substance target were simultaneously sputtered, and an artificial lattice film was formed by rotating the substrate so as to alternately pass over each target. For all samples, DC magnetron sputtering was used for the ferromagnetic material and RF magnetron sputtering was used for Pt to form a film on the glass substrate, and the total film thickness was unified to about 200 angstroms.

【0016】表1および表2に示す膜構成の各人工格子
層は、飽和磁化は約350emu/cc、400nm光
に対するカー回転角は約0.3度で、室温においてほぼ
同等の磁気および磁気光学特性を示した。
Each of the artificial lattice layers having the film structures shown in Tables 1 and 2 has a saturation magnetization of about 350 emu / cc and a Kerr rotation angle of about 0.3 degree for 400 nm light, and has substantially the same magnetic and magneto-optical properties at room temperature. Characterized.

【0017】表に示した結果から、本発明の人工格子膜
は、従来の膜で同等のカー回転角を示すCo/Pt人工
格子膜よりも低いキュリー温度をもちながらも大きな保
磁力を示すことが分かる。またCoNi合金層とPt層
とからなる人工格子膜とほぼ同程度のキュリー温度をも
ち、かつ大きな保磁力を示している。
From the results shown in the table, the artificial lattice film of the present invention shows a large coercive force while having a lower Curie temperature than the Co / Pt artificial lattice film having the same Kerr rotation angle as the conventional film. I understand. Further, it has a Curie temperature almost the same as that of the artificial lattice film composed of the CoNi alloy layer and the Pt layer, and shows a large coercive force.

【0018】以上示したとおりCo層とNi層とPt層
とを順次積層した人工格子膜を作成することによって従
来のCo/Pt人工格子膜のキュリー温度を低減し、保
磁力を向上させることができる。
As described above, it is possible to reduce the Curie temperature and improve the coercive force of the conventional Co / Pt artificial lattice film by forming the artificial lattice film in which the Co layer, the Ni layer and the Pt layer are sequentially laminated. it can.

【0019】[0019]

【表1】 [Table 1]

【0020】[0020]

【表2】 [Table 2]

【0021】[0021]

【発明の効果】本発明の記録媒体は、Co/Pt人工格
子の持つ短波長域での大きなカー回転角を同様に保持
し、さらに適度なキュリー温度および大きな垂直磁気異
方性を有した光磁気記録媒体であり、良好な記録再生特
性が期待できるものである。
The recording medium of the present invention similarly retains the large Kerr rotation angle in the short wavelength region of the Co / Pt artificial lattice, and further has an appropriate Curie temperature and a large perpendicular magnetic anisotropy. It is a magnetic recording medium and can be expected to have good recording and reproducing characteristics.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施態様の断面を示す図。FIG. 1 is a diagram showing a cross section of an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1:透明基板 2:誘電体層 3:Co層とNi層とPt層の交互積層からなる人工格
子膜 4:誘電体層 5:反射膜
1: Transparent substrate 2: Dielectric layer 3: Artificial lattice film consisting of alternating layers of Co layer, Ni layer and Pt layer 4: Dielectric layer 5: Reflective film

【手続補正書】[Procedure amendment]

【提出日】平成5年6月2日[Submission date] June 2, 1993

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0014[Correction target item name] 0014

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0014】実施例 表1に示すように、カ−回転角がほぼ同じになるように
Co、Ni、Pt各層厚を制御し、同表のa〜cに示す
組成のCo/Ni/Pt人工格子を形成した。又、比較
のために、表2のd、eに従来型のCo/PtおよびC
o50Ni50/Pt人工格子の特性を示した。a〜d
の試料はCo、Ni、Ptの3つの単体ターゲットを同
時スパッタしながら、基板が各ターゲット上をCo、N
i、Ptの順に通過させるように回転させることで人
格子膜を作成した。
Example As shown in Table 1, Co, Ni, and Pt layer thicknesses were controlled so that the car rotation angles were almost the same, and Co / Ni / Pt artificial materials having the compositions shown in a to c of the table were prepared. Formed a grid. For comparison, the conventional Co / Pt and C are shown in d and e of Table 2.
The characteristics of the o50Ni50 / Pt artificial lattice are shown. a-d
The sample of Co., Co, Ni, and Pt are simultaneously sputtered on three targets, and the substrate is Co, N
i, was created artificial <br/> lattice film by rotating so as to pass in the order of Pt.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】少なくとも情報記録読出し層が、Co層と
Ni層とPt層の3層を1組として、複数組積層した人
工格子膜からなることを特徴とする光磁気記録媒体。
1. A magneto-optical recording medium, wherein at least the information recording / reading layer comprises an artificial lattice film in which a plurality of sets of three layers of a Co layer, a Ni layer and a Pt layer are laminated.
【請求項2】Co層が1〜5オングストローム、Ni層
が1〜8オングストローム、Pt層が4〜20オングス
トロームの厚さである請求項1記載の光磁気記録媒体。
2. The magneto-optical recording medium according to claim 1, wherein the Co layer has a thickness of 1 to 5 angstroms, the Ni layer has a thickness of 1 to 8 angstroms, and the Pt layer has a thickness of 4 to 20 angstroms.
JP11156893A 1993-05-13 1993-05-13 Magneto-optical recording medium Pending JPH06325419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11156893A JPH06325419A (en) 1993-05-13 1993-05-13 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11156893A JPH06325419A (en) 1993-05-13 1993-05-13 Magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPH06325419A true JPH06325419A (en) 1994-11-25

Family

ID=14564681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11156893A Pending JPH06325419A (en) 1993-05-13 1993-05-13 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPH06325419A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6881497B2 (en) 2001-06-04 2005-04-19 Hitachi Global Storage Technologies Netherlands B.V. ‘Thermal spring’ magnetic recording media for writing using magnetic and thermal gradients
US8313847B2 (en) 2008-01-21 2012-11-20 Samsung Electronics Co., Ltd. Information storage devices using magnetic domain wall movement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6881497B2 (en) 2001-06-04 2005-04-19 Hitachi Global Storage Technologies Netherlands B.V. ‘Thermal spring’ magnetic recording media for writing using magnetic and thermal gradients
US8313847B2 (en) 2008-01-21 2012-11-20 Samsung Electronics Co., Ltd. Information storage devices using magnetic domain wall movement

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