JPH0631500A - Hot press - Google Patents

Abstract

PURPOSE:To highly precisely execute the multi-layer forming in the desirable pressure distribution by feeding back the variation of pressure distribution generated due to the deformation of a hot plate and a bolster to an auxiliary ram pressure. CONSTITUTION:A multi-layer substrate stock 39M is heated and pressurized with the surface pressure of 5-30kgf/cm<2> and the temperature of 170-250 deg.C under supplying the prescribed gas in the sealed space 31S. Bolsters 5, 7 and hot plates 13, 15, etc., of this state are deformed by receiving an external force of a pressurizing force 42, an adhering resin pressure reacting force 43, and a reacting force 44 of frame 2. Then, the varying amount is successively computed with a controller 30, the high pressure oil for requiring the absorption of deformation to the auxiliary ram 8, 9 inside a deformation absorbing mechanism composed of the bolsters 5, 7 and a buffer plate 11, and the most suitable surface pressure is applied on the multi-layer substrate stock 39M by applying the most suitable deformation to the buffer plate 11.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hot press used for manufacturing a multilayer substrate, and more particularly to a hot press suitable for forming a thin, high-density, high-quality multilayer substrate and reducing costs.

[0002]

2. Description of the Related Art As the density of multi-layer substrates manufactured by hot pressing has been increased, it has become necessary to have a high level of performance against warping, twisting and misalignment of the substrates. In order to meet this requirement, as disclosed in Japanese Patent Laid-Open No. 3-128195, between a hot plate that heats the material of the multilayer substrate and a bolster that presses the material of the multilayer substrate through the hot plate. Pressure distribution during bonding is achieved by applying heat evenly to the material through an insulating plate, enclosing the bolsters with a sealing means, creating a vacuum atmosphere until the adhesive softens and flows, and an air pressure added atmosphere during the curing stage. There is a uniform one.

As a means for correcting the convexity of the substrate thickness distribution due to the deformation of the heat insulating plate due to the pressure distribution at the time of adhering the substrates, an auxiliary ram is arranged in the bolster to absorb the concave amount of the heat insulating plate. Is proposed.

For example, in the rear of Japanese Patent Laid-Open No. 62-23731, it is introduced that the pressure distribution is detected by a buffer plate on a bolster, the hydraulic pressure of the auxiliary ram is adjusted, and uniform bonding is performed.

[0005]

If the pressure distribution of the adhesive substrate is accurately detected on the buffer plate in the vicinity of the auxiliary ram, the correction control of the auxiliary ram pressure to obtain the optimum pressure distribution is possible.
However, since there is a large error in the detected pressure due to the adhesive pressure through the heat insulating plate which is a porous material, and the temperature of the pressure detecting portion is 30 to 80 ° C even though the heat insulating plate is used for heat insulation.
There are many errors due to temperature variations.

In the low-pressure molding process such as molding by the air pressure addition method, it is possible to accurately comprehend the slight pressure distribution fluctuation caused by the deformation of the hot plate or the bolster and feed it back to the auxiliary ram oil to achieve the desired pressure distribution. It has been found that it is difficult and high precision multi-layer molding cannot be performed.

Therefore, the object of the present invention is to estimate the deformation of the hot plate, bolster, etc., which affects the pressure distribution, to perform the optimum pressure distribution control, and to form a high-density multilayer substrate with a high finish accuracy by voidlessness. It is to provide a hot press that can.

[0008]

In the hot press of the present invention which achieves the above object, the means for controlling the fluid pressure applied to the plurality of auxiliary rams are constituted by the pressure applied to the multilayer substrate material by both bolsters and the air pressure in the sealed space. And a means for calculating the fluid pressure to be applied to each auxiliary ram from the multiplying factor obtained from the means, the pressure applied to the multilayer substrate material by both bolsters, and the air pressure in the sealed space. Characterize.

[0009]

A buffer plate is provided on the opposing surfaces of the upper and lower bolsters in which a plurality of annular auxiliary rams are arranged so as to oppose each other, and the upper and lower heat plates are provided on the buffer plate via a heat insulating plate. The material of the multi-layer substrate is inserted on the top and sealed by the cylinder sealing means provided on the upper and lower bolsters. After evacuation of the inside of the cylinder, the multilayer substrate material is preheated by the heating means while being pressed by the main ram. Since the inside of the cylinder is evacuated at the preheating stage of the multilayer substrate, the upper and lower bolsters are deformed by the uniform pressure of 1 kgf / cm ² of external pressure applied by the multilayer substrate material. In the subsequent forming process, the main ram presses the multilayer substrate material while pressurizing the inside of the cylinder with a gas such as air. In this case, the upper and lower bolsters are deformed by a uniform internal pressure due to air at a portion which is not in contact with the multilayer substrate material, and are deformed by a pressure applied by the main ram received on the hot plate surface on which the multilayer substrate material is loaded. At this time, the deformation of the hot plate surface in contact with the multilayer substrate material is estimated and calculated from the degree of vacuum and the air pressure, and each auxiliary ram pressure is controlled to obtain the optimum surface pressure distribution. Therefore, the material of the multilayer substrate can be heated and pressed with the optimum surface pressure distribution from the depressurized state in the preheating stage to the pressed state in the molding stage, so there are no voids, no warpage or twisting of the multilayer, and highly accurate multilayer thickness. The substrate can be molded.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The hot press of the present invention will be described below with reference to FIG. 1 showing an embodiment.

In FIG. 1, a main hydraulic cylinder 3 is installed in the center of a frame 2 installed on a floor 1, and a lower bolster 5 mounted on a piston 4 is guided by a plurality of guide rails 6 fixed to the frame. Be lifted up and down. An upper bolster 7 is arranged at an upper position of the frame 2 facing the lower bolster 5. Annular auxiliary rams 8A, 9A, 10A are embedded (inlaid) on the upper surface of the lower bolster 5, and a buffer plate 11A whose periphery is supported by the lower bolster is provided above the auxiliary rams 8A, 9A, 10A.
The lower heating plate 13 is attached by peripheral support via the heat insulating plate 12A, and the cylindrical body receiving ring 14 is attached to the periphery. Similarly, the upper bolster 7 has annular auxiliary rams 8B, 9
B and 10B are embedded (inlaid), and an upper heating plate 15 is attached by peripheral support via a buffer plate 11B and a heat insulating plate 12B whose periphery is supported by an upper bolster.
6 is attached.

As shown in FIG. 4, the lower heating plate 13 and the upper heating plate 15 have a heat medium passage 40 such as steam therein, and the heat medium is heated by a heating / cooling source 17 which constitutes heating / cooling means. The heating plates 13 and 15 are supplied through the medium supply hose 18, pass through the heating medium passage 40, and return to the heating / cooling source 17 through the heating medium return hose 19.

Hydraulic pressure is supplied to the hydraulic cylinder 3 from a hydraulic source 20 through hydraulic pipes 21 and 22. Hydraulic piping 2
1 is connected to the head side port 3a of the hydraulic cylinder 3,
The hydraulic pipe 22 is connected to the load side port 3b of the hydraulic cylinder 3 through a pilot check mechanism 23.

Auxiliary rams 8A, 9 of the upper and lower bolsters 5, 7
A, 10A, 8B, 9B and 10B are connected to the hydraulic pipes 24A, 25A, 26A, 24B, 25B and 2 from the hydraulic source 20.
6B through pressure adjusting valves 27A, 28A, 29A, 2 respectively
Upper and lower bolsters 5, 7 via 7B, 28B, 29B
Hydraulic pressure is supplied to the pressure ports of the
A command pressure is transmitted from A, 28A, 29A, 27B, 28B, 29B from a control panel 30 equipped with an input device 30a.

A cylindrical body 31 is provided on the outer periphery of a cylindrical body guide 16 attached to the side surface of the upper bolster so that it can be raised and lowered by an elevating means 32 provided in the lower bolster 5.
In order to be able to form the sealed space 31S inside the lower position, the upper sealing means 33 and the lower sealing means 34 are provided on the cylindrical body guide 16 and the cylindrical body receiving ring 14, respectively. The sealed space 31S is depressurized by exhausting the atmosphere inside through the exhaust passage 36 by the exhaust means, and brought into a gas pressurized state by the gas supply means 37 through the gas pipe 38.

FIG. 2 shows a state in which the cylindrical body 31 is stopped at the raised position, and in this state, the material 39M of the multilayer substrate 39 is inserted between the heat plates 13 and 15.

In FIG. 3, after exhausting the inside of the cylinder, the piston 4 and the auxiliary rams 8A, 9A, 10 are driven by the pressure oil from the hydraulic pressure source 20.
Through the A, the lower bolster 5, the buffer plate 11A, the heat insulating plate 12A, and the lower heating plate 13, while heating the material 39M of the multilayer substrate with a predetermined pressing force, the heating / cooling source 17 heats and cools according to the process conditions. The state where the operation is performed is shown, and in this state, the bonding work is performed.

Next, the operation of the hot press of the present invention will be described.

As shown in FIG. 2, the cylinder 31 is moved up and down by means 32.
The multi-layer substrate material 39M is inserted between the upper heating plate 15 and the lower heating plate 13 with the, and then the lowering means 32 is given a lowering command to lower the tubular body 31 as shown in FIG.

Next, in order to prevent the lower bolster 5 from rising due to a negative pressure during vacuum exhaustion, high pressure oil is supplied from the hydraulic pressure source 20 through the hydraulic pipe 22 from the 3b port of the cylinder 3, and the upper sealing means 33 and the lower portion. With the sealing means 34, a sealed space 31S is formed inside the cylindrical body 31. Exhaust means 35
The air in the sealed space 31S is exhausted by 5 to 50 To
The reduced pressure state of rr is set. When a predetermined vacuum is obtained, the high pressure oil at the 3b port of the cylinder 3 is discharged, and the 3
Pressure oil is supplied from the hydraulic pressure source 20 through the hydraulic pipe 21 from the port a to raise the lower bolster, and the multilayer substrate material 39
A surface pressure of about 1 to 5 kgf / cm ^{2 is applied} to M as a pre-pressurization so that heat is uniformly transferred from the upper heating plate 15 and the lower heating plate 13. Give heating.

At this time, as shown in FIG.
1. Since the multilayer substrate material 39M is pressed by the external force of 1, the pressing force 42 by the cylinder, the adhesive resin reaction force 43, and the frame reaction force 44, uniform pressing cannot be performed. Therefore, this deformation amount is sequentially calculated by the control panel 30, and the bolsters 5 and 7 and the buffer plate 11 are calculated.
By supplying the high-pressure oil required for deformation absorption to the auxiliary rams 8, 9, and 10 in the deformation absorption mechanism formed by, the buffer plate 11 is deformed optimally, thereby applying the optimum surface pressure to the multilayer substrate material 39M. To do.

After the adhesive resin is softened by preheating and the depressurized state is completed, the multilayer substrate material 39M is 5 to 30 kgf / c.
Pressurization is performed with a surface pressure of m ² . Almost at the same time when the pressurization is started, a predetermined gas (an inert gas such as dry air or nitrogen gas) is supplied from the gas supply means 37 into the sealed space 31S to pressurize the gas. Pressure is 3 to 10 kgf / cm ² , time is 3
0 to 60 minutes. After pressurization, heating at 170 ° C. to 250 ° C. is performed to stabilize the adhesive resin. In this state, the bolster, hot plate, etc. are deformed by the external force of the air pressurization 47, the pressing force 42 by the cylinder, the adhesive resin pressure reaction force 43, and the frame reaction force 44 shown in FIG. 6, and this deformation absorption is also described above. Similarly to the above, the control board 30 calculates the combined value of thermal deformation, and supplies the high pressure oil necessary for deformation absorption to the auxiliary rams 8, 9 and 10 in the deformation absorption mechanism formed by the bolsters 5 and 7 and the buffer plate 11, The cushion plate 11 is deformed as necessary to apply an optimum surface pressure to the multilayer substrate material 39M.

The calculation executed by the control panel 30 for applying the optimum surface pressure to the multilayer substrate material 39M will be described.

The calculation is performed by the following equation.

P1 = APo-DPa P2 = BPo-EPa P3 = CPo-FPa Here, P1 to P3 are hydraulic pressures of the high-pressure oil supplied to the auxiliary rams 8, 9 and 10, and Po is the adhesive surface pressure of the multilayer substrate material 39M. ,
Pa has a negative value under reduced pressure and a positive value under increased pressure at the atmospheric pressure of the sealed space 31S. A to F are correction coefficients (multiplication factors) input by the operator from the input device 30a attached to the control panel 30. The control panel 30 obtains the adhesive surface pressure Po and the atmospheric pressure Pa of the sealed space 31S from the hydraulic pressure source 20, the exhaust means 35, and the gas supply means 37, respectively.

The concrete numerical values of the respective correction coefficients (multiplication factors) A to F are as follows.

A = 1.8 to 2.5 B = 0.8 to 1.2 C = 0.5 to 0.8 D = 3.5 to 4.5 E = 1.8 to 2.5 F = 1.2 to 1.7 Under the heating and pressurizing conditions of the above example, A = 2 and B =
1, C = 0.75, D = 4, E = 2, and F = 1.
When the operator inputs 5, there is no void and it twists,
It was possible to manufacture a high-density multi-layer substrate 39 with high finish accuracy without warpage and wrinkles.

Each of the correction factors (multipliers) A to F is adjusted by the input device 30a when the dimensions, heating, pressurizing conditions, etc. of the multilayer substrate 39 are changed, so that the desired multilayer substrate 39 can be obtained. Can be manufactured.

After the required heating is completed, each heating plate 13, 15 is
The cooling medium is supplied from the heating / cooling source 17 to cool the multilayer substrate 39, and the pressurization of the hot plates 13 and 15 is completed.

In the above, the correction is performed by the auxiliary ram at the same time as the preliminary heating. However, if the deformation due to the preliminary pressing is small, the correction may be performed from the main pressing.

[0031]

As described above, according to the hot press of the present invention, the deformation state of the multi-layer substrate material pressing portion due to the external force is successively estimated and grasped, and the multi-layer substrate material is pressed under the optimum condition, so that the void is eliminated. It is possible to efficiently produce a high-density multi-layer substrate with high finishing accuracy without twisting, warping, and wrinkles.

[Brief description of drawings]

FIG. 1 is a sectional view showing a hot press in a sealed state according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a state where the tubular body is opened by the hot press shown in FIG.

3 is a cross-sectional view showing a pressed state of the hot press shown in FIG.

FIG. 4 is a cross-sectional view of essential parts of the hot plate taken along the line XX of FIG.

FIG. 5 is a schematic diagram showing a situation where a main member of the hot press shown in FIG. 1 is deformed by an external force.

FIG. 6 is a schematic diagram showing a situation where a main member of the hot press shown in FIG. 1 is deformed by internal pressure.

[Explanation of symbols]

2 ... Frame, 3 ... Main hydraulic cylinder, 4 ... Piston, 5
... Lower bolster, 7 ... Upper bolster, 8, 9, 10 ... Auxiliary ram, 11 ... Buffer plate, 12 ... Insulating plate, 13 ... Lower heating plate, 1
5 ... Upper heating plate, 17 ... Heating / cooling source, 20 ... Hydraulic pressure source, 27,
28, 29 ... Pressure control valve, 30 ... Control panel, 30a ... Input device, 31 ... Cylindrical body, 31S ... Sealed space, 35 ... Exhaust means, 37 ... Gas supply means, 39 ... Multilayer substrate, 39M = Multilayer substrate material.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁵ Identification number Reference number within the agency FI technical display location B30B 15/22 B 7819-4E (72) Inventor Musumasa Fujii 28, Shinto Higashi 2-chome, Tsuchiura City, Ibaraki Prefecture No. 4 Hitachi Techno Engineering Co., Ltd. Tsuchiura Works (72) Inventor Kazunori Tsujimura No. 1 Horiyamashita, Hinoyama, Hadano, Kanagawa Pref. 292, Machi Incorporated company Hitachi, Ltd.

Claims (4)

[Claims] 1. A pair of bolsters that are relatively movably opposed to each other, a plurality of auxiliary rams that are annularly arranged in the respective opposed surface portions of the both bolsters, and between the opposed surfaces of the both bolsters. A pair of arranged heat plates, a cylinder body arranged between the both bolsters, a means for sealing the inner space formed by the both bolsters and the cylinder body with respect to the outer space, and controlling the atmospheric pressure of the inner space. And a means for controlling the fluid pressure applied to the plurality of auxiliary rams, and a multi-layer substrate material composed of a plurality of substrates and an adhesive is installed between the both heating plates to control the air pressure in the internal space. In hot pressing to obtain a multilayer substrate by heating and pressurizing, the means for controlling the fluid pressure applied to the plurality of auxiliary rams is controlled by the pressure applied to the multilayer substrate material by the bolsters and the atmospheric pressure of the internal space. A means for changing the rate, and a means for calculating the fluid pressure to be applied to each auxiliary ram from the multiplication factor obtained from the means, the pressure applied to the multilayer substrate material by the bolsters, and the atmospheric pressure in the internal space. A hot press characterized by. 2. The hot press according to claim 1,
The hot press is characterized in that the means for changing the multiplying factor is for changing the multiplying factor based on manual input. 3. The hot press according to claim 1, wherein
The means for calculating the fluid pressure applied to each auxiliary ram is the pressure applied to the multi-layer substrate material by the bolsters, the pressure in the internal space, and the differential pressure obtained from the multiplication factor corresponding to each auxiliary ram. A hot press which is calculated as an applied fluid pressure. 4. An upper and lower bolster in which a plurality of annular auxiliary rams arranged in opposition to each other and a buffer plate are movably inserted in a pressurizing direction of an object to be adhered, and heat insulating plates are respectively provided to the respective bolsters. The upper and lower hot plates, the means for sealing the bolsters, the heat insulating materials, and the hot plates, the means for moving at least one of the upper and lower bolsters with respect to the other, and the heating plates for heating. Or a means for cooling and a means for applying a vacuum or a high pressure to the space formed by the sealing means, aligning the materials of the multi-layer substrate consisting of a plurality of substrates and an adhesive and inserting them between the respective heat plates. However, in a hot press for producing a multilayer substrate by heating and pressurizing the material under reduced pressure or high pressure by the moving means and heating or cooling means, the bolster up and down caused by the pressure difference inside and outside the bolster by the sealing means. Deformation means for calculating a correction amount, hot pressing, characterized in that a means for optimizing the pressure applied to the multi-layer substrate material obtains the pressure of the auxiliary ram from correction amount obtained by said means.