JPH0631486A - Production of composite solder ingot - Google Patents

Production of composite solder ingot

Info

Publication number
JPH0631486A
JPH0631486A JP4194096A JP19409692A JPH0631486A JP H0631486 A JPH0631486 A JP H0631486A JP 4194096 A JP4194096 A JP 4194096A JP 19409692 A JP19409692 A JP 19409692A JP H0631486 A JPH0631486 A JP H0631486A
Authority
JP
Japan
Prior art keywords
solder
powder
ingot
particles
composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4194096A
Other languages
Japanese (ja)
Inventor
Katsuya Sasaki
勝也 佐々木
Atsushi Kubokawa
厚志 窪川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tanaka Denshi Kogyo KK
Original Assignee
Tanaka Denshi Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tanaka Denshi Kogyo KK filed Critical Tanaka Denshi Kogyo KK
Priority to JP4194096A priority Critical patent/JPH0631486A/en
Publication of JPH0631486A publication Critical patent/JPH0631486A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof

Landscapes

  • Powder Metallurgy (AREA)

Abstract

PURPOSE:To uniformly disperse the respective particles of the powder to be added into molten solder in the solder in the process for production of the solder ingot in order to produce the composite solder contg. the powder of the m.p. higher than the m.p. of the solder. CONSTITUTION:The films of metals (Cu, Ni, Au, Ag) which are easily wettable with the solder are formed on the surfaces of the respective particles a1, a1... of the powder (a) consisting of the materials (Cu, Ni, Mo, W, ceramics, alumina, glass, BN, etc.) having the m. p. higher than the m. p. of the solder. These particles are kneaded with a flux (b) and are then put into the solder (c) which consists of PbSn, PbAgSn, etc., and are melted by heating. The base material (d') obtd. by stirring the molten solder (c') to uniformly disperse the respective particles al, la... therein is packed into a mold K and is solidified by cooling, by which the composite solder ingot (d) having the uniform density of the particles a1 of the powder (a) is obtd.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、パワートランジスタ等
における電子部品の接続に用いる接続材料、詳しくは、
半導体チップの基板への固着等に用いる複合半田を成形
するための、半田インゴットの製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connecting material used for connecting electronic parts in a power transistor or the like, more specifically,
The present invention relates to a method for manufacturing a solder ingot for molding a composite solder used for fixing a semiconductor chip to a substrate or the like.

【0002】[0002]

【従来の技術】従来から、半導体チップを基板上に固着
する際に用いる接続材料として、周知な半田材料を用い
て所定形状に作製される半田本体中に、半田よりも高融
点の材質からなる粉末を散在状に混入せしめた複合半田
が知られている。
2. Description of the Related Art Conventionally, as a connecting material used for fixing a semiconductor chip on a substrate, a solder body made of a known solder material into a predetermined shape is made of a material having a melting point higher than that of the solder. A composite solder in which powder is mixed in a scattered manner is known.

【0003】この複合半田は、適量を基板C上に載せた
状態で加熱し溶融させると、前記粉末の各粒子によって
溶融せる半田の厚み(高さ)を一定に保持し、該半田上
にセットする半導体チップを基板上に水平に固着させる
ものである。
When this composite solder is heated and melted in an appropriate amount placed on the substrate C, the thickness (height) of the solder melted by each particle of the powder is kept constant and set on the solder. The semiconductor chip is fixed horizontally on the substrate.

【0004】この様に、半導体チップを基板上に水平に
接続する、即ち、半田溶融後の厚み(高さ)を一定に保
つことは、その接続部分において所定の熱サイクル強度
が保持され、温度変化による半導体チップの剥離や導通
不良を防ぐ点で有用である。
As described above, in order to connect the semiconductor chip horizontally on the substrate, that is, to keep the thickness (height) constant after melting the solder, a predetermined heat cycle strength is maintained at the connecting portion, and the temperature is kept constant. This is useful in preventing peeling of the semiconductor chip and poor conduction due to changes.

【0005】上述の複合半田を作製するには、図5に示
すように、溶融状の半田100 中に、半田よりも高融点な
材質の粉末200 を入れ、これを攪拌した後、冷却,固化
させて半田インゴッドを製造し、さらにこのインゴッド
からテープ状,ペレット状等の製品を成形する方法が用
いられる。
In order to produce the above-mentioned composite solder, as shown in FIG. 5, powder 200 of a material having a melting point higher than that of solder is put in molten solder 100, stirred, and then cooled and solidified. Then, a method of manufacturing a solder ingot and molding a tape-shaped or pellet-shaped product from the ingot is used.

【0006】[0006]

【発明が解決しようとする課題】しかし乍ら、上記従来
の方法によれば、溶融状の半田100 中に粉末200 を入れ
て攪拌する際、粉末200 の各粒子201 ,201 …を溶融状
半田100 中に均一に分散させることができず(図5
(ロ) 参照)、得られたインゴッド中に粒子が偏在して
しまう。
However, according to the above conventional method, when the powder 200 is put into the molten solder 100 and stirred, the particles 201, 201 ... Unable to disperse evenly in 100 (Fig. 5
(See (b)), particles are unevenly distributed in the obtained ingot.

【0007】そのようなインゴッドから作製した複合半
田300 を用いて半導体チップXを基板Y上に固着した場
合、図6に示すように、粒子201 の密度が高い部分では
半田が厚く、密度の低い部分では薄くなる。よって、半
田が薄い部分では所定の熱サイクル強度が得られず、温
度変化による半導体チップXの剥離や導通不良が生じる
欠点があった。
When the semiconductor chip X is fixed on the substrate Y using the composite solder 300 manufactured from such an ingot, as shown in FIG. 6, the solder is thick and the density is low in the portion where the density of the particles 201 is high. It becomes thin at the part. Therefore, a predetermined heat cycle strength cannot be obtained in a portion where the solder is thin, and there is a defect that peeling of the semiconductor chip X or defective conduction occurs due to temperature change.

【0008】本発明は上述の従来事情に鑑みてなされた
ものであり、その目的とするところは、半田よりも高融
点の粉末を含有せる複合半田を作製するための半田イン
ゴッドの製造において、混入する粉末の各粒子を、溶融
状の半田中にて均一に分散させることが可能な方法を提
供することである。
The present invention has been made in view of the above-mentioned conventional circumstances, and an object thereof is to mix in a solder ingot for producing a composite solder containing a powder having a melting point higher than that of the solder. It is an object of the present invention to provide a method capable of uniformly dispersing each particle of powder to be melted in molten solder.

【0009】[0009]

【課題を解決するための手段】前述の目的を達成するた
めに、本発明に係る複合半田インゴッドの製造方法は、
半田よりも高融点の材質からなる粉末の粒子表面に、半
田とぬれ易い金属の膜を形成し、これをフラックスで練
ったものを溶融状半田中に入れ、該溶融状半田を攪拌し
て前記粒子を分散させた後、冷却,固化させることを特
徴とする。
In order to achieve the above-mentioned object, a method for manufacturing a composite solder ingot according to the present invention comprises:
On the surface of powder particles made of a material having a melting point higher than that of the solder, a film of a metal that is easily wettable with the solder is formed, and this is kneaded with flux into molten solder, and the molten solder is stirred to The method is characterized in that after the particles are dispersed, they are cooled and solidified.

【0010】[0010]

【作用】本発明の製造方法によれば、粉末の粒子表面に
半田とぬれ易い金属膜を形成すると同時に、その金属膜
表面に酸化膜が形成されることをフラックスが防ぐ。よ
って、溶融状半田中における粉末粒子のゆきわたりやす
さが飛躍的に向上し、溶融状半田中に粉末を入れて攪拌
すれば、各粒子が均一に分散し、得られたインゴッドに
おける粒子密度が均一化する。
According to the manufacturing method of the present invention, the flux prevents the formation of an oxide film on the surface of the metal film while forming a metal film which is easily wetted by the solder on the surface of the powder particle. Therefore, the ease of transfer of the powder particles in the molten solder is dramatically improved, and if the powder is put in the molten solder and stirred, each particle is uniformly dispersed, and the particle density in the obtained ingot is Homogenize.

【0011】[0011]

【実施例】以下、本発明製造方法の一実施例を、図1を
参照して説明する。図1(イ)は、半田よりも高融点の
材質、例えばCu,Ni,Mo,W,セラミック,アル
ミナ,ガラス,BN等の粉体からなる粉末aを表す。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the manufacturing method of the present invention will be described below with reference to FIG. FIG. 1A shows a powder a made of a material having a melting point higher than that of solder, for example, powders of Cu, Ni, Mo, W, ceramics, alumina, glass, BN and the like.

【0012】(第1工程…図1 (ロ) )上記の粉末a
を、半田とぬれ易い金属(Ni,Cu,Au,Ag等)
のイオンを含んだ溶液中に浸漬せしめて、周知な電気メ
ッキ,無電解メッキ法によりメッキ処理するをもって、
各粒子a1,a1…の表面に前記金属(Ni,Cu,Au,
Ag等)の膜を形成する。
(First step: FIG. 1 (b)) The above powder a
Is a metal that easily wets with solder (Ni, Cu, Au, Ag, etc.)
By immersing it in a solution containing the ions of and plating by well-known electroplating and electroless plating,
The metal (Ni, Cu, Au,
A film of Ag or the like) is formed.

【0013】(第2工程…図1 (ハ) )表面に前記金属
膜を形成した各粒子a1,a1…をフラックスbと一緒に練
り、各粒子a1,a1…表面をフラックス処理することで、
金属膜表面に酸化膜が成形されることを防ぐ。これによ
り得られた粒子a1は、表面に半田とぬれ易い金属膜を有
すると共に、その金属膜表面に酸化膜が形成されること
をフラックス膜が防ぐことから、溶融状半田c’中にお
けるゆきわたりやすさが飛躍的に向上する。
(Second step ... FIG. 1 (c)) By kneading the particles a1, a1 ... Having the metal film formed on the surface together with the flux b, and subjecting the particles a1, a1.
Prevents the oxide film from being formed on the surface of the metal film. The particles a1 thus obtained have a metal film that is easily wettable with solder on the surface, and the flux film prevents the formation of an oxide film on the surface of the metal film. Ease of use is dramatically improved.

【0014】(第3工程…図1 (ニ) , (ホ) )各粒子
a1,a1…の表面に金属膜を有すると共にその表面をフラ
ックス処理した粉末aを、フラックスbと共に溶融状半
田c’中に入れ、攪拌して各粒子a1,a1…を溶融状半田
c’中に均一に分散させ、インゴッド成形用の母材d’
を得る。溶融状半田c’は、PbSn,PbAgSn等の周知な材
料からなる半田cを加熱して半溶融状としたものであ
る。
(Third step ... FIG. 1 (d), (e)) Each particle
Powder a having a metal film on the surface of a1, a1 ... And having its surface subjected to flux treatment is put together with flux b in molten solder c'and stirred to put each particle a1, a1 ... In molten solder c '. Base material for ingot molding d ′
To get The molten solder c ′ is obtained by heating the solder c made of a known material such as PbSn or PbAgSn so as to be in a semi-molten state.

【0015】(第4工程…図1 (ヘ) , (ト) )前記工
程で得られた母材d’を適宜な型Kに流し込み、冷却,
固化させる。固化後、型Kから取り出して、半田c内に
おける粉末aの粒子密度が均一なインゴッドdを得る。
(Fourth step ... FIG. 1 (f), (g)) The base material d'obtained in the above step is poured into an appropriate mold K and cooled,
Let it solidify. After the solidification, the ingot d is taken out from the mold K to obtain the ingot d in which the particle density of the powder a in the solder c is uniform.

【0016】以上のようにして得られた複合半田インゴ
ッドdは、図2に示すように、押出し成形等の周知な成
形方法により適宜形状の基材を作製し、さらにこれを圧
延処理する工程を経て、製品(複合半田)に成形され
る。この複合半田は、例えば図3(a)に示すペレット
状或いはリボン状,(b)に示すテープ状や、或いは不
図示のペレット状,ワイヤ状等の所望形状に作製され、
上記半田cからなる半田本体1中に、粉末aの各粒子a
1,a1…が均一に分散している。
As shown in FIG. 2, the composite solder ingot d obtained as described above has a step of producing a base material of an appropriate shape by a well-known molding method such as extrusion molding, and further rolling the base material. After that, it is formed into a product (composite solder). This composite solder is produced in a desired shape such as a pellet shape or a ribbon shape shown in FIG. 3A, a tape shape shown in FIG. 3B, or a pellet shape or a wire shape not shown,
In the solder body 1 made of the solder c, each particle a of the powder a
1, a1 ... are evenly dispersed.

【0017】この様にして得られたペレット形状の複合
半田Aを用いて、半導体チップXを基板Y上に固定する
場合について、図4を参照して説明する。
A case in which the semiconductor chip X is fixed on the substrate Y by using the pellet-shaped composite solder A thus obtained will be described with reference to FIG.

【0018】まず、前述の如く作製した複合半田Aにお
ける半田本体1の先端部分を基板Yに近付け(図4
(イ) )、該部分を加熱,溶融するせしめて、適量の溶
融状半田1’を基板Y上に載せる(図4 (ロ) 〜 (ハ)
)。この時、半田本体1内に含有せる粉末aの各粒子a
1,a1…が、部分的に偏在するようなことなく、溶融状
半田1’中にて均一に分散する。
First, the tip portion of the solder body 1 in the composite solder A produced as described above is brought close to the board Y (see FIG. 4).
(A)) Then, by heating and melting the portion, an appropriate amount of molten solder 1'is placed on the board Y (Fig. 4 (b) to (c)).
). At this time, each particle a of the powder a contained in the solder body 1
, 1, a1 ... Are uniformly dispersed in the molten solder 1 ′ without being locally unevenly distributed.

【0019】この状態で溶融状半田1’上に半導体チッ
プXをセットすれば、該半田1’中の各粒子a1,a1…が
水平方向に整列して溶融状半田1’の厚み(高さ)を一
定に保持し、半導体チップを基板上に水平に固着せしめ
る(図4 (ニ) )。
When the semiconductor chip X is set on the molten solder 1'in this state, the particles a1, a1 ... In the solder 1'are horizontally aligned and the thickness (height) of the molten solder 1'is increased. ) Is held constant, and the semiconductor chip is fixed horizontally on the substrate (Fig. 4 (d)).

【0020】従って、半導体チップXを基板Yに接続し
た状態において、その接続部分、即ち、固化後の複合半
田に部分的に薄肉な箇所が形成されず、該接続部分全域
で所定の熱サイクル強度を得られる。よって、温度変化
による半導体チップXの剥離や導通不良が生じる虞れの
ない、信頼性の高い半導体装置Zが提供される。
Therefore, in the state where the semiconductor chip X is connected to the substrate Y, a thin portion is not partially formed in the connecting portion, that is, the composite solder after solidification, and the predetermined thermal cycle strength is exerted over the entire connecting portion. Can be obtained. Therefore, it is possible to provide a highly reliable semiconductor device Z in which there is no risk of peeling of the semiconductor chip X or defective conduction due to temperature change.

【0021】尚、複合半田は前述の形状のものに限定さ
れず、例えば、シート状に作製して使用時に所望寸法の
チップ状に切断したり、若しくは予めチップ状に成形す
るなど、その外観形状については任意である。
The composite solder is not limited to the shape described above. For example, the external shape of the composite solder may be, for example, formed into a sheet shape and cut into a chip shape having a desired size at the time of use, or previously molded into a chip shape. Is optional.

【0022】また、上記説明では半導体チップXを基板
Y上に固定するための接合材料について説明したが、本
発明に係る複合半田はこれに限定されず、各種電子部品
の接続に使用可能であり、接続しようとする二部材の大
きさに合わせて半田本体や粉末の大きさ,形状等を適宜
に変更するものである。
In the above description, the bonding material for fixing the semiconductor chip X on the substrate Y has been described, but the composite solder according to the present invention is not limited to this and can be used for connecting various electronic components. The size and shape of the solder body and powder are appropriately changed according to the size of the two members to be connected.

【0023】尚、図1,4,5においては便宜上、粉末
aの各粒子a1,a1…を拡大して表したが、実際には図
3,6に示すような直径20μ,50μ,100 μといった極
微小なものであることは、いうまでもない。
1, 4 and 5, the particles a1, a1 ... Of the powder a are shown in an enlarged manner for the sake of convenience. Actually, the diameters 20 μ, 50 μ and 100 μ as shown in FIGS. Needless to say, it is a very small thing.

【0024】[0024]

【発明の効果】本発明の製造方法によれば、半田より高
融点な粉末の粒子を、溶融状半田中に均一に分散させ
て、粒子密度が均一な複合半田インゴッドを成形でき、
そのインゴッドから作製する複合半田中の粒子密度を均
一なものとし得る。この複合半田を加熱,溶融せしめて
電子部品の接続を行えば、粉末の各粒子が接続しようと
する二部材間に均一に分散して、半田の厚み(高さ)を
均一に保持し、接続後における熱サイクル強度の低下を
より確実に防止する。
According to the manufacturing method of the present invention, particles of powder having a higher melting point than solder can be uniformly dispersed in the molten solder to form a composite solder ingot having a uniform particle density,
The particle density in the composite solder produced from the ingot can be made uniform. When this composite solder is heated and melted to connect electronic parts, each particle of the powder is evenly distributed between the two members to be connected, and the thickness (height) of the solder is maintained evenly. It is possible to more reliably prevent the thermal cycle strength from being lowered later.

【0025】従って、所定の熱サイクル強度を備えた信
頼性の高い半導体装置の提供に際し、該半導体装置の作
製に必要不可欠な複合半田を得るための半田インゴッド
の製造に極めて有用である。
Therefore, when providing a highly reliable semiconductor device having a predetermined heat cycle strength, it is extremely useful for manufacturing a solder ingot for obtaining a composite solder which is indispensable for manufacturing the semiconductor device.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る半田インゴッド製造方法の一実施
例を表す簡略図。
FIG. 1 is a simplified diagram showing an embodiment of a solder ingot manufacturing method according to the present invention.

【図2】本発明方法で得られた半田インゴッドを用いて
複合半田を作製する過程を表すブロック図。
FIG. 2 is a block diagram showing a process of producing a composite solder using the solder ingot obtained by the method of the present invention.

【図3】本発明で得られた半田インゴッドから作製した
複合半田の斜視図。
FIG. 3 is a perspective view of a composite solder made from the solder ingot obtained by the present invention.

【図4】図3(a) に係る複合半田の使用方法を説明する
断面図。
FIG. 4 is a cross-sectional view illustrating a method of using the composite solder according to FIG.

【図5】従来の複合半田インゴッドの製造方法を表す簡
略図。
FIG. 5 is a simplified diagram showing a conventional method for manufacturing a composite solder ingot.

【図6】従来方法で得られたインゴッドから作製した複
合半田の使用状態を表す断面図。
FIG. 6 is a cross-sectional view showing a usage state of a composite solder manufactured from an ingot obtained by a conventional method.

【符号の説明】[Explanation of symbols]

a:粉末 a1:粒子 b:
フラックス c:半田 d:インゴッド A:複合半田 1:半田本体 X:半導体チップ Y:基板 Z:
半導体装置
a: powder a1: particles b:
Flux c: Solder d: Ingot A: Composite solder 1: Solder body X: Semiconductor chip Y: Substrate Z:
Semiconductor device

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 半田よりも高融点の材質からなる粉末の
夫々の粒子表面に、半田とぬれ易い金属の膜を形成し、
これら粒子をフラックスと一緒に練ったものを溶融状半
田中に入れ、該溶融状半田を攪拌して前記各粒子を分散
させた後、冷却,固化させることを特徴とする複合半田
用インゴットの製造方法。
1. A metal film that is easily wettable with solder is formed on each particle surface of powder made of a material having a melting point higher than that of solder,
Manufacturing of an ingot for composite solder, which is prepared by kneading these particles together with flux in molten solder, stirring the molten solder to disperse the particles, and then cooling and solidifying. Method.
JP4194096A 1992-07-21 1992-07-21 Production of composite solder ingot Pending JPH0631486A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4194096A JPH0631486A (en) 1992-07-21 1992-07-21 Production of composite solder ingot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4194096A JPH0631486A (en) 1992-07-21 1992-07-21 Production of composite solder ingot

Publications (1)

Publication Number Publication Date
JPH0631486A true JPH0631486A (en) 1994-02-08

Family

ID=16318884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4194096A Pending JPH0631486A (en) 1992-07-21 1992-07-21 Production of composite solder ingot

Country Status (1)

Country Link
JP (1) JPH0631486A (en)

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