JPH06301037A - Production of liquid crystal display device - Google Patents

Abstract

PURPOSE:To improve a method for forming oriented films in the liquid crystal display device. CONSTITUTION:This process for production has a stage for peeling a protective film 2 of an oriented dry film 4 formed by providing the oriented film 1 having oriented molecules 3 subjected to an orientation treatment with the protective film 2 behind this film and a stage for sticking the oriented film 1 atop a TFT substrate 20 constituted by forming the TFTs atop the substrate.

Description

Detailed Description of the Invention

[0001]

The present invention relates to a thin film transistor (TFT).
sistor: thin film transistor) The present invention relates to improvement of a method of forming an alignment film used for aligning liquid crystal molecules in a method of manufacturing a liquid crystal display device such as an active matrix.

[0002]

2. Description of the Related Art A method of manufacturing a liquid crystal display device according to a conventional example will be described below. FIG. 5 is a cross-sectional view showing the structure of the TFT substrate according to the method of manufacturing a liquid crystal display device. Figure 5
As shown in FIG.
In the FT substrate (20), an auxiliary electrode (12), a gate bus line (13), and a gate insulating film (14) including a SiNX film are sequentially formed on a glass substrate (11), and the gate insulating film (14) is formed. An operating semiconductor layer (15) made of amorphous silicon and a pixel electrode (1
6), contact layers (17A, 17B) for making ohmic contact with the operating semiconductor layer (15), Al / M
Source / drain consisting of two-layer structure of o film [hereinafter referred to as S / D
Electrode] (18A, 18B) and a substrate protection film (19) made of a SiNX film.

A method of manufacturing a liquid crystal display device according to a conventional example is as follows.
First, a TFT substrate (20) having a structure as shown in FIG.
After applying a polymer material such as polyimide to the above, heat treating it at about 200 ° C. to cure it to form an alignment film (5) (FIG. 6), and then rubbing the surface in a certain direction with a cotton cloth or the like. By performing the treatment, the alignment molecules (5A) on the surface of the alignment film (5) were aligned in a fixed direction to form the alignment film (FIG. 7).

[0004]

However, according to the above-mentioned conventional method, the TFT substrate (20) needs to be heat-treated in order to cure the polymer material to form the alignment film. ) The TFT formed above is thermally destroyed. Further, static electricity is generated during the rubbing treatment for orienting the oriented molecules of the orientation film (5) in a certain direction, the TFT on the TFT substrate (20) is electrostatically destroyed, and the rubbing treatment is performed. The process itself was complicated.

Therefore, a large number of TFTs are required to form the alignment film.
However, there is a problem in that the yield is reduced because of the destruction.

[0006]

The present invention has been made in view of the above-mentioned conventional drawbacks, and as shown in FIG. 1, an alignment film (1) having alignment molecules (3) subjected to alignment treatment on its surface is formed. ), The protective film (2) of the oriented dry film (4) having a protective film (2) provided on the back surface of
By sticking the alignment film (1) on the upper surface of the TFT substrate (20) formed on the upper surface thereof, thermal destruction due to heat treatment of the TFT and electrostatic destruction due to rubbing treatment are suppressed, and the yield is improved. The present invention provides a method for manufacturing a liquid crystal display device that can be manufactured.

[0007]

[Operation] According to the method of manufacturing a liquid crystal display device of the present invention, as shown in FIG. 1, a protective film is provided on the back surface of the alignment film (1) having alignment molecules (3) subjected to alignment treatment on the surface thereof. The protective film (2) of the oriented dry film (4) provided with (2) is peeled off as shown in FIG. 2, and the TFT substrate (2 having the TFT formed on the upper surface thereof as shown in FIG. 3 is formed.
The alignment film (1) is attached to the upper surface of (0).

For this reason, the TFT substrate (2) can be formed by simply attaching the alignment film (1) having the alignment molecules (3) which have been already subjected to the alignment treatment such as rubbing or electrostatic treatment.
An alignment film can be formed on the upper surface of (0). As a result, it is not necessary to heat the TFT substrate (20) to cure the alignment film material and form the alignment film as in the conventional case, and the alignment molecules of the alignment film (5) are aligned in a fixed direction. Since no rubbing treatment is also required, it is possible to suppress thermal breakdown due to heat treatment of TFT and electrostatic breakdown due to rubbing treatment, and improve yield.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of manufacturing a liquid crystal display device according to an embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the alignment dry film (4) used in the examples of the present invention has an alignment film (made of polyimide whose surface is rubbed and alignment molecules (3) are aligned in a certain direction). 1) and a protective film (2) provided on the back surface of the alignment film (1). This protective film (2) can be easily peeled off as shown in FIG.

An adhesive is applied to the interface between the alignment film (1) and the protective film (2), and when the protective film (2) is peeled off to expose the alignment film (1), the alignment film is formed. (1) can be attached to a desired surface. A method for manufacturing a liquid crystal display device according to an embodiment of the present invention is a TFT substrate in which TFTs are arranged in a matrix on the upper surface of an alignment film for aligning liquid crystal molecules of a liquid crystal layer used in a TFT active matrix in a certain direction. A method of forming the above, characterized by using the above-mentioned oriented dry film (4) in the manufacturing process.

In the method of manufacturing a liquid crystal display device according to the embodiment of the present invention, as shown in FIG. 2, first, the protective film (2) is peeled from the alignment dry film (4), and then the structure shown in FIG. The oriented dry film (4) from which the protective film (2) has been peeled off is attached to the TFT substrate (20) having the film as shown in FIG. Then, as shown in FIG. 4, an alignment film (1) having a surface that has already been subjected to alignment treatment such as rubbing treatment or electrostatic treatment is formed on the TFT substrate (20).

As described above, according to the method of manufacturing a liquid crystal display device in accordance with the embodiment of the present invention, as shown in FIG. 1, an alignment film (1) having alignment molecules (3) subjected to alignment treatment on its surface is formed. ), The protective film (2) of the alignment dry film (4) provided with the protective film (2) on the back surface is peeled as shown in FIG. 2, and the alignment film (1) is removed as shown in FIG. Two
It is attached to the upper surface of 0).

For this reason, the TFT substrate (2) can be formed by simply attaching the alignment film (1) having the alignment molecules (3) which have already been subjected to the alignment treatment such as rubbing treatment or electrostatic treatment.
The alignment film can be easily formed on the upper surface of (0). As a result, in order to cure the alignment film material made of polyimide as in the prior art to form the alignment film, the TFT substrate (2
It is not necessary to heat-treat 0) at a temperature of about 200 ° C.

The oriented dry film (4) has already been subjected to an orientation treatment including a rubbing treatment and a subsequent electrostatic treatment, and the rubbing treatment for orienting the orientation molecules of the orientation film (5) in a certain direction is performed. I don't need it, so TF
It is possible to suppress the thermal destruction of the TFT due to the heat treatment of the T substrate (20) and the electrostatic destruction of the TFT due to the rubbing treatment, and to improve the yield.

[0015]

As described above, according to the method of manufacturing a liquid crystal display device of the present invention, the protective film (on the back surface of the alignment film (1) having the alignment molecules (3) subjected to the alignment treatment on the surface ( The protective film (2) of the oriented dry film (4) provided with 2) is peeled off, and the oriented film (1) is attached to the upper surface of the TFT substrate.

For this reason, the alignment film can be formed on the upper surface of the TFT substrate only by sticking the alignment film (1) which has been subjected to the alignment treatment, and therefore, the thermal destruction of the TFT by heat treatment or the electrostatic destruction of the rubbing treatment. It is possible to suppress the above and improve the yield.

[Brief description of drawings]

FIG. 1 is a cross-sectional view illustrating an oriented dry film according to an example of the present invention.

FIG. 2 is a first cross-sectional view illustrating the method of manufacturing the liquid crystal display device according to the embodiment of the invention.

FIG. 3 is a second cross-sectional view illustrating the method of manufacturing the liquid crystal display device according to the embodiment of the present invention.

FIG. 4 is a third cross-sectional view illustrating the method of manufacturing the liquid crystal display device according to the embodiment of the invention.

FIG. 5 is a cross-sectional view illustrating a structure of a TFT substrate of a general liquid crystal display device.

FIG. 6 is a first cross-sectional view illustrating the method of manufacturing the liquid crystal display device according to the conventional example.

FIG. 7 is a second cross-sectional view illustrating the method of manufacturing the liquid crystal display device according to the conventional example.

Claims (1)

[Claims] 1. The protective film (2) of an alignment dry film (4) comprising a protective film (2) provided on the back surface of an alignment film (1) having alignment molecules (3) subjected to alignment treatment on its surface. ) Is peeled off, and a TFT substrate (20) having a TFT formed on the upper surface thereof
A step of attaching the alignment film (1) to the upper surface of the liquid crystal display device.