JPH0628715Y2 - 電子エネルギー分布測定装置 - Google Patents

電子エネルギー分布測定装置

Info

Publication number
JPH0628715Y2
JPH0628715Y2 JP5100888U JP5100888U JPH0628715Y2 JP H0628715 Y2 JPH0628715 Y2 JP H0628715Y2 JP 5100888 U JP5100888 U JP 5100888U JP 5100888 U JP5100888 U JP 5100888U JP H0628715 Y2 JPH0628715 Y2 JP H0628715Y2
Authority
JP
Japan
Prior art keywords
target
electrons
energy distribution
electron
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5100888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01154489U (enrdf_load_html_response
Inventor
宣夫 長井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP5100888U priority Critical patent/JPH0628715Y2/ja
Publication of JPH01154489U publication Critical patent/JPH01154489U/ja
Application granted granted Critical
Publication of JPH0628715Y2 publication Critical patent/JPH0628715Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5100888U 1988-04-15 1988-04-15 電子エネルギー分布測定装置 Expired - Lifetime JPH0628715Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5100888U JPH0628715Y2 (ja) 1988-04-15 1988-04-15 電子エネルギー分布測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5100888U JPH0628715Y2 (ja) 1988-04-15 1988-04-15 電子エネルギー分布測定装置

Publications (2)

Publication Number Publication Date
JPH01154489U JPH01154489U (enrdf_load_html_response) 1989-10-24
JPH0628715Y2 true JPH0628715Y2 (ja) 1994-08-03

Family

ID=31277037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5100888U Expired - Lifetime JPH0628715Y2 (ja) 1988-04-15 1988-04-15 電子エネルギー分布測定装置

Country Status (1)

Country Link
JP (1) JPH0628715Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH01154489U (enrdf_load_html_response) 1989-10-24

Similar Documents

Publication Publication Date Title
US6020592A (en) Dose monitor for plasma doping system
US4011449A (en) Apparatus for measuring the beam current of charged particle beam
US6723998B2 (en) Faraday system for ion implanters
JPH01220350A (ja) 帯電抑制方法及びその装置を用いた粒子線照射装置
JPH0724209B2 (ja) イオン注入装置
JPH0628715Y2 (ja) 電子エネルギー分布測定装置
JPH0361303B2 (enrdf_load_html_response)
JP2756704B2 (ja) イオンビーム照射装置における電荷中和装置
JP3399230B2 (ja) イオン照射装置
JPH09167593A (ja) イオン注入装置
JPH0626107B2 (ja) 荷電粒子照射装置
JPH06267490A (ja) 負イオン注入装置
JP3843494B2 (ja) 基板保持装置
JP2663564B2 (ja) イオンビーム照射装置
JP2769375B2 (ja) イオン注入装置
JP3265988B2 (ja) イオン照射装置
JPH02216500A (ja) 荷電粒子照射方法および荷電粒子照射装置
JPH0782830B2 (ja) 電荷中和装置
JP3265987B2 (ja) イオン照射装置
JPH0518646U (ja) 電子線照射装置
JPH0654649B2 (ja) イオン注入装置
JPH0644007U (ja) イオン注入装置
JPH0613019A (ja) イオン注入装置
JPH0754918Y2 (ja) エレクトロンシャワー装置
JPH03261059A (ja) イオン注入装置