JPH0628689Y2 - 流体浮上式追従機構 - Google Patents
流体浮上式追従機構Info
- Publication number
- JPH0628689Y2 JPH0628689Y2 JP15197387U JP15197387U JPH0628689Y2 JP H0628689 Y2 JPH0628689 Y2 JP H0628689Y2 JP 15197387 U JP15197387 U JP 15197387U JP 15197387 U JP15197387 U JP 15197387U JP H0628689 Y2 JPH0628689 Y2 JP H0628689Y2
- Authority
- JP
- Japan
- Prior art keywords
- detection head
- piston rod
- balance cylinder
- fluid
- mounting plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15197387U JPH0628689Y2 (ja) | 1987-10-02 | 1987-10-02 | 流体浮上式追従機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15197387U JPH0628689Y2 (ja) | 1987-10-02 | 1987-10-02 | 流体浮上式追従機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0158159U JPH0158159U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-04-11 |
JPH0628689Y2 true JPH0628689Y2 (ja) | 1994-08-03 |
Family
ID=31426492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15197387U Expired - Lifetime JPH0628689Y2 (ja) | 1987-10-02 | 1987-10-02 | 流体浮上式追従機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0628689Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-10-02 JP JP15197387U patent/JPH0628689Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0158159U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-04-11 |
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