JPH0627945Y2 - 薄膜気相成長装置 - Google Patents
薄膜気相成長装置Info
- Publication number
- JPH0627945Y2 JPH0627945Y2 JP4509388U JP4509388U JPH0627945Y2 JP H0627945 Y2 JPH0627945 Y2 JP H0627945Y2 JP 4509388 U JP4509388 U JP 4509388U JP 4509388 U JP4509388 U JP 4509388U JP H0627945 Y2 JPH0627945 Y2 JP H0627945Y2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film vapor
- vapor deposition
- susceptor
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 title claims description 8
- 238000007740 vapor deposition Methods 0.000 title claims 4
- 229910052799 carbon Inorganic materials 0.000 claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- 239000010935 stainless steel Substances 0.000 claims description 5
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 12
- 239000010453 quartz Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4509388U JPH0627945Y2 (ja) | 1988-04-01 | 1988-04-01 | 薄膜気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4509388U JPH0627945Y2 (ja) | 1988-04-01 | 1988-04-01 | 薄膜気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01153633U JPH01153633U (enrdf_load_stackoverflow) | 1989-10-23 |
| JPH0627945Y2 true JPH0627945Y2 (ja) | 1994-07-27 |
Family
ID=31271420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4509388U Expired - Lifetime JPH0627945Y2 (ja) | 1988-04-01 | 1988-04-01 | 薄膜気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627945Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-04-01 JP JP4509388U patent/JPH0627945Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01153633U (enrdf_load_stackoverflow) | 1989-10-23 |
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