JPH0627712B2 - Inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Object of the Invention (Field of Industrial Application) The present invention relates to a probe device.

(Prior Art) Generally, a transparent quartz glass substrate on which a polycrystalline silicon thin film transistor (hereinafter abbreviated as TFT) array is formed and a color of red (R), green (G), and blue (B) for displaying television images. Liquid crystal is sealed between the transparent glass substrates with filters,
A liquid crystal color panel for displaying in a twisted nematic (hereinafter abbreviated as TN) mode is used. The TFT formed for each pixel controls on / off of the display of each pixel.

As described above, this type of panel in which the TFT array used for the switch is integrated is generally called an active matrix panel.

One of the steps of manufacturing the liquid crystal display body of the active matrix panel (hereinafter abbreviated as LCD) is the LCD.
There is a step of visually observing the pixels.

This step is performed using a probe device for visual observation.

(Problems to be Solved by the Invention) However, in the conventional probe device, an LCD in which a TFT array is integrated is supported on a support base, and X-axis. Y axis. Z
After driving the shaft or the like, the probe terminal electrode which is energized is brought into contact with the electrode of the LCD. Further, although the backlight installed on the surface of the support is used for observing and inspecting the color display of the LCD, static electricity is generated due to moving friction of each mechanism in the probe device.

This static electricity has a drawback that it damages the LCD in which the TFT array is integrated.

An object of the present invention is to provide a probe device which has been made in view of the above-mentioned conventional drawbacks and in which an LCD in which the above-mentioned TFT array is integrated is not damaged by static electricity.

[Structure of Invention]

(Means for Solving the Problems) In order to achieve the above object, the present invention transfers and supports a liquid crystal display body from a loader section to a support base of an inspection section via a transfer section,
The liquid crystal display body is aligned by controlling the movement of the support base in X, Y and θ directions, and in this state, the support base is raised in the Z axis direction to serve as an electrode of the liquid crystal display body as a probe terminal electrode on the back surface of the head plate. In a test device for visually observing the characteristic state of the pixels of the liquid crystal display body with a microscope by contacting with each other, various movable members for transporting the liquid crystal display body from the loader section to the test section through the transfer section, and An antistatic member having conductivity is provided on a static electricity generation portion due to friction accompanying the movement control of the support base of the inspection unit, and an inner surface of a housing or a head plate that covers the loader unit / transfer unit and the inspection unit,
It is characterized in that these antistatic members are connected to the ground via a conductor.

(Operation) According to the inspection device of the present invention, the liquid crystal display body carried into the loader unit is transferred and supported from the loader unit to the support base of the inspection unit via the transfer unit, and the X and Y of the support base is supported there. The liquid crystal display is aligned (aligned with the probe terminal electrodes on the back surface of the head plate) by controlling the movement in the axis and θ directions.
In this state, the support stand moves up in the Z-axis direction to bring the probe terminal electrodes on the back surface of the head plate into contact with the electrodes of the liquid crystal display to energize them. This excites the pixels of the liquid crystal display and visually observes the state with a microscope, so that the characteristics of the liquid crystal display can be inspected.

During such characteristic inspection of the liquid crystal display body, even if static electricity is generated due to friction caused by various movable members that convey the liquid crystal display body from the loader section to the inspection section through the transfer section and the movement control of the support size of the inspection section, Without static electricity
Friction static electricity generation part of the various movable members and the support,
The electric current flows from the conductive wire to the ground through the casing, which covers the loader / transfer portion and the inspection portion, and the conductive antistatic member provided on the inner side surface of the head plate, so that the electricity is removed. As a result, it is possible to reliably prevent static electricity from flowing to the liquid crystal display body in which a TFT (polycrystalline silicon thin film transistor) array is integrated, and to prevent damage to the TFT array of the liquid crystal display body and to perform a stable and highly reliable inspection. Is possible.

(Example) Hereinafter, an example in which the probe device of the present invention is applied to a visual observation prober will be specifically described with reference to the drawings.

First, the external structure of the visual observation prober of this embodiment will be described. As shown in FIG.
(1) is roughly divided into a loader section (2) for conveying the LCD and an inspection section (3) for visually observing the conveyed LCD.

As related to the inspection unit (3), an operation surface (4) to be operated, a keyboard (5) for inputting information necessary for operating the visual observation prober (1), and the LCD described above.
Microscope (6) for observing the image from above, and a display device showing the positioning process of the LCD, that is, the alignment process
(7) is arranged on the housing at the rear upper part of the above-mentioned visual observation prober (1).

The loader unit (2) and the inspection unit (3) are arranged in parallel to form a pair, but the inclination of the LCD in the carrying direction is different. For example, the loader unit (2) side moves and conveys two-dimensionally in the horizontal direction, while the inspection unit (3) side moves two-dimensionally to an inclined surface, for example, a 45 ° inclined surface. It is supposed to do. Further, since the inspection unit (3) has an inclined structure, after receiving the LCD from the loader unit (2), the LCD is inclined and transferred to the inspection unit (3).

The general description of the visual observation prober (1) of the present embodiment has been given above.

The configuration and operation of the loader section (2) will be described in detail.

As shown in FIG. 5, the loader unit (2) takes out the LCD (8) from a cassette (9) which accommodates, for example, a large number of 4-inch square LCDs (8) in a parallel direction, and further, Transport to a predetermined position, for example to L distance, then
After moving the pre-alignment plate (10) to the sub-chaak (11) position in the direction of the arrow and aligning it by sliding the sliding piece, it is transferred to the transfer unit (14) on the inspection unit (3) side. Keep me waiting. Further, the LCD (8) that has been inspected by the inspection unit (3) is transferred to the sub-chair (1
When mounted on 1), the LCD (8) is transported so as to be returned to the cassette (9).

The above series of operations are executed by instructing the driving of each pulse motor according to a program stored in advance.

This is the end of the description of the configuration and operation of the loader section (2).

Next, the inspection unit (3) will be described.

First, as shown in FIG. 5, the inspection unit (3) is an LCD (8) mounted on the sub-chair (11) on the side of the loader unit (2) described above.
A gripping device for the transfer section (14) provided below the inspection section (3)
(15) is gripped, moved to the inspection center (17), and sucked on the support base (18) by vacuum pressure, and then along the inclined base (20) surface of the support base (18). , X-axis. Y axis. The LCD (8) is aligned (referred to as main alignment) by controlling movement in the and θ directions.

Then, the LCD aligned as shown in FIG.
The probe terminal electrode (19) is brought into contact with the electrode (8), and electricity is supplied from an externally arranged power source to excite the pixels of the LCD (8) and visually observe the state.

The structure of the inspection unit (3) is controlled to move in the X-axis direction and the Y-axis direction parallel to the inclined base (20) surface, and also in the Z-axis direction (which means a direction orthogonal to the inclined surface). Further, a support base (18) which is rotationally controlled in the θ direction, and an LCD (8) is attached to the surface of the support base (18). A probe terminal electrode (19) is arranged on the head plate (21) provided in parallel so as to come into contact with the electrode of the LCD (8).

A method of contacting the probe terminal electrode (19) portion with the LCD electrode (8a) portion will be described with reference to FIGS.

The LCD (8), which is an object to be observed, is supported by a support table (18) having a vacuum suction function, and is vertically movable in the Z-axis direction. The LCD (8) is, for example, as shown in FIG.
First to fourth electrodes A _{1 in} four directions on a rectangular glass substrate
~ Forming A ₄ .

The probe terminal electrode 19 portion contacting the _{first to} fourth electrodes A _{1 to} A ₄ of the LCD 8 is composed of a glass electrode (19a). The glass electrode (19a) is provided at four positions corresponding to the respective electrodes A ₁ to A _4, are arranged so as to contact the respective electrodes A ₁ to A ₄ by the rising of the support base (18) There is.

A large number of electrode patterns (19b) are formed at predetermined intervals at the tip of the glass electrode (19a), and the electrode pattern (1
Bumps (19c) are formed on 9b) so as to project, as shown in FIG.

Further, the glass substrate (19a) and a pressure contact arm (22) as a pressure contact means for contacting each of the electrodes A _{1 to} A ₄ are supported above the glass substrate (19a). Here, when the respective pressure-contacting arms (22) are pressure-contacted with the respective electrodes A _{1 to} A ₄ , the weights of the respective electrodes in contact with the bumps are supported so as to be visually observed from the upper surface.

The opposite end of the pressure contact arm (22) is provided on a rotary shaft provided on the back surface of the head plate (21). This rotation direction is rotatably provided in a vertical plane so as not to rotate below a certain rotation.

Furthermore, when another arm (23) fixed to the shaft of the pressure contact arm (22) is provided and rotated in the rotation direction of this arm, the pressure contact arm (22) rotates in the direction of contacting the surface of the LCD. It is provided to do.

Then, at the end of the other arm (23), the solenoid (23a)
Is provided so as to supply air to this solenoid (23a).

Further, a film substrate (24) is welded to the opposite end of the glass electrode (19a) so as to correspond to the glass electrode (19a).

Therefore, the electrodes (8a) of the LCD (8) are brought into contact with the tips of the bumps (19c) provided on the glass substrate to be energized. This is the end of the description of the method of contacting the electrode (8a) of the LCD and the glass electrode (19a) provided on the glass substrate.

Next, after energizing the LCD (8) by the above contact method,
The state of pixels of the LCD (8) is observed with a microscope (6).

Next, the characteristic configuration of the visual observation prober (1) of this embodiment is that the LCD (8) is connected to the inspection unit 3 from the cassette (9) of the loader unit (2) via the transfer unit (14) as described above. An antistatic member having conductivity in a portion where static electricity is generated due to friction caused by movement of various movable members that are transported on the support table (18) during the transfer process and the support table (18) of the inspection unit (3) (not shown). No)
Is attached. That is, in the loader section (2) and the transfer section (14), the friction static electricity is generated in accordance with the movement of the movable member such as the pulse motor, the pulley and the timing belt, and in the inspection section (3), the support base (18) is moved in the X and Y directions.・ Electrically charged parts that generate friction static electricity associated with the operation of pulse motors and ball screw drive mechanisms that control movement in the Z-axis (front-back, left-right, up-down direction) and θ-direction (rotation direction around the Z-axis). A prevention member is attached.

Further, the inside surface (25) of the casing shown in FIG. 1 that covers the periphery of the loader section (2) / transfer section (14) and inspection section (3).
a), (25b), (25c), (25d), (25e) and (25g) are provided with a conductive antistatic member,
A conductive antistatic member is attached to the inner surface of the head plate (21).

The antistatic member attached to each of these places is connected to a ground via a conductor (not shown) so as to be short-circuited.

Therefore, during the characteristic inspection of the LCD (8), the LCD (8) is
Of various movable members for transporting the data from the cassette (9) of the loader unit (2) to the support base (18) of the inspection unit 3 via the transfer unit (14) and the support base (18) of the inspection unit (3). Even if static electricity is generated due to friction due to movement control, the static electricity is not charged, and the friction static electricity generating portions of the various movable members and the support base (18), the loader section (2) and the transfer section (1) thereof are generated.
4) and the inner surface (25
a), (25b), (25c), (25d), (25e), (25g) and the conductive antistatic member attached to the inner surface of the head plate (21) to flow from the conductor to ground. The charge will be removed. As a result, it is possible to reliably prevent static electricity from flowing to the liquid crystal display body in which the TFT (polycrystalline silicon thin film transistor) array is integrated.

Next, the operation will be described.

In the loader section (2), one LCD (8) is taken out from the cassette (9) and pre-aligned, and then the loader section (2)
The LCD (8) is delivered to the sub-chair (11), and the sub-chair (11) rises to a predetermined height. Also inspection department
In (3), the gripping device (15) provided in the transfer section (26) raises to a predetermined height of the sub-chair (11) and is stopped at L.
The CD (8) is gripped, moved to the inspection center (17), adsorbed on the support base (18) of the inspection center (17) and brought into contact with the probe terminal electrode (19), and the LCD (8) is energized. Will be visually inspected.

Here, in the above-mentioned visual observation prober (1), the LCD is conveyed by using the pulse motor, the pulley, the timing belt, etc. for the conveyance of the loader section (2), so naturally it is a static electricity generation source.

Similarly, in the inspection unit (3), the support base (18) is placed on the X axis. Y
Axis and Z axis. In addition, the static electricity is generated by friction between the ball screw and the pulse motor driven in the θ rotation direction.

It is essential to eliminate these static electricity.

In the visual observation prober (1) of this embodiment, the static electricity generated from the prober (1) itself is immediately removed to the outside through the earth via the antistatic member (25).

Further, even static electricity that has entered from the outside will not be immediately charged, and will be immediately discharged to the outside.

The effect of this embodiment is that the visual observation prober (1) itself is generated as static electricity is produced, and the X-axis. Y
axis. Z axis. And θ rotation and a complicated drive unit are arranged, and since these mechanisms are each made of plastic for silencing, there is little opportunity for static electricity to flow out, so they are charged. By attaching an antistatic member to these surfaces and connecting them without charging the surface, static electricity will flow out to the ground from all external terminals, and even if static electricity always occurs, a unique static electricity outflow circuit Since this is provided, even in the LCD (8) having a TFT structure, static electricity is not applied to this TFT structure, and stable observation inspection can be performed.

〔The invention's effect〕

According to the probe device of the present invention, even when an LCD having a TFT structure is inspected, an antistatic member is provided so that static electricity is not affected by the LCD. Therefore, a stable inspection without damage due to static electricity is possible. Is possible.

In addition, since the inspection can be performed without distinguishing between the LCD having a TFT structure that is weak against static electricity and the LCD that is slightly resistant to static electricity, it is not necessary to wastefully classify the LCDs, thus improving the work efficiency.

[Brief description of drawings]

FIG. 1 is a layout explanatory view for arranging an antistatic member of a visual observation prober to which an embodiment of a probe device of the present invention is applied, and FIG. 2 is an LCD of the probe device of FIG. 1 and a glass substrate of a probe terminal electrode. FIG. 3 is an explanatory view for explaining contacting, FIG. 3 is a probe terminal electrode of FIG.
FIG. 4 is an explanatory view for explaining a contact state with an LCD. FIG. 4 is an explanatory view for explaining an inspection section using the probe device of FIG. 1 for a visual observation prober. FIG. 5 is for using the probe device of FIG. 1 for a visual observation prober. FIG. 6 is an explanatory view for explaining the external structure of an embodiment of the probe device to which the present invention is applied. 1 ... Visual inspection prober, 2 ... Loader section, 3 ... Inspection section, 4 ... Operation section, 5 ... Keyboard, 6 ... Microscope, 7 ... Display, 8 ... LCD, 9 ... Cassette, 10 …… Pre-alignment plate, 11 …… Sub-chuck, 14 …… Transfer unit, 15 …… Grip member, 17 …… Inspection center, 18 …… Support stand, 19 …… Probe terminal electrode, 20 …… Base , 21 …… Head plate, 22 …… Pressing arm, 23 …… Other arm, 24 …… Film substrate, 25 …… Antistatic member.

Claims (1)

[Claims] 1. A liquid crystal display unit is transferred from a loader unit to a support base of an inspection unit via a transfer unit and supported, and the support base is controlled to move in X, Y and θ directions to align the liquid crystal display unit. Then, in this state, the support base is raised in the Z-axis direction, the probe terminal electrode on the back surface of the head plate is brought into contact with the electrode of the liquid crystal display body to energize, and the characteristics of the pixel of the liquid crystal display body at this time are visually observed with a microscope. In the inspection device described above, various movable members for transporting the liquid crystal display body from the loader unit to the inspection unit via the transfer unit, and static electricity generation parts due to friction due to movement control of the support base of the inspection unit, and the loader unit / transfer unit. And an inspection device characterized in that a conductive antistatic member is provided on the housing covering the inspection unit and on the inner surface of the head plate, and the antistatic member is connected to the ground via a conductor.