JPH0627641B2 - スケール - Google Patents
スケールInfo
- Publication number
- JPH0627641B2 JPH0627641B2 JP2145531A JP14553190A JPH0627641B2 JP H0627641 B2 JPH0627641 B2 JP H0627641B2 JP 2145531 A JP2145531 A JP 2145531A JP 14553190 A JP14553190 A JP 14553190A JP H0627641 B2 JPH0627641 B2 JP H0627641B2
- Authority
- JP
- Japan
- Prior art keywords
- scale
- support
- substrate
- thermal expansion
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 21
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 229910000831 Steel Inorganic materials 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 10
- 239000010959 steel Substances 0.000 claims description 10
- 238000009713 electroplating Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000003792 electrolyte Substances 0.000 description 3
- 239000004922 lacquer Substances 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000003679 aging effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 150000002118 epoxides Chemical class 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
- G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length-Measuring Instruments Using Mechanical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3918490.0 | 1989-06-07 | ||
| DE3918490A DE3918490C1 (enExample) | 1989-06-07 | 1989-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0324401A JPH0324401A (ja) | 1991-02-01 |
| JPH0627641B2 true JPH0627641B2 (ja) | 1994-04-13 |
Family
ID=6382208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2145531A Expired - Lifetime JPH0627641B2 (ja) | 1989-06-07 | 1990-06-05 | スケール |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5095637A (enExample) |
| EP (1) | EP0401536B1 (enExample) |
| JP (1) | JPH0627641B2 (enExample) |
| DE (2) | DE3918490C1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4406798C2 (de) * | 1994-03-02 | 1997-11-27 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
| DE19510998C2 (de) * | 1995-03-25 | 1998-09-03 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
| DE19700367C2 (de) * | 1997-01-08 | 1999-07-01 | Zeiss Carl Jena Gmbh | Verfahren und Montagevorrichtung zum gerichteten Anbringen eines Maßbandes |
| DE19912310B4 (de) * | 1999-03-19 | 2007-11-29 | Dr. Johannes Heidenhain Gmbh | Positionsmeßeinrichtung |
| DE19914311A1 (de) | 1999-03-29 | 2000-10-05 | Heidenhain Gmbh Dr Johannes | Verfahren und Vorrichtung zum Anbringen eines Maßstabes |
| JP4230810B2 (ja) * | 2003-04-24 | 2009-02-25 | 株式会社ミツトヨ | 測長装置 |
| DE102007031976A1 (de) * | 2007-07-10 | 2009-01-15 | Dr. Johannes Heidenhain Gmbh | Längenmesseinrichtung |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE7513496U (de) * | 1975-09-25 | Heidenhain J Gmbh | MeBeinrichtung | |
| DE1176382B (de) * | 1959-09-30 | 1964-08-20 | Wenczler & Heidenhain Patentve | Teilungstraeger fuer Praezisionsteilungen |
| US3629945A (en) * | 1969-10-06 | 1971-12-28 | Bausch & Lomb | Optical gage |
| DE2016253A1 (de) * | 1970-04-04 | 1971-10-14 | Heidenhain Johannes Dr Fa | Meßteilung |
| US3816002A (en) * | 1972-10-10 | 1974-06-11 | H Wieg | Apparatus for measuring displacement between two relatively movable members |
| DE3637628C1 (de) * | 1986-11-05 | 1988-02-11 | Heidenhain Gmbh Dr Johannes | Verfahren zur Herstellung einer Massverkoerperung |
| US4815213A (en) * | 1987-10-09 | 1989-03-28 | Brown & Sharpe Manufacturing Co. | Apparatus for temperature compensation of sensing means of a machine |
-
1989
- 1989-06-07 DE DE3918490A patent/DE3918490C1/de not_active Expired - Fee Related
-
1990
- 1990-05-10 EP EP90108787A patent/EP0401536B1/de not_active Expired - Lifetime
- 1990-05-10 DE DE9090108787T patent/DE59000247D1/de not_active Expired - Fee Related
- 1990-06-05 JP JP2145531A patent/JPH0627641B2/ja not_active Expired - Lifetime
- 1990-06-06 US US07/534,682 patent/US5095637A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP0401536A3 (de) | 1991-04-10 |
| DE3918490C1 (enExample) | 1990-09-27 |
| EP0401536B1 (de) | 1992-08-12 |
| EP0401536A2 (de) | 1990-12-12 |
| JPH0324401A (ja) | 1991-02-01 |
| DE59000247D1 (de) | 1992-09-17 |
| US5095637A (en) | 1992-03-17 |
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