JPH0626823Y2 - 静電容量による荷重センサ - Google Patents
静電容量による荷重センサInfo
- Publication number
- JPH0626823Y2 JPH0626823Y2 JP3767288U JP3767288U JPH0626823Y2 JP H0626823 Y2 JPH0626823 Y2 JP H0626823Y2 JP 3767288 U JP3767288 U JP 3767288U JP 3767288 U JP3767288 U JP 3767288U JP H0626823 Y2 JPH0626823 Y2 JP H0626823Y2
- Authority
- JP
- Japan
- Prior art keywords
- load sensor
- alloy
- capacitance
- sealing member
- load
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 33
- 229910045601 alloy Inorganic materials 0.000 claims description 18
- 239000000956 alloy Substances 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 8
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 5
- 239000003990 capacitor Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3767288U JPH0626823Y2 (ja) | 1988-03-24 | 1988-03-24 | 静電容量による荷重センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3767288U JPH0626823Y2 (ja) | 1988-03-24 | 1988-03-24 | 静電容量による荷重センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01141435U JPH01141435U (enrdf_load_stackoverflow) | 1989-09-28 |
| JPH0626823Y2 true JPH0626823Y2 (ja) | 1994-07-20 |
Family
ID=31264249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3767288U Expired - Lifetime JPH0626823Y2 (ja) | 1988-03-24 | 1988-03-24 | 静電容量による荷重センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0626823Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-03-24 JP JP3767288U patent/JPH0626823Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01141435U (enrdf_load_stackoverflow) | 1989-09-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6651506B2 (en) | Differential capacitive pressure sensor and fabricating method therefor | |
| KR0137965B1 (ko) | 최소의 유전 표류를 가지는 용량성 감지기 | |
| JPS60195829A (ja) | 静電容量形絶対圧力検出器 | |
| JPS6034687B2 (ja) | 圧力電子変換素子 | |
| JPS6140529A (ja) | 圧力・容量トランスデユ−サおよびその製造方法 | |
| JPH0324793B2 (enrdf_load_stackoverflow) | ||
| JPH01259265A (ja) | キャパシチブ加速度計およびその製造方法 | |
| JP3399688B2 (ja) | 圧力センサ | |
| JPH0743625Y2 (ja) | 静電容量式荷重センサ | |
| JPH0626823Y2 (ja) | 静電容量による荷重センサ | |
| JPH08122362A (ja) | 静電容量型加速度センサ | |
| JP2004226294A (ja) | 静圧動圧検知センサ | |
| JPH0750685Y2 (ja) | 静電容量式荷重センサー | |
| JPH086275Y2 (ja) | 静電容量式荷重センサ | |
| JP2007101222A (ja) | 圧力センサ | |
| JPH0542353Y2 (enrdf_load_stackoverflow) | ||
| JPH0447272A (ja) | 半導体加速度センサ | |
| JPH06323939A (ja) | 静電容量式センサ | |
| CN213364813U (zh) | 一种非对称梁谐振式微机械加速度传感器、电子装置 | |
| JPS59163513A (ja) | 静電容量式センサ | |
| JP2003106919A (ja) | 静圧動圧検知センサ | |
| JP3136549B2 (ja) | 静電容量式圧力センサ | |
| JPH0833330B2 (ja) | 静電容量式荷重センサー及びその製造方法 | |
| JP2004132882A (ja) | 静圧動圧検知センサ | |
| JP2002181648A (ja) | 圧力センサ |