JPH06265323A - Outer shape inspection device - Google Patents

Abstract

PURPOSE:To inspect both the profile and rear surface of an object to be inspected with one camera by providing a profile image reflection member with a mirror surface part for reflecting the image of the profile of the object to be inspected (lead wire of IC, etc.). CONSTITUTION:A profile image reflection member 9 consists of a mirror surface part 8 consisting of a prism and a mirror surface part retention member 8a for retaining it at both sides, thus forming the stand for an IC 4. The IC 4 is placed on the member 9 and a camera 10 is placed at a specific position. The camera image picked up and output by the camera 10 consists of the image obtained by reflecting the image of the profile of the inside of a lead 4a of the IC4 on the mirror surface part 8 (a flatness inspection image 11 of the lead 4a) and the image of the rear surface of the lead 4a (a side-bending inspection image 12), thus capturing both images of the inspection images 11 and 12 into the visual field of one camera 10. The mirror surface part 8 may be formed by performing plating treatment to a metal member and then finishing it to a mirror-surface state and the member 9 may be formed by providing a light source inside the member made of a transparent resin such as acryl.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor integrated circuit device (hereinafter referred to as I
(Referred to as “C”) for the appearance inspection technique for inspecting the appearance.

[0002]

2. Description of the Related Art Conventionally, when conducting a visual inspection of a lead such as an IC, two items of lateral bending and flatness of the lead are inspected.

For example, when inspecting leads of a J-lead type IC, which is one of the types of ICs, the leads are photographed from two directions by a camera, and an image for lateral bending inspection and an image for flatness inspection are respectively obtained. is necessary.

Here, an example of the structure of the appearance inspection apparatus considered by the present inventor is shown in the block diagram of FIG. 5, and an example of the camera image in the appearance inspection apparatus is shown in the images of FIGS. 6 (a) to 6 (c). It is shown in the explanatory diagram, and FIG. 6A shows an image by the first camera,
(B) is an image taken by the second camera, and (c) is an explanatory view of an image taken by the third camera.

The structure of the appearance inspection apparatus considered by the present inventor will be described with reference to FIGS.
The first to photograph the lead 4a of C4 from the back side of the IC4
A camera 1, a second camera 2 that photographs the side surface of the lead 4a of the IC 4 from the horizontal lateral direction, a third camera 3 that also photographs the side surface of the IC 4 opposite to the lead 4a from the horizontal lateral direction, and the first camera It is composed of a first camera image 5, which is an output image from the cameras 1 to 3, a second camera image 6, and a third camera image 7.

Next, referring to FIG. 6, the first cameras 1 to
The image captured by the third camera 3 will be described with reference to FIG.
(A) is a first camera image 5 photographed by the first camera 1, which is an image in which the lead 4a is photographed from the back surface of the IC 4 and the lateral bending of the lead 4a is inspected.

FIG. 6B is a second camera image 6 taken by the second camera 2. The side surface of the lead 4a is taken from the horizontal direction of the IC 4 to inspect the flatness of the lead 4a. It is an image.

Further, FIG. 6 (c) is a third camera image 7 photographed by the third camera 3, wherein the side face opposite to the side face of the lead 4a photographed by the second camera 2 is photographed and the lead 4a is photographed. 2 is an image for inspecting the flatness of the.

Therefore, in the above appearance inspection apparatus, it is general that at least three cameras inspect the lead lateral bending and flatness of one IC.

[0010]

However, in the above-mentioned prior art, three cameras are required to inspect the lead of one IC, so that the frame memory (pixel data converted into digital data is required). Memory to capture)
In many cases, a number corresponding to the number of cameras is required.

Even when a plurality of frame memories are not used, the inspection time becomes very long because the cameras are sequentially switched during the inspection and the image processing is performed each time.

It is an object of the present invention to provide an appearance inspection apparatus for inspecting IC leads and the like, which inspects both the side surface and the back surface of an object to be inspected by one camera.

The above and other objects and novel features of the present invention will be apparent from the description of this specification and the accompanying drawings.

[0014]

Among the inventions disclosed in the present application, a brief description will be given to the outline of typical ones.
It is as follows.

That is, the apparatus for inspecting the appearance of an object to be inspected is provided with a side surface image reflecting member having a mirror surface portion for reflecting the image of the side surface of the object to be inspected.

Further, at least the mirror surface portion of the side image reflecting member is constituted by a prism.

[0017]

According to the above-mentioned means, by providing the side surface image reflecting member having the mirror surface portion for reflecting the image of the side surface of the object to be inspected, both the image of the side surface of the object to be inspected and the image of the back surface Images can be captured in the field of view of a single camera.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a structural explanatory view showing an example of the structure of an appearance inspection apparatus which is an embodiment of the present invention, and FIG. 2 shows a camera image in the appearance inspection apparatus which is an embodiment of the present invention. It is an image explanatory view showing an example.

The configuration of the appearance inspection apparatus of this embodiment will be described with reference to FIGS. 1 and 2, which is a table for an IC4 to be inspected, and an image of the inner side surface of the lead 4a of the IC4 is a mirror surface portion. 8, a side image reflection member 9 for reflecting the image on the side surface of the lead 4a, and a camera installed so as to capture two images from the back side of the IC 4; 10 and a camera image 13 which is an output of the camera 10.

Next, FIG. 3 is a sectional view showing an example of the side image reflecting member 9 in the appearance inspection apparatus according to the embodiment of the present invention.

The configuration of the side image reflection member 9 in the appearance inspection apparatus of this embodiment will be described with reference to FIG. 3. The mirror surface portion 8 made of a prism and the mirror surface portion holding member for holding the mirror surface portion 8 on both sides. And 8a.

Next, referring to FIGS. 1 and 2, the camera 1 will be described.
The camera image 13 captured and output by 0 will be described.

First, in the camera image 13 shown in FIG. 2, the image of the inner side surface of the lead 4a is the mirror surface portion 8 of the side image reflecting member 9.
The image is a flatness inspection image 11 of the lead 4a, and the latter is a lateral bending inspection image 12 of the lead 4a.

Therefore, in the field of view of one camera 10,
An image of the inner side surface of the lead 4a (flatness inspection image 11),
Both the image of the back surface of the lead 4a (horizontal bending inspection image 12) can be captured.

Although the invention made by the present inventor has been specifically described based on the embodiments, the present invention is not limited to the above embodiments, and various modifications can be made without departing from the scope of the invention. Needless to say.

For example, in the present embodiment, it has been described that the mirror surface portion of the side image reflecting member is composed of a prism or the like, but a metal member is plated to finish the mirror surface state, or as shown in FIG. The light source 14 may be provided inside a member made of transparent resin such as acrylic.

It is also possible to increase the inspection accuracy by increasing the number of cameras for photographing and increasing the resolution of the image.

Further, although the side image reflecting member described in this embodiment corresponds to an IC of the type having leads in two directions, an IC of the type having leads in four directions.
The side image reflection member may be provided with mirror surface portions in four directions so as to correspond to.

[0029]

The effects obtained by the typical ones of the inventions disclosed in the present application will be briefly described as follows.
It is as follows.

(1). Since one camera can capture both the side image and the back image of the object to be inspected, the number of cameras used conventionally can be greatly reduced.
The overall size and cost of the device can be reduced.

(2). Because you can shoot with one camera,
Since the image data of both the side image and the back side image of the inspection object can be processed in the same frame memory, the inspection speed can be greatly improved.

(3). Because you can shoot with one camera,
The number of frame memories themselves can be reduced, and the price can be reduced.

(4). Since the appearance inspection apparatus according to the present invention can downsize the optical system and the circuit system, high reliability regarding inspection accuracy can be realized.

[Brief description of drawings]

FIG. 1 is a configuration explanatory view showing an example of the configuration of an appearance inspection apparatus that is an embodiment of the present invention.

FIG. 2 is an image explanation diagram showing an example of a camera image in the visual inspection apparatus which is an embodiment of the present invention.

FIG. 3 is a cross-sectional view showing an example of a side image reflection member in the visual inspection apparatus that is an embodiment of the present invention.

FIG. 4 is a cross-sectional view showing another embodiment of the side image reflecting member in the visual inspection apparatus which is an embodiment of the present invention.

FIG. 5 is a configuration diagram showing an example of a structure of an appearance inspection device considered by the present inventor.

6A and 6B are image explanatory diagrams showing an example of a camera image in the appearance inspection apparatus considered by the present inventor, where FIG. 6A is an image taken by a first camera, FIG. 6B is an image taken by a second camera, and FIG.
[Fig. 6] is an image explanation diagram showing an image taken by a third camera.

[Explanation of symbols]

 1 1st camera 2 2nd camera 3 3rd camera 4 IC 4a lead 5 1st camera image 6 2nd camera image 7 3rd camera image 8 Mirror surface part 8a Mirror surface part holding member 9 Side image reflection member 10 Camera 11 Flatness inspection Image 12 Lateral bend inspection image 13 Camera image 14 Light source

Claims (4)

[Claims] 1. An appearance inspection apparatus for inspecting the appearance of an object to be inspected, comprising a side image reflection member having a mirror surface portion for reflecting an image of a side surface of the object to be inspected. 2. The appearance inspection apparatus according to claim 1, wherein at least the mirror surface portion of the side image reflecting member is a prism. 3. The side image reflecting member is formed by plating a metal member.
Appearance inspection device described. 4. The appearance inspection apparatus according to claim 1, wherein the side image reflection member includes a transparent member and a light source installed inside the transparent member.