GB2361313B - An apparatus and method to transport, inspect and measure objects and surface details at high speeds - Google Patents

An apparatus and method to transport, inspect and measure objects and surface details at high speeds

Info

Publication number
GB2361313B
GB2361313B GB0114507A GB0114507A GB2361313B GB 2361313 B GB2361313 B GB 2361313B GB 0114507 A GB0114507 A GB 0114507A GB 0114507 A GB0114507 A GB 0114507A GB 2361313 B GB2361313 B GB 2361313B
Authority
GB
United Kingdom
Prior art keywords
inspect
transport
high speeds
surface details
measure objects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0114507A
Other versions
GB0114507D0 (en
GB2361313A (en
Inventor
Ping Derg Chuang
Wee Lee Sim
Choon Giap Lee
Boon Long Ng
Kee Chen George Neo
Chee Hian Seah
Choon Leong Ho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rahmonic Resources Pte Ltd
Original Assignee
Rahmonic Resources Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rahmonic Resources Pte Ltd filed Critical Rahmonic Resources Pte Ltd
Publication of GB0114507D0 publication Critical patent/GB0114507D0/en
Publication of GB2361313A publication Critical patent/GB2361313A/en
Application granted granted Critical
Publication of GB2361313B publication Critical patent/GB2361313B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB0114507A 1998-11-30 1999-11-30 An apparatus and method to transport, inspect and measure objects and surface details at high speeds Expired - Fee Related GB2361313B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG1998004084A SG76564A1 (en) 1998-11-30 1998-11-30 An apparatus and method to transport inspect and measure objects and surface details at high speeds
PCT/SG1999/000130 WO2000033027A1 (en) 1998-11-30 1999-11-30 An apparatus and method to transport, inspect and measure objects and surface details at high speeds

Publications (3)

Publication Number Publication Date
GB0114507D0 GB0114507D0 (en) 2001-08-08
GB2361313A GB2361313A (en) 2001-10-17
GB2361313B true GB2361313B (en) 2003-06-11

Family

ID=20430138

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0114507A Expired - Fee Related GB2361313B (en) 1998-11-30 1999-11-30 An apparatus and method to transport, inspect and measure objects and surface details at high speeds

Country Status (5)

Country Link
CN (1) CN1367872A (en)
AU (1) AU2019300A (en)
GB (1) GB2361313B (en)
SG (1) SG76564A1 (en)
WO (1) WO2000033027A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6532063B1 (en) * 2000-11-10 2003-03-11 Semiconductor Technologies & Instruments 3-D lead inspection
JP4228778B2 (en) * 2003-05-21 2009-02-25 ウシオ電機株式会社 Pattern inspection device
JP2004361329A (en) * 2003-06-06 2004-12-24 Ushio Inc Method and device for inspecting pattern
AU2004250194A1 (en) * 2003-06-18 2004-12-29 Amfit, Inc. Method and system for capturing and supporting 3-D contour
US7289646B2 (en) * 2003-06-30 2007-10-30 Weyerhaeuser Company Method and system for simultaneously imaging multiple views of a plant embryo
CN100554952C (en) * 2005-08-03 2009-10-28 鸿劲科技股份有限公司 Integrated circuit detector
CN101936916A (en) * 2009-07-02 2011-01-05 法国圣-戈班玻璃公司 Equipment for detecting defects of separated low-rigidity transparent or translucent body and method thereof
US9491412B2 (en) * 2012-09-13 2016-11-08 General Electric Technology Gmbh Method and system for determining quality of tubes
CN111965215A (en) * 2020-08-13 2020-11-20 长江存储科技有限责任公司 Packaged chip defect detection device and method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265323A (en) * 1993-03-16 1994-09-20 Hitachi Ltd Outer shape inspection device
JPH085568A (en) * 1994-06-15 1996-01-12 Hitachi Ltd Lead inspection apparatus
JPH10153413A (en) * 1996-11-21 1998-06-09 M C Electron Kk Appearance and dimension inspection device for ic lead

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265323A (en) * 1993-03-16 1994-09-20 Hitachi Ltd Outer shape inspection device
JPH085568A (en) * 1994-06-15 1996-01-12 Hitachi Ltd Lead inspection apparatus
JPH10153413A (en) * 1996-11-21 1998-06-09 M C Electron Kk Appearance and dimension inspection device for ic lead

Also Published As

Publication number Publication date
GB0114507D0 (en) 2001-08-08
AU2019300A (en) 2000-06-19
GB2361313A (en) 2001-10-17
WO2000033027A1 (en) 2000-06-08
WO2000033027A9 (en) 2001-11-08
SG76564A1 (en) 2000-11-21
CN1367872A (en) 2002-09-04

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20031130