GB2361313B - An apparatus and method to transport, inspect and measure objects and surface details at high speeds - Google Patents
An apparatus and method to transport, inspect and measure objects and surface details at high speedsInfo
- Publication number
- GB2361313B GB2361313B GB0114507A GB0114507A GB2361313B GB 2361313 B GB2361313 B GB 2361313B GB 0114507 A GB0114507 A GB 0114507A GB 0114507 A GB0114507 A GB 0114507A GB 2361313 B GB2361313 B GB 2361313B
- Authority
- GB
- United Kingdom
- Prior art keywords
- inspect
- transport
- high speeds
- surface details
- measure objects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG1998004084A SG76564A1 (en) | 1998-11-30 | 1998-11-30 | An apparatus and method to transport inspect and measure objects and surface details at high speeds |
PCT/SG1999/000130 WO2000033027A1 (en) | 1998-11-30 | 1999-11-30 | An apparatus and method to transport, inspect and measure objects and surface details at high speeds |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0114507D0 GB0114507D0 (en) | 2001-08-08 |
GB2361313A GB2361313A (en) | 2001-10-17 |
GB2361313B true GB2361313B (en) | 2003-06-11 |
Family
ID=20430138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0114507A Expired - Fee Related GB2361313B (en) | 1998-11-30 | 1999-11-30 | An apparatus and method to transport, inspect and measure objects and surface details at high speeds |
Country Status (5)
Country | Link |
---|---|
CN (1) | CN1367872A (en) |
AU (1) | AU2019300A (en) |
GB (1) | GB2361313B (en) |
SG (1) | SG76564A1 (en) |
WO (1) | WO2000033027A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6532063B1 (en) * | 2000-11-10 | 2003-03-11 | Semiconductor Technologies & Instruments | 3-D lead inspection |
JP4228778B2 (en) * | 2003-05-21 | 2009-02-25 | ウシオ電機株式会社 | Pattern inspection device |
JP2004361329A (en) * | 2003-06-06 | 2004-12-24 | Ushio Inc | Method and device for inspecting pattern |
AU2004250194A1 (en) * | 2003-06-18 | 2004-12-29 | Amfit, Inc. | Method and system for capturing and supporting 3-D contour |
US7289646B2 (en) * | 2003-06-30 | 2007-10-30 | Weyerhaeuser Company | Method and system for simultaneously imaging multiple views of a plant embryo |
CN100554952C (en) * | 2005-08-03 | 2009-10-28 | 鸿劲科技股份有限公司 | Integrated circuit detector |
CN101936916A (en) * | 2009-07-02 | 2011-01-05 | 法国圣-戈班玻璃公司 | Equipment for detecting defects of separated low-rigidity transparent or translucent body and method thereof |
US9491412B2 (en) * | 2012-09-13 | 2016-11-08 | General Electric Technology Gmbh | Method and system for determining quality of tubes |
CN111965215A (en) * | 2020-08-13 | 2020-11-20 | 长江存储科技有限责任公司 | Packaged chip defect detection device and method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06265323A (en) * | 1993-03-16 | 1994-09-20 | Hitachi Ltd | Outer shape inspection device |
JPH085568A (en) * | 1994-06-15 | 1996-01-12 | Hitachi Ltd | Lead inspection apparatus |
JPH10153413A (en) * | 1996-11-21 | 1998-06-09 | M C Electron Kk | Appearance and dimension inspection device for ic lead |
-
1998
- 1998-11-30 SG SG1998004084A patent/SG76564A1/en unknown
-
1999
- 1999-11-30 GB GB0114507A patent/GB2361313B/en not_active Expired - Fee Related
- 1999-11-30 WO PCT/SG1999/000130 patent/WO2000033027A1/en not_active Application Discontinuation
- 1999-11-30 AU AU20193/00A patent/AU2019300A/en not_active Abandoned
- 1999-11-30 CN CN99815888A patent/CN1367872A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06265323A (en) * | 1993-03-16 | 1994-09-20 | Hitachi Ltd | Outer shape inspection device |
JPH085568A (en) * | 1994-06-15 | 1996-01-12 | Hitachi Ltd | Lead inspection apparatus |
JPH10153413A (en) * | 1996-11-21 | 1998-06-09 | M C Electron Kk | Appearance and dimension inspection device for ic lead |
Also Published As
Publication number | Publication date |
---|---|
GB0114507D0 (en) | 2001-08-08 |
AU2019300A (en) | 2000-06-19 |
GB2361313A (en) | 2001-10-17 |
WO2000033027A1 (en) | 2000-06-08 |
WO2000033027A9 (en) | 2001-11-08 |
SG76564A1 (en) | 2000-11-21 |
CN1367872A (en) | 2002-09-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20031130 |