TWI396824B - Method and device for optically measuring the surface of a product - Google Patents

Method and device for optically measuring the surface of a product Download PDF

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TWI396824B
TWI396824B TW100106095A TW100106095A TWI396824B TW I396824 B TWI396824 B TW I396824B TW 100106095 A TW100106095 A TW 100106095A TW 100106095 A TW100106095 A TW 100106095A TW I396824 B TWI396824 B TW I396824B
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camera
height
color
white light
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TW201144747A (en
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Roman Franz Wieser
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Witrins S R O
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用於光學測量產品表面之方法及器件Method and device for optically measuring the surface of a product

本發明大體而言係關於用於測量及檢查一感測器與被測產品之間的一距離之一器件及方法特定言之,其可使用於測量及測試安裝於印刷電路板(PCB)上或一太陽能電池產品上之組件之位置的電子器件的領域,或用於檢查電子組件(諸如IC、電容器、電晶體、電阻器等等)之連接器之位置,或在將電子組件安裝於一PCB上之前用於回焊焊接之回焊焊錫膏之位置。本發明較佳地可應用於PCB產品、太陽能電池產品,諸如太陽能電池晶圓或太陽能電池元件及其他需要測量平坦度之物品,以因此指定其等之品質,且亦可用於測試產品表面之表面粗糙度。本發明亦可在當記錄一影像時,在並不必要執行從許多位置之掃描操作之下用於檢查多種物品之一三維形式,此在高生產程序中尤其有利,即,在需要測試表面粗糙度及缺陷等等之處的程序中。The present invention generally relates to a device and method for measuring and inspecting a distance between a sensor and a product under test, which can be used for measurement and testing on a printed circuit board (PCB). Or the field of electronics at the location of components on a solar cell product, or the location of connectors for inspecting electronic components (such as ICs, capacitors, transistors, resistors, etc.), or mounting electronic components on a The position of the reflow solder paste previously used for reflow soldering on the PCB. The invention is preferably applicable to PCB products, solar cell products, such as solar cell wafers or solar cell components and other articles that require flatness measurement, so as to specify their quality, and can also be used to test the surface of the product surface. Roughness. The present invention can also be used to inspect a three-dimensional form of a plurality of articles when scanning an image without having to perform scanning operations from a plurality of locations, which is particularly advantageous in high production processes, i.e., in the need to test surface roughness In the program of degrees and defects, etc.

從當前最先進技術,此等表面高度測量最頻繁地藉助於一雷射線及一高速相機而執行,較佳地使用一雷射三角測量技術。該雷射線引導至所測量之表面,且該相機(其在指定角度之下引導)在一座標(在一位置)中記錄所測量之區域的輪廓,使得該雷射將其點亮。個別的影像以對應於該雷射光束之寬度的頻率記錄,且接著組成所有影像。使用此程序,可組成一3D模型。From current state of the art technology, such surface height measurements are most frequently performed by means of a lightning ray and a high speed camera, preferably using a laser triangulation technique. The lightning ray is directed to the surface being measured, and the camera (which is guided below the specified angle) records the contour of the measured area in a landmark (in a position) such that the laser illuminates it. Individual images are recorded at a frequency corresponding to the width of the laser beam and then all images are composed. Use this program to form a 3D model.

另一方法係使用多種相機,其等從多種角度引導至測試之區域。從測試器內之相機的已知三角法,可組成一3D模型。Another method uses a variety of cameras that are directed from a variety of angles to the area of the test. A 3D model can be formed from the known trigonometry of the camera in the tester.

一進一步方法係使用莫爾(Moiré)效應,藉助於該莫爾效應,在某些情況下,可使得測試區域之形貌可見。影像經兩個總是呈相反的亮度之柵格而產生。在兩個影像組合之後,當使用干涉效應時,該表面之形貌被反射。A further method uses the Moiré effect, by means of which the morphology of the test area can be made visible in some cases. The image is produced by two grids that are always in opposite brightness. After the two images are combined, the surface topography is reflected when an interference effect is used.

文件WO 02/082009 A1教示使用由物件反射之光的色彩資訊測量一感測器與一產品之間之一距離的一方法及一裝置。該三維表面之色彩分佈與該物件之表面的一高度位準相關,使得可使用色彩資訊以分析該物件之表面的三維結構。白光源可為一鎢燈或具有單一波長之複數個光束之多個多色彩光源的一組合。Document WO 02/082009 A1 teaches a method and a device for measuring the distance between a sensor and a product using the color information of the light reflected by the object. The color distribution of the three-dimensional surface is related to a height level of the surface of the object such that color information can be used to analyze the three-dimensional structure of the surface of the object. The white light source can be a combination of a tungsten lamp or a plurality of multi-color sources having a plurality of beams of a single wavelength.

吾人可從JP 61 075210 A學習一測距儀裝置,其中一光源之光繞射成一多色彩光束,照亮一物件之一表面。由兩個不同濾光器過濾之該物件之表面反射之光的信號強度比率可使用於測量該物件之表面與該相機之間之角度及距離。From JP 61 075210 A, we can learn a range finder device in which the light of a light source is diffracted into a multi-color beam to illuminate one surface of an object. The signal intensity ratio of the light reflected by the surface of the object filtered by two different filters can be used to measure the angle and distance between the surface of the object and the camera.

最後,JP 7 117399 B揭示定義一般當前最先進技術之另一距離感測裝置。Finally, JP 7 117 399 B discloses another distance sensing device that defines the most current state of the art.

從當前最先進技術已知之方法並不允許獲得具有小於+/- 20 μm之一精確度的表面高度資訊。此外,一測試之產品的一最大掃描寬度被限制,使得掃描寬於150 mm的產品不可行。該掃描速度被限制,因此使得一高速生產程序之 表面測量到達一瓶頸。Methods known from current state of the art techniques do not allow obtaining surface height information having an accuracy of less than +/- 20 μm. In addition, a maximum scan width of a tested product is limited, making it impossible to scan products wider than 150 mm. The scanning speed is limited, thus making a high-speed production process The surface measurement reaches a bottleneck.

結果本發明之一目的係提供以高精確度、高速、可變測量解析度及以一增加之y寬度測量及檢查一產品之一表面的一方法及一器件。此外,本發明之一目的係提供可執行一自動校準的一方法及一器件,因此消除高精確度結構構造及複雜校準之工作。Summary One object of the present invention is to provide a method and apparatus for measuring and inspecting the surface of a product with high accuracy, high speed, variable measurement resolution, and an increased y width. Moreover, it is an object of the present invention to provide a method and a device for performing an automatic calibration, thereby eliminating the task of high precision structural construction and complex calibration.

上文提及之當前最先進技術之問題由根據獨立技術方案的一器件及一方法解決。有利的實施例係附屬技術方案之標的。The problems of the current state of the art mentioned above are solved by a device and a method according to the independent technical solution. Advantageous embodiments are the subject matter of the accompanying technical solutions.

本發明提供用於光學測量一測試產品之表面的一器件,其能夠執行一產品之表面的一檢查,一組件對準檢查或在一回焊焊接程序之前焊錫膏配置的一檢查,且其能夠建立該產品表面的一光學3D模型。該器件包括以下組件:The present invention provides a device for optically measuring the surface of a test product capable of performing an inspection of a surface of a product, a component alignment inspection or an inspection of a solder paste configuration prior to a reflow soldering process, and capable of An optical 3D model of the surface of the product is created. The device includes the following components:

˙一白色光源,其有利地發射具有一連續光譜的一白色光束。該光由一準直單元(包含光學構件,諸如透鏡、孔隙構件等等)調準成一平行、較窄且準直之光束,其接著經過一分光計單元,該分光計單元較佳地為一光學稜鏡或一繞射光柵。較佳地,該孔隙構件包括一狹縫光闌,其用於產生一平坦及較寬擴大的白色光束。A white light source that advantageously emits a white light beam having a continuous spectrum. The light is aligned by a collimating unit (including optical components such as lenses, aperture members, etc.) into a parallel, narrow, and collimated beam that is then passed through a spectrometer unit, which is preferably an optical稜鏡 or a diffraction grating. Preferably, the aperture member includes a slit aperture for producing a flat and wide expanded white light beam.

˙一分光計單元,尤其係一光學稜鏡,將該白光之一分解調解成包括一較寬頻率光譜之光的一多色彩光束。進入該稜鏡之該多色彩光含有該白光所選擇之或所有 色彩成分。在經過該分光計單元之後,該白光根據光折射法則分解成個別的色彩。該等個別成分係具有不同色調值的單色,因此該多色彩光束包括被空間分佈的一光譜,且以一掃描方向照亮在測試之下的一產品之一表面。此光譜之寬度直接影響該產品表面之一z軸高度之測量精確度。A spectrometer unit, in particular an optical unit, decomposes one of the white lights into a multi-color beam comprising light of a wider frequency spectrum. The multi-color light entering the 含有 contains the selected or all of the white light Color composition. After passing through the spectrometer unit, the white light is decomposed into individual colors according to the law of light refraction. The individual components are monochromatic with different tonal values, such that the multi-color beam comprises a spatially distributed spectrum and illuminates the surface of one of the products under test in a scanning direction. The width of this spectrum directly affects the measurement accuracy of one of the z-axis heights of the surface of the product.

˙一相機,較佳地為一線型掃描相機。該相機逐行逐漸記錄所測試之表面,同時該測試中產品以一x軸掃描方向相對於該相機移動。在記錄之整個時間,該相機及該光源之幾何位置保持不變。該相機及該光逐行調整至零高度(地面)使得該相機顯示該光譜之起始,即,紅色。所有非零高度接著以其等在該色彩光譜內的另一色彩顯示。其中應指出,該測試中產品相對於白光源、分光計單元及相機而移動,或白光源、分光計單元及相機相對於該測試中產品而相對移動。A first camera, preferably a one-line scanning camera. The camera progressively records the surface being tested progressively while the product is moving relative to the camera in an x-axis scan direction. The geometric position of the camera and the source remains the same throughout the recording. The camera and the light are adjusted line by line to zero height (ground) such that the camera displays the beginning of the spectrum, i.e., red. All non-zero heights are then displayed in another color within the color spectrum. It should be noted that in this test the product moves relative to the white light source, the spectrometer unit and the camera, or the white light source, the spectrometer unit and the camera move relative to the product under test.

換句話說,用於光學測量一測試產品之表面的器件(尤其用於回焊焊錫膏檢查之一PCB產品檢查)包括用於發射一束白光之至少一個白光源,用於準直該白色光束之至少一個準直單元,至少一個分光計單元,較佳地為一光學稜鏡或一光學繞射光柵,以將該白色光束分裂成多色彩光的一光束,其在一預定入射角γ之下引導至該測試產品上,及至少一個相機,其用於記錄該測試產品之單色光的一反射光束。以此方式,該測試產品之一z軸表面高度資訊可從該單色光之該反射光束之一色調值處提取,同時以一x軸 掃描方向相對地移動該測試產品。In other words, a device for optically measuring the surface of a test product (especially one of the PCB product inspections for reflow solder paste inspection) includes at least one white light source for emitting a white light for collimating the white light beam At least one collimating unit, at least one spectrometer unit, preferably an optical chirp or an optical diffraction grating, to split the white beam into a beam of multi-color light at a predetermined angle of incidence γ Down to the test product, and at least one camera for recording a reflected beam of monochromatic light of the test product. In this way, one of the z-axis surface height information of the test product can be extracted from the tone value of the reflected light beam of the monochromatic light, and at the same time, an x-axis The scanning direction relatively moves the test product.

根據本發明,該白光源係一LED帶,其經調適以產生一白光帶狀光束。至少一個微透鏡光學耦接至至少一個LED,以預調準該白色光束,且該準直單元經調適以在360°中以3°、2°或更小的一準直品質準直該白色光束,以形成垂直於該掃描方向之一白光帶狀光束,且包括至少一個透鏡,較佳地為一柱狀透鏡及至少一個孔隙構件,較佳地為一可調整狹縫光闌孔隙。In accordance with the present invention, the white light source is an LED strip that is adapted to produce a white strip light beam. At least one microlens is optically coupled to the at least one LED to pre-align the white light beam, and the collimating unit is adapted to collimate the white at 360° with a collimating quality of 3°, 2° or less The light beam is formed to form a white light strip beam perpendicular to the scanning direction and includes at least one lens, preferably a cylindrical lens and at least one aperture member, preferably an adjustable slit aperture.

因此,該準直單元較佳地至少將該光準直至在所有方向中3°、2°或更小的一準直品質。對比於平行光,準直之光建立所有色彩/色調值之高度平行的光束。該準直單元可包括光學調準構件,諸如透鏡、孔隙或鏡面,以在360°中準直該光。從該準直之光,一多色彩光譜之光線由該分光計單元形成,其中該等個別色彩及/或色調值以一可彼此區別之方式展現。可使用一光混合構件而引導該光,例如一孔隙或一光纖。Therefore, the collimating unit preferably at least aligns the light to a collimating quality of 3°, 2° or less in all directions. In contrast to parallel light, collimated light creates highly parallel beams of all color/tone values. The collimating unit can include an optical alignment member, such as a lens, aperture or mirror, to collimate the light in 360°. From the collimated light, a multi-color spectrum of light is formed by the spectrometer unit, wherein the individual color and/or tonal values are presented in a manner distinguishable from one another. The light can be directed using a light mixing member, such as a aperture or an optical fiber.

再者或另外,該準直單元可直接置於一光源之後,且可包括以一附接之機械隧道預準直光的透鏡,其中該隧道過濾未準直之光。以此方式,減小該準直單元之複雜性,且該隧道之長度及直徑決定該光之準直品質。該隧道可具有一任意橫截面,例如一矩形、圓形或橢圓橫截面,且其長度可經調適至一期望準直品質。該光由該等透鏡聚焦至該隧道中,且該隧道吸收該等未準直之部分。在該隧道之末端提供具有一定義之開口角的一準直光-由該隧道之半徑 及長度定義。可提供一單一隧道或複數個隧道,使得該準直單元可包括配置於一列中的一單一隧道/通道/LED或多個隧道/通道/LED。提供機械調整構件可為有利的,以調整該隧道之長度、高度及/或寬度,以適應性調整準直品質,例如,用於改變該隧道之長度、寬度及/或高度的一伸縮式隧道組態。Alternatively or additionally, the collimating unit can be placed directly behind a light source and can include a lens that pre-collimates light with an attached mechanical tunnel, wherein the tunnel filters uncollimated light. In this way, the complexity of the collimating unit is reduced, and the length and diameter of the tunnel determine the collimating quality of the light. The tunnel can have an arbitrary cross section, such as a rectangular, circular or elliptical cross section, and its length can be adapted to a desired collimation quality. The light is focused by the lenses into the tunnel and the tunnel absorbs the unaligned portions. Providing a collimated light having a defined opening angle at the end of the tunnel - the radius of the tunnel And length definition. A single tunnel or a plurality of tunnels may be provided such that the collimating unit may include a single tunnel/channel/LED or multiple tunnels/channels/LEDs arranged in a column. It may be advantageous to provide a mechanical adjustment member to adjust the length, height and/or width of the tunnel to adaptively adjust the collimation quality, for example, a telescopic tunnel for varying the length, width and/or height of the tunnel. configuration.

根據一有利實施例,該白光源可具有一連續光譜。另外或再者,該光譜之頻率頻寬可為可變的,較佳地在350 nm至850 nm(紫外線至紅外線)之一波長範圍內。另外或再者,該白光源之強度可為可調整的,較佳地藉由調暗該光源或藉由選擇性地將兩個或多個光源並行切換為開啟或關閉。According to an advantageous embodiment, the white light source can have a continuous spectrum. Additionally or alternatively, the frequency bandwidth of the spectrum can be variable, preferably in the range of one wavelength from 350 nm to 850 nm (ultraviolet to infrared). Additionally or alternatively, the intensity of the white light source can be adjustable, preferably by dimming the light source or by selectively switching two or more light sources in parallel to turn on or off.

根據本發明之另一有利實施例,由一LCD投影機、一視訊投影機或可產生一束多色彩光之另一視訊成像器件可展現一白光源、一準直單元及一分光計單元之一總體。因為此一投影機通常包括一白色光束、用於調準及準直該白色光束之一準直單元及一分光計單元,例如用於將該白色光束轉換成一多色彩光束的一多色彩LCD。一多色彩光束之通常規範,諸如由一LCD投影機產生之亮度、開口角、該色彩光束之不同部分之寬度等等可容易地由一影像控制單元控制,以產生具有不同色彩寬度解析度的一多色彩光束,使得可容易地控制一測量精確度。此外,此LCD投影機可產生100 fps(每秒訊框數)或甚至更多,以適應性地改變該光束之形狀。一投影機可容易地與一面型或一線型掃 描相機組合,以提供本發明之一實施例。According to another advantageous embodiment of the present invention, a white light source, a collimating unit and a spectrometer unit can be displayed by an LCD projector, a video projector or another video imaging device capable of generating a multi-color light. A whole. Because the projector typically includes a white light beam, a collimating unit for aligning and collimating the white light beam, and a spectrometer unit, such as a multi-color LCD for converting the white light beam into a multi-color light beam. . A general specification of a multi-color beam, such as brightness produced by an LCD projector, opening angle, width of different portions of the color beam, etc., can be easily controlled by an image control unit to produce resolutions having different color widths. A multi-color beam makes it easy to control a measurement accuracy. In addition, the LCD projector can produce 100 fps (frames per second) or even more to adaptively change the shape of the beam. A projector can be easily scanned with a side or a line A camera combination is provided to provide an embodiment of the present invention.

根據本發明,該白光源經調適以產生一白光帶狀光束,且該光源係一LED光源,較佳地為一LED帶,其中至少一個微透鏡光學耦接至至少一個LED,以預調準該白色光束。另外或再者,一LED帶的多個LED可選擇性地切換為開啟或關閉,以在垂直於該掃描方向的一y軸方向上增強一白色光束的強度及/或長度。另外或再者,一LED帶可包括多個不同色彩之LED,以將多色彩之光混合成一白色光束,以提供該白色光束之一可調整之頻率光譜。較佳地,該LED帶包括一個或多個LED。LED產生一未準直之光,其在所有方向上輻射,因此該光之輻射需要根據該LED帶之結構預調準。According to the present invention, the white light source is adapted to generate a white light strip beam, and the light source is an LED light source, preferably an LED strip, wherein at least one microlens is optically coupled to the at least one LED for pre-alignment The white light beam. Additionally or alternatively, the plurality of LEDs of an LED strip can be selectively switched on or off to enhance the intensity and/or length of a white light beam in a y-axis direction perpendicular to the scan direction. Additionally or alternatively, an LED strip can include a plurality of LEDs of different colors to mix the multi-colored light into a white light beam to provide an adjustable frequency spectrum of the white light beam. Preferably, the LED strip comprises one or more LEDs. The LED produces an uncollimated light that radiates in all directions, so the radiation of the light needs to be pre-aligned according to the structure of the LED strip.

該光帶可經調適成一期望掃描寬度,使得該器件可用不同y軸寬度檢查產品。有利地,該光帶可具有一最大掃描寬度之一寬度,其中該「較長」白色光束可由一無視差光學器件適應性地聚焦成一「較短」白色光束。例如,此一光帶可具有y軸方向上的450 mm至600 mm的一長度,且該白光之該平坦光束之長度可由一無視差光學器件而聚焦至150 mm的一長度。z高度解析度可由一可變孔隙寬度、該分光計單元之分光角度或分光計單元從該表面之距離而調適。歸因於z高度解析度之可變性,可達成不同掃描解析度。該光帶之y寬度可藉由使用鏡面、光導元件(諸如光纖或透鏡等等)而擴大。The strip can be adapted to a desired scan width so that the device can inspect the product with different y-axis widths. Advantageously, the strip of light can have a width of one of the largest scan widths, wherein the "longer" white beam can be adaptively focused by a non-parallax optic into a "shorter" white beam. For example, the strip of light may have a length of 450 mm to 600 mm in the y-axis direction, and the length of the flat beam of white light may be focused by a non-parallax optic to a length of 150 mm. The z height resolution may be adapted by a variable aperture width, the splitting angle of the spectrometer unit, or the distance of the spectrometer unit from the surface. Due to the variability of the z-height resolution, different scan resolutions can be achieved. The y width of the strip can be enlarged by the use of mirrors, light guiding elements such as optical fibers or lenses, and the like.

一光帶亦可藉由使用一物鏡及/或一柱狀透鏡而從一準 確光源處產生。藉此,不同玻璃之選擇可調整不同折射率,且可增強一無視差之影像。A light strip can also be obtained from a standard by using an objective lens and/or a cylindrical lens It is true that the light source is generated. Thereby, the choice of different glasses can adjust different refractive indices and enhance the image without parallax.

LED通常產生非同質分佈之白光。因此,混合不同種類之白色或多色彩LED以產生一同質白光光譜可為有利的。此一混合物可藉由使用透鏡、鏡面、玻璃光纖光學器件或類似物而達成。此外,對於額外光束可並行使用許多光帶,以增強掃描速度。LEDs typically produce a non-homogeneous distribution of white light. Therefore, it may be advantageous to mix different types of white or multi-colored LEDs to produce a homogeneous white light spectrum. This mixture can be achieved by using lenses, mirrors, glass fiber optics or the like. In addition, many bands of light can be used in parallel for additional beams to enhance scanning speed.

該白光之品質可藉由將一偏振濾光器元件整合至該白光源中以減少反射效應而進一步增強,且對於照亮金屬/非金屬表面尤其有利。總之,該白光之品質可藉由以下而增強:˙可變孔隙尺寸;˙該白色光束之光譜同質性;˙用於減少陰影效果之無視差光學器件;˙光學構件,用於在y方向上調適光帶長度至孔隙長度;˙光強度控制構件,用於調整表面反射效應;˙可調整光帶長度,用於調適掃描寬度至產品尺寸。The quality of the white light can be further enhanced by integrating a polarizing filter element into the white light source to reduce reflection effects, and is particularly advantageous for illuminating metallic/non-metallic surfaces. In summary, the quality of the white light can be enhanced by: ̇ variable pore size; 光谱 spectral homogeneity of the white beam; 无 non-parallax optics for reducing shadow effects; ̇ optical components for y-direction Adjust the length of the strip to the length of the aperture; the intensity control component for adjusting the surface reflection effect; ̇ adjust the length of the strip to adjust the scan width to the product size.

根據另一有利實施例,該準直單元可經調適以在360°準直該白色光束,且可經調適以形成垂直於該掃描方向的一白光帶狀光束,且可較佳地包括至少一透鏡及/或一準直柵格及/或至少一孔隙構件,較佳地為一可調整狹縫光闌孔隙構件。According to a further advantageous embodiment, the collimating unit can be adapted to collimate the white light beam at 360° and can be adapted to form a white light strip beam perpendicular to the scanning direction, and can preferably comprise at least one The lens and/or a collimating grid and/or at least one aperture member is preferably an adjustable slit aperture aperture member.

根據另一有利實施例,該器件亦可包括一掃描傳輸構 件,以在一掃描方向上相對地傳輸該測試產品或該光源、分光計單元、準直單元及相機。According to another advantageous embodiment, the device may also comprise a scan transmission structure And transmitting the test product or the light source, the spectrometer unit, the collimating unit, and the camera relatively in a scanning direction.

根據另一有利實施例,該相機可為一線型掃描相機,較佳地包括一相機孔隙單元及/或一視差透鏡單元,以減小視差效應,尤其一柱狀透鏡或一圓形透鏡單元,以接收來自該測試產品之該多色彩光束反射的一單色光束。另外或再者,該相機可為具有至少8位元色調解析度之一數位相機,較佳地為一可調整之10、12位元或更高之色調解析度。另外或再者,該相機可包括兩個或多個線掃描列,每一列包括用於增加色調敏感度的一色彩濾光器。另外或再者,該相機可包括至少一個灰色或黑色/白色掃描列,以增強掃描品質。或者,該相機可為一面型掃描相機,藉此可提取該掃描區域之單一或多個掃描列,用於色調高度資訊處理。此一面型相機可較佳地具有1500列或更多,且可使用於低至20 μm之解析度。有利地,該相機包括兩個或多個掃描線,在該等兩個或多個掃描線之前具有不同色彩濾光器元件,由該等不同色彩濾光器元件增強每一掃描線之敏感度至不同色調值。According to another advantageous embodiment, the camera may be a line scan camera, preferably comprising a camera aperture unit and/or a parallax lens unit to reduce parallax effects, in particular a lenticular lens or a circular lens unit. To receive a monochromatic beam of light reflected from the multi-color beam of the test product. Additionally or alternatively, the camera can be a one-digit camera having at least 8-bit tonal resolution, preferably an adjustable tone resolution of 10, 12 or higher. Additionally or alternatively, the camera may include two or more line scan columns, each column including a color filter for increasing hue sensitivity. Additionally or alternatively, the camera can include at least one gray or black/white scan column to enhance scan quality. Alternatively, the camera can be a side scan camera whereby one or more scan columns of the scan area can be extracted for tone height information processing. This one-sided camera can preferably have 1500 columns or more and can be used for resolutions as low as 20 μm. Advantageously, the camera comprises two or more scan lines having different color filter elements in front of the two or more scan lines, the sensitivity of each scan line being enhanced by the different color filter elements To different tonal values.

在一有利實施例中,該相機可為一CIS相機。一接觸影像感測器(CIS)係允許製造不由該相機感測器限制之一掃描寬度的一技術。接觸影像感測器(CIS)在光學平板掃描器之領域中使用係理想的,且在較低電力及可攜式應用中快速替換CCD。在一CIS相機中,該影像感測器與將被掃描之物件幾乎直接接觸而放置,這不同於使用鏡面以將光 彈回一固定感測器之習知的CCD掃描器中之情況。一CIS通常由一線性陣列之偵測器組成,由一聚焦透鏡遮蓋,且由紅色、綠色及藍色LED在側面包圍以照明。使用LED允許該CIS具較高功率效率,允許掃描器經由一USB連接供應之最小線電壓而供電。基於CIS的一相機感測器比一CCD線型感測器更小且更輕,且允許所有必需的光學元件包含於一緊湊模組中,因此幫助簡單化該掃描器之內部結構。由於一CIS接觸感測器,該相機之高度可為約30 mm或更小。該CIS相機可在中間沒有一空間之下添加,且因此以米之寬度的檢查係可行的。該感測器移動至在測試之下之器件(DUT)且該光(由稜鏡準直及分裂)可在越過全部寬度之前如所描述般放置。此允許檢查具有一幾乎未限制之寬度的非常大的器件。In an advantageous embodiment, the camera can be a CIS camera. A contact image sensor (CIS) allows the fabrication of a technique that does not limit the scan width of one of the camera sensors. Contact Image Sensors (CIS) are ideal for use in the field of optical flatbed scanners and quickly replace CCDs in lower power and portable applications. In a CIS camera, the image sensor is placed in almost direct contact with the object to be scanned, which is different from using a mirror to light The situation in a conventional CCD scanner that bounces back to a fixed sensor. A CIS typically consists of a linear array of detectors, covered by a focusing lens, and surrounded by red, green, and blue LEDs for illumination. The use of LEDs allows the CIS to be more power efficient, allowing the scanner to be powered via the minimum line voltage supplied by a USB connection. A CIS-based camera sensor is smaller and lighter than a CCD line sensor and allows all necessary optical components to be contained in a compact module, thus helping to simplify the internal structure of the scanner. The height of the camera can be about 30 mm or less due to a CIS contact sensor. The CIS camera can be added without a space in the middle, and thus inspections in the width of meters are feasible. The sensor moves to the device under test (DUT) and the light (collimated and split by 稜鏡) can be placed as described before crossing the full width. This allows inspection of very large devices with an almost unrestricted width.

歸因於垂直於一x軸掃描移動方向之一相機之一較大y掃描寬度,一掃描之影像可包括視差相關之誤差。在產品表面與相機之間的一視線中使用視差透鏡,但亦在白光源與分光計單元之間,允許矯正視差誤差,因此能夠在沒有較高品質之下的一產品之一3D掃描。一視差透鏡系統應該矯正所有波長之不同光繞射特性。該透鏡系統可包括長度延伸之柱狀透鏡,但亦包括圓形透鏡。當使用一線型掃描相機時,柱狀透鏡可為有利的。Due to the larger y scan width of one of the cameras perpendicular to one of the x-axis scan directions of movement, a scanned image may include parallax related errors. A parallax lens is used in a line of sight between the surface of the product and the camera, but also between the white light source and the spectrometer unit, allowing parallax errors to be corrected, thus enabling 3D scanning of one of the products without higher quality. A parallax lens system should correct for different light diffraction characteristics at all wavelengths. The lens system can include a lenticular lens of length extension, but also includes a circular lens. A lenticular lens can be advantageous when using a one-line type scanning camera.

z高度解析度之程度係該光譜光之反射色調值及該相機之色彩解析度精確度之一組合的一結果。一單一CCD晶片、多CCD晶片、CCD線型相機或其他數位相機通常可提 供至少8位元至10位元的色彩解析度每像素,通常為16位元至32位元,尤其為24位元至30位元或更多。調整該相機之色彩解析度可增加測量解析度。使用不同數目之相機線掃描可為另一可能之縮放測量解析度。例如,可使用一個二線型相機,且該相機可聚焦於兩個或多個不同色彩區域,使得可達成一可縮放解析度。相機線之數目亦可增加至四個或甚至更多掃描線,其中不同色彩濾光器可指派至個別的相機線列,因此增強解析度精確度。The degree of z-height resolution is a result of a combination of the reflected tonal value of the spectral light and the color resolution accuracy of the camera. A single CCD chip, multiple CCD chip, CCD line camera or other digital camera can usually be mentioned A color resolution of at least 8 to 10 bits per pixel, typically 16 to 32 bits, especially 24 to 30 bits or more. Adjusting the color resolution of the camera increases the measurement resolution. Scanning with a different number of camera lines can measure the resolution for another possible zoom. For example, a two-line camera can be used, and the camera can focus on two or more different color regions so that a scalable resolution can be achieved. The number of camera lines can also be increased to four or even more scan lines, where different color filters can be assigned to individual camera line columns, thus enhancing resolution accuracy.

使用可掃描該測試產品之一表面區域(代替掃描垂直於一x軸掃描移動方向的一y軸表面線的一線型相機)的一面型相機或多個線型相機亦可有利地使用為一掃描相機。由該表面區域產生之影像之個別線可被提取為多個掃描列,藉此一增加數目之提取列可增加測量精確度。此外,一掃描速度可藉由一次提取多個掃描列而增加。A side camera or a plurality of line cameras that can scan a surface area of the test product (instead of scanning a one-line camera that is perpendicular to a x-axis surface of the x-axis scanning movement direction) can also be advantageously used as a scanning camera. . The individual lines of the image produced by the surface area can be extracted into a plurality of scan columns, whereby an increased number of extracted columns can increase measurement accuracy. In addition, a scan speed can be increased by extracting a plurality of scan columns at a time.

一相機可包括一個或多個色彩敏感之掃描列及至少一個白色/黑色或灰色掃描列。因而,該黑色/白色或灰色掃描列可掃描該產品表面之一2D影像,以提供該產品之x/y尺寸。該色彩掃描列提供該產品表面之z高度之色調資訊,使得在一掃描程序中可提取該產品之x/y及z尺寸值。尤其若一產品之一表面充滿裂縫,一2D影像提供關聯z資料的確切x/y尺寸,以區別該產品之表面區域。A camera may include one or more color sensitive scan columns and at least one white/black or gray scan column. Thus, the black/white or gray scan column can scan a 2D image of the surface of the product to provide the x/y size of the product. The color scan column provides hue information for the z-height of the surface of the product such that the x/y and z-size values of the product can be extracted in a scanning procedure. In particular, if one of the surfaces of the product is full of cracks, a 2D image provides the exact x/y size of the associated z-data to distinguish the surface area of the product.

使用包括一處理單元的一相機可為有利的,該處理單元用於基於一色調高度圖的校準資料而直接將色調值轉換成z高度值。因此,該相機之處理單元可直接將相機RAW資 料轉換成z高度資料,其可傳輸至一控制單元。此外,該處理單元可使用不同校準常式,諸如亮度提取,以HIS資料(色調、飽和度、強度)之RGB轉換,基於列資料捕獲及列轉移計算的幾何校準等等。因此,該相機可直接輸出z高度測量資料,其中該相機可提供該掃描之產品之3D區域資料。It may be advantageous to use a camera comprising a processing unit for directly converting the tonal value to a z-height value based on calibration data of a tone height map. Therefore, the processing unit of the camera can directly CCD the camera The material is converted into z-height data which can be transferred to a control unit. In addition, the processing unit can use different calibration routines, such as luminance extraction, RGB conversion of HIS data (hue, saturation, intensity), geometric calibration based on column data capture and column transfer calculations, and the like. Therefore, the camera can directly output z-height measurement data, wherein the camera can provide 3D area data of the scanned product.

根據另一有利實施例,至少兩個或多個相機可以垂直於該x掃描方向的一y軸方向配置以並行掃描,因此增強該產品之掃描寬度。另外或再者,該等兩個或多個相機可以立體測量而配置,以3D掃描該產品,以減少陰影及照明效應。在垂直於一掃描方向的一掃描列中配置兩個或甚至更多相機可增加掃描寬度,因此能夠具有高速的較大產品之掃描。使用聚焦於某一線或該產品表面上的兩個或多個相機之一立體測量配置可減小陰影效果,此可因此增加測量精確度。According to a further advantageous embodiment, at least two or more cameras can be arranged perpendicular to the y-axis direction of the x-scan direction for parallel scanning, thus enhancing the scan width of the product. Additionally or alternatively, the two or more cameras can be configured for stereo measurement to scan the product in 3D to reduce shadowing and illumination effects. Configuring two or even more cameras in a scan column perpendicular to a scan direction increases the scan width and thus enables scanning of larger products at high speeds. Using a stereo measurement configuration that focuses on one line or two or more cameras on the surface of the product can reduce the shadowing effect, which can therefore increase measurement accuracy.

根據另一有利實施例,該器件可進一步包括一控制單元,其至少與該相機電連接,該控制單元可包括控制構件及色調高度映射構件,其等經調適以至少控制該相機且映射由該相機捕獲之一影像之色調值,以獲得該產品之表面高度資訊。According to a further advantageous embodiment, the device may further comprise a control unit electrically coupled to at least the camera, the control unit comprising a control member and a tone height mapping member adapted to at least control the camera and mapped by the The camera captures the tonal value of one of the images to obtain surface height information for the product.

根據另一有利實施例,該器件可進一步包括調整構件,其可由該控制單元之該控制構件控制,以調整該多色彩光束之色彩光譜寬度d,尤其用於調整該準直單元之一電樞寬度w,及/或用於調整一光束分裂高度b,在源之光線與 相機之間之一距離a或該分光計單元之稜鏡角α,以調整高度測量敏感度。According to a further advantageous embodiment, the device may further comprise an adjustment member controllable by the control member of the control unit to adjust the color spectral width d of the multi-color beam, in particular for adjusting an armature of the collimating unit Width w, and / or used to adjust a beam splitting height b, at the source of the light One of the distances between the cameras a or the angle α of the spectrometer unit to adjust the height measurement sensitivity.

此外,增加該光譜光之強度以在該分光計單元之後放置一消色差透鏡單元可為有利的。一消色差單元或消色差透鏡可為一鏡面或一透鏡,其經設計以限制色差及球面像差之效應。消色差單元經矯正以將兩個波長(通常為紅色及藍色)帶入至相同平面內聚焦。該額外消色差透鏡單元可將該光譜光聚焦至一較小高度,因此可藉以產生該高度解析度。該消色差透鏡單元可為一最終透鏡(消色差透鏡)或可為一凸面鏡。一鏡面在減少由不同光波長之不同折射率引起之消色差透鏡繞射問題上可為有利的。不同鏡面形狀可提供不同光高度位準,此亦可為可調整的,例如,藉由替換鏡面。在該光路上的一第二孔隙單元(例如,在兩個遠心透鏡之間或在該分光計單元或稜鏡之前)可進一步最佳化該光品質,使得所抓取的一圖像在品質上改良,因此簡化圖像濾光且加速圖像處理時間。Furthermore, it may be advantageous to increase the intensity of the spectral light to place an achromatic lens unit after the spectrometer unit. An achromatic unit or achromatic lens can be a mirror or a lens designed to limit the effects of chromatic aberration and spherical aberration. The achromatic unit is corrected to bring two wavelengths (usually red and blue) into the same plane for focusing. The additional achromatic lens unit can focus the spectral light to a small height so that the height resolution can be generated. The achromatic lens unit can be a final lens (achromatic lens) or can be a convex mirror. A mirror surface can be advantageous in reducing achromatic lens diffraction problems caused by different refractive indices of different light wavelengths. Different mirror shapes can provide different levels of light height, which can also be adjustable, for example, by replacing the mirror. The second aperture unit on the optical path (for example, between two telecentric lenses or before the spectrometer unit or 稜鏡) can further optimize the light quality such that the captured image is in quality Improved, thus simplifying image filtering and speeding up image processing time.

該測試產品的測量方法包括以下步驟:The measurement method of the test product includes the following steps:

˙以[mm]校準該高度之色彩標度。此藉由掃描該區域之下傾而執行,其中下傾之角度預先已知具有較高精確度。此下傾區域之影像將逐漸獲得整個光譜,且同時,在實際區域中之高度將從該下傾區域之幾何處已知。所依賴之色彩[R,G,B]之函數=函數(高度)[mm]將從其導出;校准 Calibrate the color scale of this height with [mm]. This is performed by scanning the region down, wherein the angle of the downtilt is known in advance to have a higher degree of precision. The image of this downdip region will gradually acquire the entire spectrum, and at the same time, the height in the actual region will be known from the geometry of the downtilt region. The function of the dependent color [R, G, B] = function (height) [mm] will be derived from it;

˙測試該掃描表面之組成。由該相機產生之該影像由個 別影像組成,該等影像顯示該測試產品之表面上的所有部分。x軸及y軸上的尺寸對應於所記錄之物品之實際尺寸。該物品之色彩反射對應於其在該表面上之高度。̇ Test the composition of the scanned surface. The image produced by the camera is composed of A separate image that displays all parts of the surface of the test product. The dimensions on the x-axis and the y-axis correspond to the actual dimensions of the recorded item. The color reflection of the item corresponds to its height on the surface.

˙接著,軟體計算(根據校準期間獲得之函數)實際高度(z軸)之個別像素之色彩成分[R,G,B]之確定值。Next, the software calculates (according to the function obtained during calibration) the determined value of the color component [R, G, B] of the individual pixels of the actual height (z-axis).

在當前測試之區域中,該軟體直接回報該等高度值(例如電容器之上面的區域)。In the area currently tested, the software directly reports the height values (eg, the area above the capacitor).

換句話說,使用根據前文所提及之技術方案之任一者的一器件而用於光學測量一測試產品之表面,尤其係用於一PCB產品之回焊焊錫膏檢查之本發明方法包括以下步驟: 一白色光束由該白光源發射,該白色光束由該準直單元調準及準直至經過該分光計單元的一平行較窄光束,該光束由該分光計單元分解至一色彩光譜。在該產品或其組件上的該多色彩光束之反射由該相機記錄。雖然以相對於該相機的一掃描方向移動該產品,一影像由該相機從顯示該產品之該表面上的所有部分之個別影像組成,且該影像在x軸及y軸方向上之尺寸對應於該產品之實際尺寸。同時,該影像之色調值,即,該等個別像素之色彩成分[R,G,B]的值指派至該產品之表面高度值。In other words, the method of the invention for optically measuring the surface of a test product using a device according to any of the above-mentioned technical solutions, in particular for the reflow solder paste inspection of a PCB product, comprises the following step: A white light beam is emitted by the white light source, the white light beam being aligned and aligned by the collimating unit until a parallel narrower beam passing through the spectrometer unit, the light beam being split by the spectrometer unit into a color spectrum. The reflection of the multi-color beam on the product or its components is recorded by the camera. While moving the product in a scanning direction relative to the camera, an image is composed of the camera from individual images of all portions of the surface on which the product is displayed, and the dimensions of the image in the x-axis and y-axis directions correspond to The actual size of the product. At the same time, the tonal values of the image, i.e., the values of the color components [R, G, B] of the individual pixels, are assigned to the surface height values of the product.

根據另一有利實施例,該色彩光譜之色調值對於z表面高度值之一色調高度映射可由具有高精確度之預先已知之一校準角度β的一校準本體之一表面下傾的至少一個逐漸記錄而校準,且可儲存於一色調高度映射構件之一色調高 度圖中。較佳地,該校準本體係一玻璃或陶瓷板或圓盤或由一有邊緣的材料製成。According to a further advantageous embodiment, the hue value mapping of the hue value of the color spectrum to the z-surface height value can be at least one progressive recording of a surface of a calibration body having a high degree of precision known in advance to one of the calibration angles β. Calibrated, and can be stored in one tone height mapping member In the graph. Preferably, the calibration system is a glass or ceramic plate or disk or is made of a material having an edge.

藉由掃描具有以預先已知之一校準角度β的一表面下傾的一校準本體而校準該測量器件,可省略複雜的校準動作,諸如該器件之高精確度機械調整及決定表面高度值之複雜方法。對於1 μm或更小的一解析度必需之一複雜機械校準將導致一非常昂貴且複雜之測量動作,且因此對於連續生產方法並不可用。表面高度識別與從該測試中產品之表面處反射之光的光譜色調相關。因為該相機像素之解析度被限制,該反射之光的光譜成分通常係混合的。該器件可藉由測量一校準本體之一下傾表面之一斜坡函數而校準,該校準本體以一校準角度β而下傾。此外,若該表面之曲率函數預先已知,則亦可使用該校準本體之一彎曲表面。從掃描一校準本體之一表面形貌,可建立一色調高度圖,能夠決定從一測量之色調值的一表面高度。為了增強該器件之校準品質,一校準常式可以不同校準角度及/或不同校準本體寬度而重複,藉此可基於該等不同校準常式的結果而計算一平均色調高度圖。該等不同校準角度之表面之不同反射之光譜光成分可根據該校準本體之彎曲函數而指派至不同z高度值。By scanning the measurement device with a calibration body having a surface down-tilt with a previously known calibration angle β, complex calibration actions can be omitted, such as high precision mechanical adjustment of the device and complexity of determining surface height values. method. One of the complex mechanical calibrations necessary for a resolution of 1 μm or less will result in a very expensive and complicated measurement action and is therefore not available for continuous production methods. The surface height identification is related to the spectral hue of the light reflected from the surface of the product in the test. Because the resolution of the camera pixels is limited, the spectral components of the reflected light are typically mixed. The device can be calibrated by measuring a ramp function of one of the tilting surfaces of a calibration body that is tilted down at a calibration angle β. Furthermore, if the curvature function of the surface is known in advance, one of the calibration bodies can also be used to bend the surface. From scanning a surface topography of a calibration body, a tone height map can be created that can determine a surface height from a measured tone value. To enhance the calibration quality of the device, a calibration routine can be repeated at different calibration angles and/or different calibration body widths, whereby an average tone height map can be calculated based on the results of the different calibration routines. The spectral light components of the different reflections of the surfaces of the different calibration angles can be assigned to different z-height values according to the bending function of the calibration body.

在一掃描程序期間,該高度資訊的一直接評估可從由該相機產生之影像資料(原始影像資料)之色調值處提取。因此,可產生該測試之相機之表面之一即時z高度輪廓,消除任何測量延遲,藉此該即時處理可使用一線處理方法較 佳地達成。During a scanning procedure, a direct evaluation of the height information can be extracted from the tonal values of the image data (original image data) produced by the camera. Therefore, an instant z-height profile of the surface of the camera of the test can be generated, eliminating any measurement delay, whereby the instant processing can be performed using a one-line processing method. Good land reached.

在一校準程序期間,在x軸掃描移動方向之該校準本體移動之步寬之一調適會影響該校準品質。選擇一較小步寬或較大步寬決定校準之品質及z高度測量解析度,使得可最佳化一SNR比率(訊雜比)。例如,具有100 mm×150 mm×5 mm(長度×掃描寬度×高度)之尺寸的一校準本體之一表面斜坡可用20 μm的一掃描步寬掃描,此導致5.000像素×7.500像素的一掃描資料數量,此需要儲存為色調高度圖,且其將一z高度解析度限制至5000高度值。將該步寬減小至1 μm導致100.000高度值的一z高度精確度解析度。該校準本體之表面的一進一步修改(例如遵循一預定義校準表面函數)可進一步增強解析度精確度。使用一預校準色調高度圖減少進一步掃描程序之資料處理工作,因此增強掃描時間,且根據該測量器件之機械精確度而減少約束。結果,可生成較不昂貴且更容易可行的一連續生產的測量器件。During one calibration procedure, one of the step widths of the calibration body movement in the x-axis scan direction of movement affects the calibration quality. Selecting a smaller step width or a larger step width determines the quality of the calibration and the z-height measurement resolution so that an SNR ratio (communication ratio) can be optimized. For example, a surface slope of a calibration body having a size of 100 mm × 150 mm × 5 mm (length × scan width × height) can be scanned with a scan step width of 20 μm, which results in a scan data of 5.000 pixels × 7.500 pixels. The quantity, which needs to be stored as a tone height map, and which limits a z height resolution to 5000 height values. Reducing the step width to 1 μm results in a z-high accuracy resolution of 100.000 height values. A further modification of the surface of the calibration body (e.g., following a predefined calibration surface function) may further enhance resolution accuracy. The use of a pre-calibrated tone height map reduces the data processing of further scanning procedures, thereby enhancing scan time and reducing constraints based on the mechanical accuracy of the measuring device. As a result, a continuously produced measuring device that is less expensive and more feasible can be produced.

根據另一有利實施例,該相機及該光源之幾何位置可在整個該掃描期間為靜止的,及/或在掃描期間可使用該色調高度圖而執行一即時色調高度映射。According to a further advantageous embodiment, the geometric position of the camera and the light source can be stationary throughout the scan, and/or an instant tone height map can be performed using the tone height map during the scan.

根據另一有利實施例,該相機可逐漸逐行記錄該產品之一表面之色調值,同時以一掃描方向對著該產品而相對移動該相機。According to another advantageous embodiment, the camera can progressively record the tonal value of one of the surfaces of the product progressively while simultaneously moving the camera relative to the product in a scanning direction.

根據另一有利實施例,該相機及該白光可經調整使得該色彩光譜之起始映射至零高度。另外或再者,由該相機記 錄之該等色調值可藉助於一校準函數而轉換(較佳地由一色調高度圖)至該產品或其組件之一實際表面高度。According to a further advantageous embodiment, the camera and the white light can be adjusted such that the start of the color spectrum maps to zero height. In addition or again, remembered by the camera The tonal values recorded can be converted (preferably from a tone height map) to the actual surface height of one of the products or components thereof by means of a calibration function.

根據另一有利實施例,可基於該相機之一影像之測量的x值及y值及基於該影像在該x軸及y軸上的色調值的z高度值而建立該產品之一3D模型。According to another advantageous embodiment, a 3D model of the product can be established based on the measured x and y values of one of the images of the camera and the z-height value based on the hue values of the image on the x-axis and the y-axis.

根據本發明之另一態樣,提出一上述之器件及一上述之方法之一實施例之一應用,其用於測量一產品之尺寸及/或用於構造該產品之一3D模型,尤其用於測量及檢查一PCB產品上之回焊焊錫膏之位置及高度及/或用於測量該產品之表面粗糙度。According to another aspect of the present invention, there is provided an application of one of the above-described devices and one of the above-described methods for measuring the size of a product and/or for constructing a 3D model of the product, particularly For measuring and inspecting the position and height of reflow solder paste on a PCB product and/or for measuring the surface roughness of the product.

表面粗糙度可使用具有較高z高度精確度及一較窄寬度之多色彩光束的一自校準測量器件而測試。作為一校準本體,可使用具有表面粗糙度之一預定義值之一表面,取代具有以一校準角度β降低的一表面的一校準本體。因此,具有不同表面粗糙度值的不同校準本體需要根據該測量器件之一實施例而以不同z高度掃描,以校準該器件,用於表面粗糙度測量。所提取之色調高度圖可用於決定在不同z高度位準之表面的表面粗糙度。Surface roughness can be tested using a self-calibrating measurement device with a high z-height accuracy and a narrower width multi-color beam. As a calibrated body, a surface having one of a predefined value of surface roughness can be used instead of a calibrated body having a surface that is lowered by a calibration angle β. Therefore, different calibration bodies having different surface roughness values need to be scanned at different z-heights according to one embodiment of the measurement device to calibrate the device for surface roughness measurement. The extracted tone height map can be used to determine the surface roughness of the surface at different z-height levels.

本發明之標的之優點Advantages of the subject matter of the present invention

本發明之主要優點在簡單性、抵抗性及整合性之本發明解決方案中可見。用於幾何測試之該影像之記錄與物品之掃描一起在一步驟中實行。若並不必需執行該區域的一色彩測試,可在正常讀取該影像時直接實施一3D測試,其並不延長該測試時間。並不必要重新計算該3D模型或將其模 型化(如在其他系統之情況中),該物品之高度在該影像中被記錄色彩,且可直接讀取。在併入現存的系統之後,需要時間的進一步動作並不必要,本發明僅具有根據SW的最小要求,且其可使用為現存設備中的一額外模組。The main advantages of the present invention are seen in the solution of the invention of simplicity, resistance and integration. The recording of the image for the geometric test is carried out in one step together with the scanning of the item. If it is not necessary to perform a color test of the area, a 3D test can be directly performed when the image is normally read, which does not extend the test time. It is not necessary to recalculate the 3D model or mold it The type (as in the case of other systems), the height of the item is recorded in the image and can be read directly. After incorporating the existing system, further actions that require time are not necessary, the invention has only minimal requirements according to SW, and it can be used as an additional module in existing devices.

高度可變性及可用性源自測量之可容易調整的範圍,藉由該測量,可達成需要之測量精確度。測量之範圍由距離設定,或當該色彩光譜之寬度(及亦高度)變化時旋轉該光學稜鏡而設定,使得該測試之表面被照亮。因此,對於較小物品及其組件可達成以幾微米之測量精確度(測量範圍係幾十毫米-例如,電工組件)。The high degree of variability and availability is derived from the easily adjustable range of measurements by which the required measurement accuracy can be achieved. The extent of the measurement is set by the distance, or by rotating the optical cymbal as the width (and height) of the color spectrum changes, such that the surface of the test is illuminated. Thus, measurement accuracy of a few microns can be achieved for smaller items and their components (measurement range is tens of millimeters - for example, electrical components).

此設備之基礎係光學組件,因此,不會遭致磨損或老化。具有一受限使用壽命的唯一組件係光源;然而,在幾百至幾千小時之操作之間可具有變動。The basis of this equipment is optical components and, therefore, will not cause wear or aging. The only component that has a limited lifetime is a light source; however, there can be variations between operations of hundreds to thousands of hours.

本發明連同所提及之目的及優點及其他目的及優點可從下文之實施例之詳細描述中最佳地理解,但並不限制於此等實施例。The invention, together with the objects and advantages of the invention, and other objects and advantages are best understood from the following detailed description of the embodiments of the invention.

測量一測試產品以光學地建立一3D模型的一測試器件15之第一實施例展示於圖1a中,且包括一白光源1,其具有一連續光譜之白光,一光學單元4,其用於將該白光調準及準直至白光之一準直光束30,一作為分光計單元2之光學稜鏡,其用於將該白光之準直光束30分裂成一多色彩光束31,及一RGB線型掃描相機3。該光源1之光由該光學單元4準直至該準直白色光束30,其接著經過該光學稜鏡, 該光學稜鏡用作一分光計單元2,且將該分解之光調解至一多色彩光束31之光譜(圖5)。進入該稜鏡2之該準直白色光束30含有所有色彩元素。在通過該作為分光計單元2之光學稜鏡之後,該準直白色光束30根據光折射法則而分解成該多色彩光束31之個別之色彩。該等個別之光成分係單色的,因為個別之反射單色光束32係由一彩色光譜55發射出。該彩色光譜55之光譜寬度d 6直接影響z軸中之距離解析度。該線型相機3(單一列),其較佳地為一RGB或至少一兩色相機3,其逐漸逐行掃描該測試產品5之一表面,其在一x軸掃描方向9上移動。在整個掃描期間,該相機3及該反射單色光束32之幾何位置不變。該相機3及該反射單色光束32調整至零高度(地面)使得該相機3顯示該光譜55之起始7,即,紅色。所有非零高度以其等在該色彩光譜55內的另一色彩顯示。為調整該色彩光譜55之光譜寬度d 6,該準直單元4之孔隙尺寸係可調整的,因此可調整解析度品質及z值之測量範圍。該測試產品5係一PCB,其上配置許多電子組件16,諸如電容器、電晶體或IC。該測量器件15檢查該等電子組件16之一正確對準。A first embodiment of a test device 15 for measuring a test product to optically create a 3D model is shown in Figure 1a and includes a white light source 1 having a continuous spectrum of white light, an optical unit 4 for The white light is aligned and aligned until one of the white light collimated beam 30, one as an optical pupil of the spectrometer unit 2, for splitting the collimated beam 30 of white light into a multi-color beam 31, and an RGB line type Scan camera 3. The light of the light source 1 is collimated by the optical unit 4 up to the collimated white light beam 30, which then passes through the optical 稜鏡, The optical pickup is used as a spectrometer unit 2, and the decomposed light is adjusted to the spectrum of a multi-color beam 31 (Fig. 5). The collimated white light beam 30 entering the crucible 2 contains all of the color elements. After passing through the optical pupil as the spectrometer unit 2, the collimated white light beam 30 is decomposed into individual colors of the multi-color light beam 31 in accordance with the law of light refraction. The individual light components are monochromatic because the individual reflected monochromatic beams 32 are emitted by a color spectrum 55. The spectral width d 6 of the color spectrum 55 directly affects the resolution of the distance in the z-axis. The line camera 3 (single column), which is preferably an RGB or at least one color camera 3, progressively scans one surface of the test product 5 progressively in an x-axis scanning direction 9. The geometric position of the camera 3 and the reflected monochromatic beam 32 does not change during the entire scan. The camera 3 and the reflected monochromatic beam 32 are adjusted to zero height (ground) such that the camera 3 displays the beginning 7 of the spectrum 55, i.e., red. All non-zero heights are displayed in another color that is within the color spectrum 55. In order to adjust the spectral width d6 of the color spectrum 55, the pore size of the collimating unit 4 is adjustable, so that the measurement range of the resolution quality and the z value can be adjusted. The test product 5 is a PCB on which a number of electronic components 16, such as capacitors, transistors or ICs, are disposed. The measuring device 15 checks that one of the electronic components 16 is properly aligned.

測量該測試產品的方式包括許多步驟。第一步驟係校準該色彩光譜,用於高度的一距離轉換。此係藉由掃描一校準本體19之一表面區域之校準角度β 20而執行,其中該校準角度β 20預先已知且具有高精確度,見圖9。此下傾區域之影像將沿著該整個彩色光譜55逐漸延續,且同時,在該實際區域之高度將從該下傾高度之幾何形狀得知。所依 賴之色彩[R,G,B]之函數=函數(高度)[mm/μm]將從其導出。The manner in which the test product is measured includes a number of steps. The first step is to calibrate the color spectrum for a distance conversion of height. This is performed by scanning a calibration angle β 20 of a surface area of a calibration body 19, wherein the calibration angle β 20 is known in advance and has high accuracy, see FIG. The image of the downtilt region will continue along the entire color spectrum 55, and at the same time, the height of the actual region will be known from the geometry of the downtilt height. Dependent The function of the color [R, G, B] = function (height) [mm / μm] will be derived from it.

下一步驟係測試該掃描表面之組成。由該相機3產生之影像由個別影像組成,其等顯示該測試產品5之表面上的所有部分。x軸及y軸上的尺寸對應於所記錄之產品5之實際尺寸。該測試產品5之反射單色光束32對應於其在該表面上之高度。接著,一軟體計算(根據校準期間獲得之函數)個別像素之色彩成分[R,G,B]之確定值以求得實際高度(z軸)。在該實際測試區域中,該軟體直接回報該等高度值(例如電容器之上面的區域)。The next step is to test the composition of the scanning surface. The image produced by the camera 3 is composed of individual images, which display all portions of the surface of the test product 5. The dimensions on the x-axis and the y-axis correspond to the actual dimensions of the recorded product 5. The reflected monochromatic beam 32 of the test product 5 corresponds to its height on the surface. Next, a software calculates (according to the function obtained during calibration) the determined values of the color components [R, G, B] of the individual pixels to determine the actual height (z-axis). In the actual test area, the software directly reports the height values (eg, the area above the capacitor).

圖1b示意性繪示相機3、白光源1、準直單元4、分光計單元2及在測試之下的產品5的一特殊配置。該白光源1發射白光,其由該準直單元4準直至一準直之白色光束30。該準直之白色光束30由該分光計單元2分裂成一多色彩光束31,其中該多色彩光束31之中心撞擊該測試產品5之表面的點P3 。在點P3 處,一反射單色光束32垂直於該測試產品5的一平坦表面而反射至一相機3的一透鏡。白光源1之一光軸撞擊該產品5之表面的點P2 。點P1 定義該準直白色光束30至分光計單元2中的一入口點,其中該準直之白色光束30被折射且擴大至一多色彩光束31。點P1 、P2 及P3 定義一直角三角形,其中一角度γ定義入射角,該多色彩光束31以該入射角撞擊該產品之表面。此角度γ取決於該分光計單元2在該測試產品5之表面上方的該高度b(點P1 與P2 之間之距離)及白光源1之光軸與相機3之間之一距離a(點P2 與P3 之間之距離)。藉由改變a及b,此意味著改變入射角 γ,可調整表面的一測量解析度值。Figure 1b schematically shows a special configuration of the camera 3, the white light source 1, the collimation unit 4, the spectrometer unit 2 and the product 5 under test. The white light source 1 emits white light which is collimated by the collimating unit 4 up to a collimated white light beam 30. 30 of the collimated white light beam of the spectrometer unit 2 by a division into a plurality of color light beams 31, wherein the plurality of color center beam 31 strike the surface 5 of the test product a point P 3. At the point P 3, the reflected monochromatic beam 32 a perpendicular to the flat surface of a test product 5 is reflected to a lens of a camera 3. The optical axis of one of the white light sources 1 strikes the point P 2 of the surface of the product 5. Point P 1 defines the collimated white beam 30 to an entry point in the spectrometer unit 2, wherein the collimated white beam 30 is refracted and expanded to a multi-color beam 31. Points P 1 , P 2 and P 3 define a right-angled triangle, wherein an angle γ defines the angle of incidence at which the multi-color beam 31 strikes the surface of the product. This angle γ depends on the height b of the spectrometer unit 2 above the surface of the test product 5 (the distance between the points P 1 and P 2 ) and the distance between the optical axis of the white light source 1 and the camera 3 a (the distance between points P 2 and P 3 ). By changing a and b, this means changing the angle of incidence γ to adjust a measured resolution value of the surface.

圖2、圖3及圖4示意性顯示安裝於一作為測試產品5之PCB板上的一電子組件16的一測量,同時以一掃描方向9掃描該PCB板。圖2繪示在一較小尺寸之電子組件16,諸如一IC(積體電路)上的一彩色光譜55之反射。該電子組件16之高度較小,使得接近該色彩光譜之起始7的一單色光(紅光10)被反射。2, 3 and 4 schematically show a measurement of an electronic component 16 mounted on a PCB as test product 5 while scanning the PCB in a scan direction 9. 2 illustrates the reflection of a color spectrum 55 on a smaller sized electronic component 16, such as an IC (integrated circuit). The height of the electronic component 16 is small such that a monochromatic light (red light 10) near the beginning 7 of the color spectrum is reflected.

圖3繪示一中等尺寸之電子組件16之一反射,例如,一電晶體,其中來自該光譜之中間的一單色彩,例如一綠色11被反射,且由該相機3偵測。圖4繪示一較大電子組件16(諸如一電容器)之一多色彩光束之一反射。接近該色彩光譜之末端8的一紫光12被反射至相機3中。因而,從不同的色調值(紅色、綠色、紫色),可容易測量安裝於一作為測試產品5之PCB上的一電子組件16的一高度。3 illustrates a reflection of one of the medium sized electronic components 16, for example, a transistor in which a single color from the middle of the spectrum, such as a green 11, is reflected and detected by the camera 3. 4 illustrates one of the multi-color beams reflected by one of the larger electronic components 16 (such as a capacitor). A violet light 12 near the end 8 of the color spectrum is reflected into the camera 3. Thus, a height of an electronic component 16 mounted on a PCB as the test product 5 can be easily measured from different tone values (red, green, purple).

圖5顯示根據本發明之一實施例之一色調高度圖。給出一特定測量器件組態,該色調高度圖將0 mm至10 mm的一高度範圍關聯至460 THz至740 THz(420 nm至660 nm波長)的一光譜光範圍。在波長/頻率與公制尺寸之間的此一相關性可由根據本發明方法之一實施例之一校準常式而提取。由分光計單元2提供之色彩光譜55包括具有350 nm至750 nm之間之一範圍波長的一範圍之多色彩光束31,該範圍之波長對應於800 THZ至400 THz之間的光頻率。該色彩光譜55從具有最低頻率(即,對應於一紅外光色彩的最大波長)之該色彩光譜之起始7到達對應於一紫外光色彩之該 色彩光譜之一末端8,覆蓋一紅色成分10,其指示在測試之下的一器件5的一較低高度,例如,一電子組件16或一太陽能晶圓,一綠色成分11,其指示一中等高度及一紫色成分12,其指示作為受測器件(DUT)之測試產品5之一較高高度。Figure 5 shows a tone height map in accordance with one embodiment of the present invention. Given a specific measurement device configuration, the hue height map relates a range of heights from 0 mm to 10 mm to a spectral range of light from 460 THz to 740 THz (420 nm to 660 nm wavelength). This correlation between wavelength/frequency and metric size can be extracted by calibration routines in accordance with one of the embodiments of the method of the present invention. The color spectrum 55 provided by the spectrometer unit 2 comprises a range of color beams 31 having a range of wavelengths between 350 nm and 750 nm, the wavelength of which corresponds to an optical frequency between 800 THZ and 400 THz. The color spectrum 55 reaches from the beginning 7 of the color spectrum having the lowest frequency (ie, the maximum wavelength corresponding to the color of an infrared light) corresponding to an ultraviolet color One end 8 of the color spectrum, covering a red component 10, indicates a lower height of a device 5 under test, for example, an electronic component 16 or a solar wafer, a green component 11, indicating a medium The height and a purple component 12 indicate a higher height as one of the test products 5 of the device under test (DUT).

圖6、圖7及圖8繪示改變色彩光譜55之寬度的許多選項,以控制本發明之一實施例之測量解析度。圖6a及圖6b繪示一配置,其中準直單元4之一孔隙尺寸在一孔隙尺寸w1 至一孔隙尺寸w2 之間變化。結果,該準直之白色光束30之寬度及該多色彩光束31之分散角改變,且因此該彩色光譜55之光譜寬度6從長度d 1變化至長度d 2。6, 7, and 8 illustrate a number of options for varying the width of the color spectrum 55 to control the measurement resolution of an embodiment of the present invention. Figures 6a and 6b illustrate a configuration, one 4 wherein the pore size of the collimating means a pore size varying between a pore size w 1 to w 2. As a result, the width of the collimated white light beam 30 and the dispersion angle of the multi-color light beam 31 change, and thus the spectral width 6 of the color spectrum 55 changes from the length d 1 to the length d 2 .

圖7a及圖7b顯示藉由改變一作為分光計單元2之光學稜鏡之一開口角α 18的一類似效果。在圖7a中,一光學稜鏡具有一開口角α1 ,形成彩色光譜55的一光譜寬度d 16。藉由將該開口角α1 改變至一值α2 ,彩色光譜55之一光譜寬度6從d1 變化至d2 。藉由使用一液體光學稜鏡,可提供具有一可變開口角α 18的一光學稜鏡,其中該開口角α 18可由不同靜電勢或由機械構件或當前最先進技術中已知之其他技術而調整。Figures 7a and 7b show a similar effect by changing one of the apertures α 18 of the optical pupil of the spectrometer unit 2. In Fig. 7a, an optical aperture has an opening angle α 1 which forms a spectral width d 16 of the color spectrum 55. By changing the opening angle α 1 to a value α 2 , one of the spectral widths 6 of the color spectrum 55 changes from d 1 to d 2 . By using a liquid optical cartridge, an optical aperture having a variable opening angle α 18 can be provided, wherein the opening angle α 18 can be varied by different electrostatic potentials or by mechanical components or other techniques known in the art. Adjustment.

圖8a及圖8b繪示一測量器件15之另一實施例,其中可改變在一測試產品5之一表面與一分光計單元2之間之一高度b。藉由將一距離b1 改變至一距離b2 ,多色彩光束31之開口角變化,因此導致彩色光譜55之光譜寬度d 6從d1 至d2 的一變動。根據一測試產品5之表面上之分光計2從b1 至b2 之高 度變動,在白光源1之光軸與相機3之間的一距離a亦應從a1 變化至a2 ,因此留下入射角γ為恆定。8a and 8b illustrate another embodiment of a measuring device 15 in which a height b between a surface of a test product 5 and a spectrometer unit 2 can be varied. By changing a distance b 1 to a distance b 2 , the opening angle of the multi-color beam 31 changes, thus causing a variation in the spectral width d 6 of the color spectrum 55 from d 1 to d 2 . According to the height of the spectrometer 2 on the surface of a test product 5 from b 1 to b 2 , a distance a between the optical axis of the white light source 1 and the camera 3 should also change from a 1 to a 2 , thus leaving The incident angle γ is constant.

圖9繪示一測量器件15之另一實施例,其中執行一校準常式。在一測試產品5表面頂端安裝具有可按照測試產品5之一水平表面而調整之一校準角β 20的一校準本體19(例如一校準板19)。在以一掃描方向9移動校準本體19之下傾表面的同時,該白光源1產生一準直之光束30,其由一準直單元4準直,且其由分光計單元2分裂成一多色彩光束31。分光計單元2具有一可變稜鏡角α,且準直單元4可改變一孔隙尺寸w,以調整該多色彩光束31之開口角以影響高度測量解析度精確度。歸因於以一掃描移動方向9移動校準本體19,不同反射單色光束32朝向相機3反射,其中相機3裝備有一相機孔隙單元24,以消除寄生散射光。該相機3關於具有以校準角度β 20的一下傾表面的校準本體19的掃描方向9而掃描該光,且將影像資料傳輸至一控制單元21。該控制單元21包括控制構件22,其控制該白光源1之強度/亮度,準直單元4之孔隙寬度w及分光計單元2之稜鏡開口角度α 18。由相機3接收之色調資料儲存於一色調高度映射構件23之一色調高度圖20中,其中不同色彩與從校準角度β及校準本體19之尺寸已知之不同z高度值關聯。FIG. 9 illustrates another embodiment of a measurement device 15 in which a calibration routine is performed. A calibration body 19 (e.g., a calibration plate 19) having a calibration angle β 20 that can be adjusted to one of the horizontal surfaces of the test product 5 is mounted on the top surface of a test product 5. While moving the lower surface of the calibration body 19 in a scanning direction 9, the white light source 1 produces a collimated beam 30 which is collimated by a collimating unit 4 and which is split by the spectrometer unit 2 into a multi-color Light beam 31. The spectrometer unit 2 has a variable angle α, and the collimating unit 4 can change a pore size w to adjust the opening angle of the multi-color beam 31 to affect the height measurement resolution accuracy. Due to the movement of the calibration body 19 in a scanning movement direction 9, the different reflected monochromatic light beams 32 are reflected towards the camera 3, wherein the camera 3 is equipped with a camera aperture unit 24 to eliminate parasitic scattered light. The camera 3 scans the light with respect to the scanning direction 9 of the calibration body 19 having a downwardly inclined surface at a calibration angle β 20 and transmits the image data to a control unit 21. The control unit 21 includes a control member 22 that controls the intensity/luminance of the white light source 1, the aperture width w of the collimation unit 4, and the aperture opening angle α 18 of the spectrometer unit 2. The tone data received by the camera 3 is stored in a tone height map 20 of a tone height mapping member 23, wherein the different colors are associated with different z-height values known from the calibration angle β and the size of the calibration body 19.

圖10a及圖10b繪示一白光源1、一準直單元4及一作為分光計單元2之光學稜鏡的一總體,用於產生具有一色彩光譜之一起始7(紅光)及一色彩光譜之一末端8(紫光)的一多色彩光束31,其撞擊在測試之下之一產品5的一表面。圖 10a顯示一側視圖,且圖10b顯示該總體之一俯視圖。該白光源1包括一LED帶40(發光二極體),其中多個微透鏡41將由該等LED帶40發射之擴散白光調準至一平行光束。該準直單元4包括一第一透鏡42、一第二透鏡43及一第三透鏡44以及一孔隙構件50,其可為一狹縫光闌。該孔隙構件50係一狹縫光闌,其開口寬度w係可變的,使得可調整該準直之白色光束30之寬度。該準直單元4將由該白光源1發射之白色光束轉換至具有所有不同色彩值之白光之平行光束的一準直之白色光束30。該作為分光計單元2之光學稜鏡將該準直之白色光束30分成具有一開口寬度b的一色彩光譜55的一多色彩光束31。10a and 10b illustrate a white light source 1, a collimating unit 4, and an optical pupil as a spectrometer unit 2 for generating a starting point 7 (red light) and a color having a color spectrum. A multi-color beam 31 of one end of the spectrum, 8 (violet), impinges on a surface of one of the products 5 under test. Figure 10a shows a side view and Figure 10b shows a top view of the overall. The white light source 1 includes an LED strip 40 (light emitting diode) in which a plurality of microlenses 41 align the diffused white light emitted by the LED strips 40 to a parallel beam. The collimating unit 4 includes a first lens 42, a second lens 43 and a third lens 44, and a aperture member 50, which can be a slit diaphragm. The aperture member 50 is a slit aperture having a variable opening width w such that the width of the collimated white light beam 30 can be adjusted. The collimating unit 4 converts the white light beam emitted by the white light source 1 into a collimated white light beam 30 having parallel beams of white light of all different color values. The optical pupil, which is the spectrometer unit 2, divides the collimated white light beam 30 into a multi-color beam 31 having a color spectrum 55 of an opening width b.

圖11a及圖11b繪示一白光源1、一準直單元4及一作為分光計單元2之光學稜鏡之另一實施例,以形成一多色彩之光束31。圖11a顯示一側視圖,且圖11b顯示該總體之一俯視圖。該白光源1包括一LED帶40,其裝備有微透鏡41及一第一透鏡42。該準直單元4包括多個透鏡43、44及45,以抑制視差效應,且進一步包括一孔隙構件50,其具有一可變開口寬度及一準直柵格46,以準直由該白光源1發射之擴散白色光束。該準直之白色光束30由一稜鏡2轉換至彩虹色彩之一多色彩光束31。11a and 11b illustrate another embodiment of a white light source 1, a collimating unit 4, and an optical unit as the spectrometer unit 2 to form a multi-colored light beam 31. Figure 11a shows a side view and Figure 11b shows a top view of the overall. The white light source 1 includes an LED strip 40 that is equipped with a microlens 41 and a first lens 42. The collimating unit 4 includes a plurality of lenses 43, 44 and 45 to suppress parallax effects, and further includes a aperture member 50 having a variable opening width and a collimating grid 46 for collimating the white light source 1 emits a diffused white light beam. The collimated white light beam 30 is converted from one 稜鏡 2 to one of the multi-colored light beams 31 of the rainbow color.

圖12a及圖12b繪示一白光源1、一準直單元4及一分光計單元的另一實施例,其中該白光源1包括一彎曲之LED帶,其包括一彎曲帶狀之微透鏡41,以預調準所發射之白色LED光。圖12a顯示一俯視圖,且圖12b顯示該總體之一 側視圖。該彎曲之光源1之光進入一準直單元4,且由一第一透鏡42(為柱狀透鏡)調準,且通過具有一可調整開口寬度的一孔隙構件50,且最終在離開該準直單元4之前由一第二透鏡43(為橢圓透鏡)聚焦。該準直白光光束30接著被反射,且由一作為分光計單元51之光學繞射光柵而轉換至一多色彩光束31。一測試產品5之一表面經配置以平行於作為分光計單元51之該光學繞射光柵之下方之準直白色光束30之光軸。12a and 12b illustrate another embodiment of a white light source 1, a collimating unit 4, and a spectrometer unit, wherein the white light source 1 includes a curved LED strip including a curved strip-shaped microlens 41. To pre-align the white LED light emitted by the camera. Figure 12a shows a top view and Figure 12b shows one of the overalls Side view. The light of the curved light source 1 enters a collimating unit 4, and is aligned by a first lens 42 (which is a cylindrical lens), and passes through a porous member 50 having an adjustable opening width, and finally leaves the quasi- The straight unit 4 is previously focused by a second lens 43 (which is an elliptical lens). The collimated white light beam 30 is then reflected and converted to a multi-color beam 31 by an optical diffraction grating as spectrometer unit 51. One surface of a test product 5 is configured to be parallel to the optical axis of the collimated white light beam 30 below the optical diffraction grating as the spectrometer unit 51.

圖13a及圖13b繪示一白光源1、一準直單元4及一分光計單元之一類似實施例,其中該分光計單元係一光學稜鏡2。圖13a顯示一俯視圖,且圖13b顯示該總體之一側視圖。該白光源1包括裝備有一彎曲帶狀之微透鏡41之一彎曲之LED帶40,以預調準一由該LED帶40發射之一帶狀白光,其由一準直單元4準直。該準直單元4包括一第一透鏡42(為柱狀透鏡)、一孔隙構件50,其係具有一可變開口寬度的一狹縫光闌,及一第二透鏡43(為橢圓透鏡)。最終,該準直單元4包括在其光學末端的一第三透鏡44,且該準直白色光束30進入一作為分光計單元之光學稜鏡2,以繞射至一多色彩光束31,其撞擊在測試之下之一產品5的表面。13a and 13b illustrate a similar embodiment of a white light source 1, a collimating unit 4, and a spectrometer unit, wherein the spectrometer unit is an optical unit 2. Figure 13a shows a top view and Figure 13b shows a side view of the general. The white light source 1 includes an LED strip 40 that is bent with one of the curved strip-shaped microlenses 41 to pre-align a strip of white light emitted by the LED strip 40, which is collimated by a collimating unit 4. The collimating unit 4 includes a first lens 42 (which is a cylindrical lens), a aperture member 50 having a slit aperture having a variable opening width, and a second lens 43 (which is an elliptical lens). Finally, the collimating unit 4 includes a third lens 44 at its optical end, and the collimated white light beam 30 enters an optical 稜鏡 2 as a spectrometer unit to be diffracted to a multi-color beam 31, which strikes Under test one of the surfaces of product 5.

圖14a及圖14b顯示一LED帶40之一示意圖,如具有一附接之準直單元4及一孔隙構件50之光源以一光闌之形式。圖14a顯示一LED帶40,包括多個白光LED 60。每一LED 60發射未準直之白光,其由一微透鏡41調準及預準直,該 微透鏡接近該LED 60而附接。該預準直之白光進入一準直隧道64,其中安置一第一透鏡42(為柱狀透鏡)及一第五透鏡62,以進一步準直該光。該隧道具有一矩形橫截面,且具有一長度,使得當由LED 60發射之白光進入為狹縫光闌之孔隙構件50時具有3°或更小的一孔隙角。Figures 14a and 14b show a schematic view of an LED strip 40, such as a light source having an attached collimating unit 4 and a aperture member 50 in the form of an aperture. Figure 14a shows an LED strip 40 comprising a plurality of white LEDs 60. Each LED 60 emits uncollimated white light that is aligned and pre-collimated by a microlens 41. The microlens is attached close to the LED 60. The pre-collimated white light enters a collimating tunnel 64 in which a first lens 42 (which is a cylindrical lens) and a fifth lens 62 are disposed to further collimate the light. The tunnel has a rectangular cross section and has a length such that when white light emitted by the LED 60 enters the aperture member 50 which is a slit aperture, it has a void angle of 3 or less.

最後,圖15a、圖15b及圖15c示意性繪示測量一測試產品5之一測量器件15之實施例之一配置。該測量器件15之實施例回到圖1a之配置。一LED帶40產生一白色光束30,其由包括複數個準直透鏡43a至43e的一準直單元4準直,使得形成具有3°或更小之一準直角度的一經準直之白光。呈一光學稜鏡之形式之一分光計單元2將該準直白色光束30擴大成一多色彩之光束31,包括色彩光譜之一起始7之一成分及色彩光譜之一末端8之一成分。在圖1中,此多色彩光束之瀑布被引導直接朝向一測試產品5。相比之下,在圖15a至圖15c中,一消色差透鏡單元66配置於作為分光計單元2之光學稜鏡2與接受測試之測試產品5之間。在圖15a中,一消色差透鏡單元66包括一凸面鏡68,其用於將一多色彩光束31反射至接受測試之該器件5上。該多色彩光束31之光譜之寬度且因此高度測量之精確度相當程度上取決於凸面鏡68之表面形貌之形式以及凸面鏡68與作為分光計單元2之光學稜鏡與測試產品5之間之距離,且可為可調整的。在圖15b中,消色差透鏡單元66包括兩個連續配置之凸面鏡68,以聚焦該多色彩光束31,因此縮小光譜寬度,並導致高度解析度的增加。圖15c之該消色差透鏡單 元66包括一凸面鏡68及一聚焦透鏡70之一組合,以增加該光譜光之強度。該消色差透鏡單元66可將該光譜光聚焦至一較小高度,因此可藉以產生該高度解析度,藉此該消色差透鏡單元66之焦點屬性可取決於一期望解析度而調整,例如,藉由改變凸面鏡68或聚焦透鏡70至作為分光計單元2之光學稜鏡及/或至測試產品5之間的距離。消色差透鏡單元66可包括複數個鏡面68及透鏡70,且亦可包含一個或多個遙測透鏡,有利地為一桶型或柱狀型透鏡。一遠心透鏡係一複合透鏡,其具有無窮大之入口或出口光瞳;在前一種情況中,此產生主體的一正投影視圖。此意味著主要光線(經過該孔隙光闌之中央的傾斜光線)分別在系統前面或後面皆平行於該光軸。Finally, Figures 15a, 15b and 15c schematically illustrate one configuration of an embodiment of measuring a measuring device 15 of a test product 5. The embodiment of the measuring device 15 returns to the configuration of Figure 1a. An LED strip 40 produces a white light beam 30 that is collimated by a collimating unit 4 comprising a plurality of collimating lenses 43a through 43e such that a collimated white light having a collimating angle of one of 3 or less is formed. The spectrometer unit 2, in the form of an optical 扩大, expands the collimated white light beam 30 into a multi-colored light beam 31 comprising one of the components of the color spectrum starting point 7 and one of the color spectrum one end 8 . In Figure 1, the waterfall of the multi-color beam is directed towards a test product 5. In contrast, in FIGS. 15a to 15c, an achromatic lens unit 66 is disposed between the optical 稜鏡 2 as the spectrometer unit 2 and the test product 5 under test. In Fig. 15a, an achromatic lens unit 66 includes a convex mirror 68 for reflecting a multi-color beam 31 onto the device 5 under test. The width of the spectrum of the multi-color beam 31 and hence the accuracy of the height measurement depends to a large extent on the form of the surface topography of the convex mirror 68 and the distance between the convex mirror 68 and the optical pupil as the spectrometer unit 2 and the test product 5. And can be adjustable. In Fig. 15b, the achromatic lens unit 66 includes two continuously arranged convex mirrors 68 to focus the multi-color beam 31, thereby reducing the spectral width and resulting in an increase in height resolution. Figure 15c of the achromatic lens Element 66 includes a combination of a convex mirror 68 and a focusing lens 70 to increase the intensity of the spectral light. The achromatic lens unit 66 can focus the spectral light to a small height so that the height resolution can be generated, whereby the focus property of the achromatic lens unit 66 can be adjusted depending on a desired resolution, for example, By changing the convex mirror 68 or the focusing lens 70 to the optical 作为 as the spectrometer unit 2 and/or the distance to the test product 5. The achromatic lens unit 66 can include a plurality of mirrors 68 and lenses 70, and can also include one or more telemetry lenses, advantageously a barrel or columnar lens. A telecentric lens is a compound lens having an infinite entrance or exit pupil; in the former case, this produces an orthographic view of the subject. This means that the main light (the oblique light passing through the center of the aperture stop) is parallel to the optical axis in front of or behind the system, respectively.

該器件之另一實施例可用於測試含有電子組件之電路板:Another embodiment of the device can be used to test a circuit board containing electronic components:

˙該測量器件15經校準使得在安裝(主控)板5之表面上定義零高度,使得在掃描之後,該板(地面)將以一較暗的紅色顯示(該光譜之起始7)。該測量範圍根據該白光光譜之紫色成分12(該測試產品5之最高測量部分)而選擇。The measuring device 15 is calibrated such that a zero height is defined on the surface of the mounting (master) board 5 such that after scanning, the board (ground) will be displayed in a darker red (starting 7 of the spectrum). The measurement range is selected based on the purple component 12 of the white light spectrum (the highest measurement portion of the test product 5).

˙在測試設備中,該位置與該測試產品5(之該板)之高度及容許度一起定義。In the test equipment, this position is defined along with the height and tolerance of the test product 5 (the board).

˙在將該板經過該線型掃描相機3之後,其之個別組件取決於其等之高度而以色彩顯示。经过 After passing the board through the line scan camera 3, its individual components are displayed in color depending on their height.

˙使用校準函數之軟體將色度傳輸至以毫米給出之高度 值。传输Use the software of the calibration function to transfer the chromaticity to the height given in millimeters value.

˙在測試之區域中,評估該組件之實際高度,且相對於指定之容許度,輸出係以資訊之形式,該資訊指示該測試產品5,該板作為一整體(或其個別組件)是否有缺陷。评估 In the area of the test, the actual height of the component is evaluated, and the output is in the form of information relative to the specified tolerance, the information indicating the test product 5, whether the board as a whole (or its individual components) has defect.

該器件之另一實施例可用於測試板表面或太陽能電池產品之表面:Another embodiment of the device can be used to test the surface of a board or the surface of a solar cell product:

˙該測量器件15經校準,使得在一正常可接受狀態中的表面將在掃描通常近似位於該光譜之中央之色彩(綠色)之後顯示。The measuring device 15 is calibrated such that the surface in a normally acceptable state will be displayed after scanning a color (green) that is generally approximately centered in the spectrum.

˙選擇測量範圍,即,可出現於該測試之板上(該板之彎曲度、表面缺陷、裂縫、磨損、沉積物等等)的最大值(最大)及最小值(最小)偏差。該最小偏差將以紅色顯示,且最大偏差將顯示紫色。̇ Select the measurement range, that is, the maximum (maximum) and minimum (minimum) deviations that can occur on the test board (the curvature of the board, surface defects, cracks, wear, deposits, etc.). This minimum deviation will be displayed in red and the maximum deviation will be purple.

˙該校準本體之整個表面可定義為一測試區域,且選擇偏差之偏差容許度。The entire surface of the calibration body can be defined as a test area, and the tolerance of the deviation is selected.

˙該板可藉助於一線型掃描相機3掃描。The board can be scanned by means of a line scan camera 3.

˙使用該校準函數,該軟體可將色度轉換至以毫米或微米給出之高度值。Using this calibration function, the software converts the chromaticity to a height value given in millimeters or micrometers.

˙評估是否有任何區域具有比允許之容許度預定之更大的偏差。輸出可為代表所測試產品5(板)是否有缺陷之態樣的資訊。̇ Evaluate if any areas have a larger deviation than the allowable tolerance. The output can be information indicating whether the product 5 (board) tested is defective.

工業實用性Industrial applicability

本發明之技術性解決方案可尤其使用於個別產品或其組 件之距離之幾何及測量之近似或目標檢查,尤其在必需光學測量感測器與測試之部分之間的距離中,即,在變化並不反射於正常狀態中之影像上的方向上。The technical solution of the invention can be used in particular for individual products or groups thereof The geometry of the distance of the part and the approximation or target inspection of the measurement, especially in the distance between the part where the optical measurement sensor and the test are necessary, that is, in the direction in which the change is not reflected in the image in the normal state.

1‧‧‧白光源1‧‧‧White light source

2‧‧‧分光計單元2‧‧‧Spectrometer unit

3‧‧‧相機3‧‧‧ camera

4‧‧‧準直單元4‧‧‧ Collimation unit

5‧‧‧測試產品(例如PCB)5‧‧‧Test products (eg PCB)

6‧‧‧色彩光譜之寬度6‧‧‧The width of the color spectrum

7‧‧‧色彩光譜之起始7‧‧‧The beginning of the color spectrum

8‧‧‧色彩光譜之末端8‧‧‧End of the color spectrum

9‧‧‧掃描方向9‧‧‧Scanning direction

10‧‧‧具有對應於該白光光譜之一紅色之高度的成分-紅色成分10‧‧‧ has a composition corresponding to the height of one of the white light spectra - red component

11‧‧‧具有對應於該白光光譜之一綠色之高度的成分-綠色成分11‧‧‧Having a component corresponding to the height of one of the white light spectrums - green component

12‧‧‧具有對應於該白光光譜之一紫色之高度的成分-紫色成分12‧‧‧ has a composition corresponding to the height of purple of the white light spectrum - purple component

15‧‧‧測量器件15‧‧‧Measurement device

16‧‧‧電子元件16‧‧‧Electronic components

17‧‧‧準直單元之孔隙寬度17‧‧‧Pore width of the collimating unit

18‧‧‧開口角α18‧‧‧ Opening angle α

19‧‧‧校準本體19‧‧‧ Calibration body

20‧‧‧校準角度β20‧‧‧Calibration angle β

21‧‧‧控制單元21‧‧‧Control unit

22‧‧‧控制構件22‧‧‧Control components

23‧‧‧色調高度映射構件23‧‧‧Hue height mapping component

24‧‧‧相機孔隙單元24‧‧‧ Camera aperture unit

30‧‧‧準直白色光束30‧‧‧ Collimated white beam

31‧‧‧多色彩光束31‧‧‧Multi-color beam

32‧‧‧反射之單色彩光束32‧‧‧Reflected single color beam

40‧‧‧發光二極體帶(或LED帶)40‧‧‧Lighting diode strip (or LED strip)

41‧‧‧微透鏡41‧‧‧Microlens

42‧‧‧第一透鏡42‧‧‧First lens

43‧‧‧第二透鏡43‧‧‧second lens

44‧‧‧第三透鏡44‧‧‧ third lens

45‧‧‧第四透鏡45‧‧‧Fourth lens

46‧‧‧準直柵格46‧‧‧ collimation grid

50‧‧‧孔隙構件50‧‧‧Pore components

51‧‧‧作為分光計單元之光學繞射光柵51‧‧‧ Optical diffraction grating as spectrometer unit

55‧‧‧色彩光譜55‧‧‧Color spectrum

60‧‧‧發光二極體60‧‧‧Lighting diode

62‧‧‧第五透鏡62‧‧‧ fifth lens

64‧‧‧準直隧道64‧‧ ‧ Collimation tunnel

66‧‧‧消色差透鏡單元66‧‧‧Achromatic lens unit

68‧‧‧凸面鏡68‧‧‧ convex mirror

70‧‧‧聚焦透鏡70‧‧‧focus lens

圖1a、圖1b繪示本發明之一測量器件之一第一實施例,其用於檢查一PCB上的一電子組件對準;圖2繪示根據本發明之一測量器件之該第一實施例,其用於對應於一紅色光譜檢查一PCB上之一較薄電子組件;圖3繪示根據本發明之一測量器件之該第一實施例,其用於對應於一綠色光譜檢查一PCB上之一中等尺寸之電子組件;圖4繪示根據本發明之一測量器件之該第一實施例,其用於對應於一紫色光譜檢查一PCB上之一較大電子組件;圖5繪示具有0 mm至10 mm之一標度範圍的一色彩光譜色調高度圖之一實例;圖6a、圖6b繪示根據本發明之一測量器件之另一實施例,該測量器件具有一可調整孔隙構件;圖7a、圖7b繪示根據本發明之一測量器件之另一實施例,其具有一可調整光學稜鏡;圖8a、圖8b繪示根據本發明之一測量器件之另一實施例,其具有一可調整高度之光學稜鏡;圖9繪示根據本發明之一測量器件之另一實施例;圖10a、圖10b繪示根據本發明之一測量器件之一實施例之一光源及準直單元組態; 圖11a、圖11b繪示根據本發明之一測量器件之一實施例之另一光源及準直單元組態;圖12a、圖12b繪示根據本發明之一測量器件之一實施例之另一光源及準直單元組態;圖13a、圖13b繪示根據本發明之一測量器件之一實施例之另一光源及準直單元組態;圖14a、圖14b繪示根據本發明之一測量器件之一實施例之另一光源及準直單元組態;及圖15a、圖15b、圖15c繪示根據本發明之一測量器件之一實施例之另一光源及具有一序列孔隙單元的準直單元。1a and 1b illustrate a first embodiment of a measuring device of the present invention for inspecting an electronic component alignment on a PCB; and FIG. 2 illustrates the first implementation of a measuring device in accordance with the present invention. For example, it is used to inspect a thin electronic component on a PCB corresponding to a red spectrum; FIG. 3 illustrates the first embodiment of a measuring device according to the present invention for inspecting a PCB corresponding to a green spectrum 1 is a medium-sized electronic component; FIG. 4 illustrates the first embodiment of a measuring device according to the present invention for inspecting a larger electronic component on a PCB corresponding to a purple spectrum; FIG. An example of a color spectral tone height map having a scale range of 0 mm to 10 mm; Figures 6a, 6b illustrate another embodiment of a measuring device according to the present invention having an adjustable aperture Figure 7a, Figure 7b illustrates another embodiment of a measuring device according to the present invention having an adjustable optical bore; Figures 8a, 8b illustrate another embodiment of a measuring device in accordance with the present invention , having an adjustable height optical 稜鏡; 9 illustrates another embodiment of the present invention, one of the measuring device; FIG. 10a, FIG. 10b illustrates one configuration of a light source and collimating means in accordance with one embodiment of the present invention, one of the measurement device; 11a and 11b illustrate another light source and collimating unit configuration of an embodiment of a measuring device according to the present invention; and FIGS. 12a and 12b illustrate another embodiment of one of the measuring devices according to the present invention. Light source and collimation unit configuration; Figures 13a, 13b illustrate another light source and collimation unit configuration of one embodiment of a measurement device in accordance with the present invention; Figures 14a, 14b depict one measurement in accordance with the present invention Another light source and collimating unit configuration of one embodiment of the device; and FIGS. 15a, 15b, and 15c illustrate another light source and a quasi-sequence unit having an embodiment of one of the measuring devices according to the present invention Straight unit.

1‧‧‧白光源1‧‧‧White light source

2‧‧‧分光計單元2‧‧‧Spectrometer unit

3‧‧‧相機3‧‧‧ camera

4‧‧‧準直單元4‧‧‧ Collimation unit

5‧‧‧測試產品(例如PCB)5‧‧‧Test products (eg PCB)

6‧‧‧色彩光譜之寬度d6‧‧‧The width of the color spectrum d

7‧‧‧色彩光譜之起始7‧‧‧The beginning of the color spectrum

8‧‧‧色彩光譜之末端8‧‧‧End of the color spectrum

9‧‧‧掃描方向9‧‧‧Scanning direction

10‧‧‧具有對應於該白光光譜之一紅色之高度的成分-紅色成分10‧‧‧ has a composition corresponding to the height of one of the white light spectra - red component

11‧‧‧具有對應於該白光光譜之一綠色之高度的成分-綠色成分11‧‧‧Having a component corresponding to the height of one of the white light spectrums - green component

12‧‧‧具有對應於該白光光譜之一紫色之高度的成分-紫色成分12‧‧‧ has a composition corresponding to the height of purple of the white light spectrum - purple component

15‧‧‧測量器件15‧‧‧Measurement device

16‧‧‧電子元件16‧‧‧Electronic components

30‧‧‧準直白色光束30‧‧‧ Collimated white beam

31‧‧‧多色彩光束31‧‧‧Multi-color beam

32‧‧‧反射之單色彩光束32‧‧‧Reflected single color beam

55‧‧‧色彩光譜55‧‧‧Color spectrum

Claims (15)

一種器件(15),其用於光學測量一測試產品(5)之表面,尤其係用於回焊焊錫膏檢查的一PCB產品之表面,其包括至少一白光源(1),其用於發射一白色光束,至少一準直單元(4),其用於準直該準直白色光束(30),至少一分光計單元(2,51),其較佳地為一光學稜鏡或一光學繞射光柵,以將該準直白色光束(30)分裂成一多色彩光束(31),其在一預定入射角γ之下被引導至該測試產品(5)上,及至少一相機(3),其用於記錄該測試產品(5)之一反射之單色彩光束(32),該器件被配置而使得該測試產品(5)之一z軸表面高度資訊可在以一x軸掃描方向(9)相對地移動該測試產品(5)時從該反射之單色彩光束(32)之一色調值處提取,其特徵為該白光源(1)係一LED帶(40),其經調適以產生一白光帶狀光束,其中至少一微透鏡(41)光學耦接至至少一LED,以預調準該白色光束,及該準直單元(4)經調適以在360°方向中以2°或更小的一準直品質準直該白色光束(30),且形成垂直於該掃描方向(9)的一白光帶狀光束,且包括至少一透鏡(42、43、44、45),其較佳地為一柱狀透鏡,及至少一個孔隙構件(50),其較佳地為一可調整狹縫光闌孔隙。A device (15) for optically measuring the surface of a test product (5), in particular for the surface of a PCB product for reflow solder paste inspection, comprising at least one white light source (1) for emission a white light beam, at least one collimating unit (4) for collimating the collimated white light beam (30), at least one spectrometer unit (2, 51), preferably an optical or optical Diffusing the grating to split the collimated white beam (30) into a multi-color beam (31) that is directed onto the test product (5) below a predetermined angle of incidence γ, and at least one camera (3) ) for recording a single color beam (32) reflected by one of the test products (5), the device being configured such that one of the z-axis surface height information of the test product (5) is in an x-axis scan direction (9) relatively moving the test product (5) from a tone value of one of the reflected single color beams (32), characterized in that the white light source (1) is an LED strip (40) that is adapted To generate a white light strip beam, wherein at least one microlens (41) is optically coupled to at least one LED to pre-align the white light beam, and the collimating unit (4) is adapted to Collimating the white light beam (30) with a collimating quality of 2° or less in the 360° direction, and forming a white light strip beam perpendicular to the scanning direction (9), and including at least one lens (42, 43) 44, 45), which is preferably a cylindrical lens, and at least one aperture member (50), which is preferably an adjustable slit aperture. 如請求項1之器件,其中該白光源(1)具有一連續色彩光譜(55),及/或該色彩光譜(55)之頻率頻寬係可變的,較 佳地在350 nm至850 nm之一波長範圍內,且/或該白光源(1)之強度係可調整的,較佳地藉由調暗該光源(1),或藉由選擇性地將兩個或多個光源(1)並行開啟或關閉。The device of claim 1, wherein the white light source (1) has a continuous color spectrum (55), and/or the frequency spectrum of the color spectrum (55) is variable, Preferably, the intensity of the white light source (1) is adjustable, preferably by dimming the light source (1), or by selectively Two or more light sources (1) are turned on or off in parallel. 如請求項1或2之器件,其中一LED帶(40)之多個LED可選擇性地切換成開啟或關閉,以在垂直於該掃描方向(9)的一y軸方向增強準直白色光束(30)之強度及/或長度。A device according to claim 1 or 2, wherein the plurality of LEDs of one of the LED strips (40) are selectively switchable to be turned on or off to enhance the collimated white beam in a y-axis direction perpendicular to the scanning direction (9) (30) Strength and / or length. 如請求項1或2之器件,其進一步包括一掃描傳輸構件,其用於以一掃描方向(9)相對地傳輸該測試產品(5)或該光源(1)、一分光計單元、一準直單元(4)及一相機(3)。The device of claim 1 or 2, further comprising a scan transmission member for relatively transmitting the test product (5) or the light source (1), a spectrometer unit, a quasi in a scanning direction (9) Straight unit (4) and a camera (3). 如請求項1或2之器件,其中該相機(3)係一線型掃描相機,較佳地包括一相機孔隙單元(24)及/或一視差透鏡單元,以減小視差效應,尤其一柱狀透鏡或圓形透鏡單元,以接收由該測試產品(5)反射自該多色彩光束(31)之一反射之單色彩光束(32),及/或該相機(3)係具有至少8位元色調解析度之一數位相機,較佳地為一可調整之10位元、12位元或更高之色調解析度,及/或該相機(3)包括兩個或更多個線掃描列,每一列包括一用以增加色調敏感度之色彩濾光器,及/或該相機(3)包括至少一灰色或黑色/白色掃描列,以增強掃描品質,或該相機(3)係一面型掃描相機,其中可提取該掃描面積之單一或多個掃描列,用於色調高度資訊處理。The device of claim 1 or 2, wherein the camera (3) is a line scan camera, preferably comprising a camera aperture unit (24) and/or a parallax lens unit to reduce parallax effects, especially a columnar shape a lens or circular lens unit for receiving a single color beam (32) reflected by the test product (5) from one of the multi-color beams (31), and/or the camera (3) having at least 8 bits a tonal resolution digital camera, preferably an adjustable 10-bit, 12-bit or higher tonal resolution, and/or the camera (3) includes two or more line scan columns, Each column includes a color filter for increasing hue sensitivity, and/or the camera (3) includes at least one gray or black/white scan column to enhance scanning quality, or the camera (3) is a side scan A camera in which a single or multiple scan columns of the scan area can be extracted for tone height information processing. 如請求項1或2之器件,其包括至少兩個或更多個相機(3),其等以垂直於該x掃描方向(9)的一y軸方向配置,用於平行掃描,因此增強該測試產品(5)之掃描寬度及/ 或該等相機(3)經立體配置,以3D掃描該測試產品(5),以減少陰影及照明效應。A device according to claim 1 or 2, comprising at least two or more cameras (3) arranged in a y-axis direction perpendicular to the x-scan direction (9) for parallel scanning, thus enhancing the Test product (5) scan width and / Or the cameras (3) are stereoscopically configured to scan the test product (5) in 3D to reduce shadowing and illumination effects. 如請求項1或2之器件,其進一步包括與至少該相機(3)電連接的一控制單元(21),該控制單元(21)包括控制構件(22)及色調高度映射構件(23),其經調適以至少控制該相機(3),且將由該相機(3)捕獲之一影像之色調值映射至該測試產品(5)的一表面高度資訊。A device according to claim 1 or 2, further comprising a control unit (21) electrically coupled to at least the camera (3), the control unit (21) comprising a control member (22) and a tone height mapping member (23), It is adapted to at least control the camera (3) and map the tonal value of one of the images captured by the camera (3) to a surface height information of the test product (5). 如請求項7之器件,其進一步包括調整構件,其可由該控制單元(21)之該控制構件(22)控制,以調整該多色彩光束(31)之色彩光譜寬度d(6),尤其用於調整該準直單元(4)之一電樞寬度w(17),及/或用於調整一光束分裂高度b,源(1)之光線與相機(3)之間的距離a或該分光計單元之該稜鏡角度α,以調整高度測量敏感度。The device of claim 7, further comprising an adjustment member controllable by the control member (22) of the control unit (21) to adjust a color spectral width d(6) of the multi-color beam (31), particularly Adjusting the armature width w (17) of one of the collimating units (4), and/or for adjusting a beam splitting height b, the distance a between the source (1) and the camera (3) or the splitting The angle α of the unit is measured to adjust the height measurement sensitivity. 一種用於光學測量一測試產品(5)之表面的方法,其係特別用於使用根據前述請求項中任一項之一器件的一PCB產品的回焊焊錫膏檢查,其中一準直白色光束由該白光源(1)發射,且由該準直單元(4)調準及準直成一平行較窄光束(30),其經過該分光計單元(2、51),該光束由該分光計單元分解成一色彩光譜(55),在以一掃描方向(9)相對於該相機(3)而移動該測試產品(5)時由該相機(3)記錄下該彩色光譜在該測試產品(5)或其組件上的反射,使得由該相機(3)自個別影像組成之一影像顯示該測試產品(5)之表面上的所有部分,且該影像在x軸及y軸方向上的尺寸對應於該測試產 品(5)之實際尺寸,且同時,該影像之色調值,即,個別像素之色彩部分[R,G,B]之值指派至該測試產品(5)之表面高度值。A method for optically measuring the surface of a test product (5), in particular for use in a reflow solder paste inspection of a PCB product using a device according to any of the preceding claims, wherein a collimated white beam Emitted by the white light source (1), and aligned and collimated by the collimating unit (4) into a parallel narrower beam (30) passing through the spectrometer unit (2, 51), the beam being split by the spectrometer The unit is decomposed into a color spectrum (55), which is recorded by the camera (3) when the test product (5) is moved relative to the camera (3) in a scanning direction (9) in the test product (5) Or reflection on its components such that one of the images from the individual images of the camera (3) displays all portions of the surface of the test product (5), and the image corresponds to the dimensions in the x-axis and y-axis directions For the test production The actual size of the product (5), and at the same time, the tonal value of the image, i.e., the value of the color portion [R, G, B] of the individual pixel, is assigned to the surface height value of the test product (5). 如請求項9之方法,其中該色彩光譜(55)之色調值對z表面高度值的一色調高度映射以具有高精確度之預先已知之一校準角度β(20)由一校準本體(19)之一表面下傾之至少一逐漸記錄而校準,且將一色調高度圖儲存於一色調高度映射構件(23)中。The method of claim 9, wherein the hue value of the color spectrum (55) is mapped to a hue height of the z surface height value to have a high accuracy of a known one of the calibration angles β (20) by a calibration body (19) At least one of the surface undercuts is calibrated and calibrated, and a tone height map is stored in the one-tone height mapping member (23). 如請求項9或10之方法,其中該相機(3)及該光源(1)之幾何位置在整個掃描時間期間係靜止的,及/或一即時色調高度映射使用該色調高度圖而在掃描期間執行。The method of claim 9 or 10, wherein the geometric position of the camera (3) and the light source (1) is stationary during the entire scanning time, and/or an instant tone height map is used during the scanning period. carried out. 如請求項9或10之方法,其中該相機(3)逐漸逐行記錄該測試產品(5)之一表面之色調值,同時對著該測試產品(5)以一掃描方向(9)來相對移動該相機(3)。The method of claim 9 or 10, wherein the camera (3) progressively records the tone value of the surface of one of the test products (5) progressively while facing the test product (5) in a scan direction (9). Move the camera (3). 如請求項9或10之方法,其中該相機(3)及該白光源(1)經調整使得該色彩光譜(55)之起始(7)映射至零高度及/或由該相機(3)記錄之該等色調值藉助於一校準函數較佳地藉由一色調高度圖而轉換成該測試產品(5)或其組件之一實際表面高度。The method of claim 9 or 10, wherein the camera (3) and the white light source (1) are adjusted such that the start (7) of the color spectrum (55) is mapped to zero height and/or by the camera (3) The recorded tone values are converted to the actual surface height of one of the test products (5) or components thereof by means of a calibration function, preferably by a tone height map. 如請求項9或10之方法,其中該測試產品(5)之一3D模型基於該相機(3)之一影像之經測量的x及y值而建立,且一z高度值基於該影像在該x軸及y軸上的色調值而建立。The method of claim 9 or 10, wherein the 3D model of the test product (5) is established based on the measured x and y values of one of the images of the camera (3), and a z-height value is based on the image The tone values on the x-axis and y-axis are established. 如請求項9或10之方法,其中一測試產品(5)之尺寸,尤其是一PCB或太陽能電池產品上之回焊焊錫膏之位置及高度,及/或該測試產品(5)之表面粗糙度,被測量。The method of claim 9 or 10, wherein the size of one of the test products (5), in particular, the position and height of the reflow solder paste on a PCB or solar cell product, and/or the surface roughness of the test product (5) Degree, measured.
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