TWI467129B - Method for detecting flatness of nozzle - Google Patents

Method for detecting flatness of nozzle Download PDF

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Publication number
TWI467129B
TWI467129B TW103100520A TW103100520A TWI467129B TW I467129 B TWI467129 B TW I467129B TW 103100520 A TW103100520 A TW 103100520A TW 103100520 A TW103100520 A TW 103100520A TW I467129 B TWI467129 B TW I467129B
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nozzle
reference plane
flatness
dimensional coordinate
coordinate points
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TW103100520A
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Chinese (zh)
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TW201527713A (en
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Yenting Chen
Shengyang Lin
Wenchieh Li
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China Steel Corp
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鑄嘴平坦度之檢測方法Test method for flatness of casting nozzle

本發明是有關於一種平坦度之檢測方法,且特別是有關於一種鑄嘴平坦度之檢測方法。The present invention relates to a method for detecting flatness, and more particularly to a method for detecting the flatness of a nozzle.

在一些製作非晶質合金薄帶的方法中,會利用鑄嘴來將合金溶液噴灑到金屬結晶輥上。經此金屬結晶輥的快速冷凝,可形成非晶質合金薄帶。因此,鑄嘴之噴口所在表面的平坦度會直接影響鑄嘴之澆鑄狀況的品質。若鑄嘴有瑕疵,將會造成非晶質合金薄帶的製程中斷,或導致所製成之非晶質薄帶的品質不良。In some methods of making amorphous alloy ribbons, a casting nozzle is used to spray the alloy solution onto a metallization roll. Through the rapid condensation of the metal crystallization roll, an amorphous alloy ribbon can be formed. Therefore, the flatness of the surface of the nozzle of the nozzle directly affects the quality of the casting condition of the nozzle. If the casting nozzle is flawed, the process of the amorphous alloy ribbon may be interrupted, or the quality of the amorphous ribbon produced may be poor.

目前,一種針對鑄嘴之噴口所在表面之平坦度的檢測技術係利用三次元量床來對此表面進行量測。雖然三次元量床的量測精度高,但是量測時間相當冗長。而且,三次元量床量測技術係單點逐一量測,因此無法完整描述鑄嘴的外型。再者,三次元量床量測技術係以探針接觸待測物的方式進行量測,因此利用探針來對上線紅熱狀態下的鑄嘴進行量測,不僅會損壞探針,亦可能會破壞鑄嘴表面。At present, a detection technique for the flatness of the surface of the nozzle of the nozzle is to measure the surface using a three-dimensional gauge bed. Although the measurement accuracy of the three-dimensional measuring bed is high, the measuring time is rather lengthy. Moreover, the three-dimensional volume measurement technology is measured one by one, so the shape of the nozzle cannot be fully described. Furthermore, the three-dimensional volume measurement technology measures the probe in contact with the object to be tested. Therefore, using the probe to measure the nozzle in the red hot state of the upper line will not only damage the probe, but also may Destroy the surface of the nozzle.

因此,本發明之一態樣就是在提供一種鑄嘴平坦度之檢測方法,其係一種非接觸式的自動化檢測方法,故可 避免破壞鑄嘴表面,亦不會損及檢測裝置。Therefore, one aspect of the present invention provides a method for detecting the flatness of a nozzle, which is a non-contact automatic detection method. Avoid damage to the nozzle surface and damage the detector.

本發明之另一態樣是在提供一種鑄嘴平坦度之檢測方法,其利用光學式三維測距儀與單軸向移動平台,來取得鑄嘴之噴口表面的三維座標點群,再透過影像處理的方式來計算出噴口表面的平坦度。因此,本檢測方法可快速取得眾多取樣點群,而有助於完整描述鑄嘴外型,且檢測速度快。此外,本檢測方法更可導入雜訊濾除步驟,以降低三維測距儀在移動時所造成之震動誤訊號對架構鑄嘴外型的影響,進而可更真確地描述出鑄嘴外型。Another aspect of the present invention provides a method for detecting the flatness of a nozzle, which uses an optical three-dimensional range finder and a uniaxial moving platform to obtain a three-dimensional coordinate point group of the nozzle surface of the nozzle, and then transmits the image. The way of treatment is to calculate the flatness of the nozzle surface. Therefore, the detection method can quickly obtain a large number of sampling point groups, and helps to fully describe the shape of the nozzle, and the detection speed is fast. In addition, the detection method can further introduce a noise filtering step to reduce the influence of the vibration error signal caused by the three-dimensional range finder on the movement of the structure nozzle, thereby more accurately describing the shape of the nozzle.

本發明之又一態樣是在提供一種鑄嘴平坦度之檢測方法,其可在非晶質合金薄帶生產過程中,快速檢出鑄嘴的製造瑕疵,因此可有效降低製程中斷的發生率,並可確保非晶質合金薄帶的品質。Another aspect of the present invention is to provide a method for detecting the flatness of a nozzle, which can quickly detect the manufacturing flaw of the nozzle during the production process of the amorphous alloy ribbon, thereby effectively reducing the incidence of process interruption. And can ensure the quality of amorphous alloy ribbon.

根據本發明之上述目的,提出一種鑄嘴平坦度之檢測方法,其包含下列步驟。利用光學式三維測距儀對鑄嘴之噴口所在之表面進行掃描,以取得複數個三維座標點。使用運算設備進行邏輯運算處理,以利用這些三維座標點之至少一部分擬合出基準平面之方程式。使用運算設備並利用基準平面之方程式計算每個三維座標點與基準平面之距離。使用運算設備並利用這些三維座標點與基準平面之距離及預設指標,計算前述表面之平坦度檢測值。In accordance with the above object of the present invention, a method for detecting the flatness of a nozzle is provided, which comprises the following steps. The surface of the nozzle of the nozzle is scanned by an optical three-dimensional range finder to obtain a plurality of three-dimensional coordinate points. The arithmetic operation is performed using an arithmetic device to fit the equation of the reference plane using at least a portion of the three-dimensional coordinate points. The distance between each three-dimensional coordinate point and the reference plane is calculated using an arithmetic device and using the equation of the reference plane. The flatness detection value of the aforementioned surface is calculated using an arithmetic device and using the distance between the three-dimensional coordinate points and the reference plane and the preset index.

依據本發明之一實施例,上述之光學式三維測距儀包含雷射與三維測距儀,且三維測距儀與雷射接合。According to an embodiment of the invention, the optical three-dimensional range finder includes a laser and a three-dimensional range finder, and the three-dimensional range finder is coupled to the laser.

依據本發明之另一實施例,上述利用光學式三維測 距儀對鑄嘴之噴口所在之表面進行掃描之步驟包含下列步驟。將光學式三維測距儀設於單軸向移動平台上。使光學式三維測距儀設於前述鑄嘴之表面的前方。使單軸向移動平台以平行此表面之方向移動。According to another embodiment of the present invention, the above-described optical three-dimensional measurement is utilized. The step of scanning the surface on which the nozzle of the nozzle is located includes the following steps. The optical three-dimensional range finder is placed on a uniaxial moving platform. The optical three-dimensional range finder is placed in front of the surface of the aforementioned nozzle. The uniaxially moving platform is moved in a direction parallel to the surface.

依據本發明之又一實施例,上述之運算設備包含電腦設備。According to still another embodiment of the present invention, the above computing device comprises a computer device.

依據本發明之再一實施例,上述進行邏輯運算處理之步驟包含利用線性最小方差(linear least squares)法。In accordance with still another embodiment of the present invention, the step of performing the logical operation process includes utilizing a linear least squares method.

依據本發明之再一實施例,上述進行邏輯運算處理之步驟包含使用運算設備並利用上述三維座標點擬合出粗略基準平面之方程式、進行雜點濾除處理、以及利用剩餘之三維座標點擬合出基準平面之方程式。此雜點濾除處理包含下列步驟。使用運算設備並利用粗略基準平面之方程式計算每個三維座標點與粗略基準平面之間之距離。去除與粗略基準平面之間的距離超過一預設值之三維座標點。According to still another embodiment of the present invention, the step of performing the logical operation processing comprises using an arithmetic device and fitting the equation of the rough reference plane by using the three-dimensional coordinate point, performing the filtering processing of the noise, and using the remaining three-dimensional coordinate points. Combine the equation of the reference plane. This noise filtering process consists of the following steps. The distance between each three-dimensional coordinate point and the coarse reference plane is calculated using an arithmetic device and using the equation of the coarse reference plane. The three-dimensional coordinate points that are separated from the rough reference plane by more than a predetermined value are removed.

依據本發明之再一實施例,在上述進行邏輯運算處理之步驟中,於擬合出基準平面之方程式的步驟前,包含重複進行利用三維座標點擬合出粗略基準平面之方程式與雜點濾除處理至少一次。According to still another embodiment of the present invention, in the step of performing the logical operation processing, before the step of fitting the equation of the reference plane, the method of repeating the equation and the noise filtering using the three-dimensional coordinate point to fit the rough reference plane is repeated. Except processing at least once.

依據本發明之再一實施例,上述之預設指標為最大值、最小值、平均值或標準差。According to still another embodiment of the present invention, the preset indicator is a maximum value, a minimum value, an average value, or a standard deviation.

100‧‧‧檢測方法100‧‧‧Test method

102‧‧‧步驟102‧‧‧Steps

104‧‧‧步驟104‧‧‧Steps

106‧‧‧步驟106‧‧‧Steps

108‧‧‧步驟108‧‧‧Steps

200‧‧‧光學式三維測距儀200‧‧‧Optical three-dimensional range finder

202‧‧‧雷射202‧‧‧Laser

204‧‧‧三維測距儀204‧‧‧Three-dimensional range finder

206‧‧‧單軸向移動平台206‧‧‧ uniaxial mobile platform

208‧‧‧運算設備208‧‧‧ computing equipment

210‧‧‧支撐架210‧‧‧Support frame

212‧‧‧承載件212‧‧‧Carrier

214‧‧‧鑄嘴214‧‧‧ casting nozzle

216‧‧‧部分Section 216‧‧‧

218‧‧‧部分Section 218‧‧‧

220‧‧‧噴口220‧‧‧ spout

222‧‧‧表面222‧‧‧ surface

為讓本發明之上述和其他目的、特徵、優點與實施例 能更明顯易懂,所附圖式之說明如下:The above and other objects, features, advantages and embodiments of the present invention are made. Can be more obvious and easy to understand, the description of the drawing is as follows:

第1圖係繪示依照本發明之一實施方式的一種鑄嘴平坦度之檢測方法的流程圖。1 is a flow chart showing a method for detecting the flatness of a nozzle according to an embodiment of the present invention.

第2圖係繪示依照本發明之一實施方式的一種檢測鑄嘴之平坦度的裝置示意圖。2 is a schematic view of a device for detecting the flatness of a casting nozzle according to an embodiment of the present invention.

由於鑄嘴的品質會嚴重非晶質合金薄帶的製程與品質,而目前又無精度高且不損及鑄嘴的檢測方法。因此,本案在此提出針對鑄嘴之表面平坦度的一種非接觸式的自動化檢測方法,可快速檢測出鑄嘴是否適合上線進行非晶質合金薄帶的製造。Since the quality of the casting nozzle will seriously affect the process and quality of the amorphous alloy ribbon, there is no high precision and no damage to the nozzle. Therefore, the present invention proposes a non-contact automatic detection method for the surface flatness of the casting nozzle, which can quickly detect whether the casting nozzle is suitable for the upper wire to manufacture the amorphous alloy ribbon.

請同時參照第1圖與第2圖,其係分別繪示依照本發明之一實施方式的一種鑄嘴平坦度之檢測方法的流程圖、以及檢測鑄嘴之平坦度的裝置示意圖。本發明之檢測方法可適用於各種物體之表面平坦度的檢測上。在本實施方式中,係將此檢測方法應用來檢測鑄嘴214之噴口220所在之表面222的平坦度。Please refer to FIG. 1 and FIG. 2 simultaneously, which are respectively a flow chart of a method for detecting the flatness of a nozzle according to an embodiment of the present invention, and a schematic diagram of a device for detecting the flatness of the nozzle. The detection method of the present invention can be applied to the detection of the surface flatness of various objects. In the present embodiment, this detection method is applied to detect the flatness of the surface 222 where the nozzle 220 of the nozzle 214 is located.

在本實施方式中,進行鑄嘴214之平坦度的檢測方法100時,可先提供鑄嘴214之平坦度的檢測設備。在一些實施例中,如第2圖所示,檢測設備主要包含光學式三維測距儀200、單軸向移動平台206與運算設備208。光學式三維測距儀200主要可包含雷射202與三維測距儀204。雷射202與三維測距儀204可彼此接合。在一示範例子中,如第2圖所示,雷射202與三維測距儀204可整合成一體 之結構。雷射202可透過朝待檢測之鑄嘴214發射雷射光的方式,來進行鑄嘴214之表面222的掃描。雷射202可將其掃描所得之訊號傳遞給三維測距儀204,藉此獲得關於此表面222的許多三維座標點。三維測距儀204可將這些三維座標點數據予以數位化。In the present embodiment, when the flatness detecting method 100 of the casting nozzle 214 is performed, the flatness detecting device of the casting nozzle 214 can be provided first. In some embodiments, as shown in FIG. 2, the detecting device mainly includes an optical three-dimensional range finder 200, a uniaxial moving platform 206, and an arithmetic device 208. The optical three-dimensional range finder 200 can primarily include a laser 202 and a three-dimensional range finder 204. The laser 202 and the three-dimensional range finder 204 can be coupled to each other. In an exemplary example, as shown in FIG. 2, the laser 202 and the three-dimensional range finder 204 can be integrated into one. The structure. The laser 202 can scan the surface 222 of the nozzle 214 by emitting laser light toward the nozzle 214 to be inspected. The laser 202 can pass its scanned signal to the three-dimensional range finder 204, thereby obtaining a plurality of three-dimensional coordinate points for the surface 222. The three-dimensional range finder 204 can digitize these three-dimensional coordinate point data.

將光學式三維測距儀200設置在單軸向移動平台206上。單軸向移動平台206可由線性馬達來驅動,而朝單一方向移動,並同時帶動設置於其上的物體朝同一方向移動。也就是說,單軸向移動平台206可帶動光學式三維測距儀200朝單一方向移動。The optical three-dimensional range finder 200 is placed on the uniaxial moving platform 206. The uniaxially moving platform 206 can be driven by a linear motor to move in a single direction while simultaneously moving the objects disposed thereon in the same direction. That is to say, the uniaxial moving platform 206 can drive the optical three-dimensional range finder 200 to move in a single direction.

運算設備208與光學式三維測距儀200電性連接,而可以接收來自光學式三維測距儀200之經數位化後之三維座標點的資料。運算設備208可利用這些三維座標點資料來進行邏輯運算處理,而擬合出基準平面的方程式。運算設備208亦可計算出每個三維座標點與基準平面之間的距離。運算設備208更可根據一預設指標,而利用這些距離計算出表面222的平坦度檢測值。在一些示範例子中,運算設備208可包含電腦設備。The computing device 208 is electrically coupled to the optical three-dimensional range finder 200 and can receive data from the digitized three-dimensional coordinate points of the optical three-dimensional range finder 200. The computing device 208 can utilize these three-dimensional coordinate point data for logical operation processing to fit the equation of the reference plane. The computing device 208 can also calculate the distance between each three-dimensional coordinate point and the reference plane. The computing device 208 can further calculate the flatness detection value of the surface 222 by using the distances according to a preset index. In some demonstrative examples, computing device 208 can include a computer device.

此外,檢測設備更可根據實際應用需求而包含支撐架210與承載件212。如第2圖所示,承載件212可為一框體,以使得待檢測之鑄嘴214可裝載於此框體中。支撐架210設置在承載件212下,以支撐承載件212與設置在程載件212中的鑄嘴214。在一些例子中,支撐架210具有可調整高度的設計,以因應檢測需求而調整待檢測之鑄嘴214 的高度。一般而言,鑄嘴214可包含二部分216與218。其中,部分216之剖面形狀可為ㄇ字型,而部分218之剖面形狀可為ㄩ字型,此二部分216與218對接而形成中間具有噴口220之鑄嘴214。In addition, the detecting device can further include the support frame 210 and the carrier 212 according to actual application requirements. As shown in FIG. 2, the carrier 212 can be a frame such that the nozzle 214 to be inspected can be loaded into the frame. A support frame 210 is disposed under the carrier 212 to support the carrier 212 and the nozzle 214 disposed in the carrier 212. In some examples, the support frame 210 has an adjustable height design to adjust the nozzle 214 to be inspected in response to inspection requirements. the height of. In general, the nozzle 214 can include two portions 216 and 218. The cross-sectional shape of the portion 216 may be U-shaped, and the cross-sectional shape of the portion 218 may be U-shaped. The two portions 216 and 218 are butted to form a casting nozzle 214 having a spout 220 therebetween.

在一些實施例中,請再次同時參照第1圖與第2圖,進行檢測方法100時,將待檢測之鑄嘴214設置在承載件212中,且將光學式三維測距儀200設置在單軸向移動平台204上。並且,將單軸向移動平台204與設置於其上之光學式三維測距儀200放置在鑄嘴214之設有噴口220之表面222的前方,以使光學式三維測距儀200可一邊沿著單一方向移動一邊利用雷射光對前方之噴口220之表面222進行掃描,直至完成鑄嘴214之表面222之待測區域的掃描。在一較佳實施例中,單軸向移動平台204係以平行於鑄嘴214之表面222的方向移動。鑄嘴214之高度需與光學式三維測距儀200之高度配合,以使鑄嘴214位於光學式三維測距儀200之雷射光的掃描範圍內。在一些例子中,可在進行光學掃描前,先對三維測距儀204進行儀器校正,以提高檢測的準確性。In some embodiments, referring to FIG. 1 and FIG. 2 simultaneously, when the detecting method 100 is performed, the casting nozzle 214 to be detected is disposed in the carrier 212, and the optical three-dimensional range finder 200 is set in a single Move axially on the platform 204. Moreover, the uniaxially moving platform 204 and the optical three-dimensional range finder 200 disposed thereon are placed in front of the surface 222 of the nozzle 214 provided with the spout 220, so that the optical three-dimensional range finder 200 can be edged. The surface 222 of the front spout 220 is scanned with laser light in a single direction until scanning of the area to be tested of the surface 222 of the nozzle 214 is completed. In a preferred embodiment, the uniaxially moving platform 204 moves in a direction parallel to the surface 222 of the casting nozzle 214. The height of the nozzle 214 needs to match the height of the optical three-dimensional range finder 200 such that the nozzle 214 is within the scanning range of the laser light of the optical three-dimensional range finder 200. In some examples, the three-dimensional range finder 204 may be instrumentally calibrated prior to optical scanning to improve detection accuracy.

完成檢測設備的安裝後,可如步驟102所述般,利用光學式三維測距儀200之雷射202對鑄嘴214之噴口220所在的表面222發出雷射光,以掃描鑄嘴214之表面222。掃描的橫向解析度取決於單軸向移動平台204的移動速率,而掃描的縱向解析度則取決於光學式三維測距儀200之雷射的解析度。雷射202將掃描所獲得之訊號傳遞給光 學式三維測距儀200的三維測距儀204。三維測距儀204處理這些訊號後,可獲得許多的三維座標點。三維測距儀204可進一步將這些三維座標點予以數位化。After the installation of the detecting device is completed, the laser light of the optical three-dimensional range finder 200 can be used to emit laser light to the surface 222 of the nozzle 220 of the casting nozzle 214 to scan the surface 222 of the casting nozzle 214 as described in step 102. . The lateral resolution of the scan depends on the rate of movement of the uniaxially moving platform 204, while the longitudinal resolution of the scan depends on the resolution of the laser of the optical three-dimensional range finder 200. The laser 202 transmits the signal obtained by the scan to the light The three-dimensional range finder 204 of the three-dimensional range finder 200. After the three-dimensional range finder 204 processes these signals, a number of three-dimensional coordinate points are available. The three-dimensional range finder 204 can further digitize these three-dimensional coordinate points.

接下來,如步驟104所述,透過運算設備208,且利用經數位化後之三維座標點的資料的全部或一部分,擬合出基準平面的方程式。在一些實施例中,由於光學式三維測距儀200掃描所獲得之三維座標點可能並非全為代表鑄嘴214之表面220的三維座標點,因此可先擷取代表鑄嘴214之表面220的三維座標點,來作為擬合基準平面的目標點。在一些示範例子中,若光學式三維測距儀200的移動平穩而沒有震動的情況下,掃描所得的這些三維座標點中可能沒有或僅有些許會對擬合結果產生干擾的雜點,故可無需進行雜點濾除處理。在一般的例子中,為了提高所擬合出來之基準平面的正確性,通常會對這些三維座標點進行一或多次的雜點濾除處理。Next, as described in step 104, the equation of the reference plane is fitted through the computing device 208 and using all or a portion of the digitized three-dimensional coordinate points. In some embodiments, since the three-dimensional coordinate points obtained by the optical three-dimensional range finder 200 scanning may not all represent the three-dimensional coordinate points of the surface 220 of the nozzle 214, the surface 220 representing the nozzle 214 may be first captured. The three-dimensional coordinate point is used as the target point for fitting the reference plane. In some exemplary examples, if the movement of the optical three-dimensional range finder 200 is stable without vibration, there may be no or only a few noise points in the three-dimensional coordinate points obtained by the scanning, which may interfere with the fitting result. No need to perform the impurity filtering process. In the general case, in order to improve the accuracy of the fitted reference plane, one or more noise filtering processes are usually performed on these three-dimensional coordinate points.

舉例而言,在沒有進行雜點濾除處理的例子中,運算設備208進行邏輯運算處理的程序如下所述。先令這些三維座標點之點群為,並定義擬合的平面方程式為aX+bY+cZ+d=0。其中,{P }為這些三維座標點的點群,p i (x i ,y i ,z i )為各三維座標點。擬合欲最小化的成本函數(cost function)f 設定為各三維座標點p i 與擬和平面間之距離D i 的總和: For example, in the example in which the noise filtering processing is not performed, the program in which the arithmetic device 208 performs the logical operation processing is as follows. Stipulate that the point groups of these three-dimensional coordinate points are And define the fitted plane equation as aX+bY+cZ+d=0. Where { P } is the point group of these three-dimensional coordinate points, and p i ( x i , y i , z i ) is each three-dimensional coordinate point. The cost function f to be minimized is set to the sum of the distances D i between the three-dimensional coordinate points p i and the pseudo-planes:

使用最佳化的數值方法可求得成本函數f 的最小解(a 1 ,b 1 ,c 1 ,d 1 ),即可得到描述此平面方程式的參數。在一示範例子中,此邏輯運算處理包含利用線性最小方差法。在此示範例子中,並沒有要進行雜點濾除處理,因此所擬合出的平面方程式即為基準平面的方程式。Using the optimized numerical method, the minimum solution ( a 1 , b 1 , c 1 , d 1 ) of the cost function f can be obtained, and the parameters describing the plane equation can be obtained. In an exemplary example, this logical operation includes the use of a linear minimum variance method. In this example, the noise filtering process is not performed, so the fitted plane equation is the equation of the reference plane.

另一方面,在對這些三維座標點進行雜點濾除處理的例子中,運算設備208進行邏輯運算處理的程序如下所述。先擬合出粗略的基準平面。擬合粗略的基準平面時,與上述例子相同,先令這些三維座標點之點群為,並定義擬合的粗略基準平面方程式為aX +bY +cZ +d =0。其中,{P }為這些三維座標點的點群,p i (x i ,y i ,z i )為各三維座標點。擬合欲最小化的成本函數f 設定為各三維座標點p i 與擬和粗略基準平面間之距離D i 的總和: On the other hand, in the example in which the three-dimensional coordinate points are subjected to the noise filtering processing, the program for performing the logical operation processing by the arithmetic device 208 is as follows. Fit a rough reference plane first. When fitting a rough datum plane, as in the above example, let the point groups of these three-dimensional coordinate points be And define the fitting equation is a rough reference plane aX + bY + cZ + d = 0. Where { P } is the point group of these three-dimensional coordinate points, and p i ( x i , y i , z i ) is each three-dimensional coordinate point. The cost function f to be minimized is set as the sum of the distances D i between the three-dimensional coordinate points p i and the pseudo-rough reference planes:

使用最佳化的數值方法可求得成本函數f 的最小解(a 1 ,b 1 ,c 1 ,d 1 ),即可得到描述此粗略基準平面之方程式的參數。在一示範例子中,此邏輯運算處理包含利用線性最小方差法。Using the optimized numerical method, the minimum solution ( a 1 , b 1 , c 1 , d 1 ) of the cost function f can be obtained, and the parameters describing the equation of this coarse reference plane can be obtained. In an exemplary example, this logical operation includes the use of a linear minimum variance method.

由於上述用來擬合計算粗略基準平面之三維座標點除了有代表鑄嘴214之表面222的點之外,亦可能包含了一些例如以週期性的方式出現的雜點,因此計算出來的粗略基準平面雖然大致通過鑄嘴214之表面222,但精準度 仍受這些雜點的影響。這些雜點可能是因為光學式三維測距儀200在掃描過程中受到單向移動平台震動而產生。故,為了求得更精確的基準平面,接下來進行雜點濾除處理。Since the three-dimensional coordinate points used to fit the calculated rough reference plane described above may include some points such as those occurring in a periodic manner, in addition to the points representing the surface 222 of the nozzle 214, the calculated rough reference is thus calculated. Although the plane passes substantially through the surface 222 of the nozzle 214, the accuracy is Still affected by these noises. These noises may be due to the optical three-dimensional range finder 200 being subjected to a one-way moving platform vibration during scanning. Therefore, in order to obtain a more accurate reference plane, next, the noise filtering process is performed.

在雜點濾除處理中,可使用運算設備208,並利用上述擬合出之粗略基準平面的方程式a 1 X +b 1 Y +c 1 Z +d =0來計算每個三維座標點與此粗略基準平面之間的距離。將雜點的點群{Q}定義為與粗略基準平面之間的距離超過一預設值外的點:,|D j |>預設值。In the noise filtering process, the arithmetic device 208 can be used, and each three-dimensional coordinate point is calculated using the equation a 1 X + b 1 Y + c 1 Z + d =0 of the rough reference plane fitted above. The distance between the rough reference planes. The point group {Q} of the noise is defined as a point beyond the predetermined reference value from the rough reference plane: , | D j |> default value.

可根據震動的幅度與雜點的分布範圍,來定義距離的預設值。在一示範例子中,預設值訂為0.2mm。接著,將雜點{Q}濾除,即去除與粗略基準平面之間的距離超過此預設值的這些三維座標點。將雜點{Q}濾除後,可得到剩餘之三維座標點的點群{R}。The preset value of the distance can be defined according to the magnitude of the vibration and the distribution range of the noise. In an exemplary example, the preset value is set to 0.2 mm. Next, the noise {Q} is filtered out, that is, the three-dimensional coordinate points whose distance from the rough reference plane exceeds the preset value are removed. After the noise {Q} is filtered out, the point group {R} of the remaining three-dimensional coordinate points is obtained.

然後,使用運算設備208,並利用剩餘的這些三維座標點,而如同上述擬合粗略基準平面的方式擬合出基準平面的方程式a 2 X +b 2 Y +c 2 Z +d =0。在一些示範例子中,可僅進行一次的雜點濾除處理程序。在另一些示範例子中,可根據實際檢測的需求,而重複進行一或多次的擬合粗略基準平面之方程式與雜點濾除處理的程序。Then, the arithmetic device 208 is used, and the remaining three-dimensional coordinate points are utilized, and the equation a 2 X + b 2 Y + c 2 Z + d =0 of the reference plane is fitted as described above by fitting the rough reference plane. In some exemplary examples, the noise filtering process can be performed only once. In other exemplary examples, one or more procedures for fitting the equations of the rough reference plane and the noise filtering process may be repeated according to the actual detection requirements.

請再次參照第1圖與第2圖,在擬合出基準平面的方程式後,可如步驟106所述,使用運算設備208並利用上述所擬合出來的基準平面方程式來計算每個三維座標點 與此基準平面之間的距離。以經過雜點濾除後所獲得之基準平面方程式a 2 X +b 2 Y +c 2 Z +d =0為例,且每個三維座標點與此基準平面之間的距離設為D k ,則: Referring again to FIGS. 1 and 2, after fitting the equation of the reference plane, each of the three-dimensional coordinate points can be calculated using the computing device 208 and using the above-described fitted reference plane equation as described in step 106. The distance from this datum plane. Taking the reference plane equation a 2 X + b 2 Y + c 2 Z + d =0 obtained after filtering through the noise point as an example, and the distance between each three-dimensional coordinate point and the reference plane is set to D k , then:

接著,如步驟108所述,使用運算設備208,並利用上述所計算出之三維座標點與基準平面之間的這些距離與預設指標,來計算鑄嘴214之表面222的平坦度檢測值。在一些示範例子中,此預設指標可為最大值、最小值、平均值或標準差,即三維座標點與基準平面之間的距離的最大值、最小值、平均值或標準差。舉例而言,若採用標準差來作為預設指標,則以標準差所計算出之平坦度檢測值的數值愈小,代表鑄嘴214之噴口220所在之表面222的平坦度愈高。Next, as described in step 108, the flatness detection value of the surface 222 of the casting nozzle 214 is calculated using the computing device 208 and utilizing the distances between the calculated three-dimensional coordinate points and the reference plane and the preset index. In some exemplary examples, the preset indicator may be a maximum value, a minimum value, an average value, or a standard deviation, that is, a maximum value, a minimum value, an average value, or a standard deviation of a distance between the three-dimensional coordinate point and the reference plane. For example, if the standard deviation is used as the preset index, the smaller the value of the flatness detection value calculated by the standard deviation, the higher the flatness of the surface 222 where the nozzle 220 of the nozzle 214 is located.

由上述之實施方式可知,本發明之一優點就是因為鑄嘴平坦度之檢測方法係一種非接觸式的自動化檢測方法,因此可避免破壞鑄嘴表面,亦不會損及檢測裝置。It can be seen from the above embodiments that one of the advantages of the present invention is that the method for detecting the flatness of the nozzle is a non-contact automatic detection method, thereby avoiding damage to the surface of the nozzle and without damaging the detecting device.

由上述之實施方式可知,本發明之另一優點就是因為鑄嘴平坦度之檢測方法利用光學式三維測距儀與單軸向移動平台,來取得鑄嘴之噴口表面的三維座標點群,再透過影像處理的方式來計算出噴口表面的平坦度。因此,本檢測方法可快速取得眾多取樣點群,而有助於完整描述鑄嘴外型,且檢測速度快。此外,本檢測方法更可導入雜訊濾除步驟,以降低三維測距儀在移動時所造成之震動誤訊 號對架構鑄嘴外型的影響,進而可更真確地描述出鑄嘴外型。It can be seen from the above embodiments that another advantage of the present invention is that the method for detecting the flatness of the nozzle utilizes an optical three-dimensional range finder and a uniaxial moving platform to obtain a three-dimensional coordinate point group of the nozzle surface of the nozzle, and then The flatness of the nozzle surface is calculated by image processing. Therefore, the detection method can quickly obtain a large number of sampling point groups, and helps to fully describe the shape of the nozzle, and the detection speed is fast. In addition, the detection method can further introduce a noise filtering step to reduce the vibration error caused by the three-dimensional range finder when moving. The influence of the number on the shape of the casting nozzle can further describe the shape of the casting nozzle more accurately.

由上述之實施方式可知,本發明之又一優點就是因為鑄嘴平坦度之檢測方法可在非晶質合金薄帶生產過程中,快速檢出鑄嘴的製造瑕疵,因此可有效降低製程中斷的發生率,並可確保非晶質合金薄帶的品質。According to the above embodiments, another advantage of the present invention is that the method for detecting the flatness of the nozzle can quickly detect the manufacturing flaw of the nozzle during the production process of the amorphous alloy ribbon, thereby effectively reducing the process interruption. The incidence and the quality of the amorphous alloy ribbon can be ensured.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何在此技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described above by way of example, it is not intended to be construed as a limitation of the scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧檢測方法100‧‧‧Test method

102‧‧‧步驟102‧‧‧Steps

104‧‧‧步驟104‧‧‧Steps

106‧‧‧步驟106‧‧‧Steps

108‧‧‧步驟108‧‧‧Steps

Claims (8)

一種鑄嘴平坦度之檢測方法,包含:利用一光學式三維測距儀對一鑄嘴之一噴口所在之一表面進行掃描,以取得複數個三維座標點;使用一運算設備進行一邏輯運算處理,以利用該些三維座標點之至少一部分擬合出一基準平面之一方程式;使用該運算設備並利用該基準平面之該方程式計算每一該些三維座標點與該基準平面之一距離;以及使用該運算設備並利用該些三維座標點與該基準平面之該些距離及一預設指標,計算該表面之一平坦度檢測值。A method for detecting the flatness of a nozzle comprises: scanning an surface of one nozzle of a casting nozzle with an optical three-dimensional range finder to obtain a plurality of three-dimensional coordinate points; and performing a logic operation using an arithmetic device And using at least a portion of the three-dimensional coordinate points to fit an equation of a reference plane; using the computing device and using the equation of the reference plane to calculate a distance between each of the three-dimensional coordinate points and the reference plane; The flatness detection value of the surface is calculated by using the computing device and using the distances of the three-dimensional coordinate points from the reference plane and a predetermined index. 如請求項1所述之鑄嘴平坦度之檢測方法,其中該光學式三維測距儀包含一雷射與一三維測距儀,且該三維測距儀與該雷射接合。The method for detecting the flatness of a nozzle according to claim 1, wherein the optical three-dimensional range finder comprises a laser and a three-dimensional range finder, and the three-dimensional range finder is engaged with the laser. 如請求項1所述之鑄嘴平坦度之檢測方法,其中利用該光學式三維測距儀對該鑄嘴之該噴口所在之該表面進行掃描之步驟包含:將該光學式三維測距儀設於一單軸向移動平台上;使該光學式三維測距儀設於該鑄嘴之該表面的前方;以及使該單軸向移動平台以平行該表面之方向移動。The method for detecting the flatness of a nozzle according to claim 1, wherein the step of scanning the surface of the nozzle of the nozzle by using the optical three-dimensional range finder comprises: setting the optical three-dimensional range finder On a single axial moving platform; the optical three-dimensional range finder is disposed in front of the surface of the casting nozzle; and the uniaxially moving platform is moved in a direction parallel to the surface. 如請求項1所述之鑄嘴平坦度之檢測方法,其中該運算設備包含一電腦設備。The method for detecting the flatness of a nozzle according to claim 1, wherein the computing device comprises a computer device. 如請求項1所述之鑄嘴平坦度之檢測方法,其中進行該邏輯運算處理之步驟包含利用一線性最小方差法。The method for detecting the flatness of a nozzle according to claim 1, wherein the step of performing the logical operation comprises using a linear minimum variance method. 如請求項1所述之鑄嘴平坦度之檢測方法,其中進行該邏輯運算處理之步驟包含:使用該運算設備並利用該些三維座標點擬合出一粗略基準平面之一方程式;進行一雜點濾除處理,包含:使用該運算設備並利用該粗略基準平面之該方程式計算每一該些三維座標點與該粗略基準平面之間之一距離;以及去除與該粗略基準平面之間的該些距離超過一預設值之該些三維座標點;以及利用剩餘之該些三維座標點擬合出該基準平面之該方程式。The method for detecting the flatness of a nozzle according to claim 1, wherein the step of performing the logical operation comprises: using the computing device and using the three-dimensional coordinate points to fit an equation of a rough reference plane; Point filtering processing, comprising: calculating a distance between each of the three-dimensional coordinate points and the coarse reference plane using the computing device and using the equation of the coarse reference plane; and removing the relationship between the coarse reference plane and the coarse reference plane The three-dimensional coordinate points whose distance exceeds a predetermined value; and the equations for fitting the reference plane by using the remaining three-dimensional coordinate points. 如請求項6所述之鑄嘴平坦度之檢測方法,其中在進行該邏輯運算處理之步驟中,於擬合出該基準平面之該方程式的步驟前,包含重複進行利用該些三維座標點擬合出該粗略基準平面之該方程式與該雜點濾除處理至少一次。The method for detecting the flatness of a casting nozzle according to claim 6, wherein in the step of performing the logical operation processing, before the step of fitting the equation of the reference plane, the method further comprises: using the three-dimensional coordinate points repeatedly The equation for the coarse reference plane is combined with the noise filtering process at least once. 如請求項1所述之鑄嘴平坦度之檢測方法,其中該預設指標為最大值、最小值、平均值或標準差。The method for detecting the flatness of a nozzle according to claim 1, wherein the preset index is a maximum value, a minimum value, an average value, or a standard deviation.
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