JPH062625B2 - Ceramic metallization method - Google Patents

Description

TECHNICAL FIELD The present invention relates to a metallizing method for ceramics, and more particularly to a metallizing method capable of forming an extremely precise and strong metal coating on the surface of ceramics. is there.

<Prior Art> Currently, there is a plating or vapor deposition method as a method for forming a precise thin film on a ceramic. However, since these coatings are merely physically attached to the ceramic, they can be easily formed. Peel off.

In order to increase the peel strength, it is necessary to form a reaction phase at the interface.

As this method, there is currently a method of using a Mo-Mn paste or a method of fusing an active metal.

These methods are extremely excellent in terms of strength, but they have the drawback that the film thickness is thin and it is difficult to obtain a precise coating.

<Problems to be Solved by the Invention> The present invention has been made in view of the above problems, and an object thereof is to provide a new metallization capable of forming a metal film which is precise, has a small film thickness, and has extremely high peel strength. There is a way to provide.

<Means for Solving Problems> The above problems can be solved by the following method.

(1) After coating a metal thin film on the metallized surface of the ceramic, depositing a powder of a diffusible material on the ceramic, coating the deposited surface with a metal, and diffusing the deposited powder. A method of metallizing a ceramic, comprising a step of diffusing components into the ceramic.

(2) The ceramic metallizing method according to the above item 1, wherein the material having diffusibility in the ceramic is selected from active metals and their thermally decomposable compounds.

<Operation> The “adhesion” of the present invention refers to the following concept.

(1) The powder originally has a property of adsorbing to the surface of the object, and once attached, it cannot be easily removed by washing.

Use this property to form a powder adsorption layer on the ceramic surface.

(2) To deposit powder on the surface by using the force of static electricity, which is typified by electrophoresis and electrostatic coating.

(3) Make paste or liquid and apply or print on the surface.

(4) In general, the state in which powder is physically or chemically attached to the surface without diffusion of other substances.

The most typical materials that have diffusivity in ceramics are
Active metals and their thermally decomposable compounds.

Active metals include, for example, Ti, Zr, V, Nb, Ta, Ca, Mg,
Y, rare earth metals and their alloys are referred to, and thermally decomposable compounds are compounds that are substantially decomposed into active metals at the temperature during diffusion treatment. The most typical ones are the active metals mentioned above. It is a hydride.

The deposition of the powder is performed after coating the surface of the ceramic with a thin film of metal in advance. This is suitable for forming a fine pattern by etching, as compared with a case where active metal powder is directly deposited on the surface of a ceramic without forming a metal thin film in advance.

Existing methods such as wet plating, vacuum plating, and vapor phase plating can be used for forming a metal thin film. For metals, for example, Cu, Fe, Ni, Co, Ag, Au, Al, Sn, In, Zn and These alloys or plating metals such as Cu-P, Ni-P, Ni-B, Co-P, and Co-B can be appropriately used alone or in combination with each other.

After deposition, more metal is coated.

For this coating, all existing methods such as wet plating, vacuum plating, vapor phase plating can be used. For the metal, similar to thin film metal, for example, Cu, Fe, Ni, Co, Ag, Au, Al, Sn, In , Zn, alloys thereof, or plated metals such as Cu-P, Ni-P, Ni-B, Co-P, and Co-B can be used individually or in appropriate combination.

In addition, it is needless to say that each of the above examples is a list of typical metals, and that other metals can be appropriately used as needed.

Diffusion treatment of a material component having a ceramic diffusivity into a ceramic is performed by heat treatment.

The atmosphere is preferably a non-oxidizing atmosphere, and the temperature may be below the melting point of the thin-film metal or the coating metal, or above the melting point if necessary, as long as it is sufficient for the diffusion material to diffuse into the ceramic. It can also be carried out as appropriate at the temperature of.

Applicable ceramics are applicable to all ceramics from so-called oxide, nitride and carbide ceramics to carbon and glass.

<Example> Example 1. Ceramic: 96% alumina plate (50 x 50 x 1 mm) After depositing 0.1 micron of Cu on an alumina plate, the surface of the plate was dusted with titanium hydride powder of 10 micron under.

TiH ₂ powder was deposited on the surface.

Next, this was washed with water to remove excess powder, and then Cu was plated to a thickness of 10 μm.

<Diffusion treatment> Heat treatment was performed in a vacuum of 2 × 10 ⁻⁴ Torr at 900 ° C. for 30 minutes.

<Evaluation> A 0.8 mm solder-plated wire was soldered and a tensile test was performed.

Number of Samples N = 5 Times 4 of 5 samples were fractured in the form of ceramic scooping.

The tensile strength was 2.1 to 3.8 Kg / mm ³ .

Incidentally, the one that was not heat treated was 0.2 to 0.4 kg / mm ³ , and it was peeled off from the 100% plated surface.

Reference Example 1 Ceramic: 96% Alumina (50 x 50 x 1 mm) Alumina plate is sprinkled with titanium powder having a grain size of 325 mesh, washed with water to remove excess titanium, and then plated with Cu to a thickness of 20 microns. did.

<Diffusion Treatment> Heat treatment was performed at 950 ° C. for 1 hour in a vacuum of 1 × 10 ⁻⁴ Torr.

<Evaluation> After the heat treatment, a tensile test was performed in the same manner as in Example 1.

Number of samples N = 5 times The strength was 1.9 to 2.7 Kg / mm ² .

In addition, those that were not heat-treated were 0.1 to 0.3 kg / mm ² .

Example 2 Ceramic: Partially Stabilized Zirconia (15 × 15 × 5 mm) A plate of zirconia was plated with Ni—P for 1 micron, and a titanium hydride powder having a particle size of 10 micron was deposited on the surface by electrophoresis. .

After depositing and cleaning, Ni was plated to about 10 microns.

<Diffusion Treatment> Heat treatment was performed at 950 ° C. for 20 minutes in a vacuum of 2 × 10 ⁻⁴ Torr.

<Evaluation> After the heat treatment, a tensile test was performed in the same manner as in Example 1.

Number of samples N = 5 times The strength was 2.5 to 3.7 kg / mm ³ .

Example 3 Ceramic: Aluminum Nitride (20 × 20 × 0.5 mm) An aluminum nitride plate was plated with 0.2 μm of copper, and then 10 μm under titanium hydride powder was sprinkled on the surface.

After washing with water to remove excess powder, silver was vapor-deposited to 1 micron, and Ni was further plated to 5 micron.

<Diffusion treatment> Heat treatment was performed at 850 ° C for 10 minutes in a vacuum of 1 × 10 ^-4 Torr.

<Evaluation> After the heat treatment, a tensile test was performed in the same manner as in Example 1.

Number of samples N = 5 times The strength was 1.8 to 2.7 kg / mm ³ .

Example 4 Ceramic: 99% Alumina (20 × 20 × 5 mm) After 0.5 μm Ni-P was plated on a ceramic plate,
The surface was dusted with zirconium hydride powder with a particle size of 10 microns under.

After washing with water to remove excess powder, Ni-
P was plated with 10 microns.

<Diffusion heat treatment> Heat treatment was performed at 980 ° C for 10 minutes in a vacuum of 5 × 10 ^-5 Torr.

<Evaluation> After the heat treatment, a tensile test was performed in the same manner as in Example 1.

Number of samples N = 5 times The strength was 1.4 to 2.3 Kg / mm ² .

<Effects of the Invention> As described in detail above, the present invention has a feature that a metallized film having high precision and high strength can be formed, and is extremely useful as a metallizing method for precision parts or electronic parts as well as mechanical parts. It is something.

Claims (2)

[Claims] 1. A method of coating a metal thin film on a metallized surface of a ceramic and then applying a powder of a diffusible material to the ceramic, a step of coating the adhered surface with a metal, and the applied powder. A method of metallizing a ceramic, comprising the step of diffusing the diffusion component of (4) into the ceramic. 2. The ceramic metallizing method according to claim 1, wherein the material having diffusivity in the ceramic is selected from active metals and thermally decomposable compounds of the active metals.