JPH0625955Y2 - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPH0625955Y2
JPH0625955Y2 JP755591U JP755591U JPH0625955Y2 JP H0625955 Y2 JPH0625955 Y2 JP H0625955Y2 JP 755591 U JP755591 U JP 755591U JP 755591 U JP755591 U JP 755591U JP H0625955 Y2 JPH0625955 Y2 JP H0625955Y2
Authority
JP
Japan
Prior art keywords
substrate
epitaxial growth
liquid phase
sealed tube
melt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP755591U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03110839U (enExample
Inventor
研二 丸山
道春 伊藤
知史 上田
満男 吉河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP755591U priority Critical patent/JPH0625955Y2/ja
Publication of JPH03110839U publication Critical patent/JPH03110839U/ja
Application granted granted Critical
Publication of JPH0625955Y2 publication Critical patent/JPH0625955Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP755591U 1991-02-20 1991-02-20 液相エピタキシヤル成長装置 Expired - Lifetime JPH0625955Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP755591U JPH0625955Y2 (ja) 1991-02-20 1991-02-20 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP755591U JPH0625955Y2 (ja) 1991-02-20 1991-02-20 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPH03110839U JPH03110839U (enExample) 1991-11-13
JPH0625955Y2 true JPH0625955Y2 (ja) 1994-07-06

Family

ID=31511214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP755591U Expired - Lifetime JPH0625955Y2 (ja) 1991-02-20 1991-02-20 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPH0625955Y2 (enExample)

Also Published As

Publication number Publication date
JPH03110839U (enExample) 1991-11-13

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Effective date: 19950110