JPH0625000Y2 - 炉芯管構造 - Google Patents

炉芯管構造

Info

Publication number
JPH0625000Y2
JPH0625000Y2 JP1988153490U JP15349088U JPH0625000Y2 JP H0625000 Y2 JPH0625000 Y2 JP H0625000Y2 JP 1988153490 U JP1988153490 U JP 1988153490U JP 15349088 U JP15349088 U JP 15349088U JP H0625000 Y2 JPH0625000 Y2 JP H0625000Y2
Authority
JP
Japan
Prior art keywords
core tube
furnace core
heat treatment
tube
control body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988153490U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0273730U (enrdf_load_stackoverflow
Inventor
利雄 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fukui Shin Etsu Quartz Co Ltd
Original Assignee
Fukui Shin Etsu Quartz Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fukui Shin Etsu Quartz Co Ltd filed Critical Fukui Shin Etsu Quartz Co Ltd
Priority to JP1988153490U priority Critical patent/JPH0625000Y2/ja
Publication of JPH0273730U publication Critical patent/JPH0273730U/ja
Application granted granted Critical
Publication of JPH0625000Y2 publication Critical patent/JPH0625000Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988153490U 1988-11-28 1988-11-28 炉芯管構造 Expired - Lifetime JPH0625000Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988153490U JPH0625000Y2 (ja) 1988-11-28 1988-11-28 炉芯管構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988153490U JPH0625000Y2 (ja) 1988-11-28 1988-11-28 炉芯管構造

Publications (2)

Publication Number Publication Date
JPH0273730U JPH0273730U (enrdf_load_stackoverflow) 1990-06-05
JPH0625000Y2 true JPH0625000Y2 (ja) 1994-06-29

Family

ID=31429376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988153490U Expired - Lifetime JPH0625000Y2 (ja) 1988-11-28 1988-11-28 炉芯管構造

Country Status (1)

Country Link
JP (1) JPH0625000Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54103750U (enrdf_load_stackoverflow) * 1977-12-29 1979-07-21
JPS57135733U (enrdf_load_stackoverflow) * 1981-02-20 1982-08-24
JPS57201030A (en) * 1981-06-05 1982-12-09 Oki Electric Ind Co Ltd Heat treatment for semiconductor wafer
JPS6245128A (ja) * 1985-08-23 1987-02-27 Toshiba Corp 外部燃焼装置

Also Published As

Publication number Publication date
JPH0273730U (enrdf_load_stackoverflow) 1990-06-05

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