JPH06244556A - Manufacture of multilayered printed wiring board - Google Patents

Manufacture of multilayered printed wiring board

Info

Publication number
JPH06244556A
JPH06244556A JP3000993A JP3000993A JPH06244556A JP H06244556 A JPH06244556 A JP H06244556A JP 3000993 A JP3000993 A JP 3000993A JP 3000993 A JP3000993 A JP 3000993A JP H06244556 A JPH06244556 A JP H06244556A
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
inner layer
copper foil
aqueous solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3000993A
Other languages
Japanese (ja)
Inventor
Naohito Yoshimura
直仁 吉村
Yasuo Tanaka
恭夫 田中
Takashi Nakada
貴司 中田
Koichi Nakano
孝一 中野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Gas Chemical Co Inc
Original Assignee
Mitsubishi Gas Chemical Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Gas Chemical Co Inc filed Critical Mitsubishi Gas Chemical Co Inc
Priority to JP3000993A priority Critical patent/JPH06244556A/en
Publication of JPH06244556A publication Critical patent/JPH06244556A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To provide a method for manufacturing a wiring board used by cleaning with an alkali permanganate solution before an inner layer board is treated for interlayer adhesion. CONSTITUTION:A method for manufacturing a title wiring board which uses an inner layer printed wiring board comprising the surface of a copper foil cleaned with an alkalipermanganate solution before the copper foil is surface- treated for interlayer adhesion after an inner layer printed wiring network is formed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、多層板の中間層として
用いる内層用プリント配線板の製造法に関するものであ
り、内層用のプリント配線網上等に残存したレジストな
どをより完璧に除去することにより、層間接着用の表面
処理をより均一とすることによってより信頼性の高い層
間接着を有する多層プリント配線板を製造するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an inner layer printed wiring board used as an intermediate layer of a multilayer board, and more completely removes resist and the like remaining on the inner layer printed wiring network. This makes it possible to manufacture a multilayer printed wiring board having more reliable interlayer adhesion by making the surface treatment for interlayer adhesion more uniform.

【0002】[0002]

【従来の技術】内層用プリント配線板は、通常、両面銅
張積層板をバフ研磨等の機械的研磨を施し、適宜、化学
研磨液にて処理したものを用い、フォトレジスト貼着、
露光、現像、エッチング、フォトレジスト剥離し、褐色
乃至黒色の微細凹凸酸化銅皮膜の形成或いはそれをさら
に微細凹凸を保って還元する方法などの層間接着用の表
面処理を施すことより製造されている。
2. Description of the Related Art As an inner layer printed wiring board, a double-sided copper-clad laminate is usually subjected to mechanical polishing such as buffing, and appropriately treated with a chemical polishing liquid.
It is manufactured by exposing, developing, etching, removing photoresist, forming a brown or black fine uneven copper oxide film, or performing surface treatment for interlayer adhesion such as a method of reducing it while maintaining fine unevenness. .

【0003】最近、部品のより小型化とその表面実装化
に伴い、小径スルーホール化、より精密なプリント配線
パターンの形成が必要とされ、また、より薄い内層用プ
リント配線板の採用などが必要とされている。特に、小
径スルーホール化に伴い、ドリル孔あけ時に生じた微細
な破壊面やクラックにスルーホールメッキ液が浸透し、
ハローイングが発生し易いという問題がある。
Recently, with the miniaturization of components and the surface mounting thereof, it is necessary to reduce the diameter of through holes, to form a more precise printed wiring pattern, and to use a thinner printed wiring board for inner layers. It is said that. In particular, with the development of smaller diameter through-holes, the through-hole plating solution penetrates into the minute fracture surfaces and cracks that occur during drilling,
There is a problem that haloing is likely to occur.

【0004】この解決策として、酸化銅膜を形成した
後、還元処理して金属銅とすることにより、孔あけ時の
破壊面やクラックの発生を抑えると共に、金属銅はメッ
キ液にも溶解しにくいことを利用する方法が開発され
た。しかし、この方法は、設備、ランニングコストの面
に課題があることと共に、還元前の酸化銅皮膜がより均
一とする必要があった。
As a solution to this problem, by forming a copper oxide film and then reducing it to metallic copper, the occurrence of fracture surfaces and cracks at the time of drilling is suppressed and the metallic copper also dissolves in the plating solution. Methods have been developed to take advantage of the difficulty. However, this method has problems in terms of equipment and running cost, and it is necessary to make the copper oxide film before reduction more uniform.

【0005】[0005]

【発明が解決しようとする課題】本発明は、エッチング
後、レジストの剥離残などの有機物を内層用プリント配
線銅箔表面から完全に除去することにより、均一な酸化
処理を可能とするものであり、酸化処理のみによっても
従来に比較して大幅にハローイングの大きさが減少した
内層板を見いだすことにある。
DISCLOSURE OF THE INVENTION The present invention enables uniform oxidation treatment by completely removing organic substances such as residue of resist peeling from the surface of the printed wiring copper foil for inner layer after etching. The purpose is to find an inner layer plate in which the haloing size is greatly reduced compared to the conventional case only by the oxidation treatment.

【0006】[0006]

【課題を解決するための手段】すなわち、本発明は、多
層プリント配線板の製造法において、内層用プリント配
線網を形成した後、層間接着用の銅箔表面処理に先立っ
て、アルカリ性過マンガン酸塩水溶液にて銅箔表面を清
浄化してなる内層用プリント配線板を用いることを特徴
とする多層プリント配線板の製造法である。また、本発
明の好ましい態様においては、該アルカリ性過マンガン
酸塩水溶液が、過マンガン酸カリウム或いは過マンガン
酸ナトリウム 10〜70g/リットル、水酸化ナトリウム 5〜70
g/リットルを含む水溶液であり、処理を40〜80℃、2〜7分
間の範囲で行う多層プリント配線板の製造法である。
That is, according to the present invention, in a method for producing a multilayer printed wiring board, after forming a printed wiring network for an inner layer and prior to a copper foil surface treatment for interlayer adhesion, an alkaline permanganate is used. A method for producing a multilayer printed wiring board, which comprises using an inner layer printed wiring board obtained by cleaning the surface of a copper foil with an aqueous salt solution. In a preferred embodiment of the present invention, the alkaline permanganate aqueous solution is potassium permanganate or sodium permanganate 10 to 70 g / liter, sodium hydroxide 5 to 70.
It is an aqueous solution containing g / liter and is a method for producing a multilayer printed wiring board in which the treatment is carried out at 40 to 80 ° C. for 2 to 7 minutes.

【0007】以下、本発明の構成を説明する。本発明の
多層プリント配線板は、中間層として用いる内層用プリ
ント配線板として、内層プリント配線網を形成した後、
アルカリ性過マンガン酸塩水溶液にて清浄化した後、層
間接着用の銅箔表面を行ってなる内層用プリント配線板
を用いることを除き、多層化接着用プリプレグ、外層用
の銅箔或いは片面銅張積層板などの積層材料、それらの
多層化積層成形方法など従来公知のものが使用できる。
The structure of the present invention will be described below. The multilayer printed wiring board of the present invention, as an inner layer printed wiring board used as an intermediate layer, after forming an inner layer printed wiring network,
After cleaning with an alkaline permanganate aqueous solution and then using the inner layer printed wiring board made by performing the copper foil surface for interlayer adhesion, multilayer prepreg for adhesion, copper foil for outer layer or single-sided copper clad Conventionally known materials such as a laminated material such as a laminated plate and a method for forming a multilayered laminate thereof can be used.

【0008】片面或いは両面銅張積層板用プリプレグ、
多層化接着用プリプレグは、基材としてドリル孔あけ性
に優れたものを用い、これに熱硬化性樹脂組成物を含浸
・乾燥してなるものである。基材としてはE-ガラス、S-
ガラス、SII-ガラス、T-ガラス、C-ガラス、A-ガラス、
D-ガラスなどの各種ガラス繊維を用いた織布、不織布、
アルミナペーパーなどの無機繊維不織布;液晶性ポリエ
ステル、全芳香族ポリアミド、ポリイミド、フッ素樹
脂、ポリフェニレンサルファイド、ポリエーテルエーテ
ルケトン、ポリエーテルイミド、その他の耐熱性の繊維
を用いた織布、不織布、さらにこれらの混合織布、混合
不織布などが挙げられる。
Prepreg for single-sided or double-sided copper-clad laminate,
The multi-layered adhesive prepreg uses a base material having excellent drilling properties and is impregnated with a thermosetting resin composition and dried. As a base material, E-glass, S-
Glass, SII-glass, T-glass, C-glass, A-glass,
Woven cloth, non-woven cloth using various glass fibers such as D-glass,
Inorganic fiber non-woven fabric such as alumina paper; liquid crystalline polyester, wholly aromatic polyamide, polyimide, fluororesin, polyphenylene sulfide, polyether ether ketone, polyether imide, and other woven and non-woven fabrics using heat-resistant fibers Mixed woven fabrics, mixed non-woven fabrics and the like.

【0009】また、含浸に用いる熱硬化性樹脂として
は、ビスフェノールA型、ノボラック型、ハロゲン化ビ
スフェノールA型、ハロゲン化ノボラック型、その他の
3官能以上の多官能性エポキシ樹脂;シアナト樹脂、シ
アン酸エステル−エポキシ樹脂、シアン酸エステル−マ
レイミド−エポキシ樹脂などのシアン酸エステル系樹
脂;ビスマレイミド、その他、マレイミド基を2以上有
する多官能性マレイミド類とビス(4−アミノフェニル)
メタンなどの多官能性アミンを主成分とするマレイミド
系樹脂;さらに耐熱性の熱可塑性樹脂や熱可塑性樹脂と
熱硬化性樹脂との組成物が例示される。
As the thermosetting resin used for impregnation, bisphenol A type, novolac type, halogenated bisphenol A type, halogenated novolak type, and other polyfunctional epoxy resins having three or more functional groups; cyanato resin, cyanic acid Cyanate ester resins such as ester-epoxy resin, cyanate ester-maleimide-epoxy resin; bismaleimide, and other polyfunctional maleimides having two or more maleimide groups and bis (4-aminophenyl)
Examples thereof include a maleimide-based resin containing a polyfunctional amine such as methane as a main component; and a heat-resistant thermoplastic resin or a composition of a thermoplastic resin and a thermosetting resin.

【0010】銅箔としては、圧延銅箔、電解銅箔などが
挙げられる。積層成形方法としては、熱盤プレス、熱盤
真空プレス、オートクレーブ成形などが例示される。ま
た、内層プリント配線網銅箔の層間接着用の表面処理と
しては、従来公知の方法、並びにこれを還元処理する方
法が挙げられる。
Examples of the copper foil include rolled copper foil and electrolytic copper foil. Examples of the lamination molding method include hot plate press, hot plate vacuum press, and autoclave molding. Moreover, as the surface treatment for the interlayer adhesion of the inner layer printed wiring network copper foil, a conventionally known method and a method of reducing the same can be mentioned.

【0011】本発明では、上記した片面又は両面銅張積
層板を用い、エッチングレジスト貼着、露光、現像、エ
ッチングし、レジスト剥離した後、アルカリ性過マンガ
ン酸塩水溶液にて銅箔表面を清浄化した後、層間接着用
の表面処理して内層用プリント配線板とする。アルカリ
性過マンガン酸塩水溶液とそれによる処理としては、過
マンガン酸カリウム或いは過マンガン酸ナトリウム 10
〜70g/リットル、好ましくは40〜60g/リットル、水酸化ナトリウ
ム 5〜70g/リットル、好ましくは40〜60g/リットルを含む水溶液
にて、温度 40〜80℃、好ましくは60〜80℃、2〜7分
間、好ましくは3〜7分間の範囲;濃度 85重量%以上
の濃硫酸にて、温度20〜45℃、2〜7分間の範囲で行う
方法が挙げられる。
In the present invention, the above-mentioned single-sided or double-sided copper-clad laminate is used, and after the etching resist is attached, exposed, developed, etched, and the resist is peeled off, the copper foil surface is cleaned with an alkaline permanganate aqueous solution. After that, a surface treatment for interlayer adhesion is performed to obtain an inner layer printed wiring board. The alkaline permanganate aqueous solution and the treatment therewith include potassium permanganate or sodium permanganate.
~ 70 g / liter, preferably 40-60 g / liter, sodium hydroxide 5-70 g / liter, preferably 40-60 g / liter in an aqueous solution containing 40 to 80 ° C, preferably 60 to 80 ° C, 2 to 7 minutes, preferably in the range of 3 to 7 minutes; a method of performing the treatment in concentrated sulfuric acid having a concentration of 85% by weight or more at a temperature of 20 to 45 ° C. for 2 to 7 minutes.

【0012】アルカリ性過マンガン酸塩水溶液の濃度、
温度は、処理するプリント配線板の表面状態により最適
な条件を選択する。濃度が低い場合、処理温度が低い場
合には、処理に時間がかかりすぎたり、油脂分の除去が
不十分となり好ましくなく、アルカリ性過マンガン酸塩
水溶液の場合、上限を超えると過マンガン酸塩の自己分
解が生じたり、液調整に時間を要したりして好ましくな
い。
The concentration of the aqueous alkaline permanganate solution,
The optimum temperature is selected according to the surface condition of the printed wiring board to be treated. If the concentration is low, if the treatment temperature is low, the treatment takes too much time, or the removal of oil and fat is insufficient, which is not preferable. It is not preferable because self-decomposition occurs and it takes time to prepare the solution.

【0013】本発明の上記のアルカリ性過マンガン酸塩
水溶液による内層用プリント配線板の処理に用いる装置
或いは方法としては、ディッピングによる溶液浸漬法、
スプレー式のコンベアベルト型ソフトッチングマシンに
よる方法などが挙げられる。
The apparatus or method used for treating the inner layer printed wiring board with the above alkaline permanganate aqueous solution of the present invention includes a solution dipping method by dipping,
Examples include a method using a spray-type conveyor belt type soft-etching machine.

【0014】[0014]

【実施例】以下、実施例により本発明を説明する。 実施例1 絶縁層厚み 0.8mm、銅箔厚み70μmの両面銅張積層板を
番手#1000 のアルミナ研磨剤入りバフブラシ (フットプ
リント 10mm 、カッティング速度 9m/sec 、オシレーシ
ョン 250回/min、コンベア速度 3m/min)にてバフ研磨
し、乾燥後、ドライフィルム (旭化成 (株) 製、AQ306
5) を両面全面にラミネートした。この両面に紫外線露
光機(オーク社製、HMW301) にて全面紫外線商社した
後、3重量%水酸化ナトリウム水溶液にて40℃、1分間
の条件で処理し、ドライフィルムの除去を行った。
EXAMPLES The present invention will be described below with reference to examples. Example 1 A double-sided copper clad laminate having an insulation layer thickness of 0.8 mm and a copper foil thickness of 70 μm was a buff brush with a # 1000 alumina abrasive (footprint 10 mm, cutting speed 9 m / sec, oscillation 250 times / min, conveyor speed 3 m). / min), buffed and dried, then dry film (AQ306 manufactured by Asahi Kasei Corp.)
5) was laminated on both sides. The both surfaces were exposed to ultraviolet light using a UV exposure machine (HMW301, manufactured by Oak Co.), and then treated with a 3 wt% sodium hydroxide aqueous solution at 40 ° C. for 1 minute to remove the dry film.

【0015】これを過マンガン酸カリウム 50g/l(リット
ル)、水酸化ナトリウム 50g/lの水溶液で60℃、 3分間強
酸化による清浄化処理し、10重量%硫酸で酸洗し水洗し
た。亜塩素酸ナトリウム 30g/l、水酸化ナトリウム 15g
/l、リン酸ナトリウム 5g/lの水溶液で80℃、 4分間処
理して銅箔表面を酸化する接着力強化処理を行い、水
洗、乾燥して内層用プリント配線板とした。
This was cleaned with an aqueous solution of 50 g / l (liter) of potassium permanganate and 50 g / l of sodium hydroxide by strong oxidation at 60 ° C. for 3 minutes, then pickled with 10% by weight sulfuric acid and washed with water. Sodium chlorite 30g / l, sodium hydroxide 15g
/ l, an aqueous solution of 5 g / l sodium phosphate at 80 ° C for 4 minutes to oxidize the surface of the copper foil to enhance adhesion, and then wash and dry to obtain an inner layer printed wiring board.

【0016】樹脂量 52%、厚み 0.1mmのガラスエポキ
シプリプレグを上記で得た内層用プリント配線板の両面
に 3枚ずつ、さらにその外側に18μmの電解銅箔を配置
した構成にて温度 175℃、圧力 40kg/cm2で 2時間積層
成形し、厚み 1.6mmの4層板を得た。得られた4層板を
2枚重ね、上面に0.1mm アルミ板、下面に 1.5mmの紙フ
ェノール積層板を当て、 0.4mmφのドリルビットを用
い、回転数 80krpm 、送り 1.6m/min の条件にて 2500
の孔明けを行った。
A glass epoxy prepreg with a resin amount of 52% and a thickness of 0.1 mm was placed on each side of the printed wiring board for the inner layer, three sheets on each side, and an electrolytic copper foil of 18 μm was placed on the outside of the printed wiring board for a temperature of 175 ° C. Then, lamination molding was performed at a pressure of 40 kg / cm 2 for 2 hours to obtain a four-layer board having a thickness of 1.6 mm. Two of the obtained 4-layer boards are stacked, a 0.1 mm aluminum board is placed on the upper surface, and a paper phenol laminated board of 1.5 mm is placed on the lower surface. A 0.4 mmφ drill bit is used, and the rotation speed is 80 krpm and the feed rate is 1.6 m / min. Total 2500
I made a hole.

【0017】上記で孔明けした4層板を4規定塩酸に5
分間浸漬した後、外層18μm銅箔を研磨にて取り除き、
発生したハローイングの最大量を求めた。この結果、ハ
ローイングの最大量 230μmであった。 比較例1 実施例1において、過マンガン酸カリウムと水酸化ナト
リウムの混合液での強酸化処理を行わない他は、すべて
同様にした。この結果、ハローイングの最大量400μm
であった。
The four-layer plate perforated as described above was added to 4N hydrochloric acid to form 5
After dipping for a minute, remove the outer layer 18μm copper foil by polishing,
The maximum amount of haloing that occurred was determined. As a result, the maximum amount of haloing was 230 μm. Comparative Example 1 The same procedure was performed as in Example 1 except that the strong oxidation treatment with the mixed solution of potassium permanganate and sodium hydroxide was not performed. As a result, the maximum amount of haloing is 400 μm
Met.

【0018】[0018]

【発明の効果】以上、発明の詳細な説明、実施例などか
ら明瞭なように本発明によるプリント配線板はハローイ
ング発生量が抑制され、より信頼性の高いプリント配線
板を製造可能とするものであり、その工業的意義は高
い。
As is clear from the detailed description of the invention, the examples, etc., the printed wiring board according to the present invention suppresses the amount of haloing generated, and makes it possible to manufacture a more reliable printed wiring board. Therefore, its industrial significance is high.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中野 孝一 東京都葛飾区新宿6丁目1番1号 三菱瓦 斯化学株式会社東京工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Koichi Nakano 6-1, 1-1 Shinjuku, Katsushika-ku, Tokyo Mitsubishi Gas Chemical Co., Ltd. Tokyo factory

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 多層プリント配線板の製造法において、
内層用プリント配線網を形成した後、層間接着用の銅箔
表面処理に先立って、アルカリ性過マンガン酸塩水溶液
にて銅箔表面を清浄化してなる内層用プリント配線板を
用いることを特徴とする多層プリント配線板の製造法
1. A method for manufacturing a multilayer printed wiring board, comprising:
After forming the inner layer printed wiring network, prior to the copper foil surface treatment for interlayer adhesion, the inner layer printed wiring board formed by cleaning the copper foil surface with an alkaline permanganate aqueous solution is used. Manufacturing method of multilayer printed wiring board
【請求項2】 該アルカリ性過マンガン酸塩水溶液が、
過マンガン酸カリウム或いは過マンガン酸ナトリウム
10〜70g/リットル、水酸化ナトリウム 5〜70g/リットルを含む水
溶液であり、処理を40〜80℃、2〜7分間の範囲で行う
ものである請求項1記載の多層プリント配線板の製造法
2. The alkaline permanganate aqueous solution,
Potassium permanganate or sodium permanganate
The method for producing a multilayer printed wiring board according to claim 1, wherein the treatment is an aqueous solution containing 10 to 70 g / liter and 5 to 70 g / liter of sodium hydroxide, and the treatment is carried out at 40 to 80 ° C. for 2 to 7 minutes.
JP3000993A 1993-02-19 1993-02-19 Manufacture of multilayered printed wiring board Pending JPH06244556A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3000993A JPH06244556A (en) 1993-02-19 1993-02-19 Manufacture of multilayered printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3000993A JPH06244556A (en) 1993-02-19 1993-02-19 Manufacture of multilayered printed wiring board

Publications (1)

Publication Number Publication Date
JPH06244556A true JPH06244556A (en) 1994-09-02

Family

ID=12291878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3000993A Pending JPH06244556A (en) 1993-02-19 1993-02-19 Manufacture of multilayered printed wiring board

Country Status (1)

Country Link
JP (1) JPH06244556A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7390974B2 (en) 1998-02-26 2008-06-24 Ibiden Co., Ltd. Multilayer printed wiring board with filled viahole structure

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7390974B2 (en) 1998-02-26 2008-06-24 Ibiden Co., Ltd. Multilayer printed wiring board with filled viahole structure
US7622183B2 (en) 1998-02-26 2009-11-24 Ibiden Co., Ltd. Multilayer printed wiring board with filled viahole structure
US7737366B2 (en) 1998-02-26 2010-06-15 Ibiden Co., Ltd. Multilayer printed wiring board with filled viahole structure
US8115111B2 (en) 1998-02-26 2012-02-14 Ibiden Co., Ltd. Multilayer printed wiring board with filled viahole structure
US8987603B2 (en) 1998-02-26 2015-03-24 Ibiden Co,. Ltd. Multilayer printed wiring board with filled viahole structure

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