JPH0623568Y2 - グロ−放電型成膜装置 - Google Patents

グロ−放電型成膜装置

Info

Publication number
JPH0623568Y2
JPH0623568Y2 JP1987024828U JP2482887U JPH0623568Y2 JP H0623568 Y2 JPH0623568 Y2 JP H0623568Y2 JP 1987024828 U JP1987024828 U JP 1987024828U JP 2482887 U JP2482887 U JP 2482887U JP H0623568 Y2 JPH0623568 Y2 JP H0623568Y2
Authority
JP
Japan
Prior art keywords
bias voltage
film forming
discharge type
electrode
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987024828U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63131757U (enExample
Inventor
博 高宮
盛衛 早川
望 生地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1987024828U priority Critical patent/JPH0623568Y2/ja
Publication of JPS63131757U publication Critical patent/JPS63131757U/ja
Application granted granted Critical
Publication of JPH0623568Y2 publication Critical patent/JPH0623568Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
JP1987024828U 1987-02-21 1987-02-21 グロ−放電型成膜装置 Expired - Lifetime JPH0623568Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987024828U JPH0623568Y2 (ja) 1987-02-21 1987-02-21 グロ−放電型成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987024828U JPH0623568Y2 (ja) 1987-02-21 1987-02-21 グロ−放電型成膜装置

Publications (2)

Publication Number Publication Date
JPS63131757U JPS63131757U (enExample) 1988-08-29
JPH0623568Y2 true JPH0623568Y2 (ja) 1994-06-22

Family

ID=30824407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987024828U Expired - Lifetime JPH0623568Y2 (ja) 1987-02-21 1987-02-21 グロ−放電型成膜装置

Country Status (1)

Country Link
JP (1) JPH0623568Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5190316B2 (ja) * 2007-10-04 2013-04-24 キヤノンアネルバ株式会社 高周波スパッタリング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59183827A (ja) * 1983-03-31 1984-10-19 Japan Synthetic Rubber Co Ltd プラズマ連続処理装置

Also Published As

Publication number Publication date
JPS63131757U (enExample) 1988-08-29

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