JPH0622464Y2 - 薬液吐出装置 - Google Patents

薬液吐出装置

Info

Publication number
JPH0622464Y2
JPH0622464Y2 JP1989039221U JP3922189U JPH0622464Y2 JP H0622464 Y2 JPH0622464 Y2 JP H0622464Y2 JP 1989039221 U JP1989039221 U JP 1989039221U JP 3922189 U JP3922189 U JP 3922189U JP H0622464 Y2 JPH0622464 Y2 JP H0622464Y2
Authority
JP
Japan
Prior art keywords
chemical liquid
nozzle
container
tip
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989039221U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02133471U (enExample
Inventor
博之 平井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1989039221U priority Critical patent/JPH0622464Y2/ja
Publication of JPH02133471U publication Critical patent/JPH02133471U/ja
Application granted granted Critical
Publication of JPH0622464Y2 publication Critical patent/JPH0622464Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP1989039221U 1989-04-04 1989-04-04 薬液吐出装置 Expired - Lifetime JPH0622464Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989039221U JPH0622464Y2 (ja) 1989-04-04 1989-04-04 薬液吐出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989039221U JPH0622464Y2 (ja) 1989-04-04 1989-04-04 薬液吐出装置

Publications (2)

Publication Number Publication Date
JPH02133471U JPH02133471U (enExample) 1990-11-06
JPH0622464Y2 true JPH0622464Y2 (ja) 1994-06-15

Family

ID=31547936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989039221U Expired - Lifetime JPH0622464Y2 (ja) 1989-04-04 1989-04-04 薬液吐出装置

Country Status (1)

Country Link
JP (1) JPH0622464Y2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050224523A1 (en) * 2004-04-13 2005-10-13 Advanced Technology Materials, Inc. Liquid dispensing method and system with headspace gas removal
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
JP4583235B2 (ja) * 2005-05-09 2010-11-17 東京エレクトロン株式会社 処理液吐出装置およびその動作検証方法ならびに同装置の駆動制御方法
JP6578460B1 (ja) * 2019-03-29 2019-09-18 ヤマト科学株式会社 容器の配管接続構造
JP6607653B1 (ja) * 2019-04-09 2019-11-20 ヤマト科学株式会社 固相合成装置

Also Published As

Publication number Publication date
JPH02133471U (enExample) 1990-11-06

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