JPH0621164Y2 - 電子ビーム銃の制御装置 - Google Patents
電子ビーム銃の制御装置Info
- Publication number
- JPH0621164Y2 JPH0621164Y2 JP1988154343U JP15434388U JPH0621164Y2 JP H0621164 Y2 JPH0621164 Y2 JP H0621164Y2 JP 1988154343 U JP1988154343 U JP 1988154343U JP 15434388 U JP15434388 U JP 15434388U JP H0621164 Y2 JPH0621164 Y2 JP H0621164Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- electron beam
- vacuum
- intermediate chamber
- melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 30
- 230000008018 melting Effects 0.000 claims description 33
- 238000002844 melting Methods 0.000 claims description 33
- 230000001133 acceleration Effects 0.000 claims description 18
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 10
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988154343U JPH0621164Y2 (ja) | 1988-11-29 | 1988-11-29 | 電子ビーム銃の制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988154343U JPH0621164Y2 (ja) | 1988-11-29 | 1988-11-29 | 電子ビーム銃の制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0274758U JPH0274758U (enrdf_load_stackoverflow) | 1990-06-07 |
| JPH0621164Y2 true JPH0621164Y2 (ja) | 1994-06-01 |
Family
ID=31430990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988154343U Expired - Lifetime JPH0621164Y2 (ja) | 1988-11-29 | 1988-11-29 | 電子ビーム銃の制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0621164Y2 (enrdf_load_stackoverflow) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2321976A1 (fr) * | 1975-08-26 | 1977-03-25 | Commissariat Energie Atomique | Vanne d'isolement pour machine de soudage par bombardement electronique et machines munies d'une telle vanne |
| JPS5648044A (en) * | 1979-09-28 | 1981-05-01 | Hitachi Ltd | Electron beam device |
| JPS5971561U (ja) * | 1982-11-04 | 1984-05-15 | 株式会社日立製作所 | 粒子線装置の真空保護装置 |
| JPS6015083A (ja) * | 1983-07-08 | 1985-01-25 | Hitachi Ltd | 電子ビ−ム加工機 |
-
1988
- 1988-11-29 JP JP1988154343U patent/JPH0621164Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0274758U (enrdf_load_stackoverflow) | 1990-06-07 |
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