JPH06198530A - Method for working and superposing a plurality of plate-like materials - Google Patents

Abstract

PURPOSE:To simultaneously work a plurality of plate-like bodies for improving productivity by integrating a plurality of superposed plate-like bodies separably stacked up without any gaps therebetween to perform drilling a plurality of the integrated plate-like bodies. CONSTITUTION:In drilling a plate-like body such as a disk-like glass plate used for an optical disk, magnetic disk or the like, a plurality of (for example 50 plates) glass plates 10... are superposed to lean against a receiving tray 12 which has a plate 14 formed into the nearly V-shaped form and with a plurality of openings 14A and triangular closing plates provided on both ends of the plate 14. The receiving tray 12 receiving the glass plates 10... is dipped in adhesive liquid solidified at the room temperature so that the adhesive liquid by a capillary phenomenon gaps between the overlapped glass plates 10, 10 which are drilled under the adhered condition through the adhesive liquid under the room temperature.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for processing a plurality of plate-like materials and a method for laminating a plurality of plate-like materials simultaneously for processing a plurality of plate-like bodies into the same shape.

[0002]

2. Description of the Related Art Disk-shaped or disk-shaped glass plates used for optical disks, magnetic disks, magneto-optical disks, etc. are processed by grinding wheels arranged in an annular shape. That is, when processing a disk-shaped glass plate, each rectangular glass plate is vacuum-sucked to the processing table one by one, and the grinding wheels arranged in an annular shape are rotated, so that the rectangular glass plate is processed into a disk. Pull out the glass plate. That is, a disk-shaped glass plate is obtained by simultaneously or separately performing circular processing of the outer circumference and perforation processing for forming the inner circumference. As a result, a disk-shaped or donut-shaped glass plate is processed.

On the other hand, in recent years, optical disks, magnetic disks,
Magneto-optical discs and the like tend to be miniaturized, and the outer diameter of these discs becomes smaller and the plate thickness becomes thinner.

[0004]

However, when the outer diameter of an optical disk, a magnetic disk, a magneto-optical disk, or the like becomes small, for example, 2.5 inches or less, or when the thickness of these disks becomes small, for example, 1 0.5 mm,
Further, when the thickness is 1.0 mm or less, it becomes difficult to vacuum-adsorb the rectangular glass plate before processing on the processing table, so that there is a problem that processing such as circular processing and perforation processing becomes difficult. Further, if the disk-shaped glass plates are processed one by one, the productivity cannot be improved and there is a problem that the cost is increased. Further, as shown in FIG. 10, when the disk-shaped glass plates 2 are circularly processed or punched one by one, the edge chipping (chipping) 2A of the glass plates is caused at the outer peripheral edge of the disk-shaped glass, or Since it occurs on the inner peripheral edge, there is a problem that the yield is deteriorated.

The present invention has been made in order to solve such a problem, and various kinds of grinding such as circular processing, perforation processing, processing of a donut-shaped glass disk, etc. are easy,
An object of the present invention is to provide a method for processing a plurality of plate-like materials and a method for superposing a plurality of plate-like materials, which can significantly improve productivity and can perform grinding with high yield. .

[0006]

In order to achieve the above-mentioned object, the present invention has a plurality of plate-like members integrated with each other so as to be closely separable and closely separable in a superposed state. It is characterized in that the material is simultaneously subjected to circular processing, perforation processing, or donut-shaped processing. Further, in order to achieve the above-mentioned object, the present invention forms a bonding layer in a gap between a plurality of superposed plate-like materials and allows the superposed plurality of plate-like materials to be in close contact with each other without a gap. It is characterized by being separably integrated.

[0007]

According to the present invention, in the state where a plurality of plate-like materials are superposed, the plate-like materials are separably integrated so as not to create a gap between the plate-like materials so that the plate-like materials are separably integrated. It is possible to simultaneously process the plurality of processed plate-shaped materials and separate the processed plurality of plate-shaped materials one by one. Therefore, a plurality of plate-shaped materials can be processed at the same time, and further, chipping that tends to occur in each plate-shaped material during processing can be prevented.

Further, according to the present invention, the joining layer is formed in a state where the plurality of plate-shaped members are superposed on each other so that no gap is generated between the plate-shaped members. This makes it possible to integrate the plurality of stacked plate-shaped members in close contact with each other without any gap. Then, after performing the grinding process as described above in the superposed state, it is possible to separate the plurality of plate-like materials integrated in a close contact state one by one.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a method for processing a plurality of plate-shaped materials and a method for superposing a plurality of plate-shaped materials according to the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view showing a state in which a plurality of glass plates 10, 10 ... Overlaid on each other are arranged in a tray 12. The glass plate 10 is made of a brittle material and is formed into a rectangular thin plate. The glass plates 10 formed in this way are leaned against the saucer 12 in a state where they are stacked, for example, on 50 or 100 sheets. Saucer 1
2 includes a plate 14 formed in a substantially V shape as shown in FIG.
A is formed. Closing plates 16 are provided at both ends of the plate 14. The closing plate 16 is formed in a triangular shape, and like the plate 14, the opening 1
4A is formed.

The length L and height H of the tray 12 are
It is set so that the plurality of stacked glass plates 10, 10 ... Can be leaned against the inside of the tray 12 in a stable state.
Then, the saucer 12 is immersed in the bonding liquid 18 with the plurality of glass plates 10, 10 ... Standing (see FIG. 3).
The bonding liquid 18 is filled in the bucket 20. When the tray 12 is immersed in the bonding solution 18, the bonding solution 18 enters the tray 12 through the opening holes 14A, 14A ... The bonding liquid 18 that has entered the saucer 12 enters the gap between the plurality of glass plates 10 and 10 that are stacked. And
The bonding liquid 18 that has entered the gap between the glass plates 10 and 10 is
The capillary phenomenon spreads over the entire gap between the glass plates 10 and 10. As a result, the bonding liquid 18 spreads over the entire surfaces of the glass plates 10, 10 ...

In this case, a plurality of glass plates 1 which are stacked on each other
When 0, 10 ... Are crimped with a vise or the like, the thickness of the bonding liquid 18 that has entered the gap between the glass plates 10 and 10 can be kept constant. As the bonding liquid 18, a commercially available wax, an ultraviolet (UV) curable resin, or the like is used. Since the wax softens at a predetermined temperature to become liquid and becomes solid at room temperature, the work of joining a plurality of glass plates and the work of separating a plurality of glass plates are easy. Moreover, since the ultraviolet (UV) curable resin is easily solidified by irradiation with ultraviolet rays having a predetermined wavelength, it is easy to join a plurality of glass plates. As the UV curable resin, hot water, boiling water,
A UV curable resin of a type that can easily peel off a plurality of glass plates joined together with water or an organic solvent one by one is particularly selected.

Therefore, when wax is used, a plurality of stacked glass plates 10, 10, ... Are immersed in the bonding liquid 18 and then pulled out of the bonding liquid 18 and kept at room temperature, the plurality of stacked glass plates 10, 10. The bonding liquid 18 that has entered between 10 ... Solidifies. Further, in the case of using a UV curable resin, after immersing the plurality of laminated glass plates 10, 10, ... In the bonding liquid 18, pulling it up from the bonding liquid 18 and irradiating it with ultraviolet rays, the plurality of laminated glass plates 10, 10
The bonding liquid 18 that has entered the gap is solidified.

As a result, the plurality of stacked glass plates 10, 10 ... Are bonded to each other by the solidified bonding liquid 18. In this case, a plurality of stacked glass plates 1
Since the bonding layer 18A is formed between 0, 10, ..., The plurality of glass plates 10, 10, ...
(A) and FIG. 4 (B)). Further, the plurality of glass plates 10, 10 ... which are closely adhered and integrated with wax can be separated one by one by immersing them in a stripping solution. In addition, a plurality of glass plates 1 which are adhered and integrated with a UV curable resin
0, 10 ... Can be easily separated from each other by immersing them in warm water or boiling hot water for a predetermined time. Note that some UV-curing resins can be separated into individual sheets by further irradiating with ultraviolet rays, and thus the plurality of glass plates 10 can be irradiated with ultraviolet rays. 10 can be separated for each sheet.

A plurality of glass plates 10 and 1 which are closely integrated with each other.
0 ... indicates a suction method by a vacuum chuck, a fixing method by interposing a wax bonding layer, a fixing method by a clamp, a fixing method by a pressing plate, bolts and nuts, a suction method by a freezing chuck, and other appropriate fixing, suction, bonding, It is fixed to the table 22 of the grinding machine by a supporting method or the like. FIG. 5 shows an example in which a plurality of glass plates 10, 10 ... which are closely adhered to each other are frozen and chucked to a table 22 of a grinding machine by a suction means of a frozen chuck.

An example of the freeze chuck will be described below with reference to FIG. The Peltier elements 24, 24 ... Are embedded in the table 22 of the grinding machine.
24 ... Is switched between positive and negative of the applied voltage and is cooled or heated. Therefore, it is possible to cool and freeze the water between the plurality of glass plates 10, 10 ... As a result, the plurality of glass plates 10, 10 ... Which are brought into close contact with each other are frozen and chucked to the table 22. Further, when the Peltier elements 24, 24 ... Are heated, the frozen chuck state is released, and the plurality of glass plates 10, 10, ...

As shown in FIG. 5, when a plurality of glass plates 10, 10 ... Closely integrated with each other are frozen and chucked on the table 22, the cutting water 26 is used so that the ice for the frozen chuck is not thawed. Must be cooled before use. Further, a plurality of glass plates 10 and 1 which are closely integrated with each other.
When the heat insulating material 28 is attached around 0, the cooling effect of the Peltier elements 24, 24 ... Can be enhanced. By burying the Peltier elements 24, 24 ... In the inner periphery of the heat insulating material 28, the cooling effect can be further enhanced.

As described above, by freeze-chucking the plurality of glass plates 10, 10 ... Intimately integrated with each other on the table 22, the plurality of glass plates 10, 10 intimately integrated.
Can be processed with the grinding wheel 30 or the like. As a result, a plurality of glass plates 10, 10 ... Can be simultaneously ground. Then, after completion of the grinding process, the plurality of glass plates 10, 10, ...
It is possible to separate each glass plate 10, 10 ... By boiling 10 in boiling water for a predetermined time or by immersing it in warm water for a predetermined time.

By freeze-chucking the plurality of glass plates 10, 10 ..., which are closely integrated as described above, to the table 22, even if the outer diameter of the disk or the like to be extracted from the glass plate 10 is small, the load during processing is increased. The table 22 holds the plurality of glass plates 10, 10 ...
Can be held at. Thereby, when the outer diameter of the disk or the like to be extracted from the glass plate 10 is small, for example, when the outer diameter is 2.5 inches or less, and when the glass plate is thinner, for example, when the thickness is 1.5 mm or less, processing is performed. It is possible to solve the problem that it becomes difficult to vacuum-adsorb the rectangular glass plate on the processing table.

FIG. 6 shows a state in which a plurality of glass plates 10, 10 ... Which are closely integrated are punched at the same time, and FIGS. 7 and 8 show a plurality of glass plates 10, 1 which are closely integrated.
0 ... to discs 10A, 10A ... and donut-shaped disc 10
B, 10B ... are cut out. As shown in FIGS. 6 to 8, when a plurality of glass plates 10, 10, ... Which are closely integrated are ground, the same processing as in the case of grinding a block of an integrated body can be performed. The productivity can be improved as compared with the case where each of the sheets is ground.

Further, when the glass plates 10 are grinded one by one, edge chipping (chipping) of the glass plates occurs during processing. However, when a plurality of glass plates 10, 10, ... Since there is no edge, it is possible to prevent chipping during processing. However, the plurality of glass plates 10 and 10 are in close contact with each other and integrated.
Even if the ... Is processed, chipping often occurs on the glass plate 10 disposed on the bottom surface. As a method of preventing this chipping, a method of closely placing a dummy glass plate 37A under the glass plate 10 to be processed arranged on the bottom surface is effective (see FIGS. 9 and 11).

In this case, if the dummy glass plate 37A is processed halfway, a plurality of glass plates 10, 10 ... Adheringly integrated to form the disks 10A, 10A ... Or the donut-shaped disks 10B, 10B. When cutting or punching, the cut-out discs 10A, 10A ... Or the donut-shaped discs 10B, 10B ... Can be maintained in a state of being fixed to the dummy glass plate 37A. Good circular processing, punching processing, and donut-shaped cutting processing are possible.

Further, a plurality of glass plates 1 which are closely integrated with each other.
When the discs 10A, 10A ... Or the donut-shaped discs 10B, 10B ... Are cut out or punched from 0, 10 ..., there is a risk that chipping will occur in the uppermost glass plate. In order to prevent the occurrence of chipping, it is also useful to place a dummy glass plate 37B in close contact with the uppermost glass plate of the plurality of glass plates 10 that are in close contact with each other (see FIG. 11).

Next, based on FIGS. 11 and 12, a doughnut-shaped glass is prepared by simultaneously grinding the outer circumference and the inner circumference in which the inner circumference grinding stone 43 is coaxially arranged on the outer circumference grinding stone 42. When a doughnut-shaped disc 10B, 10B ... is cut out from a plurality of glass plates 10, 10 ... which are closely integrated by using a double-core type grinding wheel (that is, a core drill) 30 configured so as to obtain a disk. The processing method will be described.

First, a double-core type grinding wheel 30
The shaft portion 32 of 1 is attached to the rotary shaft of the grinding device. As a result, the opening 32A of the shaft portion 32 communicates with the grinding fluid supply source of the grinding device. When the grinding fluid supply source is driven in this state, the grinding fluid is supplied to the inside of the cylindrical portion 34 through the opening 32A.

Next, the grinding wheel 30 is rotated, for example, in the clockwise direction, and the plurality of glass plates 10, 10 ... which are closely integrated are ground by the segment wheels 36A, 36A.
Then, when being ground by the segment grindstones 36A, 36A ..., the grinding fluid supplied to the inner side of the cylindrical portion 34 through the opening holes 32A is brought into close contact with the outer peripheral processing grindstone 42 and the inner peripheral processing grindstone 43, respectively. Multiple glass plates 10, 10
It goes down through one of the gaps between and, and is guided to the tips of the segment grindstones 36A, 36A. The grinding fluid led to the tips of the segment grindstones 36A, 36A ... Is slit 45 between the segment grindstones 36A, 36A.
Are guided to the opposite side by means of, and then rise up through the other gap between the plurality of glass plates 10, 10, ... It is discharged from the surface of the plurality of integrated glass plates 10, 10 ...

As described above, while rotating the grinding wheel 30 in the clockwise direction, the grinding wheel 30 is lowered to grind the plurality of glass plates 10, 10 ... which are closely integrated to reach the dummy glass plate 37A. After grinding a part of the surface of the dummy glass plate 37A, stop lowering the grinding wheel 30 and
Next, the grinding wheel 30 is raised while rotating, and the grinding wheel 3 is moved from the plurality of glass plates 10, 10 ...
After pulling out 0 and reaching the upper side, the rotation of the grinding wheel 30 is stopped and the grinding process is completed. In this way, the doughnut-shaped glass disk is obtained by simultaneously grinding the outer circumference and the inner circumference.

In the embodiment of the grinding method described above, a method of processing a glass plate into a donut-shaped glass disk by simultaneously grinding the outer circumference and the inner circumference using a double core type grinding wheel has been described. Using a single-core type grinding wheel provided with either an outer circumference grinding wheel or an inner circumference grinding wheel, grind only the outer circumference or only the inner circumference to process a disk-shaped glass plate. Alternatively, the glass plate may be perforated.

In the above embodiments, the work to be machined is explained by using a glass plate, but the type of plate material of the work to be ground in the present invention is not limited to a glass plate, but a crystallized glass plate, It may be a ceramic plate, a silicon plate, an aluminum plate, or a plate-shaped material made of various other brittle materials, and the method of the present invention is similarly applicable to these plate-shaped materials.

Further, although the case where wax, UV curable resin or the like is used as the joint material has been described in the above embodiment, the present invention is not limited to this, and other joint materials which can obtain the same effect as wax or UV curable resin. May be used. In the above embodiment, the tray 12 is formed by a plate having a plurality of holes opened, but the present invention is not limited to this, and another tray having an opening may be used.

In the above embodiment, a freeze chuck is used,
The case where a plurality of glass plates 10, 10 ... Intimately integrated with each other are held on the table of the grinding machine has been described, but the present invention is not limited to this, a suction method by a vacuum chuck, a fixing method by interposing a wax bonding layer, a clamp or a vise. Fixing method with a base, fixing method with a pressing plate, bolts and nuts,
Alternatively, it may be held on the table of the grinding machine by using an appropriate fixing method or the like.

The example shown in FIGS. 11 and 12 uses a pressing plate 38 having an opening in which a circular processed portion is hollowed out,
A plurality of glass plates 10, 1 with bolts 40 and nuts 39
It shows a method of pressing and fixing 0 ...

[0032]

As described above, according to the method for processing a plurality of plate-shaped materials and the method for laminating a plurality of plate-shaped materials according to the present invention, a state in which a plurality of plate-shaped materials are stacked so,
Separately integrated in a state of closely contacting each other so that there is no gap between the plate-shaped materials, and processing the plurality of plate-shaped materials that are closely contacted and integrated in a separable manner. It can be separated one by one. In particular, according to the present invention, when processing such as circular processing, perforation processing, donut-shaped circular / perforation processing, etc., it is difficult to hold it on the table of the grinding machine, or it easily breaks, and these processing Glass plate with a small thickness, for example, plate thickness 1.
The above-mentioned processing of a glass plate of 5 mm or less, further 1.0 mm or less becomes easy, and circular processing, perforation processing or donut shape from a small glass plate to a glass disk having an outer diameter of 2.5 inches or less. Processing is also easy.

Further, since a plurality of plate-shaped materials, particularly a plurality of glass plates which are closely adhered and integrated, can be simultaneously processed,
Prevents chipping that occurs on the outer edge or inner edge of the disk-shaped glass that tends to occur when the above-mentioned processing is performed for each glass plate, especially for each thin glass plate as described above. It is possible to prevent a decrease in yield.

Further, according to the present invention, the joining layer is formed in a state where the plurality of plate-shaped members are superposed on each other so that no gap is generated between the plate-shaped members. This makes it possible to integrate the plurality of stacked plate-shaped members in close contact with each other without any gap. Then, after grinding is performed in the superposed state, it is possible to separate the plurality of plate-shaped materials integrated in a close contact state one by one.

Therefore, since the above-described processing can be performed on a large number of plate-shaped members simultaneously and easily, the productivity can be remarkably improved. Further, the yield can be further improved by simultaneously processing a large number of plate-shaped materials. In the method of the present invention, a glass plate having a particularly small work size and a thin plate, for example, a plate having a thickness of 1.5.
It is particularly useful for circular processing, punching, and processing into a donut-shaped disk of a glass plate having a size of not more than 1.0 mm, further not more than 1.0 mm.

[Brief description of drawings]

FIG. 1 is an explanatory view of a method of superposing a plurality of plate-shaped materials according to the present invention.

FIG. 2 is a perspective view of a saucer used in the method for superposing a plurality of plate-shaped materials according to the present invention.

FIG. 3 is an explanatory view of a method of superposing a plurality of plate-shaped materials according to the present invention.

FIG. 4 (A) is a perspective view showing a state in which a plurality of plate-like materials are overlapped by a method of superposing a plurality of plate-like materials according to the present invention, and FIG. 4 (B) is a main part thereof. Enlarged view

FIG. 5 is a diagram illustrating a method of processing a plurality of plate-shaped materials that are stacked by the method of stacking a plurality of plate-shaped materials according to the present invention.

FIG. 6 is an explanatory view of a method for processing a plurality of plate-shaped materials according to the present invention.

FIG. 7 is an explanatory view of a method for processing a plurality of plate-shaped materials according to the present invention.

FIG. 8 is an explanatory view of a method for processing a plurality of plate-shaped materials according to the present invention.

FIG. 9 is an explanatory view of a method for processing a plurality of plate-shaped materials according to the present invention.

FIG. 10 is a cross-sectional view showing a state where chipping has occurred on the plate-shaped material.

FIG. 11 is an explanatory diagram of a method for processing a plurality of plate-shaped materials according to the present invention.

FIG. 12 is an explanatory view of a method for processing a plurality of plate-shaped materials according to the present invention.

[Explanation of symbols]

 10 ... Plate-shaped material 10A ... Disc 10B ... Donut-shaped disc 12 ... Sauce 18A ... Bonding layer

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Ikuo Nagasawa 1-1, Suehiro-cho, Tsurumi-ku, Yokohama-shi, Kanagawa Asahi Glass Co., Ltd. Keihin factory

Claims (6)

[Claims] 1. A plurality of plate-shaped materials, characterized in that a plurality of plate-shaped materials are superposed in close contact with each other without a gap and are separably integrated, and the plurality of integrated plate-shaped materials are perforated. Processing method. 2. A plurality of plate-shaped materials are superposed in close contact with each other without a gap and are separably integrated, and a plurality of discs are integrally superposed on each other. A method of processing a plurality of plate-shaped materials, which comprises cutting out. 3. A plurality of plate-shaped members are superposed in close contact with each other without a gap and are separably integrated, and a plurality of donut-shaped discs are integrally stacked from the integrated plurality of plate-shaped members. A method for processing a plurality of plate-shaped materials, which is characterized by cutting in a state. 4. A bonding layer is formed in a gap between a plurality of stacked plate-like materials, and the plurality of stacked plate-like materials are separably integrated in a state of closely contacting each other without a gap. And a method of stacking multiple plate-shaped materials. 5. The method for processing a plurality of plate-shaped materials according to claim 1, 2 or 3, wherein the plate-shaped material is a glass plate. 6. The method for stacking a plurality of plate-shaped materials according to claim 4, wherein the plate-shaped material is a glass plate.