JPH0619068Y2 - 高温流体用の圧力センサ - Google Patents
高温流体用の圧力センサInfo
- Publication number
- JPH0619068Y2 JPH0619068Y2 JP1988098934U JP9893488U JPH0619068Y2 JP H0619068 Y2 JPH0619068 Y2 JP H0619068Y2 JP 1988098934 U JP1988098934 U JP 1988098934U JP 9893488 U JP9893488 U JP 9893488U JP H0619068 Y2 JPH0619068 Y2 JP H0619068Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- high temperature
- diaphragm portion
- pressure sensor
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988098934U JPH0619068Y2 (ja) | 1988-07-26 | 1988-07-26 | 高温流体用の圧力センサ |
US07/384,817 US4993266A (en) | 1988-07-26 | 1989-07-25 | Semiconductor pressure transducer |
EP89113807A EP0352773B1 (en) | 1988-07-26 | 1989-07-26 | Piezoresistive si single crystal pressure transducer |
DE89113807T DE68905967T2 (de) | 1988-07-26 | 1989-07-26 | Piezoresistiver Si Einkristall Druckwandler. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988098934U JPH0619068Y2 (ja) | 1988-07-26 | 1988-07-26 | 高温流体用の圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0220129U JPH0220129U (US06265458-20010724-C00056.png) | 1990-02-09 |
JPH0619068Y2 true JPH0619068Y2 (ja) | 1994-05-18 |
Family
ID=31325634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988098934U Expired - Lifetime JPH0619068Y2 (ja) | 1988-07-26 | 1988-07-26 | 高温流体用の圧力センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0619068Y2 (US06265458-20010724-C00056.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5141202B2 (ja) * | 2007-11-19 | 2013-02-13 | 株式会社日本自動車部品総合研究所 | 圧力センサの取付構造 |
JP5373658B2 (ja) * | 2010-02-09 | 2013-12-18 | 株式会社豊田中央研究所 | 圧力センサ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3857287A (en) | 1972-05-08 | 1974-12-31 | Kistler Instrumente Ag | Pressure transducers |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6327845U (US06265458-20010724-C00056.png) * | 1986-08-05 | 1988-02-24 |
-
1988
- 1988-07-26 JP JP1988098934U patent/JPH0619068Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3857287A (en) | 1972-05-08 | 1974-12-31 | Kistler Instrumente Ag | Pressure transducers |
Also Published As
Publication number | Publication date |
---|---|
JPH0220129U (US06265458-20010724-C00056.png) | 1990-02-09 |
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