JPH0619068Y2 - 高温流体用の圧力センサ - Google Patents

高温流体用の圧力センサ

Info

Publication number
JPH0619068Y2
JPH0619068Y2 JP1988098934U JP9893488U JPH0619068Y2 JP H0619068 Y2 JPH0619068 Y2 JP H0619068Y2 JP 1988098934 U JP1988098934 U JP 1988098934U JP 9893488 U JP9893488 U JP 9893488U JP H0619068 Y2 JPH0619068 Y2 JP H0619068Y2
Authority
JP
Japan
Prior art keywords
diaphragm
high temperature
diaphragm portion
pressure sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988098934U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220129U (US06265458-20010724-C00056.png
Inventor
厚志 塚田
義輝 大村
貞幸 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP1988098934U priority Critical patent/JPH0619068Y2/ja
Priority to US07/384,817 priority patent/US4993266A/en
Priority to EP89113807A priority patent/EP0352773B1/en
Priority to DE89113807T priority patent/DE68905967T2/de
Publication of JPH0220129U publication Critical patent/JPH0220129U/ja
Application granted granted Critical
Publication of JPH0619068Y2 publication Critical patent/JPH0619068Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1988098934U 1988-07-26 1988-07-26 高温流体用の圧力センサ Expired - Lifetime JPH0619068Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1988098934U JPH0619068Y2 (ja) 1988-07-26 1988-07-26 高温流体用の圧力センサ
US07/384,817 US4993266A (en) 1988-07-26 1989-07-25 Semiconductor pressure transducer
EP89113807A EP0352773B1 (en) 1988-07-26 1989-07-26 Piezoresistive si single crystal pressure transducer
DE89113807T DE68905967T2 (de) 1988-07-26 1989-07-26 Piezoresistiver Si Einkristall Druckwandler.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988098934U JPH0619068Y2 (ja) 1988-07-26 1988-07-26 高温流体用の圧力センサ

Publications (2)

Publication Number Publication Date
JPH0220129U JPH0220129U (US06265458-20010724-C00056.png) 1990-02-09
JPH0619068Y2 true JPH0619068Y2 (ja) 1994-05-18

Family

ID=31325634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988098934U Expired - Lifetime JPH0619068Y2 (ja) 1988-07-26 1988-07-26 高温流体用の圧力センサ

Country Status (1)

Country Link
JP (1) JPH0619068Y2 (US06265458-20010724-C00056.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5141202B2 (ja) * 2007-11-19 2013-02-13 株式会社日本自動車部品総合研究所 圧力センサの取付構造
JP5373658B2 (ja) * 2010-02-09 2013-12-18 株式会社豊田中央研究所 圧力センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857287A (en) 1972-05-08 1974-12-31 Kistler Instrumente Ag Pressure transducers

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327845U (US06265458-20010724-C00056.png) * 1986-08-05 1988-02-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3857287A (en) 1972-05-08 1974-12-31 Kistler Instrumente Ag Pressure transducers

Also Published As

Publication number Publication date
JPH0220129U (US06265458-20010724-C00056.png) 1990-02-09

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