JPH06188470A - Bismuth layer compound-piezoelectric polymer composite - Google Patents

Bismuth layer compound-piezoelectric polymer composite

Info

Publication number
JPH06188470A
JPH06188470A JP4337067A JP33706792A JPH06188470A JP H06188470 A JPH06188470 A JP H06188470A JP 4337067 A JP4337067 A JP 4337067A JP 33706792 A JP33706792 A JP 33706792A JP H06188470 A JPH06188470 A JP H06188470A
Authority
JP
Japan
Prior art keywords
layered compound
powder
bismuth layered
bismuth layer
piezoelectric polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4337067A
Other languages
Japanese (ja)
Other versions
JP3075447B2 (en
Inventor
Kazuhide Kaneko
和秀 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP04337067A priority Critical patent/JP3075447B2/en
Publication of JPH06188470A publication Critical patent/JPH06188470A/en
Application granted granted Critical
Publication of JP3075447B2 publication Critical patent/JP3075447B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to facilitate plastic work and form piezo-electric elements in various shapes by dispersing bismuth layer compound powder into a piezo-electric polymer matrix comprising a copolymer of vinylidene fluoride and ethylene trifluoride. CONSTITUTION:A piezo-electric polymer, which is a copolymer comprising vinylidene and ethylene trifluoride is used as a matrix where 5 to 90wt.% of bismuth layer compound powder is dispersed into there. It is possible to use ordinary bismuth layer powder, which can be expressed with a general formula (MxBiy) Ti4O15. Since the polymer is used as a matrix, plastic work is available so that various-shaped piezo-electric elements may by formed easily. Furthermore, since the bismuth layer compound powder 2, which is plastic, is dispersed there, it is possible to increase its Young's modulus compared with a polymer simple substance and use the powder as an element, which demands strength, such as a pressure sensor.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は圧力センサ、高周波フィ
ルタなどとして利用可能な、圧電性を有するビスマス層
状化合物と圧電高分子との複合体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite of a bismuth layer compound having piezoelectricity and a piezoelectric polymer, which can be used as a pressure sensor, a high frequency filter and the like.

【0002】[0002]

【従来の技術】圧電性を有するセラミックスとしては、
チタン酸バリウム(BaTiO3 )、チタン酸鉛(Pb
TiO3 )、チタン酸ジルコン酸鉛固溶体(PZT)、
ビスマス層状化合物(SrBi4 Ti4 15)などが知
られている。例えばPZTは特に高い感度を有するた
め、圧電アクチュエータとして利用されている。またビ
スマス層状化合物は、感度はPZTほど高くないが強度
が大きく、キュリー温度が500〜800℃と高く広い
温度範囲で使用できるため、圧力センサとしての利用が
期待されている。
2. Description of the Related Art As ceramics having piezoelectricity,
Barium titanate (BaTiO 3), lead titanate (Pb
TiO 3 ), lead zirconate titanate solid solution (PZT),
Bismuth layered compounds (SrBi 4 Ti 4 O 15 ) and the like are known. For example, PZT is used as a piezoelectric actuator because it has a particularly high sensitivity. Further, the bismuth layered compound is not as high in sensitivity as PZT, but has a high strength and a high Curie temperature of 500 to 800 ° C. and can be used in a wide temperature range. Therefore, it is expected to be used as a pressure sensor.

【0003】このビスマス層状化合物から圧力センサな
どを形成するには、酸化ビスマス(Bi2 3 )、酸化
チタン(TiO2 )、炭酸ストロンチウム(SrC
3 )などの原料粉末を所定比率で混合して粉末原料を
調製し、この粉末原料から所定形状の成形体を形成した
後焼結して焼結体とし、それを分極処理して形成する方
法が一般的である。また、特開昭52−86198号公
報には、ホットプレスなどを用い、焼結時に一方向に圧
力を加えることにより、板状の結晶の結晶軸を一方向に
揃え、以て感度を向上させるビスマス層状化合物の製造
方法が開示されている。この製造方法によれば、ビスマ
ス層状化合物の層状結晶がプレス方向に直角な方向に配
向した状態で焼結され、分極容易軸がプレス方向に直角
な方向に揃うため、圧電性の感度が向上する。
To form a pressure sensor or the like from this bismuth layered compound, bismuth oxide (Bi 2 O 3 ), titanium oxide (TiO 2 ) and strontium carbonate (SrC) are used.
O 3 ) and other raw material powders are mixed in a predetermined ratio to prepare a powder raw material, and a molded body having a predetermined shape is formed from this powder raw material and then sintered to form a sintered body, which is then polarized to form. The method is common. Further, in JP-A-52-86198, a hot press or the like is used to apply pressure in one direction during sintering to align the crystal axes of plate-shaped crystals in one direction, thereby improving sensitivity. A method of making a bismuth layered compound is disclosed. According to this manufacturing method, the layered crystal of the bismuth layered compound is sintered in a state of being oriented in the direction perpendicular to the pressing direction, and the easy axis of polarization is aligned in the direction perpendicular to the pressing direction, so the piezoelectric sensitivity is improved. .

【0004】[0004]

【発明が解決しようとする課題】上記したように、ビス
マス層状化合物は広範囲の温度で使用できるため、圧力
センサとしての利用が期待されている。ところがビスマ
ス層状化合物は、それ自体がセラミックスであるため
に、セラミックス特有の硬度は有するが脆いという不具
合があり、延伸したり曲げたりする塑性加工が困難で加
工自由度が小さい。
As described above, since the bismuth layered compound can be used in a wide range of temperatures, it is expected to be used as a pressure sensor. However, since the bismuth layered compound itself is a ceramic, it has a hardness that is peculiar to ceramics but is fragile, and it is difficult to perform plastic working such as stretching or bending and has a small processing flexibility.

【0005】本発明はこのような事情に鑑みてなされた
ものであり、ビスマス層状化合物を複合化して塑性加工
を可能とし、新規な複合型圧電体とすることを目的とす
る。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a novel composite piezoelectric body by compounding a bismuth layer compound to enable plastic working.

【0006】[0006]

【課題を解決するための手段】上記課題を解決する本発
明のビスマス層状化合物−圧電高分子複合体は、フッ化
ビニリデンと3フッ化エチレンの共重合体からなる圧電
高分子のマトリックス中に、ビスマス層状化合物粉末が
5〜90重量%分散していることを特徴とする。
A bismuth layered compound-piezoelectric polymer composite of the present invention for solving the above-mentioned problems is provided in a piezoelectric polymer matrix composed of a copolymer of vinylidene fluoride and trifluoroethylene, The bismuth layered compound powder is characterized by being dispersed in an amount of 5 to 90% by weight.

【0007】ビスマス層状化合物としては、一般式(M
x Biy )Ti4 15で表される一般的なものを用いる
ことができる。ここでMは1〜5価の金属元素であり、
Sr,Be,Mg,Ca,Ba,Raなどのアルカリ土
類金属、Li,Na,K,Rb,Csなどのアルカリ金
属あるいはPbなどから種々選択できる。また、性能を
損なわない範囲でMn,Ni,Crなどの金属元素を共
存させてもよい。
The bismuth layer compound has the general formula (M
A general one represented by x Biy) Ti 4 O 15 can be used. Here, M is a metal element having a valence of 1 to 5,
Various selections can be made from alkaline earth metals such as Sr, Be, Mg, Ca, Ba and Ra, alkali metals such as Li, Na, K, Rb and Cs and Pb. Further, metal elements such as Mn, Ni and Cr may coexist as long as the performance is not impaired.

【0008】マトリックスを構成する圧電高分子は、フ
ッ化ビニリデンと3フッ化エチレンの共重合体から構成
される。例えばポリフッ化ビニリデン、フッ化ビニリデ
ンと4フッ化エチレンの共重合体などの高分子も圧電高
分子であるが、これらの圧電高分子は電圧を印加しただ
けでは分極が困難であり、ロール延伸操作などが必要で
ある。ところがフッ化ビニリデンと3フッ化エチレンの
共重合体から構成される圧電高分子は、通常の電圧印加
のみで分極が可能であることから、この圧電高分子を用
いることとした。
The piezoelectric polymer constituting the matrix is composed of a copolymer of vinylidene fluoride and ethylene trifluoride. For example, polymers such as polyvinylidene fluoride and copolymers of vinylidene fluoride and tetrafluoroethylene are also piezoelectric polymers, but these piezoelectric polymers are difficult to polarize only by applying a voltage, and therefore roll stretching operation is performed. Etc. are required. However, since a piezoelectric polymer composed of a copolymer of vinylidene fluoride and ethylene trifluoride can be polarized only by applying a normal voltage, this piezoelectric polymer was used.

【0009】本発明のビスマス層状化合物−圧電高分子
複合体には、マトリックスのフッ化ビニリデンと3フッ
化エチレンの共重合体からなる圧電高分子中に、ビスマ
ス層状化合物粉末が5〜90重量%分散している。ビス
マス層状化合物粉末が5重量%に満たないと、ヤング率
の向上が望めない。また90重量%を超えて含有させる
と形状が維持できず複合体とすることが困難である。
In the bismuth layered compound-piezoelectric polymer composite of the present invention, 5 to 90% by weight of bismuth layered compound powder is contained in a piezoelectric polymer composed of a copolymer of vinylidene fluoride and ethylene trifluoride as a matrix. It is dispersed. If the bismuth layered compound powder is less than 5% by weight, the Young's modulus cannot be improved. If the content exceeds 90% by weight, the shape cannot be maintained and it is difficult to form a composite.

【0010】[0010]

【作用】本発明のビスマス層状化合物−圧電高分子複合
体では、フッ化ビニリデンと3フッ化エチレンの共重合
体からなる圧電高分子がマトリックスを構成しているの
で、この圧電高分子に起因して塑性加工が可能である。
一方、この圧電高分子単体ではヤング率が0.3×10
10Paと極めて小さく、圧力センサなど強度を必要とす
るものには用いられない。しかし、セラミックスである
ビスマス層状化合物粉末を5〜90重量%含有すること
によりヤング率が約一桁増大し、圧力センサなど強度の
必要なものにも利用することができる。
In the bismuth layered compound-piezoelectric polymer composite of the present invention, the piezoelectric polymer composed of a copolymer of vinylidene fluoride and ethylene trifluoride constitutes the matrix. Plastic working is possible.
On the other hand, this piezoelectric polymer alone has a Young's modulus of 0.3 × 10
It is extremely small at 10 Pa and cannot be used for pressure sensors and other devices that require strength. However, the inclusion of the bismuth layered compound powder of ceramics in an amount of 5 to 90% by weight increases the Young's modulus by about an order of magnitude, and it can be used as a pressure sensor or the like that requires strength.

【0011】また、ビスマス層状化合物を分極するに
は、200℃,6kV/mm以上という厳しい条件が必
要であったが、分極が容易なフッ化ビニリデンと3フッ
化エチレンの共重合体からなる圧電高分子をマトリック
スとしているため、常温で1kV/mm程度の条件でも
分極が可能である。さらに、ビスマス層状化合物とフッ
化ビニリデンと3フッ化エチレンの共重合体とは、ほと
んど同程度の感度を有するため、それぞれの配合比率を
厳密に制御しなくともほぼ一定の感度が得られる。
Further, in order to polarize the bismuth layered compound, a strict condition of 200 ° C. and 6 kV / mm or more was required, but a piezoelectric composed of a copolymer of vinylidene fluoride and ethylene trifluoride, which is easy to polarize. Since a polymer is used as a matrix, polarization is possible even under conditions of about 1 kV / mm at room temperature. Further, since the bismuth layered compound, the vinylidene fluoride and the trifluoroethylene copolymer have almost the same sensitivity, almost constant sensitivity can be obtained without strictly controlling the respective mixing ratios.

【0012】[0012]

【実施例】以下、実施例により具体的に説明する。図1
に本発明の一実施例のビスマス層状化合物−圧電高分子
複合体の構成を説明する断面図を示す。このビスマス層
状化合物−圧電高分子複合体は、フッ化ビニリデンと3
フッ化エチレンの共重合体からなる圧電高分子1をマト
リックスとし、そのマトリックス中にビスマス層状化合
物粉末2が分散した構成である。
EXAMPLES The present invention will be specifically described below with reference to examples. Figure 1
FIG. 3 is a cross-sectional view illustrating the structure of the bismuth layered compound-piezoelectric polymer composite of one embodiment of the present invention. This bismuth layered compound-piezoelectric polymer composite is composed of vinylidene fluoride and 3
The piezoelectric polymer 1 made of a copolymer of ethylene fluoride is used as a matrix, and the bismuth layered compound powder 2 is dispersed in the matrix.

【0013】このビスマス層状化合物−圧電高分子複合
体は以下のようにして形成された。すなわち、出発原料
として、炭酸ストロンチウム(SrCO3 ),酸化ビス
マス(Bi2 3 ),酸化チタン(TiO2 )及び酸化
マンガン(MnO)を用い、それぞれの原料粉末を、組
成比がSrBi4 Ti4 15となるように、かつMnO
をMn重量換算で0.1重量%含むように秤量して、エ
タノールとともにポットミル中で48時間湿式混合し
た。
This bismuth layered compound-piezoelectric polymer composite was formed as follows. That is, strontium carbonate (SrCO 3 ), bismuth oxide (Bi 2 O 3 ), titanium oxide (TiO 2 ), and manganese oxide (MnO) were used as starting materials, and the respective raw material powders were used with the composition ratio of SrBi 4 Ti 4 O 15 and MnO
Was weighed so as to contain 0.1% by weight in terms of Mn weight, and wet mixed with ethanol in a pot mill for 48 hours.

【0014】その混合粉末を脱エタノール乾燥し、80
0℃で2時間仮焼した。この仮焼粉末を再びポットミル
中で48時間湿式混合し、脱エタノール乾燥して粉末原
料とした。この粉末原料にポリビニルアルコール(PV
A)を約3重量%加えて造粒し、それを直径18mmの
円柱状キャビティをもつ金型中に供給して、1t/cm
2の圧力で成形した。
The mixed powder is dried with ethanol to remove 80
It was calcined at 0 ° C. for 2 hours. The calcined powder was wet-mixed again in the pot mill for 48 hours, and dried with ethanol to obtain a powder raw material. Polyvinyl alcohol (PV
About 3% by weight of A) was added and granulated, and the mixture was fed into a mold having a cylindrical cavity with a diameter of 18 mm to obtain 1 t / cm.
Molded at a pressure of 2 .

【0015】得られた一次成形体を900℃〜1050
℃で2〜10時間加熱して焼結し、冷却後の焼結体をグ
ラインダーで1〜10μmに粉砕してビスマス層状化合
物粉末とした。次にこのビスマス層状化合物粉末と、フ
ッ化ビニリデンと3フッ化エチレンの共重合体の粉末と
を、表1に示すように重量比で7対3(仮焼結粉末が3
0重量%)となるように混合し、その混合粉末を直径1
8mmの円柱状キャビティをもつ金型を用い100MP
aの圧力で成形して、円板状の成形体を形成した。そし
てこの成形体を150〜200℃で熱処理し、ビスマス
層状化合物−圧電高分子の複合体を得た。
The obtained primary molded body is heated at 900 ° C. to 1050 ° C.
The mixture was heated at 0 ° C. for 2 to 10 hours for sintering, and the sintered body after cooling was pulverized to 1 to 10 μm with a grinder to obtain a bismuth layered compound powder. Next, as shown in Table 1, the bismuth layered compound powder and the powder of the copolymer of vinylidene fluoride and ethylene trifluoride were mixed in a weight ratio of 7: 3 (the temporary sintered powder was 3
0% by weight), and mix the mixed powder to a diameter of 1
100MP using a mold with a cylindrical cavity of 8mm
Molding was performed under the pressure of a to form a disk-shaped molded body. Then, this molded body was heat-treated at 150 to 200 ° C. to obtain a bismuth layered compound-piezoelectric polymer composite.

【0016】得られた複合体の両表面に導電接着剤を塗
布し、常温にて1kV/mm以上の条件で分極処理を行
った。そして得られた素子の圧電性の感度を測定し、結
果を表1に示す。ここで圧電性の感度とは、試料に力F
を加えた場合に発生する電荷の量をEとしたときに、単
位力当たりの電荷(E/F,単位pC/N)をいう。ま
た、得られたビスマス層状化合物−圧電高分子複合体の
ヤング率を測定し、結果を表1に示す。
A conductive adhesive was applied to both surfaces of the obtained composite and polarized at room temperature under the condition of 1 kV / mm or more. The piezoelectric sensitivity of the obtained device was measured, and the results are shown in Table 1. Here, the piezoelectric sensitivity means the force F on the sample.
The charge per unit force (E / F, unit pC / N), where E is the amount of charge generated when the above is added. The Young's modulus of the obtained bismuth layered compound-piezoelectric polymer composite was measured, and the results are shown in Table 1.

【0017】なお、ビスマス層状化合物粉末とフッ化ビ
ニリデンと3フッ化エチレンの共重合体の粉末との混合
割合を表1に示すように変化させ、同様にしてビスマス
層状化合物−圧電高分子複合体を得た。そして同様に圧
電性の感度とヤング率を測定し、結果を表1に示す。
The mixing ratio of the bismuth layered compound powder and the vinylidene fluoride / trifluoroethylene copolymer powder was changed as shown in Table 1, and the bismuth layered compound-piezoelectric polymer composite was similarly prepared. Got Similarly, the piezoelectric sensitivity and Young's modulus were measured, and the results are shown in Table 1.

【0018】[0018]

【表1】 (評価)表1より、ビスマス層状化合物と圧電高分子の
混合割合が変動しても、感度が一定で安定していること
が明らかである。したがって本発明のビスマス層状化合
物−圧電高分子複合体は、混合割合を精密に制御する必
要がなく、製造が容易であることがわかる。
[Table 1] (Evaluation) From Table 1, it is clear that the sensitivity is constant and stable even if the mixing ratio of the bismuth layer compound and the piezoelectric polymer changes. Therefore, it is understood that the bismuth layered compound-piezoelectric polymer composite of the present invention does not require precise control of the mixing ratio and is easy to manufacture.

【0019】またヤング率は、ビスマス層状化合物粉末
の混合割合が4重量%までは0.5と低い値を示してい
るが、ビスマス層状化合物粉末の混合割合が5重量%を
超えると急激に上昇していることも明らかである。な
お、ビスマス層状化合物粉末の混合割合が90重量%を
超えると、熱処理後に成形体が粉状となり、形状を維持
することが困難で複合体を形成することができなかっ
た。したがって本発明のビスマス層状化合物−圧電高分
子複合体では、ビスマス層状化合物粉末の混合割合は5
〜90重量%の範囲が望ましい。
The Young's modulus shows a low value of 0.5 up to a mixing ratio of the bismuth layered compound powder of 4% by weight, but increases rapidly when the mixing ratio of the bismuth layered compound powder exceeds 5% by weight. It is also clear that they are doing. When the mixing ratio of the bismuth layered compound powder exceeded 90% by weight, the molded body became powdery after the heat treatment, and it was difficult to maintain the shape, and the composite body could not be formed. Therefore, in the bismuth layered compound-piezoelectric polymer composite of the present invention, the mixing ratio of the bismuth layered compound powder is 5%.
The range of up to 90% by weight is desirable.

【0020】[0020]

【発明の効果】すなわち本発明のビスマス層状化合物−
圧電高分子複合体によれば、高分子をマトリックスとし
ているため塑性加工が可能となり、種々の形状の圧電素
子を容易に形成することができる。また、セラミックス
であるビスマス層状化合物粉末が分散されているので、
高分子単体に比べてヤング率が高まり、圧力センサーな
ど強度の必要な素子とすることもできる。
That is, the bismuth layered compound of the present invention
According to the piezoelectric polymer composite, since the polymer is used as a matrix, it is possible to perform plastic working, and it is possible to easily form piezoelectric elements of various shapes. Also, since the bismuth layered compound powder which is ceramics is dispersed,
The Young's modulus is higher than that of a polymer alone, and it can be used as an element requiring strength such as a pressure sensor.

【0021】さらに、ビスマス層状化合物単体の場合に
比べてかなり緩やかな条件でも分極が可能となり、省エ
ネルギー化することができる。
Furthermore, polarization can be performed even under a much milder condition than in the case of the bismuth layered compound alone, and energy can be saved.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のビスマス層状化合物−圧電高分子複合
体の構成を説明する模式的断面図である。
FIG. 1 is a schematic cross-sectional view illustrating the structure of a bismuth layered compound-piezoelectric polymer composite of the present invention.

【符号の説明】[Explanation of symbols]

1:圧電高分子(マトリックス) 2:ビスマス層状
化合物粉末
1: Piezoelectric polymer (matrix) 2: Bismuth layered compound powder

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 フッ化ビニリデンと3フッ化エチレンの
共重合体からなる圧電高分子のマトリックス中にビスマ
ス層状化合物粉末が5〜90重量%分散していることを
特徴とするビスマス層状化合物−圧電高分子複合体。
1. A bismuth layered compound-piezoelectric material, characterized in that 5 to 90% by weight of bismuth layered compound powder is dispersed in a matrix of a piezoelectric polymer composed of a copolymer of vinylidene fluoride and ethylene trifluoride. Polymer composite.
JP04337067A 1992-12-17 1992-12-17 Bismuth layered compound-piezoelectric polymer composite Expired - Fee Related JP3075447B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04337067A JP3075447B2 (en) 1992-12-17 1992-12-17 Bismuth layered compound-piezoelectric polymer composite

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04337067A JP3075447B2 (en) 1992-12-17 1992-12-17 Bismuth layered compound-piezoelectric polymer composite

Publications (2)

Publication Number Publication Date
JPH06188470A true JPH06188470A (en) 1994-07-08
JP3075447B2 JP3075447B2 (en) 2000-08-14

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Publication number Priority date Publication date Assignee Title
US7741754B1 (en) * 2005-09-22 2010-06-22 Sei-Joo Jang Polymer bulk acoustic resonator

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JP5616171B2 (en) 2009-09-28 2014-10-29 富士フイルム株式会社 Polymer composite piezoelectric body and piezoelectric element using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7741754B1 (en) * 2005-09-22 2010-06-22 Sei-Joo Jang Polymer bulk acoustic resonator

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