JPH06188066A - Chemical liquid heating device - Google Patents

Abstract

PURPOSE:To heat chemical liquid having light emission property safely and effectively by installing a light source lamp for heating and a quartz glass tube through which the chemical liquid flows having a distance between each other in a closed space container formed to have inner surfaces of double- parabola reflection mirror surfaces. CONSTITUTION:A closed space container 16 is formed as double-parabola mirrors comprising an upper half of a parabolic surface mirror, and a lower half formed as a CPC as a subject parabolic surface having a perpendicular long axis. Radiation light of a halogen lamp 20 installed on a focal point of the parabolic surface mirror of the upper half is reflected on the mirror surface, and parallel beams get into the CPC. They are then reflected by the mirror surface of the CPC to be converted to a chemical liquid flow tube 18 installed on the focal point and comprising a quartz glass tube, so chemical liquid is heated. Because the lamp 20 is installed above the tube 18, the chemical liquid can be prevented from getting in contact with the lamp 20 if the tube 18 is broken, or the chemical liquid is not contaminated if the lamp 20 is broken. The chemical liquid having light emission property can thus be heated safely and effectively.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical solution heating device for application to heating a chemical solution having an ignitability to a high temperature in the fields of semiconductors and biotechnology where cleanliness is required.

[0002]

2. Description of the Related Art In the case of heating a chemical used in the field of semiconductor manufacturing or biotechnology, a method of heating by immersing a heater in a chemical bath has been conventionally used (Actual Kaihei 2-52437).
No.), or a method in which the chemical solution container has a structure having a surface that reflects light from a heating light source, and a heating light source is disposed inside the container for heating (JP-A-2-52437).

[0003]

However, in the conventional method, there is no problem if the chemical liquid to be heated is not ignitable like pure water, but the peeling liquid used in the semiconductor or liquid crystal manufacturing process is ignitable. Therefore, there is a risk that the chemical solution may ignite due to damage of the chemical solution container, leading to an accident.

An object of the present invention is to provide a chemical solution heating device capable of safely and efficiently heating an ignitable chemical solution.

[0005]

In order to achieve the above object, a chemical solution heating apparatus according to the present invention is provided with a sealed space container having an inner surface formed as a reflecting mirror surface, and a light source lamp as a heating source is provided in the container. And a quartz glass tube through which an ignitable chemical liquid, which is a fluid to be heated, flows is installed at a distance. In this case, the installation position of the heating light source lamp is configured to be always above the quartz glass tube,
Further, the outside of the closed space container may be covered with a heat insulating material. Furthermore, the cross-sectional shape of the closed space container whose inner surface is formed as a reflecting mirror surface is a spheroidal reflector or a double parabolic reflector, and the heating light source lamp and the quartz glass tube are each a spheroidal reflector or a double parabolic reflector. It is desirable to configure the focus.

[0006]

According to the above construction, since the light source lamp which is the heating source and the quartz glass tube through which the ignitable heated fluid (chemical solution) flows, are installed in the closed space container,
Radiant and reflected energy from the heating light source lamp is efficiently absorbed by the quartz glass tube. Moreover, since both are installed in a closed space container with a distance therebetween, direct ignition can be prevented even if the chemical liquid flow pipe is damaged.
At this time, the safety can be further improved by setting the heating light source lamp to be always positioned above the quartz glass tube. Furthermore, while the inner surface of the closed space container is a reflecting mirror surface, its cross-sectional shape is a spheroidal reflector or a double parabolic reflector, and the heating light source lamp and the quartz glass tube are the focal points of the spheroidal reflector or the double parabolic reflector, respectively. By installing it in, the reflected light is surely absorbed by the quartz glass tube at the other focal point, which greatly improves the heating efficiency.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the chemical liquid heating apparatus according to the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a partial cross-sectional perspective view showing the overall structure of a chemical liquid heating apparatus according to an embodiment. As shown in this figure,
The chemical liquid heating device of the embodiment is provided with two chemical liquid heating parts 12, 12 inside a housing case 10, and each chemical liquid heating part 12 is formed in a cylindrical shape. This chemical heating unit 12
Is set horizontally with the cylinder axis set horizontally, and
A closed space container 16 having front and rear end surfaces closed by a holder plate 14 is provided. This closed space container 16
The vertical section of the cylindrical part is formed in an almost elliptical shape, and its inner surface is used as a reflecting mirror surface to reflect the light of a heating light source described later. In this embodiment, as shown in FIG. 2A, the cross-sectional shape of the closed space container 16 is such that the upper half part is formed as a parabolic mirror 16U and the lower half part is a target parabola with a vertical long axis. It is configured as a so-called double parabolic mirror formed as a CPC 16D having a surface.

By the way, inside such a sealed space container 16, a halogen lamp 20 which forms a heating light source and a chemical liquid flow pipe 18 made of a quartz glass tube along the container cylinder axis line.
Are supported at their ends by the holder plate 14 and are mounted at a distance. The heating light from the halogen lamp 20 directly irradiates the chemical liquid flow tube 18, and the reflected light reflected by the reflecting mirror surface is also applied to heat the flow tube 18. In order to improve the heating efficiency, in this embodiment, the chemical liquid flow pipe 18 is installed at the focal portion of the lower CPC 16D of the closed space container 16, and the halogen lamp 20 is installed.
Is attached so as to be located at the focal point of the upper parabolic mirror 16U. Therefore, the heating light from the halogen lamp 20 arranged at one focus is reflected by the mirror surface of the closed space container 16 and is condensed on the chemical liquid flow pipe 18 installed at the other focus to efficiently radiate the radiant energy. It can be absorbed.

A supply pipe 22 for supplying a chemical liquid to a chemical liquid flow pipe 18 arranged inside the closed space container 16 is connected via a holder plate 14, and flows out in a heated state from an outflow pipe 24 on the other end side. It has become one. Supply pipe 22
Is simultaneously supplied to each of the closed space containers 16 branched and arranged in parallel inside the housing case 10, and the outflow pipe 24 is drawn out of the case as a confluent pipe. By the way, as the chemical liquid heated by this heating device, a stripping chemical liquid in a semiconductor or liquid crystal manufacturing process is targeted, and for example, this is a mixed chemical liquid of dimethyl sulfoxide 70% and monoethanolamine 30%, or dimethyl sulfoxide 30% and monohydrate. A mixed chemical solution of 70% ethanolamine is targeted, and this is supplied from the supply pipe 22 to the heating device.

A heat insulating material 26 is attached to the outer surface of the above-mentioned closed space container 16 to cover the whole, so that the internal heat is not diffused and radiated. In FIG. 1, 28 is a power supply unit of the halogen lamp 20, and 30 is a chemical liquid leak sensor installed on the floor of the case 10.

The operation of the chemical liquid heating device configured as described above is as follows. Since the halogen lamp 20 is installed at the focus of the parabolic mirror (upper half) of the closed space container 16, all the light emitted from the halogen lamp 20 is a parabolic mirror, as shown in FIG. After being reflected by 16U, the parallel rays emerge from the exit of the parabolic mirror 16U (the AA 'plane in FIG. 2 (1)) downward. The light emitted from the parabolic mirror 16U is
All enter the CPC 16D as parallel rays. CPC16D
The incoming light is reflected by the mirror surface of CPC16D,
It condenses on the chemical liquid flow pipe 18 made of a quartz glass pipe installed at the focus of 16D, penetrates this, and enters the chemical liquid inside,
It is absorbed here and used to heat the internal chemicals.
At this time, the whole is installed so that the halogen lamp 20 is always located above. With such a configuration, even if the lower quartz glass flow pipe 18 is broken, the chemical liquid flows downward and there is no possibility of directly contacting the halogen lamp 20 above, so there is no danger of ignition. Safe without.

According to the above-described embodiment, the halogen lamp 20 is used because of the indirect heating method.
There is no contamination of the liquid due to damage of the. Also, halogen lamp 2
It is easy to exchange 0. Moreover, it is possible to heat the flammable chemical liquid to a high temperature with a small and compact device.

FIG. 2B shows a modified example of the closed space container 16, which is an example in which the inner reflecting mirror constitutes a spheroidal reflecting mirror in cross section. Also in this case, the long axis is arranged vertically, the halogen lamp 20 is installed at the upper focus, and the chemical liquid flow pipe 18 is installed at the lower focus. Also by this, the reflection from the halogen lamp 20 is focused on the chemical liquid flow pipe 18 to efficiently heat the chemical liquid.

[0015]

As described above, according to the present invention, a closed space container having an inner surface formed as a reflecting mirror surface is provided, and a light source lamp as a heating source and an ignitable chemical liquid as a fluid to be heated are provided in the container. Since the quartz glass tubes that circulate are installed at a distance, it is possible to safely heat the flammable chemical liquid to a predetermined temperature, and the chemical liquid is heated in a state where it passes through a dedicated distribution pipe, so it is clean. It can be heated. The heating light source lamp is always installed above the quartz glass tube for safe heating, and the outside of the closed space container is covered with a heat insulating material, and the inner surface is reflected. While the cross-sectional shape of the closed space container formed as a mirror surface is a spheroidal reflector or a double parabolic reflector, a heating light source lamp and a quartz glass tube are installed at respective focal points of the spheroidal reflector or the double parabolic reflector. Therefore, it is possible to highly efficiently heat the ignitable chemical solution.

[Brief description of drawings]

FIG. 1 is a partial cross-sectional perspective view showing the overall configuration of a chemical liquid heating device according to an embodiment.

FIG. 2 is an explanatory diagram of a cross section of a chemical liquid heating unit.

[Explanation of symbols]

 10 Housing Case 12 Chemical Liquid Heating Section 14 Holder Plate 16 Closed Space Container 16U Parabolic Mirror 16D CPC 18 Chemical Liquid Flow Pipe 20 Halogen Lamp 22 Supply Pipe 24 Outflow Pipe 26 Insulation Material 28 Power Supply Unit 30 Chemical Liquid Leak Sensor

Claims (5)

[Claims] 1. A closed space container having an inner surface formed as a reflecting mirror surface is provided, and a light source lamp as a heating source and a quartz glass tube through which an ignitable chemical liquid as a fluid to be heated are allowed to flow are provided in the container. A chemical heating device characterized by being installed separately. 2. The chemical liquid heating apparatus according to claim 1, wherein the installation position of the heating light source lamp is always above the quartz glass tube. 3. The chemical liquid heating device according to claim 1, wherein the outside of the closed space container is covered with a heat insulating material. 4. The chemical liquid heating device according to claim 1, wherein the cross-sectional shape of the closed space container whose inner surface is formed as a reflecting mirror surface is a spheroidal reflector or a double parabolic reflector. . 5. The chemical liquid heating apparatus according to claim 4, wherein a heating light source lamp and a quartz glass tube are provided at respective focal points of the spheroid reflector and the double parabolic reflector.