JP3300082B2 - Chemical heating device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid heating apparatus for heating a flammable chemical liquid to a high temperature in the fields of semiconductors and biotechnology where cleanliness is required.

[0002]

2. Description of the Related Art When heating a chemical solution used in the field of semiconductor manufacturing or biotechnology, a conventional method of immersing a heater in a chemical solution tank and heating the solution (see Japanese Utility Model Application Laid-Open No. 2-52437).
Or a method in which a chemical solution container has a structure having a surface for reflecting light from a heating light source, and a heating light source is disposed inside the heating solution for heating (Japanese Patent Laid-Open No. 2-52437).

[0003]

However, in the conventional method, there is no problem if the chemical solution to be heated is not ignitable like pure water or the like, but the stripping solution used in the semiconductor or liquid crystal manufacturing process is ignitable. For this reason, there is a risk that a chemical solution may be ignited due to breakage of the chemical solution container or the like, leading to an accident.

[0004] It is an object of the present invention to provide a chemical heating device capable of safely and efficiently heating an ignitable chemical.

[0005]

In order to achieve the above object, a chemical liquid heating apparatus according to the present invention comprises a closed space container having an inner surface formed as a reflecting mirror surface, and a light source lamp as a heating source in the container. And a quartz glass tube through which an ignitable chemical solution as a fluid to be heated flows is installed at a distance. In this case, the installation position of the heating light source lamp is configured to be always above the quartz glass tube,
Further, the outside of the closed space container can be covered with a heat insulating material. Further, the cross-sectional shape of the closed space container whose inner surface is formed as a reflecting mirror surface is a spheroidal reflector or a double parabolic reflector, and the heating light source lamp and the quartz glass tube are each a spheroidal reflector or a double parabolic reflector. It is desirable to be configured to be installed at the focal point.

[0006]

According to the above construction, the light source lamp as the heating source and the quartz glass tube through which the ignitable fluid to be heated (chemical liquid) flows are installed at a distance in the closed space container.
Radiation and reflected energy from the heating light source lamp are efficiently absorbed by the quartz glass tube. In addition, since both are installed at a distance from each other in a closed space container, direct ignition can be prevented even if the chemical liquid distribution pipe is broken.
At this time, if the heating light source lamp is always set above the quartz glass tube, safety can be further improved. Furthermore, while the inner surface of the closed space container is a reflecting mirror surface, the cross-sectional shape is a cylindrical elliptical reflector or a double parabolic reflector having an elliptical cross section , and the heating light source lamp and the quartz glass tube are an elliptical reflector or a double parabolic reflector. The placement at each focal point of the body ensures that the reflected light is absorbed by the quartz glass tube at the other focal point, thereby greatly increasing the heating efficiency.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a specific embodiment of a chemical heating apparatus according to the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view, partly in section, showing the overall structure of a chemical heating device according to an embodiment. As shown in this figure,
The chemical heating device of the embodiment includes two chemical heating units 12, 12 inside a housing case 10, and each of the chemical heating units 12 is formed in a cylindrical shape. This chemical heating section 12
Is set horizontally with the cylinder axis set horizontally,
A closed space container 16 having front and rear end faces closed by a holder plate 14 is provided. This closed space container 16
Is formed as a reflecting mirror surface, and reflects light from a heating light source described later. In this embodiment, as shown in FIG. 2A, the cross-sectional shape of the closed space container 16 is such that the upper half is formed as a parabolic mirror 16U, and the lower half is a target paraboloid with a vertical long axis. It is configured as a so-called double parabolic mirror formed as a CPC 16D having a surface formed.

Meanwhile, inside the closed space container 16, a chemical liquid flow tube 18 made of a quartz glass tube and a halogen lamp 20 forming a heating light source are provided along the container cylinder axis.
Are supported at their ends by the holder plate 14 and are mounted at a distance. The heating light from the halogen lamp 20 directly irradiates the chemical liquid distribution tube 18 and irradiates the reflected light reflected by the reflecting mirror surface to heat the distribution tube 18. In this embodiment, in order to enhance the heating efficiency, the chemical solution flow pipe 18 is installed at the focal point of the lower CPC 16D of the closed space container 16 and the halogen lamp 20 is used.
Is mounted at the focal point of the upper parabolic mirror 16U. Therefore, the heating light from the halogen lamp 20 disposed at one focal point is reflected by the mirror surface of the closed space container 16 and is condensed on the chemical liquid distribution pipe 18 disposed at the other focal point, so that the radiant energy is efficiently transmitted. It can be absorbed.

A supply pipe 22 for supplying a chemical to a chemical flow pipe 18 disposed inside the closed space container 16 is connected via a holder plate 14 and flows out in a heated state from an outlet pipe 24 at the other end. It has become something. Supply pipe 22
Are simultaneously supplied to the respective closed space containers 16 branched and arranged in parallel in the housing case 10, and the outflow pipe 24 is drawn out of the case as a merging pipe. By the way, the chemical heated by the heating device is intended for a stripping chemical in a semiconductor or liquid crystal manufacturing process, such as a mixed chemical of 70% dimethyl sulfoxide and 30% monoethanolamine, or a mixed chemical of 30% dimethyl sulfoxide and monoethanolamine. The mixed chemical solution of 70% ethanolamine is supplied to the heating device from the supply pipe 22.

A heat insulating material 26 is attached to the outer surface of the closed space container 16 so as to cover the whole, so that the internal heat is not diffused and radiated. In FIG. 1, reference numeral 28 denotes a power supply unit of the halogen lamp 20, and reference numeral 30 denotes a chemical liquid leak sensor installed on the floor of the case 10.

The operation of the thus configured chemical heating device is as follows. Since the halogen lamp 20 is installed at the focal point of the parabolic mirror (upper half) of the closed space container 16, all the light emitted from the halogen lamp 20 is a parabolic mirror as shown in FIG. The light is reflected by 16U and exits downward as parallel rays from the exit of the parabolic mirror 16U (the AA ′ plane in FIG. 2A). The light emitted from the parabolic mirror 16U is
All enter the CPC 16D as parallel rays. CPC16D
The light that has entered is reflected by the mirror surface of CPC16D,
The light is condensed on a chemical liquid flow tube 18 made of a quartz glass tube set at the focal point of 16D, penetrates this, enters the internal chemical liquid,
It is absorbed here and used to heat the internal chemical solution.
At this time, the whole is installed so that the halogen lamp 20 is always located at the upper side. With this configuration, even if the lower quartz glass tube 18 is broken, the chemical flows downward, and there is no possibility of directly touching the upper halogen lamp 20. Is safe.

According to the above embodiment, the halogen lamp 20 is used in particular because of the indirect heating method using the halogen lamp 20.
There is no liquid contamination due to breakage. Also, halogen lamp 2
The exchange of 0 is also easy. In addition, a flammable chemical can be heated to a high temperature with a small and compact device.

FIG. 2B is a modified example of the closed space container 16, which is an example in which the cross-section of the internal reflecting mirror constitutes a cylindrical elliptical reflecting mirror having an elliptical shape . Also in this case, the long axis is vertically arranged, the halogen lamp 20 is installed at the upper focal point, and the chemical liquid flow tube 18 is installed at the lower focal point. This also allows the reflection from the halogen lamp 20 to reflect the chemical solution flow pipe 1.
8 and efficient heating of the chemical solution is performed.

[0015]

As described above, the present invention provides a closed space container having an inner surface formed as a reflecting mirror surface, in which a light source lamp as a heating source and a flammable chemical liquid as a fluid to be heated are provided. The quartz glass tube that distributes the liquid is placed at a distance, so that the ignitable chemical can be safely heated to a predetermined temperature, and the chemical is heated while passing through the dedicated distribution tube, so it is clean. Can be heated. The heating light source lamp is placed so that it is always above the quartz glass tube for safe heating, and the outside of the closed space container is covered with a heat insulating material. while the cross sectional shape of the closed space container is formed as a mirror-cylindrical elliptical reflector or a double parabolic reflector, installing a heat source lamp and the quartz glass tube to each of the focal point of the elliptical reflector or double parabolic reflector configuration Therefore, the ignitable chemical solution can be heated with high efficiency.

[Brief description of the drawings]

FIG. 1 is a partial cross-sectional perspective view showing an entire configuration of a chemical liquid heating device according to an embodiment.

FIG. 2 is an explanatory diagram of a cross section of a chemical liquid heating unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Housing case 12 Chemical liquid heating part 14 Holder plate 16 Sealed space container 16U Parabolic mirror 16D CPC 18 Chemical liquid circulation pipe 20 Halogen lamp 22 Supply pipe 24 Outflow pipe 26 Insulation material 28 Power supply part 30 Chemical leakage sensor

Claims (4)

(57) [Claims] 1. A closed space container having an inner surface formed as a reflecting mirror surface, wherein a light source lamp and a quartz glass tube through which a fluid to be heated flows are installed at a distance in the container. A chemical liquid heating device characterized in that the position is above the quartz glass tube. 2. The chemical heating device according to claim 1, wherein the fluid to be heated is an ignitable chemical. 3. A cylindrical closed space container having an inner surface formed as a reflecting mirror surface and having an elliptical cross section, wherein a quartz glass tube through which a light source lamp and a fluid to be heated are passed is formed into one of the elliptical shapes of the cylindrical closed space container. A chemical heating device, which is installed at a focal position on one side and another side along a longitudinal direction of a cylindrical container. 4. A light source lamp and a heated airtight container having a cylindrical closed space container having an inner surface formed as a reflecting mirror surface, one end of a cross section having a parabolic shape, and the other end having a double parabolic surface. The quartz glass tube through which the fluid flows, the focal position of the parabolic surface at one end of the cylindrical closed space container,
And a chemical heating device which is installed at the focal position of the double parabolic surface on the other end side along the longitudinal direction of the cylindrical container.