JPH0618329Y2 - 集光用斜入射反射鏡の位置調整装置 - Google Patents

集光用斜入射反射鏡の位置調整装置

Info

Publication number
JPH0618329Y2
JPH0618329Y2 JP14167887U JP14167887U JPH0618329Y2 JP H0618329 Y2 JPH0618329 Y2 JP H0618329Y2 JP 14167887 U JP14167887 U JP 14167887U JP 14167887 U JP14167887 U JP 14167887U JP H0618329 Y2 JPH0618329 Y2 JP H0618329Y2
Authority
JP
Japan
Prior art keywords
reflector
reflecting mirror
shield
reflective surface
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14167887U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6449808U (enrdf_load_stackoverflow
Inventor
和雄 神津
Original Assignee
神津精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神津精機株式会社 filed Critical 神津精機株式会社
Priority to JP14167887U priority Critical patent/JPH0618329Y2/ja
Publication of JPS6449808U publication Critical patent/JPS6449808U/ja
Application granted granted Critical
Publication of JPH0618329Y2 publication Critical patent/JPH0618329Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
JP14167887U 1987-09-18 1987-09-18 集光用斜入射反射鏡の位置調整装置 Expired - Lifetime JPH0618329Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14167887U JPH0618329Y2 (ja) 1987-09-18 1987-09-18 集光用斜入射反射鏡の位置調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14167887U JPH0618329Y2 (ja) 1987-09-18 1987-09-18 集光用斜入射反射鏡の位置調整装置

Publications (2)

Publication Number Publication Date
JPS6449808U JPS6449808U (enrdf_load_stackoverflow) 1989-03-28
JPH0618329Y2 true JPH0618329Y2 (ja) 1994-05-11

Family

ID=31406958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14167887U Expired - Lifetime JPH0618329Y2 (ja) 1987-09-18 1987-09-18 集光用斜入射反射鏡の位置調整装置

Country Status (1)

Country Link
JP (1) JPH0618329Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6449808U (enrdf_load_stackoverflow) 1989-03-28

Similar Documents

Publication Publication Date Title
JP2001021507A (ja) Xafs測定装置
JP7070029B2 (ja) 光照射装置及びレーザレーダ装置
JPH09304036A (ja) 立体部品の角度測定装置
JPH0618329Y2 (ja) 集光用斜入射反射鏡の位置調整装置
US4416022A (en) Prism light-line system
JPH05220794A (ja) プラスチックレンズのゲートカット相対位置決め装置
KR930017127A (ko) 레이저 광선을 반사표면에 대하여 정확하게 맞추기 위한 방법 및 장치
KR100619097B1 (ko) 다중-노즐 위치 정렬 센서 내의 반사광 제어를 위한 방법 및 장치
JP2899056B2 (ja) 試料固定型x線回折装置の光軸調整方法および装置
JPH0968507A (ja) X線回折装置
JP2749712B2 (ja) レーザー加工における被加工物位置合わせ方法
JPS61128522A (ja) 焦点合せ装置
JP2004198244A (ja) 透過率測定装置および絶対反射率測定装置
KR100317644B1 (ko) 초점 미세조정이 가능한 비전장치
JPH0566114A (ja) 透明物体の厚み測定装置
JP3710023B2 (ja) クラツキ型スリット装置
JP2001083105A (ja) X線回折装置および回折x線の測定方法
JP2001201331A (ja) 傾斜角度測定方法および装置
JPH0255735B2 (enrdf_load_stackoverflow)
JPH05180692A (ja) 紫外線照射装置、光学系の光軸調整装置及び光軸調整方法
JPH0359406A (ja) 位置検出装置及び方法
JPH0445417A (ja) 光線反射鏡
JPH05166695A (ja) 位置検出方法及びそれを用いた露光装置
JPH1123218A (ja) 走査型レーザ測距装置
JPH0231504A (ja) パラボラアンテナ装置