JPH06168031A - Control system for equipment for fluid control - Google Patents

Abstract

PURPOSE:To provide the control system for equipment for fluid control, by which minute control in terms of time can be realized. CONSTITUTION:Plural units for fluid control K1-K4 are connected to a single signal transmission line L. In the control system for the equipment for fluid control, in which a controller C common to the equipment for fluid control K1-K4 controls the units for fluid control K1-K4, plural identification codes are given to all the units for fluid control K1-K4 apart from broadcast codes, and the units for fluid control K1-K4 can be controlled individually of by individual groups with a command from the controller C.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid in which a plurality of fluid control devices are connected to a single signal transmission line, and the fluid control device is controlled by a controller common to these fluid control devices. The present invention relates to a control device control system.

[0002]

2. Description of the Related Art For example, in the case of supplying various gases used for semiconductor manufacturing to a semiconductor manufacturing apparatus, a mass flow controller (hereinafter abbreviated as MFC), an automatic pressure regulator, a solenoid valve, or the like is provided in the supply flow paths thereof. A plurality of fluid control devices such as temperature controllers are provided, and the flow rate and pressure of gas are adjusted appropriately by these fluid control devices. These fluid control devices are connected to a single signal transmission line and are controlled by a common controller.

FIG. 2 shows a conventional fluid control device control system.
Is a diagram for explaining the₁，
k₂, K₃, K_FourIs a fluid control provided in the supply channel
Equipment, each fluid control equipment k₁~ K_FourIs a single signal
A common controller (for example, a computer
Data) C. And each fluid control device
k ₁~ K_FourIs a control such as a one-chip microcomputer
And all fluid control equipment k₁~
k_FourBroadcast for simultaneous control without distinction
A code, for example 00, is added and the individual
Unique identification code to distinguish each fluid control device.
For example, 01, 02, 03, 04 are assigned
It

In the fluid control device control system configured as described above, broadcast communication for sending a signal with a broadcast code added to the command content of the controller C and signal with an individual identification code added to the command content are provided. It is possible to perform individual communication for sending. When the former communications command from the controller C is incorporated in all of the fluid control equipment k ₁ to k _4, in the apparatus for controlling individual fluid k ₁ to k _4, corresponding to the instruction content processing Will be done. In the case of the latter communication,
The signal from the controller C is taken into only the fluid control device having an identification code that matches the identification code given to the signal, and a predetermined process or response is performed.
As described above, in the conventional fluid control device control system, desired communication can be performed without using a special exchanger.

[0005]

However, in the above conventional fluid control device control system, for example,
In the case where commands having the same content are communicated only to the fluid control devices k ₁ and k ₂ , broadcast communication cannot be performed, and therefore individual communication needs to be performed twice in succession, which takes time. Further, in this case, if the command content from the controller C is such that the two fluid control devices k ₁ and k ₂ are operated at the same time, there is an inconvenience that the control cannot be substantially performed.

In this way, the gas supply system becomes complicated,
Conventionally, when a large number of fluid control devices are used, only broadcast communication for all fluid control devices k _{1 to} k ₄ and individual communication for specific fluid control devices can be performed. In this fluid control device control system, it is extremely difficult to perform fine control in terms of time.

The present invention has been made in view of the above matters, and an object of the present invention is to provide a fluid control device control system capable of performing finer control over time. .

[0008]

In order to achieve the above object, according to the present invention, a plurality of fluid control devices are connected to a single signal transmission path, and fluid is controlled by a controller common to these fluid control devices. In a fluid control device control system configured to control a control device, all of the fluid control devices are provided with a plurality of identification codes in addition to the broadcast code, and the fluid control device is controlled by a command from the controller. Each device can be controlled individually or in groups.

[0009]

In the present invention, since each fluid control device can have a plurality of identification codes other than the broadcast code, for example, when it has two identification codes, the first identification code identifies the individual. The second identification code is a code for identifying the groups that are divided by a certain specific reference. By doing so, not only can all the fluid control devices be controlled collectively, but also individual control and group control can be performed, and finer control can be performed in terms of time. It can be carried out.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows a fluid control device control system according to an embodiment of the present invention. In this figure, K ₁ , K
₂ , K ₃ and K ₄ are, for example, MFCs connected to a common controller (for example, a computer) C via a single signal transmission line L. Each of the MFCK _{1 to} K ₄ includes a control unit such as a one-chip microcomputer,
Further, a broadcast code for controlling all MFCK _{1 to} K ₄ without distinction, such as 00, is added, and the following identification code is added.

That is, the first MFCK ₁ has 01 as the first identification code and A 0 as the second identification code.
However, the second MFCK ₂ contains 0 as the first identification code.
2, A0 as the second identification code, C0 as the third identification code, 03 as the first identification code, B0 as the second identification code, C0 as the third identification code in the third MFCK _3. But, in the fourth MFCK ₄ ,
04 as the first identification code and B0 as the second identification code are set (assigned) respectively. In this embodiment, the first MFCK ₁ and the fourth MFCK ₄ are
The third identification code is not set.

The first identification codes 01 to 04 are assigned to each MF.
It is a code for individually identifying (specifying) CK _{1 to} K ₄ . The second identification codes A0 and B0 are all M
It is a code showing a group when FCK _{1 to} K ₄ are divided into groups according to a certain standard. The third identification code C0 is a code representing the group when grouped by other criteria all MFCK ₁ ~K _4.

In the fluid control device control system configured as described above, the command output from the controller C with the identification code 00, for example, is taken into all the MFCK _{1 to} K ₄ . The command output with the identification code 01 is fetched only in the first MFCK ₁ . The command output with the identification code 02 is fetched only in the second MFCK ₂ . The command output with the identification code 03 is taken in only by the third MFCK ₃ . The command output with the identification code 04 is taken into only the fourth MFCK ₄ . The command output with the identification code A0 is taken into the first MFCK ₁ and the second MFCK ₂ . The command output with the identification code B0 is taken into the third MFCK ₃ and the fourth MFCK ₄ . The command output with the identification code C0 is taken into the second MFCK ₂ and the third MFCK ₃ .

For example, the first MFCK ₁ and the second MFC
Start K ₂ and then 3rd MFCK ₃ and 4th
When it is desired to start the MFCK ₄ of the above, by transmitting the flow rate setting values to the respective MFCK _{1 to} K ₄ in advance, setting the flow rate, and outputting the start command with the identification code A0 from the controller C, First MFC
When K ₁ and the second MFCK ₂ are started, and then a start command with the identification code B0 is output, the third MFCK ₃ and the fourth MFCK ₄ can be started. Therefore, according to the present invention, finer control can be performed in terms of time.

As can be understood from the above description, according to the present invention, it is possible to control all the MFCK _{1 to} K ₄ collectively, and to control each MFCK _{1 to} K individually. It is also possible to perform group control according to the control mode. Note that the grouping is MFCK.
Needless to say, it may be performed based on the control method of _{1 to} K ₄ , etc., and therefore the number of identification codes may be arbitrarily set corresponding to the type of grouping.

In the above-described embodiment, all of the fluid control devices K _{1 to} K ₄ are MFCs, but the present invention is not limited to this, and MFCs and automatic pressure regulators are not limited thereto. Needless to say, the present invention can be applied to a case where a plurality of types of solenoid valves, temperature controllers, etc. are provided.

Needless to say, the present invention can be applied not only to the gas supply system but also to the liquid supply system.

[0019]

As described above, according to the present invention,
Even when a fluid supply system becomes complicated and a large number of fluid control devices are used, these fluid control devices can be reliably controlled, and finer control can be performed in terms of time. .

[Brief description of drawings]

FIG. 1 is a block diagram showing an example of a fluid control device control system according to the present invention.

FIG. 2 is a block diagram for explaining a conventional fluid control device control system.

[Explanation of symbols]

C ... controller, K ₁ ~K ₄ ... fluid control equipment, L ...
Signal transmission line.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takayuki Hashizume 2 Higashimachi, Kichijoin Miya, Minami-ku, Kyoto-shi, Kyoto Inside STEC Co., Ltd.

Claims (1)

[Claims] 1. A fluid control device control system in which a plurality of fluid control devices are connected to a single signal transmission path, and the fluid control device is controlled by a controller common to these fluid control devices. , In addition to the broadcast code,
A fluid control device control system, wherein a plurality of identification codes are attached, and each of the fluid control devices can be controlled individually or in groups by a command from a controller.