JP3301042B2 - Fluid control equipment control system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid in which a plurality of fluid control devices are connected to a single signal transmission line, and the fluid control devices are controlled by a controller common to these fluid control devices. The present invention relates to a control device control system.

[0002]

2. Description of the Related Art For example, when supplying various gases used for manufacturing a semiconductor to a semiconductor manufacturing apparatus, a mass flow controller (hereinafter abbreviated as MFC), an automatic pressure regulator, an electromagnetic valve, A plurality of fluid control devices such as a temperature controller are provided, and the flow rate and pressure of gas are appropriately adjusted by these fluid control devices. These fluid control devices are connected to a single signal transmission line and configured to be controlled by a common controller.

FIG. 2 is a diagram for explaining a conventional fluid control device control system. In FIG. 2, k ₁ ,
k ₂ , k ₃ , and k ₄ are fluid control devices provided in the supply flow path. Each of the fluid control devices k _{1 to} k ₄ is connected to a common controller (for example, a computer) via a single signal transmission line L. ) C. Each of the fluid control devices k _{1 to} k ₄ includes a control unit such as, for example, a one-chip microcomputer, and further includes all of the fluid control devices k ₁ to k ₁ .
Broadcast code for controlling simultaneously without distinction k _4, for example, 00 together are given a unique identification code for distinguishing a device for controlling the individual fluid separately to each, e.g., 01, 02, 03 , 04 are assigned.

In the fluid control device control system configured as described above, a broadcast communication for sending a signal with a broadcast code added to the command content of the controller C, and a signal with an individual identification code added to the command content. Individual communication to be transmitted can be performed. In the case of the former communication, the command from the controller C is
Taken in all the fluid control devices k _{1 to} k ₄ ,
In each of the fluid control devices k _{1 to} k ₄ , a process according to the content of the command is performed. In the case of the latter communication, the signal from the controller C is fetched only to the fluid control device having the identification code that matches the identification code added to the signal, and a predetermined process or response is performed. As described above, in the conventional fluid control device control system, desired communication can be performed without using a special exchanger.

[0005]

However, in the above-mentioned conventional fluid control device control system, for example,
When the same command is communicated only to the fluid control devices k ₁ and k ₂ , broadcast communication cannot be performed. Therefore, it is necessary to perform individual communication twice one after another, which takes much time. Further, in this case, if the command content from the controller C is such that the two fluid control devices k ₁ and k ₂ are operated simultaneously, there is a disadvantage that the control cannot be performed substantially.

Thus, the gas supply system becomes complicated,
If multiple fluid control becomes to use the equipment, can only individual communication performed in the target broadcast communication a particular fluid control equipment performed by all of the fluid control equipment k ₁ to k ₄ subject prior In the fluid control device control system described above, it is extremely difficult to perform detailed control over time.

SUMMARY OF THE INVENTION The present invention has been made in consideration of the above-described circumstances, and an object of the present invention is to provide a fluid control device control system capable of performing finer control over time. .

[0008]

In order to achieve the above object, according to the present invention, a plurality of fluid control devices are connected to a single signal transmission line, and the fluid is controlled by a controller common to these fluid control devices. in was set to control the control equipment for fluid control device control system, all of the fluid control device, separately from the broadcast code,
Individual identification code and identification for individual identification
The fluid control devices are grouped based on the criteria of
Previously subjected respectively a group identification code when the previous
In accordance with a command from the controller, each of the fluid control devices can be controlled collectively, individually, or in groups.

[0009]

In the present invention, since each fluid control device can have a plurality of identification codes other than the broadcast code, for example, when two identification codes are provided, the first identification code is used to identify the individual. The second identification code is a code for identifying a group divided by a specific standard. By doing so, not only can all the fluid control devices be controlled collectively, but also both individual control and group control can be performed, and finer control over time can be achieved. It can be carried out.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.

[0011] Figure 1 shows a fluid control device control system according to an embodiment of the present invention, In FIG, K _1, K
₂ , K ₃ and K ₄ are, for example, MFCs connected to a common controller (for example, a computer) C via a single signal transmission line L. Each of the MFCK _{1 to} K ₄ includes a control unit such as a one-chip microcomputer, for example, and furthermore, a broadcast code for controlling all the MFCK _{1 to} K ₄ at once without discrimination, for example, 00
, And the following identification code.

That is, the first MFCK ₁ has 01 as the first identification code and A0 as the second identification code.
However, the second MFCK ₂ has 0 as the first identification code.
2, A0 as the second identification code, C0 as the third identification code, and 03 in the third MFCK ₃ as B0 as the first identification code, B0 as the second identification code, and C0 as the third identification code But the fourth MFCK ₄
04 as the first identification code and B0 as the second identification code are respectively set (given). In this embodiment, the first MFCK ₁ and the fourth MFCK ₄ include:
The third identification code has not been set.

The first identification codes 01 to 04 correspond to each MF
CK ₁ ~K ₄ individually identifiable is a code for (specific). The second identification codes A0 and B0 are all M
The criterion that is the FCK ₁ ~K ₄ is a code representing the group when the grouping. The third identification code C0 is a code representing the group when grouped by other criteria all MFCK ₁ ~K _4.

In the fluid control device control system configured as described above, for example,
The command output with the identification code 00 is assigned to all MF
It is incorporated into the CK ₁ ~K _4. Command output denoted by the identification code 01 is captured only in the first MFCK _1. The command output with the identification code 02 is taken in only by the second MFCK ₂ . The command output with the identification code 03 is the third MFCK ₃
Is captured only by The command output with the identification code 04 is taken in only by the fourth MFCK ₄ .
Command output denoted by the identification code A0 is taken first MFCK ₁ and the second MFCK _2. The command output with the identification code B0 is the third MFC
K ₃ and the fourth MFCK ₄ . The command output with the identification code C0 is taken into the second MFCK ₂ and the third MFCK ₃ .

For example, a first MFCK ₁ and a second MFCK ₁
It is started and K _2, then a third MFCK ₃ 4
When it is desired to start the MFCK ₄ of the above, the flow rate setting value is transmitted to each of the MFCK _{1 to} K ₄ in advance, and the flow rate is set. First MFC
K ₁ and second MFCK ₂ and is started, then the outputs a start instruction marked with identification codes B0, it is possible to start the third MFCK ₃ and a fourth MFCK _4. Therefore, according to the present invention, finer control over time can be performed.

As understood from the above description, according to the present invention, not only can all MFCK _{1 to} K ₄ be controlled collectively, but also each MFCK _{1 to} K 4 can be individually controlled. Group control according to the control mode. The grouping is performed by MFCK
May be performed on the basis of a control method of ₁ ~K _4, therefore, it goes without saying that may be arbitrarily set corresponding to the number even this type of grouping of the identification codes.

In the above-described embodiment, the fluid control devices K _{1 to} K ₄ are all MFCs. However, the present invention is not limited to this. Needless to say, the present invention can be applied to a case where a plurality of types and a plurality of solenoid valves, temperature controllers and the like are provided.

It goes without saying that the present invention can be applied not only to a gas supply system but also to a liquid supply system.

[0019]

As described above, according to the present invention,
Multiple fluid control devices can be controlled collectively
Of course, either individual control or group control
Can also be performed. Therefore, even when the fluid supply system becomes complicated and a large number of fluid control devices such as a plurality of types and a plurality of fluid control devices are used, it is possible to reliably control these fluid control devices, and it is possible to timely control the devices. Fine control can be performed.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an example of a fluid control device control system according to the present invention.

FIG. 2 is a block diagram for explaining a conventional fluid control device control system.

[Explanation of symbols]

C ... controller, K ₁ ~K ₄ ... fluid control equipment, L ...
Signal transmission path.

────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Takayuki Hashizume 2 Higashi-cho, Kichijoin-gu, Minami-ku, Kyoto, Kyoto Prefecture S-Tech Co., Ltd. (56) References JP-A-3-114328 (JP, A) JP-A-61 −294519 (JP, A) JP-A-5-100710 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G05D 7/06

Claims (1)

(57) [Claims] A fluid control device control system in which a plurality of fluid control devices are connected to a single signal transmission line, and the fluid control devices are controlled by a controller common to the fluid control devices. , all of the fluid control device, separately from the broadcast code, individuals each
Individual identification code and specific criteria for separate identification
When the fluid control devices are grouped based on
Group identification code previously subjected respectively, by a command from the controller <br/> rollers, each of the fluid control equipment, batch, and characterized in that to allow controlled either by another individual or group Fluid control equipment control system.