JPH05190407A - Semiconductor manufacturing system - Google Patents

Abstract

PURPOSE:To always monitor, by using a product recognition means, whether a semiconductor product designated by a computer is put into a semiconductor manufacturing apparatus without any mistake in a computer-controlled production system. CONSTITUTION:A product recognition device 4 which transfers an information signal to and from a computer 3 which designates a product 2 to be put into a semiconductor manufacturing apparatus 1 by using a transmission route S1 is arranged. The product recognition device 4 takes, as a signal S2 from the product 2, a piece of information used to discriminate the product 2 to be put into the semiconductor manufacturing apparatus 1; it collates the piece of information at the computer 3. When a collated result coincides, a control signal S3 which permits that the product 2 is accepted by the semiconductor manufacturing apparatus 1 is sent out to the semiconductor manufacturing apparatus 1. When the result does not coincide, the control signal S3 which does not permit that the product 2 is accepted by the semiconductor manufacturing apparatus 1 is sent out to the semiconductor manufacturing apparatus 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing system that depends on a computer-controlled production system.

[0002]

2. Description of the Related Art A conventional semiconductor manufacturing system using a computer-controlled production system will be described with reference to the flowchart of FIG.

When there is an instruction from the computer to insert the next product into the semiconductor device in the product waiting state, the operator inserts the instructed product into the semiconductor manufacturing apparatus,
Prepare for production. At the start of production, the operator inputs the product.

In such a configuration, there is a risk of introducing a product different from the product instructed by the computer, and there is always a problem of creating a defective product, which hinders the quality of the computer-controlled production system.

[0005]

As described above, there is a drawback in the related art that there is a risk of introducing a product different from the product instructed by the computer.

The present invention has been made in consideration of the above circumstances, and an object thereof is to provide a semiconductor manufacturing system which improves the quality of a production system under computer control.

[0007]

A semiconductor manufacturing system of the present invention is a computer-controlled production system, and when a semiconductor product specified by a computer is put into a semiconductor manufacturing apparatus, the specified semiconductor product is actually put in. And a control signal transmission / reception unit for controlling the operation of the semiconductor manufacturing apparatus, which is provided between the product recognition unit and the semiconductor manufacturing apparatus. To do.

[0008]

According to the present invention, in the computer-controlled production system, it is constantly monitored whether the semiconductor product designated by the computer by the product recognizing means is correctly introduced into the semiconductor manufacturing apparatus. When the semiconductor product input to the semiconductor manufacturing apparatus is incorrect, the control signal transmitting / receiving means immediately stops the operation of the semiconductor manufacturing apparatus.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a block diagram showing the structure of a semiconductor manufacturing apparatus according to an embodiment of the present invention. Semiconductor manufacturing equipment
Product recognition device 4 for exchanging mutual information signals with computer 3 which directs product 2 to be input to 1 through transmission path S1
Has been deployed. Product recognition device 4 is semiconductor manufacturing device 1
Information S for identifying the product 2 to be input to the signal S
Take in from product 2 as 2 and match with computer 3. If the collation results match, the semiconductor manufacturing apparatus 1 is allowed to accept the product 2, and if they are not matched, the semiconductor manufacturing apparatus 1 is not allowed to accept the product 2 control signal S3
To the semiconductor manufacturing apparatus 1. That is, the operation of the semiconductor manufacturing apparatus 1 is controlled by this control signal S3.

FIG. 2 is a flow chart showing the operation of FIG. When the next product is input from the computer 3 to the semiconductor manufacturing device 1 in the product waiting state, the operator determines by the product recognition device 4 whether or not it is the instructed product before inputting the instructed product to the semiconductor manufacturing device 1. Prompt for information such as product code. The product recognition device 4 determines whether or not the product code of the set instruction product matches the product code indicated by the computer 3. If they match, production preparation (product input to semiconductor manufacturing equipment 3)
Then, normal production is started. However, if they do not match, the operator again needs to check and reset the indicated product (process 11).

That is, when it is determined by the product recognition device 4 that an incorrect product has been set, the product input is not permitted and the production line of the semiconductor manufacturing device 1 is stopped.
Along with this, the operator is notified by an alarm and an error message and the like, and the semiconductor manufacturing apparatus does not permit the production or accept the product until the product code instructed by the computer is input by the product recognition device. As a result, it is possible to reliably prevent erroneous product production.

FIG. 3 shows an example of the product recognition method of the product recognition device. The product code for each product is identified using the bar code 12, and when the next product is input from the computer, the product code is read using the bar code reader 13 and sent to the product recognition device 4 as a data signal S2. .. Since the product code is input to the computer 3 in advance as shown in FIG. 4, it is judged whether the product codes match or not by exchanging a signal with the product recognition device 4.

According to the above-described embodiment, the semiconductor products and materials designated by the computer can be surely put into the semiconductor manufacturing apparatus in the computer-controlled production system.
Improves computer-controlled production method significantly without creating defective products

Although the bar code is used as the identification information of the input product in the above embodiment, the present invention is not limited to this, and other information may be used as long as it identifies the product code.

[0016]

As described above, according to the present invention,
In the computer-controlled production system, the product recognition means constantly monitors whether the semiconductor product specified by the computer is correctly input to the semiconductor manufacturing apparatus. Therefore, the semiconductor manufacturing apparatus and the material specified by the computer can be reliably ensured. It is possible to provide a semiconductor manufacturing system that can be put into a computer and further improves the production system by computer management.

[Brief description of drawings]

FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention.

FIG. 2 is a flowchart showing the configuration of FIG.

FIG. 3 is a first diagram for specifically explaining a main part of the configuration of FIG.

FIG. 4 is a second diagram for specifically explaining a main part of the configuration of FIG.

FIG. 5 is a flowchart showing a configuration of a conventional semiconductor manufacturing system.

[Explanation of symbols]

1… Semiconductor manufacturing equipment, 2… Products, 3… Computers, 4
… Product recognition device.

Claims (2)

[Claims] 1. In a semiconductor manufacturing system having a computer-controlled production system, when a semiconductor product designated by a computer is loaded into a semiconductor manufacturing apparatus, a product for judging whether or not the designated semiconductor product is actually loaded. A semiconductor manufacturing system comprising: a recognizing unit; and a control signal transmitting / receiving unit provided between the product recognizing unit and the semiconductor manufacturing apparatus for controlling the operation of the semiconductor manufacturing apparatus. 2. The semiconductor manufacturing system according to claim 1, wherein the product recognition means comprises means for recognizing information such as product codes of various products.