KR970052074A - Semiconductor manufacturing device - Google Patents

Semiconductor manufacturing device Download PDF

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Publication number
KR970052074A
KR970052074A KR1019950056429A KR19950056429A KR970052074A KR 970052074 A KR970052074 A KR 970052074A KR 1019950056429 A KR1019950056429 A KR 1019950056429A KR 19950056429 A KR19950056429 A KR 19950056429A KR 970052074 A KR970052074 A KR 970052074A
Authority
KR
South Korea
Prior art keywords
gas
unit
semiconductor manufacturing
alarm
information
Prior art date
Application number
KR1019950056429A
Other languages
Korean (ko)
Other versions
KR100205005B1 (en
Inventor
이석민
김종영
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950056429A priority Critical patent/KR100205005B1/en
Publication of KR970052074A publication Critical patent/KR970052074A/en
Application granted granted Critical
Publication of KR100205005B1 publication Critical patent/KR100205005B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring

Abstract

본 발명은 가스를 사용하는 반도체 제조장치에 가스의 공급을 제어하는 가스공급장치에 관한 것으로, 가스봄브박스의 모든 정보를 가스공급장치에서 받아 원격제어 할 수 있도록 하여, 가스봄브의 가스압력 및 가스무게를 원격으로 점검 할 수 있고, 가스 교환 시에 가스공정치에서 밸브 조작이 바로 되므로 가스 교환에 따른 시간이 소비가 적고, 모든 인터록 기능을 반도체 제조장치에서 단일화 하므로 불필요한 에러의 발생이 최소화 되며, 기타 가스공급에 따른 필요한 제어를 가스공급장치에서 모두 수행할 수 있다.The present invention relates to a gas supply device for controlling the supply of gas to a semiconductor manufacturing apparatus using gas, so that all the information of the gas spring box can be received from the gas supply device for remote control, so that the gas pressure and gas of the gas spring Since the weight can be checked remotely and the valve operation is performed at the gas process value during gas exchange, the time required for gas exchange is reduced, and all the interlock functions are unified in the semiconductor manufacturing equipment, minimizing unnecessary errors. All necessary control of the gas supply can be carried out in the gas supply system.

Description

반도체 제조장치Semiconductor manufacturing device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

본 발명에 따른 반도체 제조장치의 가스봄브박스 원격제어를 나타내는 블록도.Block diagram showing a gas bomb box remote control of the semiconductor manufacturing apparatus according to the present invention.

Claims (3)

반도체 장치를 제조하기 위한 다수의 가스를 담고 있는 다수의 가스봄브로부터 가스를 공급받아 반도체 장치를 제조하는 반도체 제조장치에 있어서; 상기 가스봄브를 제어하는 가스봄브박스(10)로부터 소정의 정보를 입력받아 정보를 출력하는 출력부(20)와; 상기 정보에 응답하여 필요한 소정의 제어신호를 가스봄브박스(10)로 출력하는 제어부(30)를 포함하는 것을 특징으로 하는 반도체 제조장치.A semiconductor manufacturing apparatus for manufacturing a semiconductor device by receiving gas from a plurality of gas bombs containing a plurality of gases for manufacturing a semiconductor device; An output unit 20 for receiving predetermined information from the gas spring box 10 controlling the gas spring and outputting the information; And a controller (30) for outputting a predetermined control signal required in response to the information to the gas spring box (10). 제1항에 있어서, 상기 출력부(20)는, 상기 가스봄브의 1차 압력과 2차 압력 및 가스의 무게를 표시하는 표시부(21)와; 상기 가스봄브의 가스가 소정의 기준량 이하일 때 알람기능과 반도체 장치에 가스가 도포 되는 각각의 스텝을 표시하고, 상기 가스의 1차 압력과 2차 압력이 소정의 기준값 이하일 때 알람을 발생하는 알람기능을 갖는 알람부(25)를 포함하는 것을 특징으로 하는 반도체 제조장치.According to claim 1, wherein the output unit 20, The display unit 21 for displaying the primary pressure and secondary pressure of the gas bomb and the weight of the gas; Alarm function to display the alarm function when the gas of the gas bomb is below a predetermined reference amount and each step of applying the gas to the semiconductor device, and to generate an alarm when the primary pressure and the secondary pressure of the gas is below the predetermined reference value Semiconductor manufacturing apparatus comprising an alarm unit having a. 제1항에 있어서, 상기 제어부(30)는, 가스공급라인의 가스누설시 자동으로 가스밸브를 차단하고, 필요에 따라 스프링 콜러를 작동시키는 기능과, 가스밸브의 조작이 틀리는 경우 가스밸브의 개폐를 금지시키는 기능을 갖는 인터락부(31)와; 가스 교환 시에 가스밸브의 조작을 수동조작 또는 자동조작이 되게 하는 판넬조작부(35)를 포함하는 것을 특징으로 하는 반도체 제조장치.According to claim 1, wherein the control unit 30, the function of automatically shutting off the gas valve when the gas supply line of the gas supply, the operation of the spring caller if necessary, and opening and closing the gas valve when the operation of the gas valve is wrong An interlock unit 31 having a function to prohibit the operation; A panel manufacturing unit (35) comprising a panel manipulation section (35) for manual or automatic operation of the gas valve during gas exchange. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950056429A 1995-12-26 1995-12-26 Semiconductor manufacture apparatus KR100205005B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950056429A KR100205005B1 (en) 1995-12-26 1995-12-26 Semiconductor manufacture apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950056429A KR100205005B1 (en) 1995-12-26 1995-12-26 Semiconductor manufacture apparatus

Publications (2)

Publication Number Publication Date
KR970052074A true KR970052074A (en) 1997-07-29
KR100205005B1 KR100205005B1 (en) 1999-06-15

Family

ID=19444343

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950056429A KR100205005B1 (en) 1995-12-26 1995-12-26 Semiconductor manufacture apparatus

Country Status (1)

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KR (1) KR100205005B1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100481182B1 (en) * 2002-11-14 2005-04-07 삼성전자주식회사 Gas suppling device of semiconductor manufacturing equipment having interlock apparatus and the interlock method
KR101782745B1 (en) * 2016-08-12 2017-09-28 윤승찬 fluid supply system for supply machine remote control and method using the same

Also Published As

Publication number Publication date
KR100205005B1 (en) 1999-06-15

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