JPH06157135A - Surface-tempered sintered alloy and production thereof - Google Patents

Surface-tempered sintered alloy and production thereof

Info

Publication number
JPH06157135A
JPH06157135A JP4337974A JP33797492A JPH06157135A JP H06157135 A JPH06157135 A JP H06157135A JP 4337974 A JP4337974 A JP 4337974A JP 33797492 A JP33797492 A JP 33797492A JP H06157135 A JPH06157135 A JP H06157135A
Authority
JP
Japan
Prior art keywords
sintered alloy
oxide
layer
surface layer
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4337974A
Other languages
Japanese (ja)
Other versions
JP3092887B2 (en
Inventor
Masaki Kobayashi
正樹 小林
Toshiyuki Takahashi
俊行 高橋
Masayuki Suzaki
正行 須崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP04337974A priority Critical patent/JP3092887B2/en
Publication of JPH06157135A publication Critical patent/JPH06157135A/en
Application granted granted Critical
Publication of JP3092887B2 publication Critical patent/JP3092887B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To develop a surface-tempered sintered alloy superior in wear resistance, strength and toughness by forming and sintering rigid alumina by allowing a specific high M.P. metal to be a bond phase, and forming a specific metal compound contained layer on the surface. CONSTITUTION:In the production of the sintered alloy in which the rigid phase consisting of Al2O3 is a main component and the high M.P. metal is a bond phase, the sintered alloy consists of a matrix consisting of group IV, V, VI metals in periodic table and Ni, Co, Fe and Al or these alloys being incorporated in the 2-50vol.% ratio as the bond phase and the balance being the Al2O3 being >=50vol.% and the balance consisting of one or more kinds of ZrO2, partially stabilized ZrO2, HfO and Cr2O3, etc., or carbides of group IV-VI metals and nitride, etc. In the surface of the alloy, 0.01mm depth layer consists of Al2O3 and the high M.P. metallic compound of the carbides, nitrides and oxides, etc., of group IV-VI metals, and also average weight of the bond phase in the surface layer is smaller than the average value of the bond phase in the inside of the sintered alloy and the quantity of diffused elements of C, N and O2, etc., in the surface thickness decreases from the surface to the interior.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は酸化アルミニウムを主成
分とする硬質相と高融点金属を含む結合相とからなる焼
結合金の表面部における組成成分を改質してなる表面調
質焼結合金及びその製造方法に関し、具体的には、例え
ば旋削工具,フライス工具,ドリル,エンドミル等の切
削工具、ダイス,パンチ,スリッター等の耐摩耗工具、
高温炉治具,パイプ,ノズル,ボルト等の高温装置用部
品等の耐熱耐酸化性部品に代表される工具や部品として
最適な表面調質焼結合金及びその製造方法に関する。
BACKGROUND OF THE INVENTION The present invention relates to a surface heat-bonded material obtained by modifying the compositional components in the surface portion of a sintered alloy comprising a hard phase containing aluminum oxide as a main component and a binder phase containing a refractory metal. Regarding gold and its manufacturing method, specifically, for example, cutting tools such as turning tools, milling tools, drills and end mills, wear-resistant tools such as dies, punches and slitters,
The present invention relates to a surface-tempered sintered alloy most suitable for tools and parts represented by heat-resistant and oxidation-resistant parts such as high-temperature furnace jigs, parts for high-temperature equipment such as pipes, nozzles and bolts, and a manufacturing method thereof.

【0002】[0002]

【従来の技術】酸化アルミニウムを主成分とする硬質相
と高融点金属を含む結合相とからなる焼結合金として
は、Al23−Cr焼結合金,Al23−Mo−Cr焼
結合金,又はAl23−W−Cr焼結合金が高温部品と
して一部実用されている。
2. Description of the Related Art As sintered alloy comprising a binding phase containing a hard phase and a refractory metal mainly composed of aluminum oxide, Al 2 O 3 -Cr sintered alloy, Al 2 O 3 -Mo-Cr sintered Bonded gold or Al 2 O 3 —W—Cr sintered alloy has been partially put into practical use as high temperature parts.

【0003】しかしながら、これらの高温部品は、強度
及び靭性が低く、用途が非常に制限されるという問題が
ある。
However, these high temperature parts have the problem that their strength and toughness are low and their applications are very limited.

【0004】この問題を解決しようとして提案されてい
る代表的なものに、特開昭54−4915号公報及び特
開昭55−85653号公報がある。
Representatives proposed in order to solve this problem are Japanese Patent Laid-Open Nos. 54-4915 and 55-85653.

【0005】[0005]

【発明が解決しようとする課題】酸化アルミニウムと高
融点金属とを含む焼結合金の先行技術としての特開昭5
4−4915号公報には、酸化アルミニウム,酸化ジル
コニウム又はこれらの混合物からなる酸化物相10〜9
5重量%、及び30重量%ジルコニウム含有ニッケル合
金からなる金属相5〜90重量%とでなる工具用酸化ア
ルミニウム含有金属組成物について記載されている。
As a prior art of a sintered alloy containing aluminum oxide and a refractory metal, Japanese Unexamined Patent Application Publication No. Sho.
No. 4-4915 discloses an oxide phase 10-9 composed of aluminum oxide, zirconium oxide or a mixture thereof.
An aluminum oxide-containing metal composition for tools is described which comprises 5% by weight and a metal phase consisting of a nickel alloy containing 30% by weight zirconium and 5 to 90% by weight.

【0006】また、特開昭55−85653号公報に
は、Al23とTiNとを主成分としてなるマトリック
スを金属Tiで分散強化した切削工具用セラミックス焼
結体について記載されている。
Further, JP-A-55-85653 discloses a ceramic sinter for a cutting tool in which a matrix containing Al 2 O 3 and TiN as main components is dispersed and strengthened with metallic Ti.

【0007】これら両公報に記載されている酸化アルミ
ニウムと高融点金属とを含む焼結合金は、強度及び靭性
の向上を目的とし、切削時における耐欠損性が向上して
いるが、まだ満足できるものでなく、満足できるに至る
ような耐欠損性にすると、逆に耐摩耗性の低下が顕著に
なるという問題がある。
The sintered alloys containing aluminum oxide and refractory metal described in both of these publications have improved fracture resistance during cutting for the purpose of improving strength and toughness, but are still satisfactory. However, if the fracture resistance is satisfactory, the wear resistance is conspicuously deteriorated.

【0008】本発明は、上述のような問題点を解決した
もので、具体的には、焼結合金の内部の強度及び靭性を
高め、被加工物と直接接触する焼結合金の表面部の組成
成分を漸次最適に改質させて、耐摩耗性,強度及び靭性
をバランスよく保持させた表面調質焼結合金及びその製
造方法の提供を目的とする。
The present invention has solved the above-mentioned problems. Specifically, the strength and toughness of the inside of the sintered alloy are increased, and the surface portion of the sintered alloy that is in direct contact with the workpiece is improved. An object of the present invention is to provide a surface-tempered sintered alloy in which the composition components are gradually and optimally modified to maintain wear resistance, strength, and toughness in a balanced manner, and a method for producing the same.

【0009】[0009]

【課題を解決するための手段】本発明者らは、従来の酸
化アルミニウムを主成分として含む焼結合金のように金
属の結合相成分の調整でもって、強度及び靭性を向上さ
せても、逆に耐摩耗性,耐熱性,耐酸化性,耐腐食性が
低下することから、その検討を行っていた所、焼結合金
の内部においては強度及び靭性に寄与する結合相とし、
焼結合金の表面部においては、焼結合金の内部の結合相
とは異なった改質された結合相とし、かつ表面部の結合
相を構成する元素の濃度を変化させることにより、焼結
合金の特性がバランスよく向上するという知見を得て、
本発明を完成するに至ったものである。
DISCLOSURE OF THE INVENTION The inventors of the present invention have improved the strength and toughness by adjusting the binder phase component of a metal, as in the conventional sintered alloy containing aluminum oxide as the main component. Since wear resistance, heat resistance, oxidation resistance, and corrosion resistance are reduced, the study was conducted to find that in the interior of the sintered alloy, a binder phase that contributes to strength and toughness,
At the surface portion of the sintered alloy, a modified binder phase different from the binder phase inside the sintered alloy is used, and the concentration of the elements constituting the binder phase at the surface portion is changed to make the sintered alloy We obtained the knowledge that the characteristics of
The present invention has been completed.

【0010】すなわち、本発明の焼結合金は、周期律表
の4a,5a,6a族の金属、Ni,Co,Fe,Al
及びこれらの相互合金の中の少なくとも1種の結合相2
〜50体積%と、残部が酸化アルミニウムの硬質相、又
は酸化アルミニウム50体積%以上と残り酸化ジルコニ
ウム,部分安定化酸化ジルコニウム,酸化ハフニウム,
酸化クロム,酸化ケイ素,炭化ケイ素,窒化ケイ素,周
期律表の4a,5a,6a族の金属の炭化物,窒化物及
びこれらの相互固溶体の中の少なくとも1種とでなる硬
質相と不可避不純物とからなる焼結合金の1部の面もし
くは全面に表面から少なくとも0.01mm内部までの
厚さでなる表面層が形成されており、該表面層が酸化ア
ルミニウムと周期律表の4a,5a,6a族の金属の炭
化物,窒化物,酸化物,ホウ化物,ケイ化物及びこれら
の相互固溶体の中の少なくとも1種の高融点金属化合物
とでなり、あるいは、酸化アルミニウムと該高融点金属
化合物と該結合相とでなる表面層を有する焼結合金であ
って、該表面層中の該結合相の平均量が該焼結合金の内
部の該結合相の平均量よりも少なく、かつ該表面層中に
存在している炭素,窒素,酸素,ホウ素,ケイ素の中の
少なくとも1種の拡散元素が該表面層の表面から該焼結
合金の内部に向って漸減していることを特徴とする。
That is, the sintered alloy of the present invention is a metal of group 4a, 5a, 6a of the periodic table, Ni, Co, Fe, Al.
And at least one binder phase in these mutual alloys 2
˜50% by volume with the balance being aluminum oxide in the hard phase, or 50% by volume or more of aluminum oxide with the remaining zirconium oxide, partially stabilized zirconium oxide, hafnium oxide,
From a hard phase consisting of chromium oxide, silicon oxide, silicon carbide, silicon nitride, carbides, nitrides of metals of groups 4a, 5a and 6a of the periodic table and at least one of these mutual solid solutions, and inevitable impurities A surface layer having a thickness of at least 0.01 mm from the surface is formed on a part or the whole surface of the sintered alloy consisting of aluminum oxide and a group 4a, 5a, 6a of the periodic table. At least one refractory metal compound among the above-mentioned metal carbides, nitrides, oxides, borides, silicides and mutual solid solutions thereof, or aluminum oxide, the refractory metal compound and the binder phase A sintered alloy having a surface layer consisting of: and the average amount of the binder phase in the surface layer is less than the average amount of the binder phase inside the sintered alloy, and is present in the surface layer. Playing carbon Nitrogen, oxygen, boron, and wherein at least one diffusing element in the silicon is gradually decreased toward the surface of the surface layer to the interior of said sintered alloy.

【0011】本発明の焼結合金における結合相は、具体
的には、例えばTi,Zr,Hf,V,Nb,Ta,C
r,Mo,W,Ni,Co,Fe,Al,ZrMo2
TaCr2,ZrW2,TiAl,TiAl3,Nb3
l,Ni3Al,V3Al,Mo3Al,W3Al,NiA
l,Fe3Al,Co2Al9,Zr3Al,Co3Al,
Ni3(Al,Ti)又はこれらに固溶限度内の炭素,
窒素及び/又は酸素(例えば0.01原子%以下)の含
有した場合を挙げることができる。これらの結合相の
内、特に、周期律表の4a,5a,6a族の金属の中の
1種以上を含んだ高融点金属の結合相であると表面層の
形成の容易性及び耐熱性,耐酸化性,耐腐食性等の合金
特性上からも好ましい。この結合相の量が焼結合金全体
に対して2体積%未満になると、強度及び靭性の低下が
著しく、逆に50体積%を超えて多くなると、耐熱性,
耐酸化性,耐摩耗性の低下が著しくなるために、2〜5
0体積%と定めたものである。
Specifically, the binder phase in the sintered alloy of the present invention is, for example, Ti, Zr, Hf, V, Nb, Ta, C.
r, Mo, W, Ni, Co, Fe, Al, ZrMo 2 ,
TaCr 2 , ZrW 2 , TiAl, TiAl 3 , Nb 3 A
l, Ni 3 Al, V 3 Al, Mo 3 Al, W 3 Al, NiA
1, Fe 3 Al, Co 2 Al 9 , Zr 3 Al, Co 3 Al,
Ni 3 (Al, Ti) or carbon within the solid solution limit thereof,
The case where nitrogen and / or oxygen (for example, 0.01 atomic% or less) is contained can be given. Among these binder phases, particularly when the binder phase is a high melting point metal binder phase containing at least one of the metals of the 4a, 5a and 6a groups of the periodic table, the ease of forming the surface layer and the heat resistance, It is also preferable from the viewpoint of alloy characteristics such as oxidation resistance and corrosion resistance. If the amount of the binder phase is less than 2% by volume with respect to the entire sintered alloy, the strength and toughness are significantly deteriorated, and conversely, if it exceeds 50% by volume, the heat resistance,
Since the deterioration of the oxidation resistance and wear resistance becomes remarkable, 2-5
It is defined as 0% by volume.

【0012】本発明の焼結合金における結合相は、酸化
アルミニウムのみからなる場合、又は50体積%以上の
酸化アルミニウム(硬質相に対し)と残り、例えば酸化
ジルコニウム,MgO,CaO,もしくはY23を含め
た希土類元素の酸化物を安定化剤として含有する部分安
定化酸化ジルコニウム,酸化ハフニウム,酸化クロム,
酸化ケイ素,炭化ケイ素,窒化ケイ素,周期律表の4
a,5a,6a族の金属の炭化物,窒化物,炭窒化チタ
ン,炭窒化チタン・モリブデン,炭化ジルコニウム・タ
ングステン,サイアロン,酸化ジルコニウム・ハフニウ
ムの中の1種からなる場合である。
The binder phase in the sintered alloy of the present invention consists of aluminum oxide alone, or 50% by volume or more of aluminum oxide (relative to the hard phase) and the rest, such as zirconium oxide, MgO, CaO, or Y 2 O. Partially stabilized zirconium oxide, hafnium oxide, chromium oxide, containing rare earth element oxides including 3 as a stabilizer
Silicon oxide, silicon carbide, silicon nitride, 4 of the periodic table
This is the case where it is made of one of carbides, nitrides, titanium carbonitride, titanium carbonitride / molybdenum, zirconium carbide / tungsten, sialon, and zirconium oxide / hafnium of a, 5a, and 6a group metals.

【0013】表面層を除いた焼結合金、いわゆる焼結合
金の内部には、上述の結合相と硬質相が緻密に混在して
いるが、出発原料に微量に含まれている不可避不純物及
び製造工程、特に出発原料の混合粉砕時に混入する微量
の不可避不純物が合金の特性を顕著に低下させない程度
に含まれてもよい。
Inside the sintered alloy excluding the surface layer, so-called sintered alloy, the above-mentioned binder phase and hard phase are densely mixed, but inevitable impurities and production which are contained in trace amounts in the starting material. A small amount of unavoidable impurities that are mixed in the process, particularly when the starting materials are mixed and pulverized, may be included to the extent that the characteristics of the alloy are not significantly deteriorated.

【0014】本発明の焼結合金における表面層は、酸化
アルミニウムと周期律表4a,5a,6a族金属の炭化
物,窒化物,酸化物,ホウ化物,ケイ化物及びこれらの
相互固溶体の中の少なくとも1種の高融点金属化合物の
含まれている場合、又は酸化アルミニウムと高融点金属
化合物の他に、焼結合金の内部に含有している結合相の
含まれている場合がある。この表面層を構成している高
融点金属化合物としては、具体的には、例えばTiC,
WC,Ti(C,N),(Ti,W),(Ti,Mo)
C,ZrN,TiN,(Ti,Nb)N,(Cr,A
l)23,Al2TiO5,TiB2,WB,MoSi2
挙げることができる。表面層中に結合相を存在させる場
合は、表面層中の結合相の平均量が焼結合金の内部に存
在する結合相の平均量よりも少なくすることが焼結合金
の諸特性の向上に重要な役割をしているものである。表
面層中の結合相の平均量は、用途や形状により異なる
が、焼結合金の内部に存在する結合相の平均量の50%
以下が好ましく、特に耐摩耗性を重視する場合には、表
面層中の結合相の平均量を1体積%以下又は零にするこ
とが好ましい。
The surface layer of the sintered alloy of the present invention is at least aluminum carbide and carbides, nitrides, oxides, borides, silicides of metals of groups 4a, 5a and 6a of the Periodic Table and their mutual solid solutions. In some cases, one refractory metal compound is contained, or in addition to aluminum oxide and the refractory metal compound, a binder phase contained in the sintered alloy is contained. As the refractory metal compound forming the surface layer, specifically, for example, TiC,
WC, Ti (C, N), (Ti, W), (Ti, Mo)
C, ZrN, TiN, (Ti, Nb) N, (Cr, A
l) 2 O 3 , Al 2 TiO 5 , TiB 2 , WB, MoSi 2 can be mentioned. When the binder phase is present in the surface layer, it is necessary to make the average amount of the binder phase in the surface layer smaller than the average amount of the binder phase present inside the sintered alloy in order to improve various properties of the sintered alloy. It plays an important role. The average amount of the binder phase in the surface layer is 50% of the average amount of the binder phase present inside the sintered alloy, depending on the use and shape.
The following is preferable, and particularly when importance is attached to abrasion resistance, it is preferable that the average amount of the binder phase in the surface layer is 1% by volume or less or zero.

【0015】以上のような表面層の組成と共に、表面層
の構成でもう1つ重要な特徴は、表面層を形成している
必須成分として高融点金属化合物の濃度分布が異なって
いることである。具体的には、例えば表面層中に存在す
る高融点金属化合物の含有量が表面層の表面で多く、焼
結合金の内部へ向って漸減している場合、又は高融点金
属化合物である炭化物,窒化物,酸化物,ホウ化物,ケ
イ化物及びこれらの相互固溶体を構成している炭素,窒
素,酸素,ホウ素,ケイ素の中の少なくとも1種の拡散
元素の濃度が表面層の表面で高く、焼結合金の内部へ向
って漸減している場合がある。この内、後者の場合で、
1種の拡散元素の濃度が表面層の表面で高く、焼結合金
の内部へ向って漸減しているのに対し、逆に他の拡散元
素の濃度が相対的に焼結合金の内部との境界面で高く、
表面層の表面へ向って漸減した組合せでなる場合もあ
る。この表面層の厚さが0.01mm未満になると、耐
摩耗性,耐熱性,耐酸化性,耐腐食性を向上させる効果
が弱く、上述した表面層の構成及び組成成分により異な
るが、安定に長寿命化するためには、表面層の厚さを
0.05〜1mmにすることが、特に好ましい。
In addition to the composition of the surface layer as described above, another important feature in the constitution of the surface layer is that the concentration distribution of the refractory metal compound as an essential component forming the surface layer is different. . Specifically, for example, when the content of the refractory metal compound present in the surface layer is large on the surface of the surface layer and gradually decreases toward the inside of the sintered alloy, or a carbide which is the refractory metal compound, The concentration of at least one diffusing element among carbon, nitrogen, oxygen, boron, and silicon forming the nitride, the oxide, the boride, the silicide, and the mutual solid solution thereof is high on the surface of the surface layer, It may be gradually decreasing toward the inside of the bond. Of these, in the latter case,
The concentration of one kind of diffusing element is high on the surface of the surface layer and gradually decreases toward the inside of the sintered alloy, while the concentration of another diffusing element is relatively lower than that inside the sintered alloy. High at the interface,
In some cases, the combination is gradually reduced toward the surface of the surface layer. When the thickness of this surface layer is less than 0.01 mm, the effect of improving wear resistance, heat resistance, oxidation resistance, and corrosion resistance is weak, and it varies depending on the above-mentioned structure and composition of the surface layer, but it is stable. In order to extend the life, it is particularly preferable that the thickness of the surface layer is 0.05 to 1 mm.

【0016】この表面層は、焼結合金の1部の面に形成
する場合、又は全面に形成する場合、もしくは2面以上
に形成し、1つの面と他の面とが異なった表面層の構
成、具体的には、表面層の厚さが異なる場合、表面層の
組成成分が異なる場合があり、特に、用途や形状に合わ
せて、異なった高融点金属化合物を存在させることは、
特に好ましいことである。具体的な用途例としては、切
削工具、特にスローアウェイチプとして用いる場合、掬
い面と逃げ面にそれぞれ異なった表面層を形成すること
が好ましく、さらに詳述すると、掬い面には、耐溶着
性,耐熱性,耐酸化性を高めるような窒化物,酸化物,
ホウ化物でなる高融点金属化合物の含有した表面層と
し、一方逃げ面には、耐すきとり摩耗性を高める炭化物
でなる高融点金属化合物の含有した表面層とすることが
好ましい。
This surface layer is formed on a part of the surface of the sintered alloy, or on the entire surface, or on two or more surfaces, and one surface is different from the other surface layer. Configuration, specifically, if the thickness of the surface layer is different, the composition components of the surface layer may be different, in particular, according to the application and shape, the presence of different refractory metal compounds,
It is particularly preferable. As a specific application example, when used as a cutting tool, especially a throwaway tip, it is preferable to form different surface layers on the scooping surface and the flank surface. , Nitrides, oxides that enhance heat resistance and oxidation resistance,
It is preferable to use a surface layer containing a refractory metal compound made of a boride, and a flank surface to be a surface layer containing a refractory metal compound made of a carbide that enhances scraping abrasion resistance.

【0017】上述した表面層を有する焼結合金の1部の
面又は全面に、さらに金属,合金,無機化合物の被膜を
被覆させることも好ましく、被膜としては、具体的に
は、例えば周期律表の4a,5a,6a族の金属の炭化
物,窒化物,炭酸化物,窒酸化物、Alの酸化物,窒化
物、Siの炭化物,窒化物及びこれらの相互固溶体、ダ
イヤモンド、ダイヤモンド状カーボン、立方晶窒化ホウ
素の中の少なくとも1種の単層又は多層でなることが好
ましい。
It is also preferable to further coat a part or all of the surface of the sintered alloy having the above-mentioned surface layer with a film of a metal, an alloy or an inorganic compound. Specifically, for example, the periodic table is used. 4a, 5a, 6a group metal carbides, nitrides, carbon oxides, oxynitrides, Al oxides, nitrides, Si carbides, nitrides and their mutual solid solutions, diamonds, diamond-like carbons, cubic crystals It is preferably composed of at least one single layer or multiple layers of boron nitride.

【0018】本発明の焼結合金を作製するには、従来の
粉末冶金法に浸漬法,拡散法,鋳込成形法,遠心成形法
を付加応用して作製することもできるが、次の方法で行
うと表面層の制御が容易で、簡易な製造方法であるこ
と、及び品質管理上からも好ましい方法である。
In order to produce the sintered alloy of the present invention, the conventional powder metallurgy method can be applied by additionally applying the dipping method, the diffusion method, the casting method, and the centrifugal molding method. Is a preferable method from the viewpoint of easy control of the surface layer, a simple manufacturing method, and quality control.

【0019】本発明の焼結合金の製造方法は、周期律表
の4a,5a,6a族の金属、Ni,Co,Fe,Al
及びこれらの相互合金又はこれらの前駆体の中の少なく
とも1種の結合相形成粉末に酸化アルミニウム又は酸化
アルミニウム50体積%以上と残り酸化ジルコニウム,
部分安定化酸化ジルコニウム,酸化ハフニウム,酸化ク
ロム,酸化ケイ素,炭化ケイ素,窒化ケイ素,周期律表
の4a,5a,6a族の金属の炭化物,窒化物及びこれ
らの相互固溶体の中の少なくとも1種とでなる硬質相形
成粉末を加えて混合粉砕し、混合粉末とする第1工程、
該混合粉末を所定の形状に成形して粉末圧粉体とする第
2工程、該粉末圧粉体を炭素,窒素,酸素,ホウ素,ケ
イ素の中の少なくとも1種の拡散元素を含む化合物に接
触もしくは付着、あるいは該拡散元素を含むガス雰囲気
中に設置して1400〜1900℃に加熱する第3工程
からなる方法である。
The method for producing a sintered alloy of the present invention is carried out by using metals of groups 4a, 5a and 6a of the periodic table, Ni, Co, Fe and Al.
And aluminum oxide or 50% by volume or more of aluminum oxide and the balance zirconium oxide in at least one binder phase forming powder among these mutual alloys or their precursors,
At least one of partially stabilized zirconium oxide, hafnium oxide, chromium oxide, silicon oxide, silicon carbide, silicon nitride, carbides and nitrides of metals of groups 4a, 5a and 6a of the periodic table and mutual solid solutions thereof. A first step of adding a hard phase forming powder consisting of
Second step of shaping the mixed powder into a predetermined shape to obtain a powder compact, contacting the powder compact with a compound containing at least one diffusing element among carbon, nitrogen, oxygen, boron and silicon Alternatively, it is a method comprising a third step of depositing or installing in a gas atmosphere containing the diffusing element and heating to 1400 to 1900 ° C.

【0020】本発明の製造方法における結合相形成粉末
は、例えば2μm以下の微細な金属又は合金粉末を用い
ることもできるが、第3工程の加熱時に熱分解して金属
もしくは合金を生成する前駆体、具体的には、例えばT
iH2,ZrH2,TaH2,NbH2,の水素化物、Cr
N,Mo2N,TiN,の窒化物を用いると、第1工程
の混合粉砕時に微細になりやすく、かつ付着及び吸着酸
素の影響が少なく緻密で高強度な焼結合金を得ることが
できるので好ましい。結合相形成粉末に、出発原料とし
て用いる硬質相形成粉末は、従来から粉末冶金法で用い
られている粉末、例えば粒径10μm以下の粉末、好ま
しくは粒径3μm以下の粉末を用いればよく、特に酸化
物粉末の場合には、サブミクロンの粒径粉末を用いる
と、緻密で高強度な焼結合金を得ることができるので好
ましい。
As the binder phase forming powder in the production method of the present invention, for example, a fine metal or alloy powder having a particle size of 2 μm or less can be used, but a precursor which is thermally decomposed to produce a metal or alloy during the heating in the third step. , Specifically, for example, T
iH 2 , ZrH 2 , TaH 2 , NbH 2 , hydride, Cr
When N, Mo 2 N, TiN, or Nitride is used, it is possible to obtain a dense and high-strength sintered alloy that tends to become fine during the mixing and pulverization in the first step and has little influence of adhesion and adsorbed oxygen. preferable. The hard phase forming powder used as a starting material for the binder phase forming powder may be a powder conventionally used in powder metallurgy, for example, a powder having a particle size of 10 μm or less, preferably a powder having a particle size of 3 μm or less, In the case of oxide powder, it is preferable to use a submicron particle size powder because a dense and high-strength sintered alloy can be obtained.

【0021】結合相形成粉末と硬質相形成粉末とを混合
粉砕して混合粉末とする第1工程は、従来の粉末冶金法
で行われている混合方法で行い、次の粉末圧粉体とする
第2工程も従来の粉末冶金法で行われている方法、例え
ば金型成形,押出し成形,射出成形,鋳込成形,遠心成
形による方法を適時行えばよい。
The first step of mixing and pulverizing the binder phase forming powder and the hard phase forming powder into a mixed powder is carried out by a mixing method which is carried out by a conventional powder metallurgy method to obtain the following powder green compact. Also in the second step, a method which is carried out by a conventional powder metallurgy method, for example, a method by die molding, extrusion molding, injection molding, casting molding, centrifugal molding may be carried out at appropriate times.

【0022】本発明の製造方法における第3工程は、例
えばカーボン,グラファイト,金属ホウ素,ケイ素,炭
化ホウ素,炭化ケイ素,酸化ホウ素,窒化ケイ素等の粉
末からなる拡散元素を含む化合物を有機溶媒に分散させ
てスラリー状物質とし、上述の粉末圧粉体の必要な表面
にスラリー状物質を吹付け又は塗付して付着する方法、
またグラファイト板等に上述のスラリー状物質を塗付
し、その上に粉末圧粉体を接触させる方法、さらに粉末
圧粉体の成形時に、その表面部を拡散元素を含む化合物
の層で一体成形する方法、粉末圧粉体を拡散元素を含む
化合物の粉末中に埋設する方法等でもって行った後、加
熱すればよい。また、第3工程の別の方法としては、例
えばCH4,N2,O2,CO,CO2,BCl4,SiH4
の拡散元素を含むガス雰囲気中で粉末圧粉体を設置して
加熱することもできる。この場合、粉末圧粉体が焼結さ
れて緻密になる温度までは真空又は不活性ガス中で加熱
した後、拡散元素を含むガス雰囲気に切換えて焼結する
ことが好ましい。
The third step in the production method of the present invention is to disperse a compound containing a diffusing element, such as carbon, graphite, metallic boron, silicon, boron carbide, silicon carbide, boron oxide or silicon nitride, in an organic solvent. And a slurry-like substance, a method of spraying or applying the slurry-like substance to the necessary surface of the above-mentioned powder compact,
In addition, a method of applying the above-mentioned slurry-like substance to a graphite plate, etc. and contacting the powder compact with it, and further, when molding the powder compact, the surface part is integrally molded with a layer of a compound containing a diffusion element. And the method of burying the powder compact in the powder of the compound containing the diffusing element, and then heating. Further, as another method of the third step, for example, CH 4 , N 2 , O 2 , CO, CO 2 , BCl 4 , SiH 4 are used.
Alternatively, the powder compact may be placed and heated in a gas atmosphere containing the diffusing element. In this case, it is preferable to heat the powder compact in a vacuum or an inert gas up to a temperature at which the powder compact is sintered and become dense, and then switch to a gas atmosphere containing a diffusion element for sintering.

【0023】本発明の焼結合金の表面層の制御、特に表
面層の組成,厚み及び拡散元素の濃度勾配の制御は、上
述の製造方法の中でも拡散元素を含む化合物の量、ガス
雰囲気中の拡散元素ガス分圧、焼結温度及び時間によっ
て行うことができる。
The control of the surface layer of the sintered alloy of the present invention, in particular, the control of the composition, thickness and concentration gradient of the diffusing element in the above-mentioned manufacturing method, is carried out in the amount of the compound containing the diffusing element and in the gas atmosphere. The diffusion element gas partial pressure, the sintering temperature and the time may be used.

【0024】以上の製造方法で得た焼結合金をさらに熱
間静水圧処理(HIP処理)を行うことは、緻密で高強
度な焼結合金を得るために好ましいことである。また、
本発明の焼結合金の表面に、さらに被膜を被覆させる場
合には、従来から行われている化学蒸着法又は物理蒸着
法でもって行うことができる。
It is preferable to further subject the sintered alloy obtained by the above manufacturing method to hot isostatic pressing (HIP treatment) in order to obtain a dense and high-strength sintered alloy. Also,
When the surface of the sintered alloy of the present invention is further coated with a film, it can be carried out by a conventional chemical vapor deposition method or physical vapor deposition method.

【0025】[0025]

【作用】本発明の焼結合金は、焼結合金の内部、具体的
には焼結合金の内部を構成している主として結合相が強
度及び靭性を高める作用をし、表面層を構成している主
として高融点金属化合物及び結合相濃度が耐摩耗性,耐
熱性,耐酸化性,耐腐食性を高める作用をし、表面層に
おける拡散元素の濃度勾配が表面層と焼結合金の内部と
の境界面近傍における熱応力緩和を高める作用をしてい
るものである。
In the sintered alloy of the present invention, the inside of the sintered alloy, specifically, the binder phase mainly constituting the inside of the sintered alloy acts to enhance strength and toughness, and forms a surface layer. The refractory metal compound and the binder phase concentration mainly act to enhance wear resistance, heat resistance, oxidation resistance, and corrosion resistance, and the concentration gradient of the diffusing element in the surface layer causes a difference between the surface layer and the inside of the sintered alloy. It has a function of enhancing thermal stress relaxation in the vicinity of the boundary surface.

【0026】[0026]

【実施例1】平均粒径がそれぞれ0.3μmのα−アル
ミナ粉末、0.5μmのMo,W,WCの粉末、1〜3
μmのTi(C0.5,N0.5),TiH2,ZrH2,Nb
2,TaH2,CrN,Niの粉末、0.1μmのA
l,ZrO2(含3モル%Y23)粉末を用いて、表1
に示す組成成分に配合し、ウレタン内張りしたステンレ
ス製ポットにメタノールとアルミナ製ボールと共に配合
粉末を装入して48時間混合粉砕し、乾燥後80℃に加
熱しながら6wt%のパラフィンワックスを添加混合し
て混合粉末を得た。次に、金型を用いて、それぞれの混
合粉末を1ton/cm2で加圧成形して粉末成形体を
作製した。次いで、表1に併記した粉末圧粉体の表面へ
の処理方法でもって処理した後、表1に併記した焼結条
件(但し、焼結雰囲気は、1500℃までは全て10-3
Torrの真空とした)でもって焼結し、形状がISO
規格のSNMN120408相当からなる本発明品1〜
10及び比較品1〜3の焼結合金を得た。
Example 1 α-alumina powder having an average particle size of 0.3 μm, 0.5 μm Mo, W, and WC powders, 1 to 3
μm Ti (C 0.5 , N 0.5 ), TiH 2 , ZrH 2 , Nb
H 2 , TaH 2 , CrN, Ni powder, A of 0.1 μm
1, ZrO 2 (containing 3 mol% Y 2 O 3 ) powder was used.
Into a stainless steel pot lined with urethane and lined with methanol and alumina balls, mix and pulverize for 48 hours, mix and pulverize for 48 hours, then add and mix 6 wt% paraffin wax while heating to 80 ° C. To obtain a mixed powder. Next, each mixed powder was pressure-molded at 1 ton / cm 2 using a mold to prepare a powder compact. Then, after the powder compact was treated by the method for treating the surface of the powder compact described in Table 1, the sintering conditions also listed in Table 1 (provided that the sintering atmosphere was 10 -3 at all until 1500 ° C).
Sintered with a vacuum of Torr) and the shape is ISO
The product 1 of the present invention including a standard equivalent of SNMN120408
10 and comparative products 1 to 3 were obtained.

【0027】[0027]

【表1】 本発明品1〜10及び比較品1〜3の焼結合金を切断
し、それぞれの表面層の厚さ、焼結合金の表面層の表面
より0.01mm内部の点(表面層)と焼結合金の表面
層の表面より2.0mm内部の点(焼結合金の内部)に
おける、それぞれの微少部X線回折、金属顕微鏡,走査
型電子顕微鏡による組成成分及びマイクロビッカース硬
さ(500g荷重)を調べて、その結果を表2に示し
た。(但し、表面層がない場合は、焼結合金の表面よ
り、0.01mm及び2.0mmの各点を調べた)
[Table 1] The sintered alloys of the present invention products 1 to 10 and the comparative products 1 to 3 were cut, and the thickness of each surface layer, a point (surface layer) within 0.01 mm from the surface of the surface layer of the sintered alloy, and firing bonding At a point within 2.0 mm from the surface of the gold surface layer (inside of the sintered alloy), the minute component X-ray diffraction, the composition component by the metallographic microscope and the scanning electron microscope, and the micro Vickers hardness (500 g load) were measured. The results are shown in Table 2. (However, when there is no surface layer, 0.01 mm and 2.0 mm points were examined from the surface of the sintered alloy)

【0028】[0028]

【表2】 こうして得た表2の焼結合金の内、本発明品3,5,
7,10、比較品1,2と、さらに同様の形状に作製し
た市販の純アルミナ系セラミックス、アルミナ−炭化チ
タン系セラミックスを用いて、被削材S48C,切削速
度400m/min,送り0.2mm/rev,切込み
1.5mm,チップ形状SNMN120408(ブレー
カ付き,0.15×−25°PH付),切削時間10
分,評価平均逃げ面摩耗幅(VB)による乾式旋削試験
と、被削材S48C(外周に4本溝入り)切削速度10
0m/min,送り0.12mm/rev,切込み1.
5mm,チップ形状同上,切削時間欠損又はチッピング
による寿命まで、評価3コーナーの平均寿命時間による
乾式断続旋削試験を行い、その結果を表3に示した。
[Table 2] Among the sintered alloys of Table 2 thus obtained, the products of the present invention 3, 5,
Work piece S48C, cutting speed 400 m / min, feed 0.2 mm using 7 and 10, comparative products 1 and 2 and commercially available pure alumina-based ceramics and alumina-titanium carbide-based ceramics manufactured in the same shape. / Rev, depth of cut 1.5 mm, chip shape SNMN120408 (with breaker, with 0.15 x -25 ° PH), cutting time 10
Min, dry turning test based on evaluation average flank wear width (V B ) and work material S48C (4 grooves on outer circumference) cutting speed 10
0 m / min, feed 0.12 mm / rev, cut 1.
5 mm, same as chip shape, cutting time loss or life due to chipping, a dry interrupted turning test was carried out with an average life time of 3 corners evaluated, and the results are shown in Table 3.

【0029】[0029]

【表3】 [Table 3]

【0030】[0030]

【実施例2】実施例1で得た本発明品3,5,7、比較
品1,2の焼結合金及び市販のAl23系セラミック
ス,Al23−TiC系セラミックスを用いて、従来か
ら行われている化学蒸着法でもって、それぞれの焼結合
金又はセラミックスの表面に0.5μm厚さのTiC、
1μm厚さのTi(C,N)、0.5μm厚さのTiN
を順次被覆して、それぞれ本発明品11,12,13、
比較品4,5,及び被覆Al23系セラミックス,被覆
Al23−TiC系セラミックスを得た。こうして得た
被覆焼結合金及び被覆セラミックスを用いて実施例1で
行った旋削試験と断続試験を行った結果、本発明品1
1,12,13は、それぞれ実施例1の本発明品3,
5,7に対し、約50〜150%向上したのに対し、比
較品4,5及び被覆セラミックスは、それぞれ実施例1
の比較品1,2及び市販セラミックスと殆んど同等であ
った。
Example 2 Using the sintered alloys of the present invention products 3, 5, 7 and comparative products 1, 2 obtained in Example 1 and commercially available Al 2 O 3 based ceramics, Al 2 O 3 —TiC based ceramics , A 0.5 μm thick TiC film is formed on the surface of each sintered alloy or ceramic by a conventional chemical vapor deposition method.
1 μm thick Ti (C, N), 0.5 μm thick TiN
Are sequentially coated, and the products of the present invention 11, 12, 13,
Comparative products 4, 5 and coated Al 2 O 3 based ceramics and coated Al 2 O 3 —TiC based ceramics were obtained. The coated sintered alloy and the coated ceramics thus obtained were subjected to the turning test and the interrupted test conducted in Example 1, and as a result, the product 1 of the present invention was obtained.
1, 12 and 13 are the products 3 of the present invention of Example 1, respectively.
Compared with Nos. 5 and 7, the improvement was about 50 to 150%, while Comparatives Nos. 4 and 5 and the coated ceramics were each manufactured in Example 1.
It was almost the same as the comparative products 1 and 2 and the commercial ceramics.

【0031】[0031]

【発明の効果】本発明の焼結合金は、表面層の硬さが焼
結合金の内部に比べて、4%〜34%高く、従来の酸化
アルミニウム系焼結合金に比べて、耐摩耗性において
3.3倍以上、耐欠損性による寿命において5.6倍〜
63倍も向上するという効果、また従来の酸化アルミニ
ウム系セラミックスに比べて、耐摩耗性において7%〜
52%、耐欠損性による寿命において83%〜63倍も
向上するという効果がある。
The hardness of the surface layer of the sintered alloy of the present invention is 4% to 34% higher than that of the inside of the sintered alloy, and the wear resistance is higher than that of the conventional aluminum oxide-based sintered alloy. Is 3.3 times or more, and the life due to fracture resistance is 5.6 times or more.
The effect of improving by 63 times, and the abrasion resistance is 7% to 7% compared with the conventional aluminum oxide ceramics.
52%, and the life due to fracture resistance is improved by 83% to 63 times.

【0032】さらに、硬質被膜を被覆した本発明の被覆
焼結合金は、被膜が被覆されない本発明の焼結合金に比
べて、耐摩耗性及び耐欠損性において50〜150%も
向上するという効果がある。
Furthermore, the coated sintered alloy of the present invention coated with a hard coating has the effect of improving wear resistance and fracture resistance by 50 to 150% as compared with the sintered alloy of the present invention not coated with a coating. There is.

【0033】以上本発明の焼結合金は、表面層が耐摩耗
性,耐酸化性,耐熱性,耐腐食性,鉄系材料に対する耐
溶着性及び硬質被膜との密着性を高める効果を発揮し、
焼結合金の内部が強度及び靭性を高める効果を発揮して
いるもので、工具や各種の機械部品に応用できる産業上
有用な材料である。
As described above, in the sintered alloy of the present invention, the surface layer exhibits the effects of enhancing wear resistance, oxidation resistance, heat resistance, corrosion resistance, welding resistance to iron-based materials, and adhesion with a hard coating. ,
The inside of the sintered alloy has the effect of enhancing strength and toughness, and is an industrially useful material that can be applied to tools and various mechanical parts.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 周期律表の4a,5a,6a族の金属、
Ni,Co,Fe,Al及びこれらの相互合金の中の少
なくとも1種の結合相2〜50体積%と、残部が酸化ア
ルミニウムの硬質相、又は酸化アルミニウム50体積%
以上と残り酸化ジルコニウム,部分安定化酸化ジルコニ
ウム,酸化ハフニウム,酸化クロム,酸化ケイ素,炭化
ケイ素,窒化ケイ素,周期律表の4a,5a,6a族の
金属の炭化物,窒化物及びこれらの相互固溶体の中の少
なくとも1種とでなる硬質相と不可避不純物とからなる
焼結合金の1部の面もしくは全面に表面から少なくとも
0.01mm内部までの厚さでなる表面層が形成されて
おり、該表面層が酸化アルミニウムと周期律表の4a,
5a,6a族の金属の炭化物,窒化物,酸化物,ホウ化
物,ケイ化物及びこれらの相互固溶体の中の少なくとも
1種の高融点金属化合物とでなり、あるいは、酸化アル
ミニウムと該高融点金属化合物と該結合相とでなる表面
層を有する焼結合金であって、該表面層中の該結合相の
平均量が該焼結合金の内部の該結合相の平均量よりも少
なく、かつ該表面層中に存在している炭素,窒素,酸
素,ホウ素,ケイ素,の中の少なくとも1種の拡散元素
が該表面層の表面から該焼結合金の内部に向って漸減し
ていることを特徴とする表面調質焼結合金。
1. A metal of group 4a, 5a, 6a of the periodic table,
2 to 50% by volume of a binder phase of at least one of Ni, Co, Fe, Al and their mutual alloys, and a hard phase of the balance being aluminum oxide, or 50% by volume of aluminum oxide
Above and remaining zirconium oxide, partially stabilized zirconium oxide, hafnium oxide, chromium oxide, silicon oxide, silicon carbide, silicon nitride, carbides, nitrides of metals of groups 4a, 5a and 6a of the periodic table and mutual solid solutions thereof. A surface layer having a thickness of at least 0.01 mm from the surface is formed on a part or all of the surface of the sintered alloy composed of a hard phase composed of at least one of the above and unavoidable impurities. The layer is aluminum oxide and 4a of the periodic table,
A carbide, a nitride, an oxide, a boride, a silicide of a group 5a or 6a metal and at least one refractory metal compound among these mutual solid solutions, or aluminum oxide and the refractory metal compound. And a surface layer comprising the binder phase, wherein the average amount of the binder phase in the surface layer is less than the average amount of the binder phase inside the sintered alloy, and the surface At least one diffusing element among carbon, nitrogen, oxygen, boron, and silicon present in the layer is gradually reduced from the surface of the surface layer toward the inside of the sintered alloy. Sintered surface tempered alloy.
【請求項2】 上記表面層は、上記焼結合金の少なくと
も2つの表面に形成されており、該焼結合金の1つの表
面に形成された該表面層と他の表面に形成された該表面
層には、異なった上記高融点金属化合物が存在している
ことを特徴とする請求項1記載の表面調質焼結合金。
2. The surface layer is formed on at least two surfaces of the sintered alloy, and the surface layer formed on one surface of the sintered alloy and the surface formed on another surface of the sintered alloy. The surface-tempered sintered alloy according to claim 1, wherein different refractory metal compounds are present in the layer.
【請求項3】 請求項1又は2に記載の表面調質焼結合
金の1部の面又は全面に周期律表の4a,5a,6a族
の金属の炭化物,窒化物,炭酸化物,窒酸化物、Alの
酸化物,窒化物、Siの炭化物,窒化物及びこれらの相
互固溶体、ダイヤモンド、ダイヤモンド状カーボン、立
方晶窒化ホウ素の中の少なくとも1種の単層もしくは多
層でなる被膜を被覆したことを特徴とする表面調質焼結
合金。
3. A carbide, a nitride, a carbonate, a nitrous oxide of a metal of group 4a, 5a, 6a of the periodic table on a part or all of the surface-tempered sintered alloy according to claim 1 or 2. A single layer or a multi-layer coating of at least one of the following: an oxide, an Al oxide, a nitride, a Si carbide, a nitride and their mutual solid solutions, diamond, diamond-like carbon, and cubic boron nitride. Surface refined sintered alloy characterized by.
【請求項4】 周期律表の4a,5a,6a族の金属、
Ni,Co,Fe,Al及びこれらの相互合金又はこれ
らの前駆体の中の少なくとも1種の結合相形成粉末に酸
化アルミニウム、又は酸化アルミニウム50体積%以上
と残り酸化ジルコニウム,部分安定化酸化ジルコニウ
ム,酸化ハフニウム,酸化クロム,酸化ケイ素,炭化ケ
イ素,窒化ケイ素,周期律表の4a,5a,6a族の金
属の炭化物,窒化物及びこれらの相互固溶体の中の少な
くとも1種とでなる硬質相形成粉末を加えて混合粉砕
し、混合粉末とする第1工程、該混合粉末を所定の形状
に成形して粉末圧粉体とする第2工程、該粉末圧粉体を
炭素,窒素,酸素,ホウ素,ケイ素の中の少なくとも1
種の拡散元素を含む化合物に接触もしくは付着、あるい
は該拡散元素を含むガス雰囲気中に設置して1400〜
1900℃に加熱する第3工程を経て請求項1又は2記
載の表面調質焼結合金を作製することを特徴とする表面
調質焼結合金の製造方法。
4. A metal of group 4a, 5a, 6a of the periodic table,
Aluminum oxide, or 50% by volume or more of aluminum oxide and remaining zirconium oxide, partially stabilized zirconium oxide, in at least one binder phase forming powder of Ni, Co, Fe, Al and their mutual alloys or their precursors. Hard phase forming powder consisting of hafnium oxide, chromium oxide, silicon oxide, silicon carbide, silicon nitride, carbides and nitrides of metals of groups 4a, 5a and 6a of the periodic table, and at least one of these mutual solid solutions Is added and mixed and pulverized to form a mixed powder, a second step of forming the mixed powder into a predetermined shape to obtain a powder compact, and the powder compact is carbon, nitrogen, oxygen, boron, At least 1 in silicon
1400 to be placed in contact with or attached to a compound containing a diffusion element of a seed, or installed in a gas atmosphere containing the diffusion element
A method for producing a surface-tempered sintered alloy, comprising producing the surface-tempered sintered alloy according to claim 1 or 2 through a third step of heating to 1900 ° C.
JP04337974A 1992-11-25 1992-11-25 Surface-finished sintered alloy and method for producing the same Expired - Fee Related JP3092887B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005087418A1 (en) * 2004-03-12 2005-09-22 Sanalloy Industry Co., Ltd. Sintered tool and method for production thereof
JP2014055325A (en) * 2012-09-12 2014-03-27 National Institute For Materials Science Alloy powder for antioxidation coating and alloy excellent in antioxidation property using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005087418A1 (en) * 2004-03-12 2005-09-22 Sanalloy Industry Co., Ltd. Sintered tool and method for production thereof
JP4726781B2 (en) * 2004-03-12 2011-07-20 サンアロイ工業株式会社 Sintered tool and its manufacturing method
JP2014055325A (en) * 2012-09-12 2014-03-27 National Institute For Materials Science Alloy powder for antioxidation coating and alloy excellent in antioxidation property using the same

Also Published As

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