JPH05186272A - Sintered boron nitride having composite high-density phase - Google Patents

Sintered boron nitride having composite high-density phase

Info

Publication number
JPH05186272A
JPH05186272A JP4020546A JP2054692A JPH05186272A JP H05186272 A JPH05186272 A JP H05186272A JP 4020546 A JP4020546 A JP 4020546A JP 2054692 A JP2054692 A JP 2054692A JP H05186272 A JPH05186272 A JP H05186272A
Authority
JP
Japan
Prior art keywords
layer
boron nitride
phase
nitrides
borides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP4020546A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Uchiumi
義之 内海
Masaki Kobayashi
正樹 小林
Yuji Katsumura
祐次 勝村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP4020546A priority Critical patent/JPH05186272A/en
Publication of JPH05186272A publication Critical patent/JPH05186272A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To enable a sintering process by hot-pressing or a hot hydrostatic treatment without using an ultrahigh-pressure press and to provide a sintered boron nitride containing composite high-density phase, having improved abrasion resistance, chipping resistance, toughness and impact resistance and producible at a low cost. CONSTITUTION:The objective sintered material contains >=10vol.% of a composite hard phase consisting of hard phase particles of cubic boron nitride and/or wurtzite-type boron nitride surface-coated with the 1st layer having mono or multilayer structure of at least one kind of material selected from nitride or boride of Ti, Zr, Hf, Al and Si or their solid solution and the 2nd layer having mono or multilayer structure of at least one kind of material selected from carbide, nitride, carbonate, oxynitride or boride of the group 4a, 5a or 6a metal of the periodic table or their solid solution. Each of the 1st and the 2nd layer has an average layer thickness of >=5Angstrom .

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、旋削工具,フライス工
具,ドリル,エンドミル等に代表される切削工具、又は
ダイス,切断刃等に代表される耐摩耗工具に適する複合
高密度相窒化ホウ素焼結体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a composite high density phase boron nitride firing suitable for a cutting tool represented by a turning tool, a milling tool, a drill, an end mill or the like, or a wear resistant tool represented by a die, a cutting blade or the like. Regarding union.

【0002】[0002]

【従来の技術】立方晶窒化ホウ素及びウルツ鉱型窒化ホ
ウ素は、六方晶窒化ホウ素に比べて高密度であることか
ら、高密度相窒化ホウ素と呼称されている。この高密度
相窒化ホウ素に金属及び/又はセラミックスの結合相を
介在させて、超高圧,高温で焼結した超高圧焼結材料が
実用されている。従来から実用されている超高圧焼結材
料は、主として高密度相窒化ホウ素の硬質相と結合相と
の比率、又は結合相の材質を調整することにより耐摩耗
性,靭性,強度及び耐熱衝撃性を高めるための検討が行
われている。
2. Description of the Related Art Cubic boron nitride and wurtzite boron nitride are called high-density phase boron nitride because they have a higher density than hexagonal boron nitride. An ultrahigh pressure sintered material obtained by sintering at a high pressure and a high temperature by interposing a binder phase of metal and / or ceramics in this high-density phase boron nitride has been put into practical use. Conventionally used ultra-high pressure sintered materials are mainly wear resistant, toughness, strength and thermal shock resistance by adjusting the ratio of hard phase to binder phase of high density phase boron nitride or the material of binder phase. Are being studied.

【0003】しかしながら、この従来の超高圧焼結材料
は、硬質相の粉末と結合相の粉末を混在させたものであ
ることから、結合相粒子間,硬質相粒子間及び硬質相粒
子と結合相粒子の粒界の結合が不充分になって、不完全
結合が欠陥として残存しやすくなること、このために、
硬質相と結合相との比率、又は結合相の材質を調整し、
耐摩耗性を高めようとすると、靭性,強度もしくは耐熱
衝撃性が低下すること、逆に靭性,強度もしくは耐熱衝
撃性を高めようとすると、耐摩耗性が低下するという問
題がある。この問題を解決したものとして、提案されて
いる代表的なものに、特開昭58−58247号公報,
特開昭58−60678号公報及び特開昭58−612
53号公報がある。
However, this conventional ultra-high pressure sintered material is a mixture of hard phase powder and binder phase powder, and therefore, between binder phase particles, between hard phase particles, and between hard phase particles and binder phase. The bond at the grain boundary of the particle becomes insufficient, and the incomplete bond is likely to remain as a defect.
Adjust the ratio of hard phase and binder phase, or the material of binder phase,
There is a problem that if the wear resistance is increased, the toughness, strength, or thermal shock resistance is lowered, and conversely, if the toughness, strength, or thermal shock resistance is increased, the wear resistance is decreased. A typical one proposed as a solution to this problem is Japanese Patent Laid-Open No. 58-58247.
JP-A-58-60678 and JP-A-58-612.
There is a 53 publication.

【0004】[0004]

【発明が解決しようする課題】特開昭58−58247
号公報には、立方晶窒化ホウ素にTi,Hf,Zr及び
Moの1種以上のホウ化物と炭化物とでなる結合相を含
有した組成で、かつ0.1〜2μmの平均層厚でなる該
ホウ化物が立方晶窒化ホウ素を包囲した組織になってい
る切削及び耐摩耗工具用高靭性窒化ホウ素基超高圧焼結
材料が記載されている。
Problems to be Solved by the Invention JP-A-58-58247
Japanese Patent Laid-Open Publication No. Heisei 7-27242 discloses that cubic boron nitride has a composition containing a binder phase composed of at least one boride of Ti, Hf, Zr and Mo and a carbide and has an average layer thickness of 0.1 to 2 μm. A high toughness boron nitride based ultra high pressure sintered material for cutting and wear resistant tools is described in which the boride has a structure surrounding cubic boron nitride.

【0005】また、特開昭58−60678号公報に
は、立方晶窒化ホウ素にTi,Hf及びSiの1種以上
の窒化物と炭化物とでなる結合相を含有した組成で、か
つ0.1〜2μmの平均層厚でなる該窒化物が立方晶窒
化ホウ素を包囲した組織になっている切削及び耐摩耗工
具用高靭性窒化ホウ素基超高圧焼結材料が記載されてい
る。
Further, Japanese Patent Application Laid-Open No. 58-60678 discloses that cubic boron nitride has a composition containing a binder phase composed of one or more nitrides of Ti, Hf and Si and a carbide, and 0.1%. A high toughness boron nitride based ultra high pressure sintered material for cutting and wear resistant tools is described in which the nitride having an average layer thickness of ˜2 μm has a structure surrounding cubic boron nitride.

【0006】さらに、特開昭58−61253号公報に
は、立方晶窒化ホウ素にAlと、Alの酸化物及び窒化
物の1種又は2種とを含有した組成で、かつ0.1〜1
μmの平均層厚でなるAl、もしくはAlとAlの酸化
物及び窒化物の1種又は2種とが立方晶窒化ホウ素を包
囲した組織になっている切削及び耐摩耗工具用高靭性窒
化ホウ素基超高圧焼結材料が記載されている。
Further, Japanese Patent Application Laid-Open No. 58-61253 discloses that cubic boron nitride has a composition containing Al and one or two kinds of Al oxides and nitrides, and has a composition of 0.1-1.
High toughness boron nitride base for cutting and wear resistant tools having a structure in which Al having an average layer thickness of μm or Al and one or two of Al oxide and nitride are surrounded by cubic boron nitride. Ultra high pressure sintered materials are described.

【0007】これらの公報に記載されている超高圧焼結
材料は、従来の超高圧焼結材料における硬質相粒子間,
結合相粒子間及び硬質相粒子と結合相粒子の粒界に存在
していたマイクロポアや未結合の欠陥が立方晶窒化ホウ
素を包囲した被膜により解消されて、耐摩耗性と靭性を
兼ね備え、切削試験においても優れた耐欠損性を有し、
かつ高硬度で,耐熱性及び高温強度にも優れているとい
うものである。しかしながら、これらの公報に記載され
ている超高圧焼結材料は、従来と同様に、超高圧装置を
用いて40kb以上の圧力、1200℃以上の温度で焼
結したもので、量産化が困難であること、大型形状品の
製造が困難であること、及び製造コストが高くなるとい
う問題があること、また、材料的には、被膜の厚さと被
膜材質から、被膜内欠陥が生じやすいこと、及び被膜と
被膜を除いた他の結合相との界面、もしくは被膜と被膜
との界面に欠陥を生じやすく、被膜を形成する工程を加
えて製造コストが高くなる割には寿命の向上がみられな
いという問題がある。
The ultra-high pressure sintered materials described in these publications are the same as those used in conventional ultra-high pressure sintered materials.
Micropores and unbonded defects that existed between the binder phase particles and at the grain boundaries between the hard phase particles and the binder phase particles are eliminated by the coating that surrounds the cubic boron nitride, and has both wear resistance and toughness, and cutting. Has excellent fracture resistance even in tests,
In addition, it has high hardness and excellent heat resistance and high temperature strength. However, the ultra-high pressure sintered materials described in these publications are sintered by using an ultra-high pressure apparatus at a pressure of 40 kb or more and a temperature of 1200 ° C. or more, as in the prior art, and thus it is difficult to mass-produce them. That is, there is a problem that it is difficult to manufacture a large-sized product, and that the manufacturing cost is high, and in terms of material, the film thickness and the film material easily cause defects in the film, and Defects tend to occur at the interface between the coating and other binder phases other than the coating, or at the interface between the coating and the coating, and the manufacturing cost is increased by adding the coating formation process, but the life is not improved. There is a problem.

【0008】本発明は、上述のような問題点を解決した
もので、具体的には、立方晶窒化ホウ素及び/又はウル
ツ鉱型窒化ホウ素でなる硬質相の粒子の表面に、ホット
プレス(HP)又は熱間静水圧(HIP)処理条件であ
っても硬質相が六方晶窒化ホウ素へ逆変換しないような
被膜を形成し、かつ被膜による欠陥も生じないようにし
て、耐摩耗性,耐欠損性,靭性,及び耐衝撃性を高めた
複合高密度相窒化ホウ素焼結体の提供を目的とする。
The present invention solves the above-mentioned problems, and more specifically, hot pressing (HP) is applied to the surface of hard phase particles made of cubic boron nitride and / or wurtzite type boron nitride. ) Or hot isostatic pressure (HIP) treatment conditions to form a coating that prevents the hard phase from being converted back into hexagonal boron nitride, and to prevent defects caused by the coating, resulting in wear resistance and chipping resistance. An object of the present invention is to provide a composite high-density phase boron nitride sintered body having improved toughness, toughness, and impact resistance.

【0009】[0009]

【課題を解決するための手段】本発明者らは、立方晶窒
化ホウ素及び/又はウルツ鉱型窒化ホウ素でなる硬質相
と、金属及び/又はセラミックスの結合相とでなる高密
度相窒化ホウ素焼結体の低廉価と、かつ諸特性の向上に
ついて検討していた所、高密度相窒化ホウ素の粒子表面
に膜質及び膜厚を選定し、緻密な被膜を形成すると、H
P又はHIP処理条件において、高密度相窒化ホウ素か
ら六方晶窒化ホウ素への逆変換が生じ難くなること、か
つ被膜厚さを制御すると得られる焼結体の諸特性が向上
するという知見を得た。本発明は、この知見に基づいて
完成するに至ったものである。
DISCLOSURE OF THE INVENTION The present inventors have found that a dense phase boron nitride firing consisting of a hard phase made of cubic boron nitride and / or wurtzite type boron nitride and a binder phase of metal and / or ceramics. As a result of studying the low cost of the aggregate and the improvement of various properties, if a film quality and a film thickness are selected on the particle surface of the high-density phase boron nitride and a dense film is formed, H
It was found that under P or HIP treatment conditions, reverse conversion of high-density phase boron nitride to hexagonal boron nitride is less likely to occur, and that various properties of the obtained sintered body are improved by controlling the film thickness. .. The present invention has been completed based on this finding.

【0010】本発明の複合高密度相窒化ホウ素焼結体
は、立方晶窒化ホウ素及び/又はウルツ鉱型窒化ホウ素
の硬質相の粒子表面がTi,Zr,Hf,Al,Siの
窒化物,ホウ化物及びこれらの相互固溶体の中の少なく
とも1種の単層又は多層の第1層と、該第1層の表面に
周期律表の4a,5a,6a族金属の炭化物,窒化物,
炭酸化物,窒酸化物,ホウ化物及び酸化アルミニウム,
酸窒化アルミニウム並びにこれらの相互固溶体(但し、
Ti,Zr,Hfの窒化物,ホウ化物及びこれらの相互
固溶体は、除く。)の中の少なくとも1種の単層又は多
層の第2層とでなる被膜で囲繞された複合硬質相を10
体積%以上含有した焼結体であって、該第1層及び該第
2層がそれぞれ平均層厚さ5Å以上でなることを特徴と
するものである。
In the composite high-density phase boron nitride sintered body of the present invention, the grain surface of the hard phase of cubic boron nitride and / or wurtzite type boron nitride is nitride of Ti, Zr, Hf, Al, Si, or boron. A single layer or a multi-layer first layer of at least one of these compounds and their mutual solid solutions, and a carbide, nitride of a metal of group 4a, 5a, 6a of the periodic table on the surface of the first layer,
Carbonates, oxynitrides, borides and aluminum oxides,
Aluminum oxynitride and their mutual solid solutions (however,
Ti, Zr, Hf nitrides, borides, and mutual solid solutions thereof are excluded. 10) a composite hard phase surrounded by a coating consisting of at least one monolayer or a multi-layered second layer in 10).
A sintered body containing at least volume% is characterized in that the first layer and the second layer each have an average layer thickness of 5Å or more.

【0011】本発明の焼結体における第1層及は、具体
的には、例えばTiN,ZrN,HfN,AlN,Si
34,TiB2,ZrB2,HfB2,Al 2,Al
12,Ti(B,N),Zr(B,N),Hf(B,
N),Al(B,N),(Ti,Zr)N,(Ti,Z
r,Hf)N,(Ti,Al)N,(Ti,Al)
(B,N),(Al,Si)Nを挙げることができる。
この第1層が平均層厚さ5Å未満でなると、硬質相の六
方晶窒化ホウ素への逆変換の抑制作用が低下すること、
及び第1層の表面に囲繞される第2層の密着性が劣る。
特に、第1層が平均層厚さ50〜1000Åでなると、
上述の逆変換の抑制作用,第1層と第2層との密着性及
び第1層内の耐剥離性の点から好ましい。
The first layer and the second layer in the sintered body of the present invention are
Specifically, for example, TiN, ZrN, HfN, AlN, Si
3NFour, TiB2, ZrB2, HfB2, Al B2, Al
B12, Ti (B, N), Zr (B, N), Hf (B,
N), Al (B, N), (Ti, Zr) N, (Ti, Z
r, Hf) N, (Ti, Al) N, (Ti, Al)
(B, N) and (Al, Si) N can be mentioned.
If the first layer has an average layer thickness of less than 5Å, the hard phase
The effect of suppressing the reverse conversion to tetragonal boron nitride is reduced,
And the adhesiveness of the second layer surrounded by the surface of the first layer is poor.
In particular, when the first layer has an average layer thickness of 50 to 1000Å,
The above-mentioned function of suppressing the reverse transformation, the adhesion between the first layer and the second layer, and
And from the viewpoint of peeling resistance in the first layer.

【0012】また、第1層の表面に囲繞される第2層
は、具体的には、例えばTiC,ZrC,HfC,V
C,NbC,TaC,WC,Mo2C,Cr32,V
N,NbN,TaN,CrN,Ti(C,N),Ti
(N,O),Ti(C,O),Ti(C,N,O),
(Ti,Ta)C,(Ti,Ta)(C,N),(T
i,V)(C,O),(Ti,Nb)(N,O),(T
i,Zr)(C,N,O),(Ti,W)C,(Ti,
W)(C,N),(Ti,Mo)(C,O),(Ti,
Mo)(C,N,O),Al23,Al(O,N),
(Al,Ti)(N,O)を挙げることができる。この
第2層が平均層厚さ5Å未満でなると、耐欠損性及び耐
酸化性の低下,並びに硬質相の六方晶窒化ホウ素への逆
変換の抑制作用が低下する。特に、第2層が平均層厚さ
50〜1000Åでなると、上述の逆変換の抑制作用及
び第2層内の耐剥離性の点から好ましい。
The second layer surrounded by the surface of the first layer is specifically, for example, TiC, ZrC, HfC, V.
C, NbC, TaC, WC, Mo 2 C, Cr 3 C 2 , V
N, NbN, TaN, CrN, Ti (C, N), Ti
(N, O), Ti (C, O), Ti (C, N, O),
(Ti, Ta) C, (Ti, Ta) (C, N), (T
i, V) (C, O), (Ti, Nb) (N, O), (T
i, Zr) (C, N, O), (Ti, W) C, (Ti,
W) (C, N), (Ti, Mo) (C, O), (Ti,
Mo) (C, N, O), Al 2 O 3 , Al (O, N),
(Al, Ti) (N, O) can be mentioned. When the second layer has an average layer thickness of less than 5Å, the fracture resistance and the oxidation resistance are lowered, and the effect of suppressing the reverse conversion of the hard phase to hexagonal boron nitride is lowered. In particular, when the second layer has an average layer thickness of 50 to 1000Å, it is preferable in terms of the above-described effect of suppressing the reverse conversion and the peeling resistance in the second layer.

【0013】この第1層と第2層とでなる被膜は、それ
ぞれの平均層厚さが5Å以上からなるもので、特に、1
00Å〜2000Åの平均層厚さでなる場合が上述の理
由から好ましい。また、この被膜は、硬質相粒子表面か
ら被膜内部へ向って組成成分が変化した、所謂、傾斜組
成にすると、硬質相粒子と被膜との界面及び被膜内の粒
界における密着強度が高くなり好ましいことである。被
膜内における傾斜組成は、具体的には、例えば、硬質相
粒子表面の近傍がB及び/又はN元素の含有量の多い非
化学量論組成であって、被膜内部及び被膜外部へ向かう
ほどB及び/又はN元素の含有量の少ない非化学量論組
成でなっている場合が特に被膜の強度上から好ましい。
The coating composed of the first layer and the second layer has an average layer thickness of 5 Å or more.
The case where the average layer thickness is 00Å to 2000Å is preferable for the above reason. In addition, this coating is preferable in that the composition components are changed from the surface of the hard phase particles toward the inside of the coating, that is, when the composition is a so-called gradient composition, the adhesion strength at the interface between the hard phase particles and the coating and at the grain boundaries in the coating becomes high, which is preferable. That is. Specifically, the gradient composition in the coating is, for example, a non-stoichiometric composition having a large content of B and / or N elements in the vicinity of the hard phase particle surface, and B toward the inside and the outside of the coating. And / or a non-stoichiometric composition containing a small amount of N element is particularly preferable from the viewpoint of the strength of the film.

【0014】本発明の焼結体における結合相は、具体的
には、例えばTiC,ZrC,HfC,VC,NbC,
TaC,WC,Mo2C,Cr32,SiC,TiN,
ZrN,VN,NbN,TaN,CrN,AlN,Si
34,Fe3C,TiO2,Ta25,Al23,SiO
2,NiO,CoO,TiB2,TaB2,WB,Al
2,Y23,YN,Dy23,CeO,(Ti,Z
r)C,(Ti,Ta)C,(Ti,Ta,Nb)C,
(Ti,W)C,(Ti,Ta,W)C,Ti(C,
N),Ti(N,O),Ti(C,O),Ti(C,
N,O),(Si,Al)(O,N),Fe,Ni,C
o,(Fe,Ni)合金,(Ni,Co)合金,(F
e,Co)合金,(Fe,Ni,Co)合金を挙げるこ
とができる。この結合相は、結合相の10〜75体積%
が、周期律表の4a,5a,6a族金属,Ai,Siの
炭化物,窒化物,酸化物,ホウ化物及びこれらの相互固
溶体の中の少なくとも1種のウイスカーからなる場合、
具体的には、例えばTiC,ZrC,TaC,WC,S
iC,TiN,TaN,AlN,Si34,TiO2
Al23,TiB2,AlB2,Ti(C,N),のウイ
スカーでなる場合には、焼結体の強度及び靭性が高くな
るので特に好ましいことである。また、焼結体中に含有
させるウイスカーは、平均太さ0.003〜3μm,平
均長さ0.01〜300μm,アスペクト比3以上から
なる場合に焼結体内のクラックの伝播抑制効果が高く、
高靭性及び高強度焼結体が得られやすいことから、特に
好ましい。
The binder phase in the sintered body of the present invention is specifically, for example, TiC, ZrC, HfC, VC, NbC,
TaC, WC, Mo 2 C, Cr 3 C 2 , SiC, TiN,
ZrN, VN, NbN, TaN, CrN, AlN, Si
3 N 4 , Fe 3 C, TiO 2 , Ta 2 O 5 , Al 2 O 3 , SiO
2 , NiO, CoO, TiB 2 , TaB 2 , WB, Al
B 2 , Y 2 O 3 , YN, Dy 2 O 3 , CeO, (Ti, Z
r) C, (Ti, Ta) C, (Ti, Ta, Nb) C,
(Ti, W) C, (Ti, Ta, W) C, Ti (C,
N), Ti (N, O), Ti (C, O), Ti (C,
N, O), (Si, Al) (O, N), Fe, Ni, C
o, (Fe, Ni) alloy, (Ni, Co) alloy, (F
e, Co) alloy and (Fe, Ni, Co) alloy. The binder phase is 10 to 75% by volume of the binder phase.
Is a whisker of at least one of 4a, 5a, 6a group metals of the periodic table, Ai, Si carbides, nitrides, oxides, borides and mutual solid solutions thereof.
Specifically, for example, TiC, ZrC, TaC, WC, S
iC, TiN, TaN, AlN, Si 3 N 4 , TiO 2 ,
When the whiskers of Al 2 O 3 , TiB 2 , AlB 2 , and Ti (C, N) are used, the strength and toughness of the sintered body are increased, which is particularly preferable. When the whiskers contained in the sintered body have an average thickness of 0.003 to 3 μm, an average length of 0.01 to 300 μm, and an aspect ratio of 3 or more, the effect of suppressing crack propagation in the sintered body is high,
It is particularly preferable because a high toughness and high strength sintered body is easily obtained.

【0015】本発明の焼結体は、立方晶窒化ホウ素及び
/又はウルツ鉱型窒化ホウ素の粉末の表面に、例えば化
学蒸着法(CVD法),物理蒸着法(PVD法)又は湿
式メッキによって被膜を形成した出発物質を用いて、非
酸化性雰囲気でのホットプレス(HP),熱間静水圧処
理(HIP)もしくは従来の超高圧装置でもって焼結す
ることにより作製することができる。また、結合相の含
有した焼結体の場合は、結合相となる物質と上述の被膜
の形成された窒化ホウ素の粉末を、従来の粉末冶金法に
よって処理し、上述の方法でもって焼結することにより
作製することができる。
The sintered body of the present invention is coated on the surface of cubic boron nitride and / or wurtzite type boron nitride powder by, for example, chemical vapor deposition (CVD), physical vapor deposition (PVD) or wet plating. It can be produced by using the starting material having the above-mentioned structure and sintering it by hot pressing (HP) in a non-oxidizing atmosphere, hot isostatic pressing (HIP), or a conventional ultrahigh pressure apparatus. Further, in the case of a sintered body containing a binder phase, the substance of the binder phase and the above-mentioned film-formed boron nitride powder are treated by a conventional powder metallurgy method and sintered by the above method. It can be produced by

【0016】[0016]

【作用】本発明の焼結体は、硬質相の表面を囲繞した被
膜が焼結過程時に、硬質相の六方晶窒化ホウ素への逆変
換を阻止する作用をし、焼結後には、硬質相相互間を緻
密に結合する作用をしている。また、結合相を含有した
本発明の焼結体の場合は、周期律表の4a,5a,6a
族金属,Al,Si,Fe,Ni,Coの炭化物,窒化
物,酸化物,ホウ化物及びこれらの相互固溶体の中の少
なくとも1種の結合相が焼結体の高温化学的安定性,耐
摩耗性及び耐溶着性を向上させる作用をし、希土類金属
の酸化物,窒化物及びこれらの相互固溶体の中の少なく
とも1種の結合相が焼結体内のマイクロポアを消滅させ
て焼結体の緻密化促進作用をし、ウイスカーがクラック
の伝播阻止作用をし、Co,Ni,Feが靭性及び強度
を向上させる作用をしているものである。
In the sintered body of the present invention, the coating surrounding the surface of the hard phase acts to prevent the hard phase from being converted back into hexagonal boron nitride during the sintering process. It has the function of closely coupling each other. Further, in the case of the sintered body of the present invention containing a binder phase, 4a, 5a, 6a of the periodic table are used.
At least one binder phase among group metals, carbides, nitrides, oxides, borides of Al, Si, Fe, Ni, Co and their mutual solid solutions has high temperature chemical stability and wear resistance of the sintered body. Of the rare earth metal oxides and nitrides and at least one binder phase among the mutual solid solutions of these rare earth metals eliminates the micropores in the sintered body and makes the sintered body dense. The whiskers act to prevent crack propagation, and Co, Ni, and Fe act to improve toughness and strength.

【0017】[0017]

【実施例1】表1に示した市販の立方晶窒化ホウ素(C
BN)粉末を用いて、CBN粉末の表面に、従来から行
われているCVD処理により表1に併記した被膜を被覆
し、複合CBN粉末を作製した。この複合CBN粉末を
粉末圧粉体とした後、(2種類の複合CBN粉末を用い
た試料は、よく混合し)表1に併記した焼結条件で焼結
し、本発明品1〜3を得た。
Example 1 Commercially available cubic boron nitride (C
BN) powder was used to coat the surface of the CBN powder with the coating shown in Table 1 by the conventional CVD treatment to produce a composite CBN powder. After the composite CBN powder was made into a powder compact, (the samples using the two kinds of composite CBN powders were well mixed) and sintered under the sintering conditions shown in Table 1 to obtain the products 1 to 3 of the present invention. Obtained.

【0018】比較に、表1に併記した複合CBN粉末を
作製し、これを表1に併記した条件で焼結し、比較品1
〜3を得た。
For comparison, a composite CBN powder shown in Table 1 was prepared and sintered under the conditions shown in Table 1 to give a comparative product 1.
~ 3 was obtained.

【0019】こうして得た本発明品1〜3及び比較品1
〜3の破壊靭性値を測定し、その結果を表1に併記し
た。表1中の膜質の欄に示した,は、の被膜を被
覆した後、の表面にの被膜を被覆した。
Inventive products 1 to 3 and comparative product 1 thus obtained
The fracture toughness values of ~ 3 were measured, and the results are also shown in Table 1. In the column of film quality in Table 1, after coating the film of, the surface of was coated with the film of.

【0020】[0020]

【表1】 [Table 1]

【0021】[0021]

【実施例2】実施例1と同様にして表2に示した複合C
BN粉末を得た。表2の複合CBN粉末と表3に示した
結合相形成用粉末とを加えて、本発明品4〜6を得た。
Example 2 Composite C shown in Table 2 as in Example 1
BN powder was obtained. The composite CBN powders in Table 2 and the binder phase forming powders shown in Table 3 were added to obtain Products 4 to 6 of the present invention.

【0022】配合組成は、本発明品4が52.03vo
l%複合CBN粉末と残り結合相形成用粉末、本発明品
5が65.57vol%複合CBN粉末と残り結合相形
成用粉末、本発明品6が35.37vol%複合CBN
粉末と残り結合相形成用粉末とした。この配合組成のも
のを表4に示した焼結条件でもって焼結し、本発明品4
〜6を得た。
The compounding composition of the present invention product 4 is 52.03 vo
1% composite CBN powder and residual binder phase forming powder, the product 5 of the present invention is 65.57 vol% composite CBN powder and residual binder phase forming powder, product 6 of the present invention is 35.37 vol% composite CBN
The powder and the remaining binder phase forming powder were used. The compound of this composition was sintered under the sintering conditions shown in Table 4 to obtain the product 4 of the present invention.
~ 6 was obtained.

【0023】こうして得た本発明品4〜6と市販のCB
N焼結体の2種類(超高圧製品)をそれぞれ比較品4,
5とし、それぞれの破壊靭性値を求めて表4に併記し
た。
The products 4 to 6 of the present invention thus obtained and commercially available CB
Two types of N sintered body (ultra high pressure product) are used for comparison 4,
5, and the fracture toughness values of the respective samples were calculated and shown in Table 4.

【0024】[0024]

【表2】 [Table 2]

【0025】[0025]

【表3】 [Table 3]

【0026】[0026]

【表4】 [Table 4]

【0027】[0027]

【発明の効果】ホットプレス又は熱間静水圧処理でもっ
て焼結できるようになった高密度相窒化ホウ素焼結体で
あって、低廉化が達成できたという効果及び焼結体の破
壊靭性値が従来の高密度相窒化ホウ素焼結体又は本発明
品から外れた比較の焼結体に比べて約27〜102%も
向上するという効果がある。
EFFECTS OF THE INVENTION A high-density phase boron nitride sintered body capable of being sintered by hot pressing or hot isostatic pressing, which is an effect that cost reduction can be achieved and a fracture toughness value of the sintered body. However, there is an effect that it is improved by about 27 to 102% as compared with the conventional high density phase boron nitride sintered body or the comparative sintered body deviated from the product of the present invention.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 立方晶窒化ホウ素及び/又はウルツ鉱型
窒化ホウ素の硬質相の粒子表面がTi,Zr,Hf,A
l,Siの窒化物,ホウ化物及びこれらの相互固溶体の
中の少なくとも1種の単層又は多層の第1層と、該第1
層の表面に周期律表の4a,5a,6a族金属の炭化
物,窒化物,炭酸化物,窒酸化物,ホウ化物及び酸化ア
ルミニウム,酸窒化アルミニウム並びにこれらの相互固
溶体(但し、Ti,Zr,Hfの窒化物,ホウ化物及び
これらの相互固溶体は除く。)中の少なくとも1種の単
層又は多層の第2層とでなる被膜で囲繞された複合硬質
相を10体積%以上含有した焼結体であって、該第1層
及び該第2層がそれぞれ平均層厚さ5Å以上でなること
を特徴とする複合高密度相窒化ホウ素焼結体。
1. The surface of particles of the hard phase of cubic boron nitride and / or wurtzite type boron nitride is Ti, Zr, Hf, A.
a single-layer or multi-layer first layer of at least one of N, Si nitrides, borides and mutual solid solutions thereof;
On the surface of the layer, carbides, nitrides, carbonates, oxynitrides, borides and aluminum oxides of group 4a, 5a and 6a metals of the periodic table, aluminum oxynitride and mutual solid solutions thereof (however, Ti, Zr, Hf are included). , Nitrides and borides thereof, and mutual solid solutions thereof), and a sintered body containing at least 10% by volume of a composite hard phase surrounded by a coating consisting of at least one single layer or a second layer of multiple layers in A composite high-density phase boron nitride sintered body, wherein the first layer and the second layer each have an average layer thickness of 5Å or more.
【請求項2】 立方晶窒化ホウ素及び/又はウルツ鉱型
窒化ホウ素の硬質相の粒子表面がTi,Zr,Hf,A
l,Siの窒化物,ホウ化物及びこれらの相互固溶体の
中の少なくとも1種の単層又は多層の第1層と、該第1
層の表面に周期律表の4a,5a,6a族金属の炭化
物,窒化物,炭酸化物,窒酸化物,ホウ化物及び酸化ア
ルミニウム,酸窒化アルミニウム並びにこれらの相互固
溶体(但し、Ti,Zr,Hfの窒化物,ホウ化物及び
これらの相互固溶体は、除く。)中の少なくとも1種の
単層又は多層の第2層とでなる被膜で囲繞された複合硬
質相を10体積%以上と残り結合相と不可避不純物とか
らなる焼結体であって、該第1層及び該第2層がそれぞ
れ平均層厚さ5Å以上でなり、かつ該結合相が周期律表
の4a,5a,6a族金属,Al,Si,Fe,Ni,
Coの炭化物,窒化物,酸化物,ホウ化物,希土類金属
の酸化物,窒化物及びこれらの相互固溶体、又はFe,
Ni,Coの中の少なくとも1種からなることを特徴と
する複合高密度相窒化ホウ素焼結体。
2. The surface of the particles of the hard phase of cubic boron nitride and / or wurtzite type boron nitride is Ti, Zr, Hf, A.
a single-layer or multi-layer first layer of at least one of N, Si nitrides, borides and mutual solid solutions thereof;
On the surface of the layer, carbides, nitrides, carbonates, oxynitrides, borides and aluminum oxides of groups 4a, 5a and 6a of the periodic table, aluminum oxynitride and their mutual solid solutions (however, Ti, Zr, Hf Of nitrides, borides, and mutual solid solutions thereof, except for 10% by volume or more of the composite hard phase surrounded by a film consisting of at least one single layer or a second layer of multiple layers in And an unavoidable impurity, wherein the first layer and the second layer each have an average layer thickness of 5Å or more, and the binder phase is a group 4a, 5a, 6a metal of the periodic table, Al, Si, Fe, Ni,
Co carbide, nitride, oxide, boride, rare earth metal oxide, nitride and mutual solid solution thereof, or Fe,
A composite high density phase boron nitride sintered body comprising at least one of Ni and Co.
【請求項3】 上記結合相は、該結合相の10〜75体
積%が周期律表の4a,5a,6a族金属,Al,Si
の炭化物,窒化物,酸化物,ホウ化物及びこれらの相互
固溶体の中の少なくとも1種のウイスカーからなること
を特徴とする請求項2記載の複合高密度相窒化ホウ素焼
結体。
3. In the binder phase, 10 to 75% by volume of the binder phase is 4a, 5a, 6a group metal, Al, Si of the periodic table.
3. The composite high density phase boron nitride sintered body according to claim 2, comprising at least one kind of whiskers among the carbides, nitrides, oxides, borides, and mutual solid solutions thereof.
JP4020546A 1992-01-09 1992-01-09 Sintered boron nitride having composite high-density phase Withdrawn JPH05186272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4020546A JPH05186272A (en) 1992-01-09 1992-01-09 Sintered boron nitride having composite high-density phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4020546A JPH05186272A (en) 1992-01-09 1992-01-09 Sintered boron nitride having composite high-density phase

Publications (1)

Publication Number Publication Date
JPH05186272A true JPH05186272A (en) 1993-07-27

Family

ID=12030155

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998024736A1 (en) * 1996-12-03 1998-06-11 Sumitomo Electric Industries, Ltd. High-pressure phase boron nitride base sinter
EP0709353A3 (en) * 1994-10-27 1998-10-28 Sumitomo Electric Industries, Limited Hard composite material for tools
EP0974566A1 (en) * 1998-07-22 2000-01-26 Sumitomo Electric Industries, Ltd. Cubic boron nitride sintered body
EP1006092A1 (en) * 1998-12-04 2000-06-07 Sumitomo Electric Industries, Ltd. High strength sintered body
JP2002329774A (en) * 2001-04-27 2002-11-15 Kyocera Corp Wafer support member
US6635593B1 (en) 1999-02-12 2003-10-21 Sumitomo Electric Industries, Ltd. High strength sintered impact having excellent resistance to cratering
JP2014147988A (en) * 2013-01-31 2014-08-21 Mitsubishi Materials Corp Cutting tool made of cubic boron nitride-based sintered material
JP2014233767A (en) * 2013-05-30 2014-12-15 三菱マテリアル株式会社 Cubic boron nitride sinter body cutting tool excellent in crack resistance

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0709353A3 (en) * 1994-10-27 1998-10-28 Sumitomo Electric Industries, Limited Hard composite material for tools
WO1998024736A1 (en) * 1996-12-03 1998-06-11 Sumitomo Electric Industries, Ltd. High-pressure phase boron nitride base sinter
US6008153A (en) * 1996-12-03 1999-12-28 Sumitomo Electric Industries, Ltd. High-pressure phase boron nitride base sinter
EP0974566A1 (en) * 1998-07-22 2000-01-26 Sumitomo Electric Industries, Ltd. Cubic boron nitride sintered body
US6316094B1 (en) 1998-07-22 2001-11-13 Sumitomo Electric Industries, Ltd. Cubic boron nitride sintered body
EP1006092A1 (en) * 1998-12-04 2000-06-07 Sumitomo Electric Industries, Ltd. High strength sintered body
KR100614536B1 (en) * 1998-12-04 2006-08-22 스미토모덴키고교가부시키가이샤 Sintered Body Having High Strength
US6635593B1 (en) 1999-02-12 2003-10-21 Sumitomo Electric Industries, Ltd. High strength sintered impact having excellent resistance to cratering
JP2002329774A (en) * 2001-04-27 2002-11-15 Kyocera Corp Wafer support member
JP4683759B2 (en) * 2001-04-27 2011-05-18 京セラ株式会社 Wafer support member and manufacturing method thereof
JP2014147988A (en) * 2013-01-31 2014-08-21 Mitsubishi Materials Corp Cutting tool made of cubic boron nitride-based sintered material
JP2014233767A (en) * 2013-05-30 2014-12-15 三菱マテリアル株式会社 Cubic boron nitride sinter body cutting tool excellent in crack resistance

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