JPH0615404B2 - High-purity aluminum nitride powder and method for producing the same - Google Patents
High-purity aluminum nitride powder and method for producing the sameInfo
- Publication number
- JPH0615404B2 JPH0615404B2 JP1318297A JP31829789A JPH0615404B2 JP H0615404 B2 JPH0615404 B2 JP H0615404B2 JP 1318297 A JP1318297 A JP 1318297A JP 31829789 A JP31829789 A JP 31829789A JP H0615404 B2 JPH0615404 B2 JP H0615404B2
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- Prior art keywords
- aluminum nitride
- less
- purity
- content
- weight
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0728—After-treatment, e.g. grinding, purification
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- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crushing And Grinding (AREA)
- Ceramic Products (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、焼結性に優れ、焼結助剤を必ずしも必要とせ
ずに低温で焼結することができる高純度窒化アルミニウ
ム粉末に関する。TECHNICAL FIELD The present invention relates to a high-purity aluminum nitride powder which has excellent sinterability and can be sintered at a low temperature without necessarily requiring a sintering aid.
従来の技術及び発明が解決しようとする課題 窒化アルミニウム（AlN）は理論的には酸化ベリリウム
（ＢｅＯ）に匹敵する３００Ｗ／ｍ・Ｋの高熱伝導率を
有し、また絶縁性、誘電性などの電気的性質にも優れて
いることから、高熱伝導性基板材料，放熱部品材料等の
電子工業用材料として注目されている。Conventional technology and problems to be solved by the invention Aluminum nitride (AlN) theoretically has a high thermal conductivity of 300 W / m · K, which is comparable to that of beryllium oxide (BeO), and also has high insulation and dielectric properties. Due to its excellent electrical properties, it has attracted attention as a material for the electronic industry such as high thermal conductivity substrate materials and heat dissipation component materials.
かかる窒化アルミニウムを用いて電子工業用部材等を製
造する場合、粉末状の窒化アルミニウムを加圧成型する
と共に、これを焼結することにより、所望形状の成形焼
結体を得る方法が採用されている。しかし、従来の窒化
アルミニウムの製造方法としては、金属アルミニウムを
窒素中で窒化する方法（特悔昭６１−１５８８０５号公
報等）が一般的に知られているが、この方法により得ら
れた窒化アルミニウム粉末は粒度が大きく、このため焼
結性に劣り、これを焼結して高精度の焼結体を得るため
には、Y2O3等の焼結助剤を添加し、１８００〜１９００
℃という高温下で処理する必要があり、量産性，製造コ
スト等の点で汎用されているアルミナの焼結体に比べて
劣るものである。When manufacturing a member for electronic industry and the like using such aluminum nitride, a method of obtaining a molded sintered body of a desired shape by pressure-molding powdery aluminum nitride and sintering this is adopted. There is. However, as a conventional method for producing aluminum nitride, a method of nitriding metallic aluminum in nitrogen (Japanese Patent Publication No. 61-158805, etc.) is generally known, and the aluminum nitride obtained by this method is known. The powder has a large particle size and therefore is inferior in sinterability. In order to sinter this and obtain a highly accurate sintered body, a sintering aid such as Y 2 O 3 is added, and 1800 to 1900
Since it needs to be processed at a high temperature of ℃, it is inferior to the commonly used alumina sintered body in terms of mass productivity and manufacturing cost.
そこで、このような窒化アルミニウム粉末を粉砕機を用
い、微粉砕してその粒度を小さくすることが考えられる
が、この際、粉砕工程中に酸素等の不純物が混入し、純
度の点で問題が生じる。この場合、窒化アルミニウムは
水との反応性が強いために、粉砕中に混入した不純物を
後処理で除去し、得られた微粉末を精製することは極め
て困難であり、このため焼結性を良好な高純度微粉末を
得ることは困難である。Therefore, it is conceivable to finely pulverize such an aluminum nitride powder by using a pulverizer to reduce the particle size, but in this case, impurities such as oxygen are mixed in during the pulverizing process, which causes a problem in terms of purity. Occurs. In this case, since aluminum nitride has a strong reactivity with water, it is extremely difficult to remove impurities mixed during pulverization by a post-treatment and to purify the obtained fine powder. It is difficult to obtain a good high-purity fine powder.
また、酸化アルミニウムや水酸化アルミニウムとカーボ
ンとの粉末混合物を窒素中で還元窒化し、平均粒子径が
１．２〜２μｍ程度の高純度窒化アルミニウム粉末を得
る方法（特開昭５９−５０００８号公報等）も提案され
ている。Further, a method of reducing and nitriding a powder mixture of aluminum oxide or aluminum hydroxide and carbon in nitrogen to obtain a high-purity aluminum nitride powder having an average particle diameter of about 1.2 to 2 μm (Japanese Patent Laid-Open No. 59-50008). Etc.) are also proposed.
この方法によれば、ある程度焼結性を向上させることが
できるが、なお焼結性の点で満足するレベルにはなく、
やはり焼結性を高めるためには粉砕工程が必要となり、
上述した不純物の問題を生じることとなる。また、この
方法は、反応性の良好な微細な（例えば平均粒子径が２
μｍ以下の）アルミナ又は水酸化アルミニウムを用いる
ため、得られる窒化アルミニウム粉末の嵩密度が小さく
なり、このため充填性が悪く、成形密度が低下し、焼結
時の収縮・変形が大きくなるという問題もある。According to this method, the sinterability can be improved to some extent, but the sinterability is still not at a satisfactory level.
After all, a crushing process is required to improve sinterability,
This will cause the above-mentioned problem of impurities. In addition, this method has a fine reactivity (for example, an average particle size of 2
Alumina or aluminum hydroxide (μm or less) is used, so that the bulk density of the obtained aluminum nitride powder is small, and thus the filling property is poor, the molding density is lowered, and the shrinkage / deformation during sintering becomes large. There is also.
本発明は、上記事情に鑑みなされたもので、平均粒子径
１μｍ以下で焼結性に優れ、焼結助剤を必ずしも必要と
せず、１６００〜１７００℃程度の低温度でも良好な焼
結体を得ることができ、焼結体の製造において高い量産
性，低コスト化を達成し得る高純度窒化アルミニウム粉
末及びその製造方法を提供することを目的とする。The present invention has been made in view of the above circumstances, has an average particle size of 1 µm or less, is excellent in sinterability, does not necessarily require a sintering aid, and provides a good sintered body even at a low temperature of about 1600 to 1700 ° C. An object of the present invention is to provide a high-purity aluminum nitride powder that can be obtained and can achieve high mass productivity and low cost in the production of a sintered body, and a method for producing the same.
課題を解決するための手段及び作用 本発明者は、上記目的を達成するため、鋭意検討を重ね
た結果、高純度の窒化アルミニウム粗粉末を平均粒子径
１μｍ未満，比表面積５m2／ｇ以上に粉砕して微粉化す
ると共に、酸素含有量を２重量％以下、アルミニウム以
外の金属不純物の含有量を０．１重量％以下に制御する
ことにより、窒化アルミニウム粉末の焼結性を焼結助剤
を必ずしも必要とせず、また１６００〜１７００℃程度
の温度でも良好に焼結し得る程に向上させることがで
き、この窒化アルミニウム粉末を用いることにより、窒
化アルミニウムの焼結物を製造する際、その量産性及び
経済性を大巾に向上さえることができ、しかも高密度で
良好なな特性を有する焼結体が得られることを見い出し
た。更に、上記粉砕処理を行なう際、内部ライナーやロ
ール等の被粉砕物を接する部分が高純度アルミナ，高純
度窒素アルミニウム及びナイロン等の合成樹脂から選ば
れた１種又は２種以上の材質で形成された粉砕機を用
い、また同様の材質の粉砕メディアを用い、乾燥窒素ガ
ス雰囲気等の非酸化性乾式雰囲気化で平均粒子径１〜２
０μｍ、酸素含有量２重量％以下、アルミニウム以外の
金属不純物含有量０．１重量％以下の窒素アルミニウム
粗粉末を微粉化処理することにより、粉砕機からの金属
不純物の混入及び雰囲気からの酸素の混入を可及的に防
止することができ、酸素含有量及び金属不純物含有量を
容易かつ確実に上記制限内に制御し得ることを知見し、
本発明に完成するに至ったものである。Means and Actions for Solving the Problems The inventors of the present invention have conducted extensive studies in order to achieve the above-mentioned object, and as a result, have found that high-purity aluminum nitride coarse powder has an average particle size of less than 1 μm and a specific surface area of 5 m 2 / g or more. The sinterability of the aluminum nitride powder is controlled by crushing and pulverizing and controlling the oxygen content to 2% by weight or less and the content of metal impurities other than aluminum to 0.1% by weight or less. Is not always necessary and can be improved to the extent that it can be sintered well even at a temperature of about 1600 to 1700 ° C. When this aluminum nitride powder is used, when producing a sintered product of aluminum nitride, It has been found that mass productivity and economical efficiency can be greatly improved, and a sintered body having a high density and good characteristics can be obtained. Further, when the above-mentioned crushing treatment is performed, the portion of the inner liner, roll or the like that comes into contact with the object to be crushed is made of one or more materials selected from synthetic resins such as high-purity alumina, high-purity nitrogen aluminum and nylon. The average particle size of 1 to 2 is obtained by using a crusher of the same type and a crushing medium of the same material in a non-oxidizing dry atmosphere such as a dry nitrogen gas atmosphere.
0 μm, oxygen content of 2 wt% or less, metal impurities other than aluminum content of 0.1 wt% or less nitrogen fine aluminum powder is subjected to a pulverization treatment, thereby mixing metal impurities from the pulverizer and oxygen from the atmosphere. It was found that contamination can be prevented as much as possible, and the oxygen content and the metal impurity content can be easily and reliably controlled within the above limits,
The present invention has been completed.
従って、本発明は、平均粒子径が１μｍ未満、比表面積
５m2／ｇ以上、含有酸素量が２重量％以下で、アルミニ
ウムを除く金属不純物の含有量が０．１重量％以下であ
ることを特徴とする高純度窒化アルミニウム粉末及び平
均粒子径が１〜２０μｍ、酸素含有量が２重量％以下、
アルミニウム以外の金属不純物含有量が０．１重量％以
下の高純度窒化アルミニウム粗粉末を、粉砕メディア及
び被粉砕物と接触する部分が高純度アルミナ，高純度窒
化アルミニウム及び合成樹脂から選ばれた１種又は２種
以上の材質で形成された粉砕機を用いて非酸化性雰囲気
下で乾式粉砕して、平均粒子径を１μｍより小さく、か
つ比表面積を５m2／ｇ以上に微粉化すると共に、含有酸
素量を２重量％以下、アルミニウムを除く金属不純物の
含有量０．１重量％以下にそれぞれ制御することを特徴
とする高純度窒化アルミニウム粉末の製造方法を提供す
る。Therefore, according to the present invention, the average particle size is less than 1 μm, the specific surface area is 5 m 2 / g or more, the oxygen content is 2 wt% or less, and the content of metal impurities other than aluminum is 0.1 wt% or less. Characteristic high-purity aluminum nitride powder and average particle size of 1 to 20 μm, oxygen content of 2% by weight or less,
The high-purity aluminum nitride coarse powder having a content of metal impurities other than aluminum of 0.1% by weight or less is selected from high-purity alumina, high-purity aluminum nitride and synthetic resin for the portion in contact with the grinding media and the object to be ground. Using a crusher formed of one or two or more kinds of materials in a non-oxidizing atmosphere and dry pulverized to have an average particle size of less than 1 μm and a specific surface area of 5 m 2 / g or more. Provided is a method for producing a high-purity aluminum nitride powder, characterized in that the oxygen content is controlled to 2% by weight or less and the content of metal impurities other than aluminum is controlled to 0.1% by weight or less.
以下、本発明につき更に詳しく説明する。Hereinafter, the present invention will be described in more detail.
本発明の高純度窒化アルミニウム粉末は、上述したよう
に平均粒子径が１μｍ未満、好ましくは０．８μｍ以
下、比表面積が５m2／ｇ以上、酸素含有量が２％（重量
％、以下同様）以下、好ましくは１．８％以下、アルミ
ニウム以外の金属不純物含有量が０．１％以下、好まし
くは０．０５％以下のものである。As described above, the high-purity aluminum nitride powder of the present invention has an average particle size of less than 1 μm, preferably 0.8 μm or less, a specific surface area of 5 m 2 / g or more, and an oxygen content of 2% (weight%, the same applies hereinafter). The following content is preferably 1.8% or less, and the content of metal impurities other than aluminum is 0.1% or less, preferably 0.05% or less.
このような高純度窒化アルミニウム粉末を得るためには
平均粒子径１〜２０μｍ、酸素含有量が２％以下、好ま
しくは１．５％以下、アルミニウム以外の金属不純物含
有量が０．１以下、好ましくは０．０５％以下の高純度
窒化アルミニウム粗粉末を使用して、これを平均粒子径
１μｍ未満、比表面積５m2／ｇ以上に粉砕する。かかる
粉砕処理を行なう場合、内部ライナー，ロール等の被粉
砕物と接する部分を高純度アルミナ，高純度窒化アルミ
ニウム及びナイロン等の合成樹脂から選ばれた１種又は
２種以上の材質で形成した粉砕機を用い、同様の材質メ
ディアを使用して乾燥窒素ガス雰囲気等の非酸化雰囲気
下で乾式粉砕する。In order to obtain such high-purity aluminum nitride powder, the average particle size is 1 to 20 μm, the oxygen content is 2% or less, preferably 1.5% or less, and the metal impurity content other than aluminum is 0.1 or less, preferably Is 0.05% or less of high-purity aluminum nitride coarse powder, which is pulverized to an average particle size of less than 1 μm and a specific surface area of 5 m 2 / g or more. When performing such a pulverization treatment, the portion of the inner liner, roll or the like which comes into contact with the object to be pulverized is made of one or more materials selected from synthetic resins such as high-purity alumina, high-purity aluminum nitride and nylon. Machine, using the same material media, dry pulverization in a non-oxidizing atmosphere such as a dry nitrogen gas atmosphere.
ここで、上記高純度窒化アルミニウム粗粉末は、平均粒
子径１〜２０μｍ、酸素含有量２％以下、アルミニウム
以外の金属不純物含有量が０．１％以下のものであれば
よく、特に限定されるものではないが、特にその比表面
積が１〜３m2／ｇ程度のものが好ましく用いられる。Here, the high-purity aluminum nitride coarse powder may have an average particle size of 1 to 20 μm, an oxygen content of 2% or less, and a metal impurity content other than aluminum of 0.1% or less, and are particularly limited. Although not particularly limited, those having a specific surface area of about 1 to 3 m 2 / g are preferably used.
なお、この高純度窒化アルミニウム粗粉末は、公知の方
法で製造されたものを用いることができ、具体的には高
純度アルミニウム粉末を高温，窒素雰囲気下で直接窒化
する方法、アルミニウム酸化物又は水酸化物とカーボン
との混合粉末を高温，窒素雰囲気下で還元窒化する方法
などにより得られたものを好適に使用することができ
る。The high-purity aluminum nitride coarse powder may be one produced by a known method, and specifically, a method of directly nitriding the high-purity aluminum powder at high temperature in a nitrogen atmosphere, aluminum oxide or water. Those obtained by a method of reducing and nitriding mixed powder of oxide and carbon under high temperature and nitrogen atmosphere can be preferably used.
本発明の高純度窒化アルミニウム粉末は、上記粗粉末を
被粉砕物と接する部分が高純度アルミナ，高純度窒化ア
ルミニウム及びナイロン等の合成樹脂から選ばれる材質
で形成された粉砕機を用い、かつ同様な材質の粉砕メデ
ィアを用いて、上記所定粒子径及び所定比表面積に粉砕
することによって得られるが、この場合高純度アルミナ
の純度は９９％以上、特に９９．５％以上とすることが
好ましく、また高純度窒化アルミニウムは、純度を９５
％以上、特に９７％以上とすることが好ましい。The high-purity aluminum nitride powder of the present invention uses a crusher in which the portion in contact with the object to be ground of the coarse powder is made of a material selected from synthetic resins such as high-purity alumina, high-purity aluminum nitride and nylon. It is obtained by pulverizing to a predetermined particle size and a specific surface area using a pulverizing medium made of various materials. In this case, the purity of the high-purity alumina is preferably 99% or more, and particularly preferably 99.5% or more, High-purity aluminum nitride has a purity of 95%.
% Or more, and particularly preferably 97% or more.
この粉砕処理は、非酸化性雰囲気下で行なわれるもので
あり、その雰囲気として具体的には、乾燥窒素雰囲気、
Ａｒ等の不活性ガス雰囲気などを挙げることができる
が、特に乾燥窒素雰囲気とすることが好ましい。なお、
粉砕時間は、特に制限されないが３〜１０時間程度とす
ることが好ましい。また、粉砕はボールミル，アトライ
ター，振動ミル，ジェットミル等の公知の乾式粉砕機を
用いることができ、粉砕条件は適宣選定し得るが、通常
は粉砕メディアを用いて粉砕する方法（例えばボールミ
ル，アトライター，振動ミル等を使用）とすることが好
ましい。This pulverization treatment is performed in a non-oxidizing atmosphere, and as the atmosphere, specifically, a dry nitrogen atmosphere,
An inert gas atmosphere such as Ar can be used, but a dry nitrogen atmosphere is particularly preferable. In addition,
The crushing time is not particularly limited, but is preferably about 3 to 10 hours. Known pulverizers such as ball mills, attritors, vibration mills, and jet mills can be used for pulverization. The pulverization conditions can be appropriately selected, but usually, a method of pulverizing using a pulverizing medium (for example, ball mill , An attritor, a vibration mill, etc.) are preferred.
発明の効果 以上説明したように、本発明の高純度窒化アルミニウム
粉末は、焼結性に優れ、必ずしも焼結助剤を必要とせ
ず、またその焼結には従来１８００℃以上の温度が必要
であったが、本発明品は１６００〜１７００℃で焼結す
ることが可能であり、焼結物の製造において、その量産
性及び経済性を大巾に向上させることができ、しかも高
純度，高密度で優れた特性を有する焼結物を得ることが
できる。また本発明の製造方法は、かかる高純度窒化ア
ルミニウム粉末を効率よく確実に製造することができる
ものである。EFFECTS OF THE INVENTION As described above, the high-purity aluminum nitride powder of the present invention has excellent sinterability, does not necessarily require a sintering aid, and its sintering conventionally requires a temperature of 1800 ° C. or higher. However, the product of the present invention can be sintered at 1600 to 1700 ° C., and in the production of the sintered product, its mass productivity and economical efficiency can be greatly improved, and high purity and high purity can be obtained. It is possible to obtain a sintered product having excellent characteristics in density. The production method of the present invention is capable of producing such high-purity aluminum nitride powder efficiently and reliably.
以下、実施例及び比較例を示し、本発明を具体的に説明
するが、本発明は下記実施例に制限されるものではな
い。Hereinafter, the present invention will be specifically described with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples.
第１表に示したＡ，Ｂ，Ｃの高純度窒化アルミニウム粉
末（信越化学工業(株)製）を粗原料とし、同表に示した
材質のライナー及びボールを用いた撹拌式ボールミル
（三井三池製ＭＹ−Ｄ型）で同表に示した各雰囲気条件
の下に上記粗原料を粉砕して微粉化し、得られた高純度
窒化アルミニウム粉末の平均粒子径，比表面積及び含有
不純物量を調べた。その結果を第１表に併記する。An agitated ball mill (Mitsui Miike, Mitsui Miike) using A, B, and C high-purity aluminum nitride powders (produced by Shin-Etsu Chemical Co., Ltd.) shown in Table 1 as raw materials and using liners and balls made of the materials shown in the table. MY-D type) under the respective atmospheric conditions shown in the same table, the above crude material was pulverized and pulverized, and the average particle diameter, specific surface area and content of impurities of the obtained high-purity aluminum nitride powder were investigated. . The results are also shown in Table 1.
第１表に示した粗原料粉末Ａ，Ｂ，Ｃ、実施例１〜５、
比較例１〜４の各窒化アルミニウム粉末について、その
焼結性及び得られた焼結物を調べたところ、粗原料粉末
Ａ，Ｂ，Ｃの窒化アルミニウム粉末は焼結助剤としてY2
O3を用い、１８００℃以上の高温で処理することが必要
であった。また、比較例１〜４の窒化アルミニウム粉末
は、必ずしも焼結助剤を必要とせず、また１６００〜１
７００℃程度の温度でも焼結が可能であったが、酸素や
金属不純物のために熱伝導性等の特性に劣るものであっ
た。これらに対し、実施例１〜５の窒化アルミニウム粉
末は、焼結助剤なしでも焼結が可能であり、また１６０
０〜１７００℃程度の温度でも良好な焼結体を得ること
ができる。しかも熱伝導率等に優れ、窒化アルミニウム
が本来持っている優れた特性を有効に保持していた。 The raw material powders A, B and C shown in Table 1, Examples 1 to 5,
When the sinterability and the obtained sinter of the aluminum nitride powders of Comparative Examples 1 to 4 were examined, the aluminum nitride powders of the raw material powders A, B, and C were used as Y 2 as a sintering aid.
It was necessary to treat with O 3 at a high temperature of 1800 ° C. or higher. Further, the aluminum nitride powders of Comparative Examples 1 to 4 do not necessarily require a sintering aid, and 1600 to 1
Sintering was possible even at a temperature of about 700 ° C., but the properties such as thermal conductivity were poor due to oxygen and metal impurities. On the other hand, the aluminum nitride powders of Examples 1 to 5 can be sintered without a sintering aid, and 160
A good sintered body can be obtained even at a temperature of about 0 to 1700 ° C. Moreover, it has excellent thermal conductivity and effectively retains the excellent properties inherent to aluminum nitride.
Claims (2)
ｇ以上、含有酸素量が２重量％以下で、アルミニウムを
除く金属不純物の含有量が０．１重量％以下であること
を特徴とする高純度窒化アルミニウム粉末。1. An average particle size of less than 1 μm and a specific surface area of 5 m 2 /
A high-purity aluminum nitride powder, characterized in that the content of oxygen is 2 g by weight or more and the content of metal impurities other than aluminum is 0.1% by weight or less.
２重量％以下、アルミニウム以外の金属不純物含有量が
０．１重量％以下の高純度窒化アルミニウム粗粉末を、
粉砕メディア及び被粉砕物と接触する部分が高純度アル
ミナ，高純度窒化アルミニウム及び合成樹脂から選ばれ
た１種又は２種以上の材質で形成された粉砕機を用いて
非酸化性雰囲気下で乾式粉砕して、平均粒子径を１μｍ
より小さく、かつ比表面積を５m2／ｇ以上に微粉化する
と共に、含有酸素量を２重量％以下、アルミニウムを除
く金属不純物の含有量を０．１重量％以下にそれぞれ制
御することを特徴とする高純度窒化アルミニウム粉末の
製造方法。2. A high-purity aluminum nitride coarse powder having an average particle size of 1 to 20 μm, an oxygen content of 2% by weight or less, and a metal impurity content other than aluminum of 0.1% by weight or less,
Dry type in a non-oxidizing atmosphere using a crusher where the part that comes into contact with the crushing media and the crushed object is made of one or more materials selected from high-purity alumina, high-purity aluminum nitride and synthetic resin. Crushed and average particle size is 1μm
It is characterized in that it is made smaller and has a specific surface area of 5 m 2 / g or more, and the content of oxygen is controlled to 2% by weight or less and the content of metal impurities except aluminum is controlled to 0.1% by weight or less. Method for producing high-purity aluminum nitride powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1318297A JPH0615404B2 (en) | 1989-12-07 | 1989-12-07 | High-purity aluminum nitride powder and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1318297A JPH0615404B2 (en) | 1989-12-07 | 1989-12-07 | High-purity aluminum nitride powder and method for producing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03177308A JPH03177308A (en) | 1991-08-01 |
| JPH0615404B2 true JPH0615404B2 (en) | 1994-03-02 |
Family
ID=18097630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1318297A Expired - Lifetime JPH0615404B2 (en) | 1989-12-07 | 1989-12-07 | High-purity aluminum nitride powder and method for producing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0615404B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7267808B2 (en) | 2004-07-08 | 2007-09-11 | Mitsui Chemicals, Inc. | Aluminum nitride powder, method for producing the same and use thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024048600A1 (en) * | 2022-08-30 | 2024-03-07 | 株式会社トクヤマ | Aluminum nitride powder and resin composition |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61146703A (en) * | 1984-12-20 | 1986-07-04 | Toshiba Corp | Production of aluminum nitride powder |
| JPS61275111A (en) * | 1985-05-31 | 1986-12-05 | Denki Kagaku Kogyo Kk | Powdery aluminium nitride for sintering and sintered aluminium nitride |
| JPS6479009A (en) * | 1987-09-18 | 1989-03-24 | Toyo Aluminium Kk | Aluminium nitride powder |
-
1989
- 1989-12-07 JP JP1318297A patent/JPH0615404B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7267808B2 (en) | 2004-07-08 | 2007-09-11 | Mitsui Chemicals, Inc. | Aluminum nitride powder, method for producing the same and use thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03177308A (en) | 1991-08-01 |
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