JPH0615392Y2 - 高周波誘導結合プラズマ質量分析計 - Google Patents

高周波誘導結合プラズマ質量分析計

Info

Publication number
JPH0615392Y2
JPH0615392Y2 JP11797787U JP11797787U JPH0615392Y2 JP H0615392 Y2 JPH0615392 Y2 JP H0615392Y2 JP 11797787 U JP11797787 U JP 11797787U JP 11797787 U JP11797787 U JP 11797787U JP H0615392 Y2 JPH0615392 Y2 JP H0615392Y2
Authority
JP
Japan
Prior art keywords
inductively coupled
high frequency
coupled plasma
frequency inductively
argon gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11797787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6423867U (enExample
Inventor
英樹 川那子
宏俊 石川
健一 阪田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP11797787U priority Critical patent/JPH0615392Y2/ja
Publication of JPS6423867U publication Critical patent/JPS6423867U/ja
Application granted granted Critical
Publication of JPH0615392Y2 publication Critical patent/JPH0615392Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP11797787U 1987-07-31 1987-07-31 高周波誘導結合プラズマ質量分析計 Expired - Lifetime JPH0615392Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11797787U JPH0615392Y2 (ja) 1987-07-31 1987-07-31 高周波誘導結合プラズマ質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11797787U JPH0615392Y2 (ja) 1987-07-31 1987-07-31 高周波誘導結合プラズマ質量分析計

Publications (2)

Publication Number Publication Date
JPS6423867U JPS6423867U (enExample) 1989-02-08
JPH0615392Y2 true JPH0615392Y2 (ja) 1994-04-20

Family

ID=31361922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11797787U Expired - Lifetime JPH0615392Y2 (ja) 1987-07-31 1987-07-31 高周波誘導結合プラズマ質量分析計

Country Status (1)

Country Link
JP (1) JPH0615392Y2 (enExample)

Also Published As

Publication number Publication date
JPS6423867U (enExample) 1989-02-08

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