JPH0615390Y2 - 試料予備室を備えた電子顕微鏡 - Google Patents

試料予備室を備えた電子顕微鏡

Info

Publication number
JPH0615390Y2
JPH0615390Y2 JP7633088U JP7633088U JPH0615390Y2 JP H0615390 Y2 JPH0615390 Y2 JP H0615390Y2 JP 7633088 U JP7633088 U JP 7633088U JP 7633088 U JP7633088 U JP 7633088U JP H0615390 Y2 JPH0615390 Y2 JP H0615390Y2
Authority
JP
Japan
Prior art keywords
chamber
sample
electron microscope
preparatory
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7633088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01179351U (US20090163788A1-20090625-C00002.png
Inventor
基英 浮穴
正弘 富田
守起 窪添
功 松井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7633088U priority Critical patent/JPH0615390Y2/ja
Publication of JPH01179351U publication Critical patent/JPH01179351U/ja
Application granted granted Critical
Publication of JPH0615390Y2 publication Critical patent/JPH0615390Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP7633088U 1988-06-10 1988-06-10 試料予備室を備えた電子顕微鏡 Expired - Lifetime JPH0615390Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7633088U JPH0615390Y2 (ja) 1988-06-10 1988-06-10 試料予備室を備えた電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7633088U JPH0615390Y2 (ja) 1988-06-10 1988-06-10 試料予備室を備えた電子顕微鏡

Publications (2)

Publication Number Publication Date
JPH01179351U JPH01179351U (US20090163788A1-20090625-C00002.png) 1989-12-22
JPH0615390Y2 true JPH0615390Y2 (ja) 1994-04-20

Family

ID=31301360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7633088U Expired - Lifetime JPH0615390Y2 (ja) 1988-06-10 1988-06-10 試料予備室を備えた電子顕微鏡

Country Status (1)

Country Link
JP (1) JPH0615390Y2 (US20090163788A1-20090625-C00002.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4063503B2 (ja) * 2001-04-10 2008-03-19 日本電子株式会社 電子顕微鏡
CN111948240B (zh) * 2020-08-17 2023-12-22 浙江祺跃科技有限公司 一种原位高温蠕变疲劳扫描电子显微镜

Also Published As

Publication number Publication date
JPH01179351U (US20090163788A1-20090625-C00002.png) 1989-12-22

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