JPH06152307A - Surface mounted piezo-electric vibrator - Google Patents

Surface mounted piezo-electric vibrator

Info

Publication number
JPH06152307A
JPH06152307A JP4300199A JP30019992A JPH06152307A JP H06152307 A JPH06152307 A JP H06152307A JP 4300199 A JP4300199 A JP 4300199A JP 30019992 A JP30019992 A JP 30019992A JP H06152307 A JPH06152307 A JP H06152307A
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
adhesive
conductive
base
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4300199A
Other languages
Japanese (ja)
Inventor
Shinichiro Yagi
慎一郎 矢木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp, Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Corp
Priority to JP4300199A priority Critical patent/JPH06152307A/en
Publication of JPH06152307A publication Critical patent/JPH06152307A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a surface mounted piezo-electric vibrator excellent in shock resistance. CONSTITUTION:In the surface mounted piezo-electric vibrator having structure forming conductive plating parts 11 on the bottom part of a ceramic base 10 and sticking and fixing a holding fixture base part (not shown in a figure) for conductively holding piezo-electric vibrator chips on short dashes line parts, alloy containing palladium is applied to the plating parts 11 to generate oxide films, so that adhesive force is increased. On the other hand, slits 11a are formed on the plating parts 11 so as to expose a part of ceramic ground and parts including the exposed ground are stuck and fixed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、セラミックパッケージ
内に圧電振動子片を保持するとともに、パッケージ基台
とキャップ間を低融点ガラスシールを用いて密封した表
面実装形圧電振動子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface mount type piezoelectric vibrator in which a piezoelectric vibrator piece is held in a ceramic package and a package base and a cap are sealed with a low melting point glass seal.

【0002】[0002]

【従来の技術】水晶やセラミックス圧電体から成る圧電
振動子片をパッケージ内に密封し、表面実装化すること
が広く行われている。図5はこの表面実装化された圧電
振動子の側面図であり、圧電振動子片50の両端を夫々
保持金具たる一対のインナーリード51の自由端にて導
通保持するとともに、各インナーリード51の基部をパ
ッケージ基台たるセラミックベース52の底面部に接着
固定している。また、低融点ガラスシール53にセラミ
ックキャップ54の縁部を当接し、このガラスシール5
3を溶融して硬化させることで両者を封止している。
2. Description of the Related Art It is widely practiced to seal a piezoelectric vibrator piece made of a crystal or a ceramics piezoelectric body in a package for surface mounting. FIG. 5 is a side view of the surface-mounted piezoelectric vibrator, in which both ends of the piezoelectric vibrator piece 50 are conductively held by the free ends of the pair of inner leads 51, which are holding metal fittings, respectively. The base is adhered and fixed to the bottom of the ceramic base 52 that is the package base. Further, the edge of the ceramic cap 54 is brought into contact with the low-melting glass seal 53, and the glass seal 5
Both are sealed by melting and hardening 3.

【0003】セラミックベース52の底面部には、図6
に示すように、圧電振動子片50を回路部品(図示省
略)に導通させるための導電メッキ部55が形成されて
おり、この導電メッキ部55を介しての導通を確保しつ
つセラミックベース52底面部に固定される。
The bottom surface of the ceramic base 52 is shown in FIG.
As shown in FIG. 5, a conductive plated portion 55 is formed for connecting the piezoelectric vibrator piece 50 to a circuit component (not shown). The bottom surface of the ceramic base 52 is ensured through the conductive plated portion 55. Fixed to the section.

【0004】通常、圧電振動子片50とインナーリード
51の自由端、インナーリード51の基部と導電メッキ
部55、更にインナーリード51の基部とセラミックベ
ース52底面部との接着固定には、ハンダや有機系の導
電性接着剤が用いられるが、図5に示すような低融点ガ
ラス封止による場合には、350〜400℃程度の加熱
が必要になってくるので、ハンダ接合よりも耐熱性の有
機系導電性接着剤に頼らざるを得ない。そのため、従来
は、イミド系の耐熱導電性接着剤56が多く使用されて
いた。
Usually, the piezoelectric vibrator piece 50 and the free end of the inner lead 51, the base of the inner lead 51 and the conductive plating 55, and the base of the inner lead 51 and the bottom of the ceramic base 52 are fixed to each other by soldering or soldering. Although an organic conductive adhesive is used, in the case of sealing with a low melting point glass as shown in FIG. 5, heating at about 350 to 400 ° C. is required, so that it is more heat resistant than solder bonding. There is no choice but to rely on organic conductive adhesives. Therefore, conventionally, the imide-based heat-resistant conductive adhesive 56 has been often used.

【0005】[0005]

【発明が解決しようとする課題】このように、低融点ガ
ラス封止の場合の耐熱性導電接着剤56として、従来、
イミド系のものが使用されているが、このイミド系の接
着剤56も350〜400℃の加熱を施されると樹脂自
身が分解し、加熱減量が5%程度生じる。例えば、現
在、最も多用されているポリイミド系接着剤の場合、1
50℃でまず溶剤が抜け出し、350℃で架橋が進む。
そして360℃で樹脂の分解が始まる。従って、400
℃の加熱を施されると、樹脂の接着力が小さくなる。特
に、導電性をもたせるために銀フィラーを使用する場
合、この銀フィラーがポリイミドに触媒的に作用して分
解開始温度を更に低下させ、接着力の低下を促進してい
た。そのため、各接着固定部が圧電振動子の回路基板等
への自動搭載時に加わる衝撃に耐えられなかったり、あ
るいは各固着部の経時変化により周波数が大きくドリフ
トする問題があった。
As described above, as the heat-resistant conductive adhesive 56 in the case of sealing with a low melting point glass, the conventional
Although an imide-based adhesive is used, when the imide-based adhesive 56 is also heated at 350 to 400 ° C., the resin itself is decomposed and a loss on heating of about 5% occurs. For example, in the case of the most frequently used polyimide adhesive, 1
At 50 ° C, the solvent first escapes, and at 350 ° C, crosslinking proceeds.
Then, the decomposition of the resin begins at 360 ° C. Therefore, 400
When heated at ℃, the adhesive force of the resin becomes small. In particular, when a silver filler is used for imparting conductivity, the silver filler catalytically acts on the polyimide to further lower the decomposition initiation temperature and promote the reduction of the adhesive strength. Therefore, there is a problem that each adhesive fixing part cannot withstand the impact applied when the piezoelectric vibrator is automatically mounted on a circuit board or the like, or the frequency largely drifts due to a change with time of each fixing part.

【0006】本発明は、かかる問題点に鑑みてなされた
もので、その目的とするところは、低融点ガラス封止に
よっても充分な耐衝撃性を有する表面実装形圧電振動子
を提供することにある。
The present invention has been made in view of the above problems, and an object of the present invention is to provide a surface mount type piezoelectric vibrator having sufficient impact resistance even by sealing with a low melting point glass. is there.

【0007】[0007]

【課題を解決するための手段】現在の耐熱導電性接着剤
としては、ポリイミド系のものが最も優れている。そこ
で、本発明では、樹脂の分解により接着力が低下しても
十分な耐衝撃性が得られる接着構成とすることで上記目
的達成を図るものである。
Polyimide-based adhesives are the most excellent current heat-resistant conductive adhesives. Therefore, in the present invention, the above object is achieved by adopting an adhesive constitution in which sufficient impact resistance is obtained even if the adhesive force is reduced due to the decomposition of the resin.

【0008】具体的には、パッケージベースの底面部に
導電性メッキ部を形成するとともに、圧電振動子片又は
圧電振動子片を導通保持するための保持金具の基部を前
記導電性メッキ部に接着固定してなる表面実装形圧電振
動子において、前記導電性メッキ部を、その表面に酸化
膜が形成される金属材料、例えばパラジウムを含む合金
にて形成した。
Specifically, a conductive plated portion is formed on the bottom surface of the package base, and the base portion of the piezoelectric vibrator piece or a holding metal member for holding the piezoelectric vibrator piece in conduction is bonded to the conductive plated portion. In the surface-mounted piezoelectric vibrator fixed, the conductive plated portion is formed of a metal material having an oxide film formed on its surface, for example, an alloy containing palladium.

【0009】また、前記導電性メッキ部の前記接着固定
部位にスリットを形成して前記パッケージベースの底面
部を一部露出させ、露出したベース部材及び導電性メッ
キ部に前記圧電振動子片又は保持金具基部を接着固定
し、あるいは、前記圧電振動子片の電極膜にスリットを
形成して圧電振動子片の一部表面を露出させ、露出した
圧電振動子片表面及び電極膜を前記保持金具の自由端又
は導電性メッキ部に接着固定した。
In addition, a slit is formed at the adhesive fixing portion of the conductive plated portion to partially expose the bottom surface portion of the package base, and the piezoelectric vibrator piece or the holding member is held on the exposed base member and conductive plated portion. The metal fitting base is adhered and fixed, or a slit is formed in the electrode film of the piezoelectric vibrator piece to expose a part of the surface of the piezoelectric vibrator piece, and the exposed surface of the piezoelectric vibrator piece and the electrode film are attached to the holding metal fitting. It was adhered and fixed to the free end or the conductive plated portion.

【0010】なお、上記構成において、前記接着固定に
用いる接着剤は、接着部位に塗布される第一の耐熱導電
性接着剤と、この第一の耐熱導電性接着剤を覆う第二の
耐熱導電性接着剤とからなり、第二の耐熱導電性接着剤
は第一の耐熱導電性接着剤よりも高耐熱性のものである
ことを特徴とする。
In the above structure, the adhesive used for the adhesive fixing is the first heat-resistant conductive adhesive applied to the bonding site and the second heat-resistant conductive adhesive covering the first heat-resistant conductive adhesive. And a heat resistant conductive adhesive, and the second heat resistant conductive adhesive has a higher heat resistance than the first heat resistant conductive adhesive.

【0011】[0011]

【作用】導電性メッキ部を例えばパラジウムを含む合金
で形成するとその表面に酸化膜が生じる。この酸化膜上
でインナーベース基部等を接着固定することにより、接
着剤の凝縮力と相俟って接着力が増し、耐衝撃性が向上
する。
When the conductive plated portion is formed of an alloy containing palladium, an oxide film is formed on the surface thereof. By bonding and fixing the inner base base or the like on this oxide film, the adhesive force is increased in combination with the condensing force of the adhesive, and the impact resistance is improved.

【0012】また、導電メッキ部又は電極膜にスリット
を形成し、一部露出したパッケージベース表面又は圧電
振動子片表面と共に接着固定することで、接着面積が増
し、耐衝撃性が向上する。
Further, by forming a slit in the conductive plated portion or the electrode film and adhering and fixing the slit together with the partially exposed surface of the package base or the surface of the piezoelectric vibrator, the adhering area is increased and the impact resistance is improved.

【0013】更に、接着固定に際して、まず接着部位に
第一の耐熱導電性接着剤を塗布して硬化させた後に、高
耐熱性の第二の耐熱導電性接着剤でこれを覆うことで、
第一の耐熱導電性接着剤の接着力低下を補うことができ
る。
Further, at the time of adhesive fixing, first the first heat resistant conductive adhesive is applied to the bonding site and cured, and then it is covered with the second heat resistant conductive adhesive having high heat resistance.
It is possible to compensate for the decrease in the adhesive strength of the first heat resistant conductive adhesive.

【0014】[0014]

【実施例】以下、本発明の実施例を図面を参照して説明
する。
Embodiments of the present invention will be described below with reference to the drawings.

【0015】図1は本発明の一実施例に係る表面実装形
圧電振動子の正面図であり、10はパッケージ基台とな
るセラミックベース、11は導電性メッキ部、12はガ
ラスシールを表す。ガラスシール12は従来品と同一の
ものである。導電性メッキ部11は、その表面に酸化膜
を生じる金属材料、例えば銀とパラジウムとの合金によ
り形成する。そして、導電性メッキ部11表面に生じた
酸化膜上でインナーリード51(図5参照)の基部を接
着固定した。これにより、接着剤自体の凝縮力と相俟っ
て接着力が増し、金等の安定物質を用いた従来の導電性
メッキ部に比べて耐衝撃性が格段に向上した。
FIG. 1 is a front view of a surface mount type piezoelectric vibrator according to an embodiment of the present invention. 10 is a ceramic base which is a package base, 11 is a conductive plated portion, and 12 is a glass seal. The glass seal 12 is the same as the conventional product. The conductive plated portion 11 is formed of a metal material that produces an oxide film on its surface, for example, an alloy of silver and palladium. Then, the base of the inner lead 51 (see FIG. 5) was adhesively fixed on the oxide film formed on the surface of the conductive plated portion 11. As a result, the adhesive force is increased in combination with the condensing force of the adhesive itself, and the impact resistance is remarkably improved as compared with the conventional conductive plated portion using a stable substance such as gold.

【0016】本実施例では、また、導電性メッキ部11
にスリット11aを形成し、セラミックベース10の底
面部の一部を露出させた。そして、この露出部を含む図
1の破線にて囲まれた部位にてインナーリード51の基
部を接着固定した。セラミックの地肌は金属表面に比べ
てその凹凸が大きいため、接着面積が増して接着力が従
来に比べて強化され、耐衝撃性が向上した。同様の理由
から、図2に示すように、圧電振動子片20の電極膜2
1にスリット21aを形成して圧電振動子片20の一部
を露出させ、電極膜21及び露出した圧電振動子片20
表面をインナーリード51の自由端に接着固定した。な
お、図1に示す導電性メッキ部11のスリット11aと
図2に示す圧電振動子片20のスリット21aとは併用
が好ましいが、いずれか一方でも耐衝撃性の強化には有
効な手段となり得る。
In the present embodiment, the conductive plated portion 11 is also used.
A slit 11a was formed in the substrate to expose a part of the bottom surface portion of the ceramic base 10. Then, the base portion of the inner lead 51 was adhesively fixed at a portion surrounded by the broken line in FIG. 1 including the exposed portion. Since the surface of the ceramic has more irregularities than the metal surface, the adhesive area is increased, the adhesive strength is strengthened compared to the conventional one, and the impact resistance is improved. For the same reason, as shown in FIG. 2, the electrode film 2 of the piezoelectric vibrator piece 20 is
1 to form a slit 21a to expose a part of the piezoelectric vibrator piece 20, and to expose the electrode film 21 and the exposed piezoelectric vibrator piece 20.
The surface was adhesively fixed to the free end of the inner lead 51. The slit 11a of the electroconductive plated portion 11 shown in FIG. 1 and the slit 21a of the piezoelectric vibrator piece 20 shown in FIG. 2 are preferably used in combination, but either one can be an effective means for enhancing the impact resistance. .

【0017】次に接着固定する耐熱導電性接着剤につい
て説明する。
Next, the heat-resistant conductive adhesive that is adhesively fixed will be described.

【0018】図3(a)はセラミックベースとインナー
リード51の基部との接着固定、(b)は圧電振動子片
20とインナーリード51自由端との接着固定の様子を
示す図である。本実施例では、従来と同様、ポリイミド
系の接着剤を用いるが、従来の銀フィラーの接着剤(第
一の耐熱導電性接着剤)に代えてフィラーがアルミニウ
ムのもの(第二の耐熱導電性接着剤)も併用することと
した。アルミニウムをフィラーとする接着剤は、銀のも
のよりも樹脂分解開始温度が460℃と高いため、接着
力を持続することができる。但し、アルミニウムのフィ
ラーは、その体積固有抵抗が1×106[Ω・cm]と大
きいため、図3(a)(b)に示すように、初めに、よ
り高導電率の銀フィラーの接着剤31で導通をとりなが
ら接着させ、その後、アルミニウムフィラーの接着剤3
2を塗布して硬化させた。これにより、低融点ガラス封
止による場合にあっても、熱による接着力低下を第二の
耐熱導電性接着剤で補うことができ、従来の問題点を解
決することができた。
FIG. 3A is a diagram showing how the ceramic base and the base of the inner lead 51 are adhesively fixed, and FIG. 3B is a diagram showing how the piezoelectric vibrator piece 20 and the inner lead 51 free end are adhesively fixed. In this embodiment, a polyimide-based adhesive is used as in the conventional case, but aluminum filler is used instead of the conventional silver filler adhesive (first heat-resistant conductive adhesive) (second heat-resistant conductive agent). Adhesive) was also used together. An adhesive containing aluminum as a filler has a resin decomposition initiation temperature of 460 ° C., which is higher than that of silver, so that the adhesive strength can be maintained. However, since the aluminum filler has a large volume resistivity of 1 × 10 6 [Ω · cm], as shown in FIGS. 3 (a) and 3 (b), first, adhesion of a silver filler having higher conductivity is performed. Adhesive while maintaining continuity with agent 31, and then adhesive 3 of aluminum filler
2 was applied and cured. As a result, even if the glass is sealed with a low melting point glass, the decrease in adhesive strength due to heat can be compensated by the second heat-resistant conductive adhesive, and the conventional problems can be solved.

【0019】以上はインナーリード51で弾性保持され
た圧電振動子片20をセラミックベース10内に配した
例であるが、圧電振動子片20を直接セラミックベース
に接着固定する場合でも本発明は有効な手段となる。
The above is an example in which the piezoelectric vibrator piece 20 elastically held by the inner lead 51 is arranged in the ceramic base 10. However, the present invention is effective even when the piezoelectric vibrator piece 20 is directly adhered and fixed to the ceramic base. It becomes a means.

【0020】図4はその実施例を示す表面実装形圧電振
動子のパッケージ断面図であり、その両面に電極膜21
とスリット21aとを形成した上記圧電振動子片20の
一端を、図示のように、セラミックベース40の支持部
41に接着固定している。
FIG. 4 is a sectional view of the package of the surface mount type piezoelectric vibrator showing the embodiment, and the electrode films 21 are formed on both sides of the package.
One end of the piezoelectric vibrator piece 20 in which the slit 21a and the slit 21a are formed is bonded and fixed to the supporting portion 41 of the ceramic base 40 as shown in the drawing.

【0021】この支持部41には導電性メッキを施す
が、前述のように、メッキ部にスリットを形成してセラ
ミックの地肌を一部露出させる。更に、接着剤42とし
て、まず銀フィラーのものを塗布し、その後、アルミニ
ウムフィラーのもので覆う。そして接着剤42が硬化し
た後はガラスシール43を用いてセラミックベース40
とセラミックキャップ44とを封止する。これにより、
耐衝撃性に優れる表面実装形圧電振動子が得られる。な
お、図4はいわゆる片支持の例であるが、圧電振動子片
20の両端支持の場合も同様の効果が得られる。
The supporting portion 41 is plated with a conductive material. As described above, a slit is formed in the plated portion to partially expose the ceramic background. Further, as the adhesive 42, a silver filler is applied first, and then an aluminum filler is applied. After the adhesive 42 is cured, the glass base 43 is used to apply the ceramic base 40.
And the ceramic cap 44 are sealed. This allows
It is possible to obtain a surface mount type piezoelectric vibrator having excellent impact resistance. Although FIG. 4 shows an example of so-called one-sided support, the same effect can be obtained in the case of supporting both ends of the piezoelectric vibrator piece 20.

【0022】[0022]

【発明の効果】以上説明したように、本発明では、圧電
振動子片又は保持金具を接着する導電性メッキ部を、そ
の表面に酸化膜が形成される金属材料、例えばパラジウ
ムを含む合金で形成したので、金等の安定物質でメッキ
する場合に比べて接着剤による接着力が増す効果があ
る。
As described above, in the present invention, the conductive plated portion for adhering the piezoelectric vibrator piece or the holding metal member is formed of a metal material having an oxide film formed on its surface, for example, an alloy containing palladium. Therefore, there is an effect that the adhesive force by the adhesive is increased as compared with the case of plating with a stable substance such as gold.

【0023】本発明では、また、導電性メッキ部の接着
固定部位又は圧電振動子片の電極膜にスリットを形成し
てパッケージベースの底面部表面又は圧電振動子片表面
を一部露出させ、露出部を含んで接着固定するようにし
たので、メッキ部又は電極膜のみの場合に比べて接着面
積が広くなり、接着力が増す効果がある。
In the present invention, a slit is formed in the adhesive fixing portion of the conductive plated portion or the electrode film of the piezoelectric vibrator piece to partially expose the bottom surface of the package base or the piezoelectric vibrator piece surface. Since the adhesive is fixed by including the portion, the adhesive area becomes wider and the adhesive force is increased as compared with the case of only the plated portion or the electrode film.

【0024】更に、接着固定に際し、まず接着部位に第
一の耐熱導電性接着剤を塗布し、次いでその表面を高耐
熱性の第二の耐熱導電性接着剤で覆うようにしたので、
加熱時の接着力の低下が防止される。
Further, at the time of bonding and fixing, the first heat resistant conductive adhesive is first applied to the bonding site, and then the surface is covered with the second heat resistant conductive adhesive having high heat resistance.
A decrease in adhesive strength during heating is prevented.

【0025】これにより、低融点ガラス封止によっても
充分な耐衝撃性を有する表面実装形圧電振動子を提供す
ることができる。
As a result, it is possible to provide a surface-mounted piezoelectric vibrator having sufficient impact resistance even by sealing with a low melting point glass.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例に係る表面実装形圧電振動子
の正面図。
FIG. 1 is a front view of a surface-mounted piezoelectric vibrator according to an embodiment of the present invention.

【図2】本実施例で用いる圧電振動子片の正面図。FIG. 2 is a front view of a piezoelectric vibrator piece used in this example.

【図3】本実施例による接着固定の説明図であり、
(a)はインナーリードの基部とセラミックベースとの
接着状態、(b)は圧電振動子片とインナーリードの自
由端との接着状態を示す。
FIG. 3 is an explanatory view of adhesive fixing according to the present embodiment,
(A) shows a bonded state between the base of the inner lead and the ceramic base, and (b) shows a bonded state between the piezoelectric vibrator piece and the free end of the inner lead.

【図4】本発明の他の実施例に係る表面実装形圧電振動
子の側面断面図。
FIG. 4 is a side sectional view of a surface-mounted piezoelectric vibrator according to another embodiment of the present invention.

【図5】低融点ガラス封止による従来の表面実装形圧電
振動子の側面図。
FIG. 5 is a side view of a conventional surface mount type piezoelectric vibrator sealed with a low melting point glass.

【図6】従来の表面実装形圧電振動子のセラミックベー
スの平面図。
FIG. 6 is a plan view of a ceramic base of a conventional surface mount piezoelectric vibrator.

【符号の説明】[Explanation of symbols]

10,40,52…セラミックベース(パッケージ基
台) 11,55…導電性メッキ部 11a…スリット 20…圧電振動子片 21…電極膜 21a…スリット 31,32…耐熱導電性接着剤 51…インナーリード部(保持金具)
10, 40, 52 ... Ceramic base (package base) 11, 55 ... Conductive plated part 11a ... Slit 20 ... Piezoelectric vibrator piece 21 ... Electrode film 21a ... Slit 31, 32 ... Heat resistant conductive adhesive 51 ... Inner lead Section (holding bracket)

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 パッケージ基台の底面部に導電性メッキ
部を形成するとともに、圧電振動子片又は圧電振動子片
を導通保持するための保持金具の基部を前記導電性メッ
キ部に接着固定してなる表面実装形圧電振動子におい
て、 前記導電性メッキ部は、その表面に酸化膜が形成される
金属材料から成ることを特徴とする表面実装形圧電振動
子。
1. A conductive plated portion is formed on a bottom surface of a package base, and a piezoelectric vibrator piece or a base of a holding metal member for holding the piezoelectric vibrator piece in conduction is adhered and fixed to the conductive plated portion. In the surface mount type piezoelectric vibrator, the conductive plated portion is made of a metal material having an oxide film formed on the surface thereof.
【請求項2】 前記金属材料は、パラジウムを含む合金
であることを特徴とする請求項1記載の表面実装形圧電
振動子。
2. The surface-mounted piezoelectric vibrator according to claim 1, wherein the metal material is an alloy containing palladium.
【請求項3】 パッケージ基台の底面部に導電性メッキ
部を形成するとともに、圧電振動子片又は圧電振動子片
を導通保持するための保持金具の基部を前記導電性メッ
キ部に接着固定してなる表面実装形圧電振動子におい
て、 前記導電性メッキ部の前記接着固定部位にスリットを形
成して前記パッケージ基台の底面部表面を一部露出さ
せ、露出した基台部材及び導電性メッキ部に前記圧電振
動子片又は保持金具基部を接着固定したことを特徴とす
る表面実装形圧電振動子。
3. A conductive plating portion is formed on a bottom surface portion of a package base, and a piezoelectric vibrator piece or a base portion of a holding metal member for holding the piezoelectric vibrator piece in conduction is adhesively fixed to the conductive plating portion. In the surface mount type piezoelectric vibrator, a slit is formed at the adhesive fixing portion of the conductive plated portion to partially expose the bottom surface of the package base, and the exposed base member and conductive plated portion. A surface mount type piezoelectric vibrator, wherein the piezoelectric vibrator piece or the base of a holding metal is bonded and fixed to the.
【請求項4】 パッケージ基台の底面部に導電性メッキ
部を形成するとともに、圧電振動子片又は圧電振動子片
を導通保持するための保持金具の基部を前記導電性メッ
キ部に接着固定してなる表面実装形圧電振動子におい
て、 前記圧電振動子片の電極膜にスリットを形成して圧電振
動子片の一部表面を露出させ、露出した圧電振動子片表
面及び電極膜を前記保持金具の自由端又は導電性メッキ
部に接着固定したことを特徴とする表面実装形圧電振動
子。
4. A conductive plated portion is formed on the bottom surface of the package base, and a piezoelectric vibrator piece or a base of a holding metal member for holding the piezoelectric vibrator piece in conduction is adhered and fixed to the conductive plated portion. In the surface mounted piezoelectric vibrator, a slit is formed in the electrode film of the piezoelectric vibrator piece to expose a part of the surface of the piezoelectric vibrator piece, and the exposed surface of the piezoelectric vibrator piece and the electrode film are held by the holding metal fitting. A surface-mounted piezoelectric vibrator, wherein the surface-mounted piezoelectric vibrator is adhesively fixed to the free end of the plate or the conductive plating part.
【請求項5】 前記接着固定に用いる接着剤は、接着部
位に塗布される第一の耐熱高導電性接着剤と、この第一
の耐熱導電性接着剤を覆う第二の耐熱導電性接着剤とか
らなり、第二の耐熱導電性接着剤は第一の耐熱導電性接
着剤よりも高耐熱性のものであることを特徴とする請求
項1ないし4のいずれかの項記載の表面実装形圧電振動
子。
5. The adhesive used for the adhesive fixing is a first heat resistant and highly conductive adhesive applied to the bonding site, and a second heat resistant conductive adhesive covering the first heat resistant conductive adhesive. 5. The surface mount type adhesive according to claim 1, wherein the second heat resistant conductive adhesive has higher heat resistance than the first heat resistant conductive adhesive. Piezoelectric vibrator.
【請求項6】 前記第一及び第二の耐熱導電性接着剤
は、異なる成分のフィラーを含むポリイミド系接着剤で
あることを特徴とする請求項5記載の表面実装形圧電振
動子。
6. The surface mount piezoelectric vibrator according to claim 5, wherein the first and second heat resistant conductive adhesives are polyimide adhesives containing fillers of different components.
JP4300199A 1992-11-11 1992-11-11 Surface mounted piezo-electric vibrator Pending JPH06152307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4300199A JPH06152307A (en) 1992-11-11 1992-11-11 Surface mounted piezo-electric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4300199A JPH06152307A (en) 1992-11-11 1992-11-11 Surface mounted piezo-electric vibrator

Publications (1)

Publication Number Publication Date
JPH06152307A true JPH06152307A (en) 1994-05-31

Family

ID=17881930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4300199A Pending JPH06152307A (en) 1992-11-11 1992-11-11 Surface mounted piezo-electric vibrator

Country Status (1)

Country Link
JP (1) JPH06152307A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012222537A (en) * 2011-04-07 2012-11-12 Seiko Epson Corp Package, vibrator, oscillator and electronic device
US9705069B2 (en) 2013-10-31 2017-07-11 Seiko Epson Corporation Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012222537A (en) * 2011-04-07 2012-11-12 Seiko Epson Corp Package, vibrator, oscillator and electronic device
US9705069B2 (en) 2013-10-31 2017-07-11 Seiko Epson Corporation Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus

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