JPH06143047A - Hole machining tool and its manufacture - Google Patents
Hole machining tool and its manufactureInfo
- Publication number
- JPH06143047A JPH06143047A JP29296392A JP29296392A JPH06143047A JP H06143047 A JPH06143047 A JP H06143047A JP 29296392 A JP29296392 A JP 29296392A JP 29296392 A JP29296392 A JP 29296392A JP H06143047 A JPH06143047 A JP H06143047A
- Authority
- JP
- Japan
- Prior art keywords
- drilling tool
- hole drilling
- present
- coating layer
- drill
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drilling Tools (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は，ドリル，ドリルブッシ
ュ，リーマー，エンドミル等の穴加工工具及びその製造
方法に関し，詳しくは，半導体基板等の穴加工等に用い
る穴加工工具及びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a drilling tool such as a drill, a drill bush, a reamer, and an end mill, and a manufacturing method thereof, and more particularly to a drilling tool used for drilling a semiconductor substrate and the like and a manufacturing method thereof. .
【０００２】[0002]
【従来の技術】従来，半導体基板，ＰＣＢ基板等の穴加
工工具として，ドリル，ドリルブッシュ，リーマー，エ
ンドミル等が用いられている。これらの工具には，高強
度，高靭性超硬合金が使用されている。これらの超硬合
金は，ＷＣ−Ｃｏ系合金を基にするものであり，用途に
応じて種々の添加物が含有され，その特性が検討されて
いる。2. Description of the Related Art Conventionally, a drill, a drill bush, a reamer, an end mill, etc. have been used as a hole processing tool for a semiconductor substrate, a PCB substrate and the like. High strength and high toughness cemented carbide is used for these tools. These cemented carbides are based on WC-Co alloys, contain various additives depending on the application, and their characteristics have been studied.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら，これら
の高靭性超硬合金からなる穴加工工具として，高温硬度
が優れ，且つ曲り難いという両者をともに兼ね備えたも
のが得られておらず，加工精度や，寿命のいずれも満足
するに至っていない。However, as a hole drilling tool made of these high toughness cemented carbides, it is not possible to obtain a tool having both excellent high temperature hardness and being difficult to bend. ， None of the life has been satisfied.
【０００４】例えば，ＰＣＢ基板等に穿穴する際には，
従来の超硬合金を用いたドリルでは，ドリルの刃自体が
５００〜７００℃位にまで，温度上昇する為に，折損し
たり，折曲がりが生じたりして，不具合があった。For example, when making a hole in a PCB substrate,
The conventional drill using the cemented carbide has a defect that the blade itself is broken or bent due to the temperature rising up to about 500 to 700 ° C.
【０００５】そこで，本発明の技術的課題は，高温にお
いても硬度を保持し，且つ靭性を有するとともに，経済
的な穴加工工具を提供することにある。Therefore, a technical object of the present invention is to provide an economical hole drilling tool which retains hardness even at high temperature and has toughness.
【０００６】[0006]
【課題を解決するための手段】本発明によれば，刃部と
保持部とを有する穴加工工具において，少なくとも刃部
に炭化タングステン被覆層を有することを特徴とする穴
加工工具が得られる。ここで，本発明において，穴加工
用工具とは，ドリル，ドリルブッシュ，リーマー，エン
ドミル等の穴加工に用いられる工具を呼ぶ。According to the present invention, there is provided a hole drilling tool having a blade portion and a holding portion, characterized in that at least the blade portion has a tungsten carbide coating layer. Here, in the present invention, the hole drilling tool refers to a tool used for drilling a hole such as a drill, a drill bush, a reamer, and an end mill.
【０００７】また，本発明の穴加工用工具において，穴
加工工具の刃部は高温強度確保のためにＷＣ−Ｃｏを基
とし，Ｃｒ3 Ｃ2 を含む超硬合金が好ましい。Further, in the hole drilling tool of the present invention, the blade portion of the hole drilling tool is preferably a cemented carbide based on WC-Co and containing Cr 3 C 2 for securing high temperature strength.
【０００８】また，本発明によれば，前記穴加工工具を
製造する方法であって，少なくとも刃部の表面に気相化
学蒸着法（以下，ＣＶＤと呼ぶ）によって炭化タングス
テン被覆層を形成することを特徴とする穴加工工具の製
造方法が得られる。Further, according to the present invention, there is provided a method for manufacturing the hole drilling tool, wherein a tungsten carbide coating layer is formed on at least the surface of the blade portion by a vapor phase chemical vapor deposition method (hereinafter referred to as CVD). A method for manufacturing a hole drilling tool is obtained.
【０００９】ここで，本発明において，穴加工工具の少
なくとも刃部に形成する炭化タングステン被覆層は，タ
ングステンのハロゲン化合物，例えば，ＷＦ6 と炭素源
となる有機物，例えば，ベンゼン，トルエン等を水素還
元法により概ね７００〜９５０℃で反応させて生成す
る。In the present invention, the tungsten carbide coating layer formed on at least the blade portion of the hole drilling tool is a halogen compound of tungsten, for example, WF 6 and an organic substance serving as a carbon source, for example, benzene, toluene or the like, which is hydrogen. It is produced by reacting at about 700 to 950 ° C. by a reduction method.
【００１０】また，本発明において，炭化タングステン
層は，ＷＣ及びＷ2 Ｃのうちのいずれでも良いが，特に
靭性を要求される部分には，ＷＣ層が好ましく，一方，
硬度のみを要求される部分には，被覆が容易なＷ2 Ｃ層
でも良い。というのは，硬度はＷＣ被覆した場合より
も，Ｗ2 Ｃ被覆した場合の方が大きいためである。Further, in the present invention, the tungsten carbide layer may be either WC or W 2 C, but the WC layer is preferable particularly in the portion where toughness is required, while
A W 2 C layer, which can be easily coated, may be used in a portion requiring only hardness. This is because the hardness is greater in the case of W 2 C coating than in the case of WC coating.
【００１１】また，本発明では，所望の穴加工工具の形
状に加工した後の超硬合金に，炭化タングステンを被覆
して，この穴加工工具に高温での硬度を付与するととも
に，半導体基板やＰＣＢ基板等に対する加工精度を向上
させたものである。そして，この穴加工工具によれば，
ダイヤモンドに比べて明らかに低廉で且つほぼ所望の特
性が確保できる。Further, according to the present invention, the cemented carbide which has been processed into the desired shape of the hole drilling tool is coated with tungsten carbide to impart hardness to the hole drilling tool at a high temperature, and the semiconductor substrate and The processing accuracy of a PCB substrate or the like is improved. And according to this hole drilling tool,
Compared with diamond, it is significantly cheaper and almost desired characteristics can be secured.
【００１２】[0012]
【実施例】以下，本発明の実施例について，図面を参照
して説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１３】図１は本発明の実施例に係る穴加工工具の
形状を示す断面図である。図１の例は，穴加工工具とし
て，マイクロドリル１０を示している。このマイクロド
リル１０は，円柱形状で中心軸方向中央部寄りに円錐面
を有する保持部１と，この円錐面の頂点から中心軸方向
に沿ってのびる刃部２とを備え，この刃部２の先端は尖
っている。この刃部２の表面には，ＣＶＤによるＷＣ被
覆層６が形成されている。FIG. 1 is a sectional view showing the shape of a hole drilling tool according to an embodiment of the present invention. The example of FIG. 1 shows a microdrill 10 as a hole drilling tool. This microdrill 10 is provided with a holding portion 1 having a cylindrical shape and having a conical surface near the central part in the central axis direction, and a blade part 2 extending from the apex of the conical surface along the central axis direction. The tip is sharp. A WC coating layer 6 is formed on the surface of the blade portion 2 by CVD.
【００１４】ＷＣ被覆層６以外の工具形状の基材部分
は，Ｃｒ3 Ｃ2 を含むＷＣ−Ｃｏ系合金（以下，母材と
呼ぶ）からなり，焼結合金中のＷＣ粒子の粒径が，０．
５〜０．８mmであることが好ましい。また，表面のＷＣ
被覆層６は，ＷＣ粒子が厚み方向に２〜４個整列した長
さに相当する１〜３μｍの厚みに形成されている。この
ＷＣ被覆層６の厚みが１〜３μｍとした理由は，ＷＣ被
覆層６が厚くなれば，刃部２の曲がりも無く都合が良い
が，靭性が失われるため，不具合を生じるので１〜３μ
ｍという薄い厚さとした。The tool-shaped base material portion other than the WC coating layer 6 is made of a WC--Co alloy containing Cr 3 C 2 (hereinafter referred to as a base material), and the particle size of the WC particles in the sintered alloy is , 0.
It is preferably 5 to 0.8 mm. Also, the WC on the surface
The coating layer 6 is formed to have a thickness of 1 to 3 μm, which corresponds to a length in which 2 to 4 WC particles are aligned in the thickness direction. The reason why the thickness of the WC coating layer 6 is 1 to 3 μm is that if the WC coating layer 6 is thick, it is convenient because the blade portion 2 does not bend, but since the toughness is lost, a problem occurs, so that the thickness is 1 to 3 μm.
The thickness is as thin as m.
【００１５】また，一般に超硬合金からなる母材であれ
ば，刃部２のエッジも鋭くすることは容易であるが，本
発明のようにＣＶＤで形成したＷＣ被覆層６の場合は若
干劣る。In general, if the base material is made of cemented carbide, it is easy to sharpen the edge of the blade portion 2, but the WC coating layer 6 formed by CVD as in the present invention is slightly inferior. .
【００１６】しかし，通常の超硬合金では，元々早期に
刃部２の極突端は，磨滅しやすいが，本発明の実施例に
よれば，ＷＣ被覆層形成後の磨耗が大幅に改善されるの
で，この穴加工工具を用いると穴開け精度が実質的に改
善される。このように，母材の刃部にＷＣ被覆層６を形
成することで，ミニドリルの刃部自体の曲りが改善さ
れ，その結果として，基板等に設けた穴の直芯性も改善
された。However, in the case of ordinary cemented carbide, the pole tip of the blade portion 2 is likely to be worn out at an early stage, but according to the embodiment of the present invention, the wear after forming the WC coating layer is greatly improved. Therefore, using this drilling tool substantially improves the drilling accuracy. As described above, by forming the WC coating layer 6 on the blade portion of the base material, the bending of the blade portion of the mini-drill was improved, and as a result, the straightness of the hole provided in the substrate was also improved.
【００１７】次に上記した穴加工工具を製造する方法に
ついて説明する。Next, a method for manufacturing the above hole drilling tool will be described.
【００１８】重量で，１０％Ｃｏ，１％Ｃｒ3 Ｃ2 ，
０．５％ＴａＣ，０．２％ＶＣ，残部ＷＣからなる組成
を有するＷＣ−Ｃｏ系超硬合金を用意し，図１で示す形
状に加工して母材を得た。一方，反応槽をＡｒガスで十
分置換し，さらに母材表面をアセトン等で清浄して，油
脂等の付着がない状態にした。反応槽に母材が挿入され
るが，この母材の保持部１は，鋼等で固定され，中心軸
に沿って回転される。次に，ＷＦ6 ８０cc/ 分，Ｈ2 ４
２０cc/ 分，Ａｒ５０cc/ 分，Ｃ7 Ｈ8 ２７０cc/ 分の
ガス比で，約８７５℃で約１０分間反応させ，母材の刃
部に２μｍのＷＣ層６を被覆形成した。By weight, 10% Co, 1% Cr 3 C 2 ,
A WC-Co type cemented carbide having a composition of 0.5% TaC, 0.2% VC and the balance WC was prepared and processed into a shape shown in FIG. 1 to obtain a base material. On the other hand, the reaction tank was sufficiently replaced with Ar gas, and the surface of the base material was cleaned with acetone or the like so that oil and fat did not adhere. The base material is inserted into the reaction tank, and the holding portion 1 of the base material is fixed with steel or the like and rotated along the central axis. Next, WF 6 80cc / min, H 2 4
The reaction was carried out at a gas ratio of 20 cc / min, Ar 50 cc / min and C 7 H 8 270 cc / min at about 875 ° C. for about 10 minutes to form a 2 μm WC layer 6 on the blade of the base material.
【００１９】母材のみでは，抗折力（ＴＲＳ）４００ k
g/mm2 で，ロックウエル硬度（ＨＲａ）は９３．０であ
ったが，得られたＷＣ層６を有する工具は，ＨＲａにつ
いては９４．０に向上し，ヤング率については６７００
０kg/ mm2 に達した。また，本発明の実施例に係る加工
工具の高温硬度は，表１に示す通りであった。The base material alone has a transverse rupture strength (TRS) of 400 k
At g / mm 2 , the Rockwell hardness (HRa) was 93.0, but the tool with the obtained WC layer 6 improved to 94.0 for HRa and 6700 for Young's modulus.
It reached 0 kg / mm 2 . The high temperature hardness of the working tool according to the example of the present invention was as shown in Table 1.
【００２０】[0020]
【表１】 [Table 1]
【００２１】上記表１に示すように，本発明の実施例に
係る穴加工工具は，従来の被覆を施さない，母材のみの
合金に比べて，室温での硬度及び高温での硬度が共に優
れていることが判明した。As shown in Table 1 above, the hole drilling tool according to the embodiment of the present invention has a hardness at room temperature and a hardness at high temperature both as compared with the conventional alloy having no base material and only the base metal. It turned out to be excellent.
【００２２】また，図２は，本発明の実施例に係る加工
工具の磨耗量の測定方法を示す図である。図２で示すよ
うに，磨耗量は，加工前のドリル刃の直径ｄ0 から，加
工後のドリル刃の直径ｄを減じた値（ｄ0 −ｄ）で示さ
れる。FIG. 2 is a diagram showing a method for measuring the amount of wear of the working tool according to the embodiment of the present invention. As shown in FIG. 2, the wear amount is represented by a value (d 0 −d) obtained by subtracting the diameter d of the drill blade after processing from the diameter d 0 of the drill blade before processing.
【００２３】本発明の実施例に係る加工工具の磨耗量を
調べるために，刃部の径が０．６mmのドリルを用い，
１．６mm×３の寸法を有する基板を，８００００rpm の
回転速度で，軸方向に２．０ｍ／分の送りスピードで穴
開けした。その結果を図３に示す。図３の縦軸は磨耗
量，横軸はヒット数を夫々示している。図示のように，
本発明の実施例に係る加工工具は，ダイヤモンドを使用
した超硬合金工具には及ばないが，従来例に係る加工工
具よりも磨耗量が少なく，穴開け加工の寿命が１．４倍
と長くなった。In order to check the wear amount of the working tool according to the embodiment of the present invention, a drill having a blade portion with a diameter of 0.6 mm is used.
A substrate having a size of 1.6 mm × 3 was punched at a rotation speed of 80000 rpm and a feed speed of 2.0 m / min in the axial direction. The result is shown in FIG. The vertical axis of FIG. 3 represents the amount of wear and the horizontal axis represents the number of hits. As shown,
The working tool according to the example of the present invention is not as good as the cemented carbide tool using diamond, but has less wear than the working tool according to the conventional example, and has a long drilling life of 1.4 times. became.
【００２４】尚，本発明の実施例においては，炭化タン
グステン層として，ＣＶＤによるＷＣ被覆層を用いた
が，Ｗ2 Ｃ被覆層も条件を適宜調節することによって，
同様に形成することができる。Although the WC coating layer formed by CVD is used as the tungsten carbide layer in the embodiment of the present invention, the W 2 C coating layer can be adjusted by appropriately adjusting the conditions.
It can be similarly formed.
【００２５】[0025]
【発明の効果】以上，説明したように，本発明によれ
ば，高温硬度を保持するとともに，高靭性を有し，且つ
安価な穴加工工具及びその製造方法を提供することがで
きる。As described above, according to the present invention, it is possible to provide an inexpensive drilling tool which retains high temperature hardness, has high toughness, and a manufacturing method thereof.
【図１】本発明に実施例に係る穴加工工具の母材の形状
を示す正面図である。FIG. 1 is a front view showing the shape of a base material of a hole drilling tool according to an embodiment of the present invention.
【図２】本発明の実施例に係る穴加工工具の磨耗量の測
定方法を示す図である。FIG. 2 is a diagram showing a method of measuring the amount of wear of the hole drilling tool according to the embodiment of the present invention.
【図３】図２の測定方法による磨耗量の測定結果を示す
図である。FIG. 3 is a diagram showing a measurement result of an amount of wear by the measuring method of FIG.
１ 保持部 ２ 刃部 ５ 刃部先端 ６ ＷＣ被覆層 １０ マイクロドリル 1 Holding part 2 Blade part 5 Blade part tip 6 WC coating layer 10 Micro drill
Claims (4)
いて，少なくとも刃部に炭化タングステン被覆層を有す
ることを特徴とする穴加工工具。1. A hole drilling tool having a blade portion and a holding portion, wherein at least the blade portion has a tungsten carbide coating layer.
記刃部は超硬合金によって形成されていることを特徴と
する穴加工工具。2. The hole drilling tool according to claim 1, wherein the blade portion is made of cemented carbide.
記炭化タングステン被覆層は，ＷＣ及びＷ2 Ｃの少なく
とも一種からなることを特徴とする穴加工工具。3. The hole drilling tool according to claim 1, wherein the tungsten carbide coating layer is composed of at least one of WC and W 2 C.
法であって，少なくとも刃部の表面にＣＶＤによって炭
化タングステン被覆層を形成することを特徴とする穴加
工工具の製造方法。4. The method for manufacturing a hole drilling tool according to claim 1, wherein a tungsten carbide coating layer is formed on at least the surface of the blade portion by CVD.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4292963A JP2997972B2 (en) | 1992-10-30 | 1992-10-30 | Drilling tool and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4292963A JP2997972B2 (en) | 1992-10-30 | 1992-10-30 | Drilling tool and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06143047A true JPH06143047A (en) | 1994-05-24 |
| JP2997972B2 JP2997972B2 (en) | 2000-01-11 |
Family
ID=17788698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4292963A Expired - Fee Related JP2997972B2 (en) | 1992-10-30 | 1992-10-30 | Drilling tool and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2997972B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0713747A1 (en) * | 1994-11-23 | 1996-05-29 | August Beck GmbH & Co. | Method of fabrication of blanks for guide shoes for one insert reamers and method of finishing for one insert reamers |
| CN100450704C (en) * | 2006-08-01 | 2009-01-14 | 杭州兴源过滤机有限公司 | Process of machining shallow hole in mold |
| KR100933348B1 (en) * | 2009-07-24 | 2009-12-22 | (주)하나마이크로텍 | Straight |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61260906A (en) * | 1985-05-14 | 1986-11-19 | Sumitomo Electric Ind Ltd | Surface coated cemented carbide drill |
| JPH0343113A (en) * | 1989-07-06 | 1991-02-25 | Mitsubishi Materials Corp | End mill made of tungsten carbide group cemented carbide |
-
1992
- 1992-10-30 JP JP4292963A patent/JP2997972B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61260906A (en) * | 1985-05-14 | 1986-11-19 | Sumitomo Electric Ind Ltd | Surface coated cemented carbide drill |
| JPH0343113A (en) * | 1989-07-06 | 1991-02-25 | Mitsubishi Materials Corp | End mill made of tungsten carbide group cemented carbide |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0713747A1 (en) * | 1994-11-23 | 1996-05-29 | August Beck GmbH & Co. | Method of fabrication of blanks for guide shoes for one insert reamers and method of finishing for one insert reamers |
| CN100450704C (en) * | 2006-08-01 | 2009-01-14 | 杭州兴源过滤机有限公司 | Process of machining shallow hole in mold |
| KR100933348B1 (en) * | 2009-07-24 | 2009-12-22 | (주)하나마이크로텍 | Straight |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2997972B2 (en) | 2000-01-11 |
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