JPS60207703A - Tool member coated with artificial diamond - Google Patents

Abstract

PURPOSE:To prolong the service life of a tool member by coating its working face made of cermet or metallic basic member with the artificial diamond film in average thickness from 0.2 to 20mum formed by means of precipitation. CONSTITUTION:When preparing, as an example of basic member, a solid reamer of 10mm.phi in diameter, comprising 0.5% of TiC, 0.5% of VC, 5% of Co, and the remainder of WC in weight, putting it in a artificial diamond precipitation generator employing the filameted thermo-electron radioactive material made of, for example, W, as a means of heating and activating the mixture of reaction gases, and processing it under the following conditions; a reactive container made of quarts tube of 120mm. in outer-diameter, temperature of 700 deg.C, reactive time of 6hr, and so forth, the artificial diamond film of 4mum in average thickness is precipitated on the working face of this reamer. The service life of tool members, thus, can be prolonged.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a tool member in which at least the working surface of the tool is coated with an artificial diamond coating.

Conventionally, the workpieces are generally non-ferrous materials such as AA, Cu, Si, and their alloys, reinforced plastics and wood, and green compacts and pre-sintered bodies of cermets and ceramics. For forming processing, reamers or reamers are used in which natural diamond or artificial diamond produced by ultra-high-pressure, high-temperature synthesis is brazed to at least the tool working surface of a base member made of tungsten carbide (WC) cemented carbide or high-speed steel. A tool member such as a formed pite is used. However, these tool parts require extremely strict dimensional accuracy on the order of microns and a clean finished surface, so manufacturing them requires a lot of time and effort.
Combined with the high price of natural and synthetic diamonds, this results in significantly higher production costs.

In addition, when drilling small diameter holes in electronic integrated circuit boards made of alternating laminates of ceramics, fiber-reinforced plastics, etc. and conductive metals, we use the above-mentioned WCC cemented carbide high-speed steel, as well as die steel. Tool parts such as small-diameter punches and drills manufactured in It was something to behold.

Furthermore, the workpiece material may be nonferrous materials such as M, Cu, Si, Ti, and their alloys, die steel, or high-speed steel.

When cutting or molding materials such as stainless steel, WC-based superalloy, gold, other cermets, ceramics, and even artificial sapphire, as well as drilling round or irregularly shaped holes, stainless steel with a diameter of 100 μm to 1 mm is used. Wire saws are used that are made of steel wire with natural diamonds or artificial diamonds synthesized under high pressure and high temperature electrodeposited on the surface. However, these wire knots often break due to non-uniform distribution of diamond grains and intensive stress loading on the diamond grains, and have a short service life despite their high cost.

Therefore, from the above-mentioned viewpoint, the present inventors conducted research in order to manufacture tool members that have a longer service life with high dimensional accuracy and at low cost. For example, WCC cemented carbide titanium carbide (TiC) based cermet, titanium nitride (Ti
N ) based cermet, and θ titanium carbonitride (TiCN)
The base member is made of cermet such as base cermet, high-speed steel, die steel, etc., and for drills and punches, the base member is made of the above-mentioned cermet, die steel, high-speed steel, and Mo, W, and their alloys. If it is a wire saw, the wire that is the base member can be made of stainless steel, Cu-Be alloy, W and its alloy,
and MO and its alloy, and at least the tool working surface of these base members is made of a soft metal, in order to prevent peeling,
If necessary, an intermediate layer (average layer thickness, 1 μm or more, (preferably 1 μm −1 van ) as a means of heating and activating the conventional artificial diamond precipitation method, i.e., heating and activating the reaction mixture.

(a) A method of using a thermionic emitting material as described in, for example, JP-A No. 58-91100; (b) A plasma discharge method using high frequency as described in, for example, JP-A-58-135117. (C) A method of utilizing plasma discharge by microwaves as described in JP-A No. 58-110.494; When treated by any of the methods (a) to (C) above, , an artificial diamond film is precipitated and formed with extremely strong adhesion on at least the tool working surface of the base member, and this artificial diamond film has properties equivalent to natural diamond or artificial diamond synthesized at ultra-high pressure and high temperature. Because it is extremely hard and has excellent abrasion resistance when put into practical use, it ensures an extremely long service life.Moreover, the artificial diamond coating is uniform on the surface of the base member. Since the precipitate is formed with a film thickness of
It was discovered that if the dimensions of the base member were made accurate, the dimensional accuracy would be high and the manufacturing cost would be low.

The present invention has been made based on the above findings, and includes artificial diamond having an average thickness of 02 to 20 μm formed by forming at least the tool working surface of a ceramic or metal base member by an artificial diamond precipitation method. This invention is characterized by an artificial diamond-coated tool member formed by coating with a film.

In the tool member of the present invention, the average layer thickness of the artificial diamond coating is limited to 02 to 20 μm because if the average layer thickness is less than 0.2 μm, the desired effect of improving wear resistance cannot be obtained. When the average layer thickness exceeds
This is because the film is more likely to peel off due to chipping.

Next, the tool member of the present invention will be specifically explained using examples.

Example 1 As a base member, TiC: 0.5 cm, VC:
A solid reamer with a diameter of 10 mm and having a composition consisting of 0.5% Co, 25% Co, and WC: residue was prepared, and this reamer was used as a means for heating and activating the reaction mixture gas. For example, a quartz tube with an outer diameter of 120 wφ is charged into an artificial diamond precipitation generating apparatus as described in Japanese Patent Application Laid-Open No. 58-91100, which uses a thermionic emitting material such as a filament made of W.

Reaction mixture gas composition: CH, /H2-5/1 in volume ratio
000° Distance between thermionic emitting material (W filament) and reamer tool working surface: 15 mm.

The atmospheric pressure inside the reaction vessel was 10 torr.

Heating temperature of thermionic radiation material: 2000°C.

The heating temperature of the tool working surface of the reamer by the thermionic emitting material is near 00°C.

Reaction time = 6 hours.

By processing under the following conditions, an artificial diamond film with an average layer thickness of 4 μm was deposited on the tool working surface of the reamer.

Then, using the resulting artificial diamond-coated reamer of the present invention, the workpiece was processed into A1 alloy (J-K5830).

Processing speed: 900m/+nm.

Sending #): 0.1 wn/rev.

Under the conditions, diameter: 10Tunφ x depth near o glue was processed, and the number of pieces that could be processed up to 2 with a diameter deviation of 8μm from the target size was measured.Toko mouth, 82
00 pieces, which indicates a fan life equivalent to that of a similar type of reamer with commercially available natural diamonds brazed to the tool working surface.

Example 2 As a base member, high speed steel (SxH-
9) was prepared, and this formed pite was charged into the same artificial diamond precipitation chemical equipment as used in Example 1, and the reaction mixture gas composition: CH4/H2/Ar by volume ratio.
-3/1000/1000° Atmospheric pressure inside the reaction vessel 0.8 torr.

Distance between thermionic emitting material (W filament) and the tool working surface of the formed pite: 35N.

Heating temperature of the tool working surface of the formed pite: 550°C.

Heating temperature of thermionic radiation material: 1500°C.

Reaction time = 2 hours.

In addition, in order to activate the reaction mixture gas, a two-turn coil was installed on the surface of the formed pite and a high frequency was applied to it. Average layer thickness =
An artificial diamond film of 2 μm was deposited.

Next, the resulting artificial diamond-coated foamed bite of the present invention was used to produce a workpiece: a brass round bar with a diameter of 70 mm.

Cutting speed: 160 m/+nia.

Feed: 0.12 run/rev,.

The above-mentioned workpiece was subjected to R processing under the following conditions, and the accuracy of R was O.
, O'2 M was measured, and the number of pieces processed until it came off was 220 pieces, which was the same service life as a similar type of formed pite with commercially available natural diamond brazed to the tool working surface.

Example 3 As a base member, TiC:O, '5% by weight.

TaC: 1%, VC: 1.5%, Co: 1
2ch, WC: Manufactured from cemented carbide having a composition consisting of WC, and having a diameter of 1. A small-diameter punch was prepared for making the hole m, and this small-diameter punch was similarly charged into the same artificial diamond precipitation generating apparatus as used in Example 1, and the reaction mixture gas composition: CH, /H2, ,.

Distance between the 5/1000°W filament and the tool working surface of the punch tip: 15.

The atmospheric pressure inside the reaction vessel was 10 torr.

Heating temperature of W filament: 2000°C.

Heating temperature of the tool working surface at the tip of the punch: 'l'ootl:
.

Reaction time: 15 hours.

By processing under the following conditions, an artificial diamond film having an average layer thickness of 1 μm was deposited on the tool working surface of the tip of the small diameter punch.

Next, using the artificial diamond-coated small-diameter punch of the present invention obtained as a result and a conventional small-diameter punch of the same material and dimensions except that no artificial diamond film was formed, M
10 plastic substrates with a thickness of 0゜5M are stacked together to form an integrated circuit using CU and CU, and holes are drilled at a speed of 150 times per minute until the end of the service life. Akira measured the number of pieces. The service life was defined as the time when the hole-machined surface became rough and machining debris remained on it due to wear at the tip of the punch.

As a result, the artificial diamond-coated small diameter punch of the present invention is
It was possible to make 88,000 holes during its service life, whereas conventional small-diameter punches required only s.
, oo'o holes were drilled until the end of its service life.

Example 4 As a base member, on the surface of a small-diameter punch body made of stainless steel (SUS 310), a reaction gas composition of 2%, WF6:4%, CH, ○H was applied.
: 15%, H2: 35%, Ar: 46%.

Reaction gas flow rate: 2t/l.

Heating temperature: 980°C.

Reaction time: 25 hours.

By applying chemical vapor deposition treatment under the conditions of:
A small-diameter punch for forming a W-deposited layer with a diameter of 1 mm was prepared, with a 200 μm W-deposited layer formed thereon, and this small-diameter punch was placed in the same artificial diamond precipitation generator as used in Example 1, and the reaction mixture was performed. Gas composition: CH4/ H2-5/ by volume ratio
1000.

The atmospheric pressure inside the reaction vessel was 1 torr.

Distance between W filament and punch surface: 30 mm.

Heating temperature of punch surface: 600°C.

Reaction time = 1 hour.

In addition to the above conditions, the entire length of the small-diameter punch was An artificial diamond film having an average layer thickness of 2 μm was deposited over the surface via the W vapor-deposited layer.

Next, using the resulting small-diameter punch coated with artificial diamond of the present invention and a conventional small-diameter punch of the same material and dimensions except that no artificial diamond film and W vapor deposition layer were formed, AA203: 90 cm, MgO: 8 %
, 5i02: Compounding composition consisting of 2% (capacity 1)
A ceramic pre-sintered body for an IC board with a thickness of 1 g is made by pre-sintering a compacted powder body having a temperature of 900°C.
The holes were drilled at a speed of 100 times/minute, and the number of holes drilled until the end of the service life was measured. In addition, as the wear of the punch increases, the resistance to drilling increases, and minute chips and chips will occur on the hole-machined surface of the workpiece, but the time at which these chips and chippings occur will depend on the service life. This was defined as the service life. As a result, the artificial diamond-coated small-diameter punch of the present invention exhibits excellent wear resistance,
It was possible to drill 88,000 holes before the end of its service life. On the other hand, the conventional small-diameter punch described above had a service life of 1000 punches.

Example 5 The material of the small diameter punch body was alloy tool steel (SKD-61), and instead of the W vapor deposition layer, W with an average grain size of 1 μm or less was used.
and W2C, and the ratio is the area ratio, W /
Average layer thickness consisting of W2C = 1/2 = 500 μm
evaporated layer.

Reactant gas composition: 2% WF6, 7% CH4
: 3%, H2: 40%, Ar: remainder.

Reaction gas flow rate: 2 A/mia.

Heating temperature: 1000℃.

Reaction time = 30 hours.

An artificial diamond-coated small-diameter punch of the present invention was manufactured under the same conditions as in Example 4, except that chemical vapor deposition was performed under the following conditions.

Next, the resulting small-diameter punch coated with artificial diamond of the present invention and a conventional small-diameter punch of the same material and dimensions except that no artificial diamond film or vapor deposition layer were formed were subjected to hole punching under the same conditions as in Example 4. is where the processing was performed.

The artificial diamond coated small diameter punch of the present invention is 105,0
The service life of the conventional small-diameter punch described above reached the end of its life after drilling 6C1 holes, but the life of the conventional small-diameter punch described above reached its life after drilling 3,500 holes.

Example 6 As a base member, a wire made of stainless steel (SUS 310) and having dimensions of diameter: 0.2wnφ x length: 250+u+ was prepared, and this wire was used in Example 1.
The surface of the wire was prepared under the same conditions as in Example 2, except that it was charged into the same artificial diamond precipitation generator as used in Example 2, and the three turns were charged in a spiral shape, and the reaction time was 20 hours. An artificial diamond film with an average layer thickness of 20 μm was deposited on the sample.

Next, a commercially available artificial diamond coated wire of the present invention obtained as a result and a stainless steel wire made of the same material and of the same dimensions with ultra-high pressure and high temperature synthesized artificial diamonds electrodeposited on the surface of the wire with an average particle size of 45 μm were prepared. A conventional artificial diamond-coated wire was used as a wire, and an artificial sapphire round bar with a diameter of 2 Bφ was cut into rings at a wire speed of 2 mm/wiu and a wire load of 3 kg.

When we measured the number of rounds until the wire was cut, the former showed a significantly superior service life, cutting the wire 20 times, while the latter only cut the wire 5 times. It was something that didn't exist.

Example 7 As a base member, a wire made of Cu-Be alloy (containing Be: 1 weight factor) and having dimensions of diameter: 05 mm x length: 250 m was prepared, and the surface of this wire was coated with a reaction layer. A W vapor deposition layer having an average layer thickness of 200 μm was formed under the same conditions as in Example 4 except that the time was changed to 16 hours. An artificial diamond-coated wire of the present invention was produced by depositing an artificial diamond coating with a layer thickness of 2 μm. When this artificial diamond-coated wire of the present invention was used as a wire saw and a cutting test was conducted under the same conditions as in Example 6, it was possible to perform 26 round cuts until the end of the service life.

As mentioned above, the artificial diamond-coated tool member of the present invention has extremely excellent wear resistance due to the artificial diamond film bonded with strong adhesion, and can be used for reamers, formed pits, small-diameter punches and drills for drilling. Furthermore, when used in practical use as cutting tool components such as cutting slots and away tips, as well as various processing tool components such as wire saws, it exhibits excellent wear resistance and has a significantly extended service life. It can be measured.

Applicant: Mitsubishi Metals Corporation Agent Tomi 1) Kazuo and 1 other person

Claims (1)

[Claims] An artificial diamond-coated tool member formed by coating at least the working surface of a cermet or metal base member with an artificial diamond film having an average layer thickness of 0.2 to 20 μm formed by an artificial diamond precipitation method.