JPH06139539A - Magnetic head slider and its production and hard disk drive device - Google Patents

Abstract

PURPOSE:To improve high-frequency characteristics by lowering the inductance of yokes while substantially obviating the degradation in output. CONSTITUTION:This floating type magnetic head slider is constituted by forming the gap joint surfaces inclusive of parts near track parts 6 of the yokes 36 for winding of small projecting lines 37 of a small width to lower the inductance and covering one or both flanks of the yokes 36 inclusive of the small projecting lines 37 with nonmagnetic materials, thereby constituting winding parts 3. A pair of grooved notches 2131 are formed on the butt surfaces 13 of a large substrate 11 and small substrate 12 formed of a ferromagnetic oxide. The projecting lines 32 of the width (t) are made to remain between the groove battoms of the notches of the small substrate 12 and the small projecting lines 37 of the further narrower width t1 are made to remain in the open surfaces of the grooves. Glass 33 is packed into the notches 31 of the small substrate 12 and both flanks of the projecting lines 32 and the small projecting lines 37 are coated with the glass. Both substrates are then butted against each other and are subjected to outside shape working, by which the floating type magnetic head slider is formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider in a hard disk drive (HDD) device in which a slider body formed of a ferromagnetic oxide and a winding yoke are butted against each other and integrally joined, and a method of manufacturing the same. And a hard disk drive device equipped with the magnetic head slider.

[0002]

2. Description of the Related Art As shown in FIG. 11, such a head slider (14) is a flat slider body made of ferromagnetic oxide.
(2) and a winding portion (3) including a yoke (36) (36) made of a ferromagnetic oxide and glass-bonded to the tip of the main body. Parallel air bearings with a certain height extending in the same direction
(5) (5) is formed, and the track portion (6) including the gap spacer (64) and the winding groove (4) are formed at the joint portion between the main body and the yoke.

In the above magnetic head slider, the width t of the winding yoke (36) is substantially equal to the width w of the air bearing portions (5) and (5). Since the width w of the air bearing portion 5 is about 400 μm, the width t of the yoke, that is, the width of the ferromagnetic oxide forming the yoke is too large, and the inductance of the magnetic head increases. In order to improve the high frequency characteristics in response to the higher recording density, it is necessary to reduce the inductance as much as possible, and the conventional yoke shape cannot handle it.

A slider has been proposed in which the width t of the yoke (36) is smaller than the width w of the air bearing portions (5) (5) (Japanese Patent Laid-Open No. 2-249120). However, when the width t of the yoke (36) is made smaller than the width w of the air bearing portion (5), the width t of the yoke is 20 because of the strength of the yoke (36).
The limit is about 0 μm, and if it is less than this, the strength becomes weak, cracks and cracks easily enter the yoke and the joint between the yoke and the slider body in the manufacturing process, and there is a problem that the yield is remarkably reduced.

The applicant has previously proposed a magnetic head slider (14) having a structure shown in FIG. 12 (Japanese Patent Application No. 3-286).
003). In the magnetic head slider (14), the width t of the yoke (36) is made smaller than the width w of the air bearing portion (5), and the side surface on one side or both sides of the yoke (36) is made of glass (33).
To form a wide winding section (3) and cover the glass (3
3) Reinforce the yoke (36) with the yoke (3
The joint between 6) and the slider body (2) is strengthened.

[0006]

[Problems to be Solved] In the above magnetic head slider, the width t of the yoke (36) is reduced to reduce the inductance and improve the high frequency characteristics. As a result, the output tends to decrease. When the yoke width t becomes narrower than a certain limit, the output sharply drops. Therefore, there is a limit in narrowing the yoke width t to reduce the inductance.

[0007]

[Means for Solving the Problems]

(Structure) The magnetic head slider (14) is configured such that the gap joint surface including the vicinity of the track portion (6) of the winding yoke (36) is formed into a narrow small protrusion (37) to reduce the inductance and reduce the small protrusion. One or both side surfaces of the yoke (36) including the strip (37) are covered with a non-magnetic material to form the winding portion (3).

The magnetic head slider is a large substrate formed of a ferromagnetic oxide and processed into a slider body.
(11) and a pair of small substrates (12) formed of a ferromagnetic oxide and processed into a winding yoke, at least the abutting surface (13) of the small substrate (12) penetrating both the front and back surfaces of the substrate. Groove-shaped notches (31) (31) are formed, and a ridge (32) corresponding to the width t of the winding yoke is left between the groove bottoms of the notches (31) (31). ) Between the groove openings of (31), the small ridges (37) of width t _{1 which} are narrower than the ridges (32) of width t left between the groove bottoms.
Leaving, the step of forming the winding groove (4) on the abutting surface (13) of one or both of the large substrate (11) and the small substrate (12), at least the notch (31) of the small substrate (12). ) To glass (3
3) and other non-magnetic material and cover both sides of the small protrusions (37) with the non-magnetic material, and the abutting surfaces (13) and (13) through the gap spacer (64) on both substrates (11). ) (12) butts and heats to bond both substrates (11) (12)
(1) is formed, the front surface of the small substrate (12) is shaved to a thickness corresponding to the thickness of the yoke, and the outer bearing processing such as air bearing processing and track processing is performed in a series of steps. To be

The hard disk drive device (7) supports the magnetic head slider (14) having the above-described structure on the hard disk (71) which is rotatably supported by the main body of the device and is rotating at a high speed by the rotating mechanism. It is supported by and is made to approach and separate.

(Operation and effect) Since the winding portion of the magnetic head slider is thinned only in the vicinity of the gap junction portion of the yoke, and the width t of the yoke is not narrowed below a necessary limit, the inductance of the magnetic head slider is reduced. It is possible to cope with recording and reproduction of a high frequency signal by lowering, and the output is slightly reduced, so that the efficiency can be improved.

[0011]

EXAMPLE As shown in FIG. 2, a hard disk drive device (7) rotatably supports a plurality of hard disks (71) in parallel on a device body (73) and is driven to rotate at a high speed by a rotation mechanism (not shown). is doing. A head support mechanism (72) having a magnetic head slider (14) attached to the tip corresponding to each hard disk (71) is provided in the apparatus main body (73), and the magnetic head is controlled by the positioning mechanism (74). The slider (14) is brought close to the hard disk (71) to record or reproduce a signal on the hard disk (71).

The magnetic head slider (14) is shown in FIG.
A slider body (2) made of a ferromagnetic oxide and having an air bearing portion (5), and a winding yoke (36) made of a ferromagnetic oxide and joined to the slider body. The slider body (2) and yoke (36)
A winding groove (4) is opened through across the abutting surface with. One or both side surfaces of the yoke (36) are covered with a first glass (33) to form a winding portion (3), and the yoke (36) and the slider body (2) are connected to the first glass (33). The second glass (22) has a softening point lower than that of the above ().

The magnetic head slider (14) of the present invention
Is manufactured by the process of FIGS. As shown in FIG. 3, on the abutting surfaces (13) of a pair of large and small substrates (11) (12) formed of a ferromagnetic oxide such as Mn-Zn single crystal ferrite, gap depth regulating grooves ( 41) Grind (41) with a diamond grindstone. In addition, a small board (1
Gap depth control groove (41) is provided on the abutting surface (13) of 2).
The groove-shaped notch (31) at a narrower interval than the processing width t _{0 of} the winding portion (3) described later and deeper than the thickness of the yoke (36) after the final processing, A t-shaped ridge (32) is formed. The width t of the protrusion (32) remaining between the notches (31) (31) is determined by the inductance required for the yoke (36) formed by the post-processing. Groove notch (31)
The width of the groove opening is wider than the groove bottom width.
At the tip of 2), which is larger than the width of the track,
Small protrusions (37) having a width t ₁ smaller than the width t of 2) are formed. Also, on the abutting surface (13) of the large substrate (11),
A groove-shaped notch (21) having the same width as the opening width of the groove-shaped notch (31) and for shallow junction is formed at a position facing the groove-shaped notch (31) formed in the small substrate (12). The narrow ridge (24) is formed so as to face the small ridge (37).

As shown in FIG. 4, the first glass (33) is provided in the gap depth regulating groove (41) and the groove-shaped notch (31) of the small substrate (12).
And the gap depth regulating groove (41) and groove-shaped notch (21) of the large substrate (11) are filled with a second glass (22) having a softening point lower than that of the first glass (33). Both boards (11)
Both sides of the ridge (32) and the small ridge (37) (24) of (12) are covered with glass. The first glass (33) reinforces the yoke (36) of the magnetic head slider (14) in FIG. 1, is a high melting point glass, and is the second glass (22).
Is a low-melting glass that joins the slider main body (2) and the winding portion (3) in FIG.
The components and characteristics of each glass material are shown in Table 1. However, the coefficient of linear thermal expansion is the average coefficient of linear thermal expansion between room temperature and 300 ° C., the softening point is the temperature at which the viscosity reaches ^10.65 poise, and the filling temperature is the maximum history temperature of the glass filling process.

[0015]

[Table 1]

The abutting surfaces of both substrates (11) and (12) are polished to a mirror surface, and SiO _{2 is applied} to the abutting surfaces of both substrates or one of the substrates.
The non-magnetic thin film of 2 is sputtered to a thickness of 0.2 μm to form the gap spacer (64), and the concave surfaces (2
3) After grinding (34), both substrates (11) (1
The small glass strips (24) (37) between the groove-like notches (21) (31) of 2) are butted against each other to form the winding groove (4) and the second glass (22) is softened. But the first glass (33)
Is heated while controlling the temperature so that it does not soften, and the two substrates (11) and (12) are bonded and integrated by the melting point of the second glass (22) to form a welded wafer (1).

Next, as shown in FIG. 6, the front surface of the welded wafer (1) on the side of the small substrate (12) is ground and removed leaving a predetermined thickness of the yoke (36) to expose the first glass. Further, in order to regulate the width t _o of the winding portion (3) including the yoke (36), cuts (35) (35) are formed through the upper and lower surfaces on the small substrate (12) side of the wafer (1). Open.

Next, as shown in FIG. 7, the air bearing (5)
(5) The air inflow end (51) and the air outflow end (52) are ground into slopes. After patterning the part that should become the track part (6) by photolithography, both sides of the track part (6) are scraped off by ion milling etc. to form a recess (61), and the predetermined gap length is regulated. To do.
As indicated by the one-dot chain line L, the wafer (1) is sliced in units of one slider to obtain the head slider shown in FIG.

In the magnetic head slider obtained by the above-mentioned manufacturing method, both surfaces of the yoke (36) are covered with the first glass (33) (3
Although the width t _o of the winding portion (3) is increased by coating with 3), the width t of the yoke itself can be reduced, and the width of the small protrusions (24) (37) including the track portion (6) can be reduced. The width t1 can be made smaller.
Therefore, the width of the ferromagnetic oxide occupying the winding portion (3) can be reduced to reduce the inductance, which corresponds to a high recording density, and the decrease in output can be suppressed to a small level. FIG. 8 shows that for the magnetic head slider, the yoke width t and the small protrusion width t ₁ are
When each has the same narrow width of 50 μm (first example), t is a wide width of 150 μm, and t ₁ is a narrow width of 50 μm (second example),
6 is a graph comparing the output, the inductance, and the efficiency per unit track width when both t and t ₁ have a wide width of 150 μm (third example). The measurement conditions are frequency 5.6MHz, relative speed to hard disk 6.3m /
The recording current is 16 mAp-p and the number of turns is 35 turns. As is clear from this experimental result, when the entire yoke width is reduced from 150 μm to 50 μm (the third example → the first
Example), the inductance is reduced by about 23%, but the output is also about 1.
Since it is 7% lower, the efficiency is 5% lower. On the other hand, when the width t of the ridge portion of the yoke width is the same and t ₁ = 50 μm only in the vicinity of the track portion (third example → second example), the decrease in output is slight and the efficiency is low. Increase by about 8%. Moreover, the magnetic head slider of the present invention (14)
The first glass (33) on the side of the yoke is the slider body
Since it is welded to the second glass (22) of (2), the joining strength between the yoke (36) and the slider body (2) is increased, and
Since both sides of the yoke are covered with glass, the mechanical strength of the yoke can be sufficiently secured.

Winding yoke (36) and slider body (2)
The second glass (22) is joined to the second glass (22) by softening and fusing. At this time, the first glass (33) has a high melting point and thus does not melt. Therefore, since the first glass (33) does not flow into the winding groove (4) and the opening of the winding groove (4) is not blocked, it is easy to wind the coil around the magnetic head slider (14). Can be done.

In the embodiment of the present invention, the winding portion (3) is formed by covering only the inside of the notch of the yoke (36) or only the outside of the yoke with the first glass (33). Is also possible. Even in these cases, since the width t of the yoke itself can be made small, the inductance can be reduced and high recording density can be accommodated, and one side of the yoke can be reinforced by the glass (4) to prevent the yoke from being damaged. The small protrusions (37) may be formed only on the yoke side, the small protrusions (24) on the slider body (2) side may be omitted, and the abutting surface on the large substrate (11) side may be flat. .

The winding groove (4) is provided with a concave groove only on the abutting surface of either the large substrate (11) or the small substrate (12), and the concave groove is omitted on the other substrate. You can also Similarly, the gap depth regulating groove (41) may be opened only on one of the large substrate (11) and the small substrate (12), and the gap depth regulating groove to the other substrate may be omitted. . Further, before joining the large and small substrates (11) and (12), a ferromagnetic metal thin film such as sendust is formed on the abutting surface of either one of the substrates or both by sputtering or the like, and the gap spacer is formed. By joining both substrates via (6),
It is possible to form a so-called MIG head slider having a high recording density, which has a ferromagnetic metal thin film on one side or both sides of the gap portion. In the embodiment, the winding portion (3) is formed on each of the air outflow ends of the two air bearings (5) (5), but it is possible to form the winding portion on only one of them. Of course.

The above description of the embodiments is for explaining the present invention, and should not be construed as limiting the invention described in the claims or limiting the scope. Further, the configuration of each part of the present invention is not limited to the above-described embodiment, and it is needless to say that various modifications can be made within the technical scope described in the claims such as changing the order of manufacturing steps.

[Brief description of drawings]

FIG. 1 is a perspective view of a slider of the present invention.

FIG. 2 is a perspective view of a hard disk drive device having a magnetic head slider.

FIG. 3 is a perspective view showing a state in which a pair of substrates is grooved in the magnetic head slider manufacturing process of the invention.

FIG. 4 is a perspective view showing a state in which a groove is filled with glass in the same as above.

FIG. 5 is a perspective view showing a state in which a pair of substrates are joined together in the above.

FIG. 6 is a perspective view of the same as above, in which the front surface is polished to expose the glass of the small substrate and a cutout for determining the width of the winding portion is formed.

FIG. 7 is a perspective view showing a state in which an air bearing portion and a track portion are formed in the above.

FIG. 8 is a graph showing the relationship between the width of the ridges and the width of the small ridges of the yoke, and the output, inductance, and efficiency.

FIG. 9 is a perspective view showing a state in which a pair of substrates is grooved in a conventional magnetic head manufacturing process.

FIG. 10 is a perspective view showing a state in which a pair of substrates is filled with glass in the same as above.

FIG. 11 is a perspective view of a conventional magnetic head slider.

FIG. 12 is a perspective view of a magnetic head slider previously proposed by the applicant.

[Explanation of symbols]

 (11) Large board (12) Small board (2) Slider body (22) Second glass (3) Winding section (32) Protrusion (33) First glass (36) Yoke (37) Small protrusion (4) ) Winding groove (5) Air bearing part (6) Track part (7) Hard disk drive device

Claims (3)

[Claims] 1. An air bearing portion made of a ferromagnetic oxide.
The slider body (2) having (5) and the winding yoke (36) made of a ferromagnetic oxide are butt-joined with each other with a gap spacer (64) interposed, and the air bearing portion ( 5) In the flying type magnetic head slider (14) in which the track portion (6) is formed above, the winding yoke (36) includes the vicinity of the track portion (6) and has a narrow butted joint surface. The winding portion (3) is formed by forming a ridge (37) to reduce the inductance and covering one or both sides of the yoke (36) including the small ridge (37) with a non-magnetic material. A floating magnetic head slider. 2. At least one of a large substrate (11) formed of a ferromagnetic oxide and processed into a slider body and a small substrate (12) formed of a ferromagnetic oxide and processed into a winding yoke. A pair of groove-shaped notches (31) (31) are formed on the abutting surface (13) of the small substrate (12) so as to penetrate both sides of the substrate, and winding is provided between the groove bottoms of the notches (31) (31). The ridge (32) corresponding to the width t of the wire yoke is left, and the notch (31) (3
The step of leaving a small ridge (37) having a width t ₁ narrower than the ridge (32) having a width t left between the groove bottoms of ₁ ), the large substrate (11) and the small substrate (12). ), The step of forming the winding groove (4) on either or both of the abutting surfaces (13), at least the notch (31) of the small substrate (12) is filled with a non-magnetic material such as glass (33). , A step of covering both side surfaces of the small ridge (37) with a non-magnetic material, butting both substrates (11) (12) against the abutting surfaces (13) (13) via the gap spacer (64) and heating. Process to bond both substrates (11) and (12) to form the bonded wafer (1), scrape the front surface of the small substrate (12) to a thickness corresponding to the thickness of the yoke, process the air bearing part, and track. A method of manufacturing a flying type magnetic head slider by a step of performing external processing such as part processing. 3. A rotation mechanism for driving a hard disk (71) rotatably supported by a main body (73) of the apparatus, and a magnetic head slider (14) supported at a tip thereof, and a magnetic head slider ( Support mechanism (72) that moves the (71) closer and away, and the magnetic head slider (14) for the hard disk (71)
The magnetic head slider (14) is composed of a positioning mechanism (74) for controlling the position of
By forming the abutting joint surface including the vicinity of the track portion (6) into a narrow small ridge (37) to reduce the inductance, the small ridge (3
A hard disk drive device, characterized in that one or both side surfaces of the yoke (36) including 7) are covered with a non-magnetic material to form a winding portion (3).