JPS63247901A - Manufacture of magnetic head - Google Patents

Abstract

PURPOSE:To improve productivity by adhering a magnetic material on the joint plane of a pair of blocks made of a non-magnetic material by providing a groove for operating gap formation having a non-parallel side set not in parallel with the joint plane and filling the non-magnetic material to increase yield. CONSTITUTION:The grooves 12 and 22 having the non-parallel sides not in parallel with the joint planes are provided on the joint planes 13 and 23 of the blocks 1 and 2 made of the non-magnetic material, and a groove 20 for winding is provided by crossing orthogonally to the groove 22 on the joint plane 23 of the block 2. The magnetic material 4 is adhered on the grooves 12 and 22, and the non-magnetic material 16 is filled in the grooves 12 and 22 on which the magnetic material 4 is adhered. Next, the unrequired parts of the non-magnetic material 6 and the magnetic material 4 are removed, and the joint plane having prescribed track width (t) is exposed at the part of the magnetic material 4. Next, a gap 3 is formed on the joint planes 13 and 23 of the blocks 1 and 2, and the joint planes 13 and 23 are jointed via the gap 3 by butting the track width (t). A jointed block is cut at a position 7 leaving the non-parallel sides of the grooves 12 and 22, then, a magnetic head body can be segmented. In such a way, it is possible to improve the yield.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic head, for example, a magnetic head for a magnetic disk device used as an external storage device. The present invention relates to a method of manufacturing a magnetic head suitable for reproduction.

[Prior Art] Recently, storage devices such as magnetic disk devices have become smaller and have larger capacities, and it is essential to increase the track density and the linear B density. For this reason, magnetic heads are also becoming narrower in track and gap. Further, in order to correspond to high coercive force recording media, a magnetic head using a magnetic material having characteristics of low coercive force and high saturation magnetic flux density has been proposed.

The above-mentioned magnetic head is typified by the one described in Japanese Patent Laid-Open No. 59-207415, which was previously filed by the present applicant.

This magnetic head will be explained with reference to FIGS. 8 and 9.

This magnetic head includes two high magnetic permeability ferrite blocks c and d having protrusions a and b whose cross-sections are protruding on the surface facing the magnetic recording medium. Magnetic materials e and f having higher saturation magnetic flux density are deposited. At the tips of the protrusions a and b, the magnetic bodies e and f face each other with an operating gap g interposed therebetween. Moreover, the center of the ferrite at the tips of the protrusions a and b is larger than the track width.

Note that the middle part of Figure 1 is a coil winding window, and j is a nonmagnetic material as a reinforcing material filled in a groove provided to determine the track width t. T is the magnetic head width.

Next, a method of manufacturing the above magnetic head will be explained with reference to FIGS. 10(A) to 10(H).

(Δ) On the surface j on the gap forming side of at least one plotter C forming a pair made of high magnetic permeability ferrite,
Form a groove for coil winding.

(B) Protrusions a, b having tips having a width narrower than the track width t orthogonal to the coil winding groove l) on the gap forming side J of the ferrite block c(d);
At least j, where k is one set, are provided in two adjacent grooves so as to sandwich the grooves, and k are provided in parallel in the two grooves in the set.

(C) At least the groove for the coil winding and the groove holding the protrusions a and b on the gap-forming side j of the ferrite block c(d) are provided with +j saturation magnetic flux from the ferrite on the surface. A high-density magnetic material e(f) is deposited.

(D) A non-magnetic material is filled in the groove forming the protrusion a(b) on the surface of which the magnetic material e(f) is adhered.

(E) Remove unnecessary portions of the non-magnetic material i and the magnetic material e(f) to expose a gap forming surface j where the magnetic material e(f) has a predetermined track width t.

(F) Prepare a pair of blocks c and d that have undergone the steps (A) to (E) above, and prepare the pair of blocks c and d.
A nonmagnetic layer gap (not shown) having a required thickness is formed on the gap forming surface j of at least one of the blocks C.

(G) The gap-forming surfaces j and j of the pair of blocks c and d that have undergone the step (F) are made to face each other and joined together to be integrated.

(1) Cut the joined blocks c and d at predetermined positions to obtain at least one magnetic head.

” - The magnetic head was manufactured as described above.

With a narrow track and a narrow gap, it is compatible with high coercive force recording media, and the contour effect can be ignored.

[Problem that the invention seeks to solve]

However, in the conventional magnetic head manufacturing method described above, in order to ensure the dimensional accuracy of the track width t and to avoid the influence of the contour effect, the gap forming surface J of the block C2d is
Two grooves k adjacent to y j.

At least one set of grooves, where k is 31, is provided with protrusions a and b having tips having a width narrower than the track width t. For this reason, the corners at the tips of the protrusions a and b are easily chipped, and the chippings may cause a decrease in yield due to defects. In particular, in the case of a magnetic head for a floating type magnetic disk device, the head width is as wide as 4 to 6 nwu. Therefore, 1
It is essential that the number of heads that can be produced from each ferrite block decreases, and production efficiency deteriorates. Therefore,
In order to improve the above-mentioned defects, it is necessary to increase the dressing frequency of the V-grooving grindstone that forms k in the grooves that sandwich the protrusions a and b, increase the lifespan of the grindstone, and control processing conditions. There will be more.

SUMMARY OF THE INVENTION An object of the present invention is to provide a method of manufacturing a magnetic head with high yield and production efficiency.

[Means for solving problems]

In the present invention, in order to ensure the dimensional accuracy of the track width and to avoid the influence of contour effects, the bonding surface of the block is
A working gap forming groove with non-parallel sides that are not parallel to the joint surface of the block is provided, a magnetic material is applied to the groove, and a non-magnetic material is then filled in the groove, eliminating the need for the non-magnetic material and magnetic material. portion is removed to expose a bonding surface having a predetermined track width in the magnetic material portion, and the bonding surfaces of a pair of blocks are bonded by matching the track widths through a gap, and the bonded blocks are connected to the working gap. A magnetic head is obtained by cutting at a predetermined position so that the magnetic material and block boundaries are not parallel to each other.

[Effect]

The present invention has an operating gap forming groove provided on the joint surface of the block, so that the corner between the joint surface of the block and the groove has a width narrower than the track width of the protrusion provided on the joint surface (gap forming surface) of the block. It is hard to miss when compared to the corner of the tip.

In addition, by removing unnecessary parts of the magnetic material adhered to the grooves of the block and the non-magnetic material filled in the block to expose the bonding surface having a predetermined track width on the block, the track width can be adjusted to It is equal to the film thickness of the deposited magnetic material and is determined by the film thickness of the magnetic material.

Furthermore, by cutting a pair of blocks joined with their track widths matched at a predetermined position, that is, leaving the non-parallel sides of the groove for forming the working gap, the working gap, the magnetic material, and the boundary between the blocks are separated. Non-parallel magnetic heads can be obtained.

〔Example〕

Hereinafter, a first embodiment of the method for manufacturing a magnetic head of the present invention will be described.
This will be explained with reference to FIGS. 7 to 7.

FIG. 1 is a perspective view of a magnetic head for a floating magnetic disk device manufactured by the magnetic head manufacturing method of the present invention, and FIG. 2 is an enlarged view of a portion of FIG. 1.

In the figure, 1 is a block made of non-magnetic material. Since this block 1 controls the floating part of the magnetic head, it is hereinafter referred to as slider block 1. This slider block 1 is made of alumina titanium carbide or calcium titanate, which has good C8S characteristics. Use materials such as This slider block 1 is
A groove 10 is provided in the center of the surface facing the magnetic recording medium, and flying smooth surfaces 1 are provided on both sides of the surface facing the magnetic recording medium (both sides of the groove 1O).
1 will be provided.

2 is a block made of non-magnetic material, and this block 2 forms the winding part of the magnetic head, so it has a C groove (coil winding window).
The C core block 2 is hereinafter referred to as a C core block 2 by performing 20 processing, and the C core block 2 is made of a material such as alumina titanium carbide or calcium titanate that has good CSS characteristics, similarly to the above-mentioned slider block 1. This C core block 2 has a width equal to the width of the flying smooth surface 11 of the slider block 1, and has a C groove 20 as a coil winding window on the surface facing the slider block 1.

The C core block 2 is integrally joined to the slider block 1 at positions corresponding to the floating sliding surfaces 11 on both sides of one end surface of the slider block 1 via a gap 3. This gap 3 is, for example, Sin
It is made of non-magnetic material such as
It is formed below.

An air bearing surface 21 is provided on the surface of the above-mentioned C core block 2 facing the magnetic recording medium on the same plane as the air bearing surface 11 of the slider block 1 and having the same size and width.

4 is a magnetic material, and this magnetic material 4 is made of, for example, amorphous or sendust having a high saturation magnetic flux density and a low coercive force.
A magnetic circuit is formed by rotating the core block 2 at the joint portion of the core block 2 by sputtering. The magnetic body 4 forming this magnetic circuit passes inside the coil winding window 20, and the flying sliding surfaces 11 and 2 of the slider block 1 and C core block 2! It intersects the gap at 3 and is bent at the gap 3.

5 is the above-mentioned slider block 1 and C core block 2
This is an operating gap formed at the intersection of the gap 3 and the magnetic body 4 on the floating surfaces 11 and 21 of the magnetic body.

The track width t of this working gap 5 is determined by the thickness of the magnetic body 4. T' is the width of the floating surfaces 11 and 21.

6 is a non-magnetic material filled in a groove provided to determine the track width t, and this non-magnetic material 6 protects the magnetic body 4;
Further, it is a reinforcing material for joining the slider block 1 and the C core block 2, and in this embodiment, a glass material is used. As the glass material, it is necessary to select a glass having a low or high melting point depending on the type of the magnetic body 4 depending on the purpose.

Next, one manufacturing process of the present invention for the above-described floating type magnetic head for a magnetic disk device will be explained with reference to FIGS. 3(A) to 3(G). In addition, in the figure, the same reference numerals as in FIGS. 1 and 2 indicate the same parts.

(A) A pair of blocks 1 and 2 made of non-magnetic material each having a size that can accommodate a plurality of heads is prepared.

As the non-magnetic material of the pair of blocks 1 and 2, alumina titanium carbide, calcium titanate, etc., which have good C8S characteristics, are used. One of the pair of blocks is used as a slider block 1 for controlling the floating part of the magnetic head, and the other is used as a C core block 2 for forming the winding part.

Joint surfaces 13 and 23 of such slider block 1 and C core block 2. That is, on the gap forming surface, grooves 12 and 22 for forming an operating gap are provided in parallel and at the same pitch, each having an isosceles trapezoidal shape with a wide opening and narrowing toward the back. This pitch dimension is approximately 5 mm, which is the sum of the slider width dimension of the magnetic head, the cutting width dimension, and the processing width dimension. Also.

The width dimensions of the working gap forming grooves 12 and 22 may be determined by taking into consideration the two track widths, the slider cutting width dimension, and the positional dimension of the working gap 5 in the width T of the floating sliding surfaces 11 and 21. Furthermore, the slope of the isosceles of the isosceles trapezoid of the first operation gap forming grooves 12 and 22 is:
Since the thickness of the magnetic body 4 directly determines the track width of the working gap 5, a slope with which there is little variation in the thickness of the magnetic body 4 is selected. For example, there is little variation in the thickness of the magnetic body 4 at an angle of inclination of around 60°. In such working gap forming grooves 12 and 22, blocks 1 and 2
It has at least non-parallel sides that are not parallel to the joint surfaces 13 and 23 of. That is, it is the isosceles inclined side of an isosceles trapezoid.

At this time, slider block 1 and C core block 2
Since the isosceles trapezoidal working gap forming grooves 12 and 22 are provided on the joint surfaces 13 and 23 of the block 1,
The corners between the joint surfaces 13 and 23 of the blocks 13 and 23 and the grooves 12 and 22 for forming the working gap are obtuse angles, and are missing when compared with the corners of the tip, which have a width narrower than the track width of the protrusion provided on the joint surface of the block. It's difficult. Therefore, there is no risk of a decrease in yield due to defects. In particular, in the case of the magnetic head for the above-mentioned floating type magnetic disk device, the head width is 4
Although the number of heads is as large as ~6 blocks, the number of heads that can be produced from one block is larger than that of conventional magnetic head manufacturing methods, and production efficiency is good. In addition, due to its high production efficiency, it is possible to reduce the number of times of dressing of the grindstones containing the grooves 12 and 22 for forming one working gap, extend the life of the grindstones, and simplify the management of processing conditions.

Before and after machining the working gap forming grooves 12 and 22 described above, a coil winding groove 20 is provided in the joint surface 23 of the C core block 2 so as to be perpendicular to the working gap forming groove 22.

(B) On the joint surfaces 13 and 23 of the slider block 1 and C core block 2, including the working gap forming grooves 12 and 22 surfaces, and on the coil winding groove 20 surface,
The magnetic material 4, for example, amorphous or sendust, which is a metallic magnetic material having a high saturation magnetic flux density and a low coercive force, is formed by a sputtering method to a thickness that takes into account the dimensions of a narrow track width.

Here, the track width t can be controlled by controlling the sputtering conditions, similar to the film thickness control of the magnetic material 4. That is, the track width t is the same as the thickness of the magnetic body 4.

(C) In the actuation gap forming grooves 12 and 22 on the surfaces of which the magnetic bodies 4 of the pair of blocks 1 and 2 are adhered, the magnetic bodies 4 are protected and the blocks 1 and 2 are
A non-magnetic material 6 is filled as a reinforcing material for bonding. The non-magnetic material 6 is, for example, a glass material, and depending on the type of the magnetic material 4, a glass material having a melting point of low or high temperature is used depending on the purpose.

(D) Grinding and polishing the joint surfaces 13 and 23 sides filled with the non-magnetic material 6 of the pair of blocks 1 and 2,
Unnecessary portions of the non-magnetic material 6 and magnetic material 4 are removed, and processing is continued until the magnetic material 4 on the bonding surfaces 13 and 23 disappears and the bonding surfaces 13 and 23 of the blocks 1 and 2 of non-magnetic material are exposed.

That is, bonding surfaces 13 and 23 having a predetermined track width t are exposed on the pair of blocks 1 and 2 at the portion of the magnetic body 4.

At this time, the track width t exposed at the joint surfaces 13 and 23 of the pair of blocks 1 and 2 is equal to the film thickness of the magnetic material 4 deposited on the 1-operation gap forming grooves 12 and 22, and the magnetic material It is determined by the film thickness of 4.

Therefore, by controlling the film thickness of the magnetic material 4, a highly accurate track width t can be obtained.

(E) A gap 31 of a non-magnetic material such as Sin is formed in the bonding surfaces 13 and 23 of the pair of blocks 1 and 2 to a thickness of 1 μm or less by sputtering.

(F) The slider block 1 and C core block 2
Joint surfaces 13 and 23 of a pair of blocks 1 and 2 with
The upper track widths t are matched through the gap 3,
and positioning the track width in the direction to obtain the effective track width t
ensure that

After that, pressurize the pair of blocks 1 and 2.

Heat. Then, the filling nonmagnetic material 6 melts, and the slider block 1 and C core block 2 are joined at their joint surfaces 13 and 23.

At this time, on the floating sliding surfaces 11 and 21 of the pair of blocks 1 and 2, an operating gap 5 having a track width t is formed at the intersection of the gap 3 and the magnetic body 4.

(G) Place the joined pair of blocks 1 and 2 at a predetermined position, that is, in the isosceles trapezoidal grooves 12 and 22 for forming the working gap, leaving the non-parallel isosceles inclined sides and the center 7. Cut the bottom part using a slicer, etc.

A large number of magnetic head bodies (A), (B), (C), etc. are cut out.

At this time, the cutting width 70 of the slicer is equal to or slightly larger than the width of the bottom of the isosceles trapezoidal working gap forming grooves 12 and 22. As a result, in the isosceles trapezoidal working gap forming grooves 12 and 22, non-parallel isosceles inclined sides remain, and the working gap 5 and the magnetic body 4. There is no part where the boundaries of blocks 1 and 2 (non-magnetic material) are parallel to each other, so it is possible to provide a magnetic head that is not affected by the contour effect.

Magnetic head body (A) machined in large numbers as described above
, (b), (c)... In order to form a slider part in the slider block 1 that controls the flying of the magnetic head, W1 is used.
10-insertion processing is performed to ensure the floating smooth surface width T considering the floating spacing. At this time, the position of the operating gap 5 is formed so as to be located at the outer ridgeline of the flying smooth surfaces 11 and 21. Furthermore, a coil is wound.

In this way, a magnetic head for a floating magnetic disk device is manufactured.

7(A), (B), and (C) are explanatory diagrams showing modified examples of the working gap forming groove.
The same reference numerals as in FIGS. 8 to 10 indicate the same parts.

FIG. 7(A) shows the isosceles triangular working gap forming grooves 12A, 22A, and the center of the working gap forming grooves 12A, 22A, ie, the apex portion of the isosceles triangle, is cut with a cutting width 70.

FIG. 7(B) shows a right triangular operating gap forming groove 1.
2B and 22B, and the outside of the working gap forming grooves 12B and 22B, that is, the long base portion of the right triangle, is cut with a cutting width of 70.

FIG. 7(C) shows a semicircular operating gap forming groove 12G.
, 22C, and the working gap forming groove 12 has a cutting width of 70.
G, cut the center of 22C, that is, the radial part of the semicircle.

The above-mentioned working gap forming grooves 12A, 12B, 12c.

22A, 22B, and 22G have fewer defects than defects, are not affected by contour effects, and can obtain narrow track widths t with high accuracy.

In the above-described embodiments, a method for manufacturing a magnetic head for a floating type magnetic disk device was described; however, the method for manufacturing a magnetic head of the present invention can also be used for manufacturing magnetic heads other than the above-mentioned floating type. be able to.

In addition, in the above embodiment, there are working gaps 5 on both sides.
Although the method for manufacturing a magnetic head having a single working gap 5 has been described, the present invention can also be applied to a method for manufacturing a magnetic head having one working gap 5.

〔Effect of the invention〕

As is clear from the above, the manufacturing method of the magnetic head of the present invention requires forming an operating gap on the joint surface of a pair of blocks in order to ensure dimensional accuracy of a narrow track width and to avoid the influence of contour effect. Since a groove is provided, the corner between the joint surface of the block and the groove is difficult to miss when compared with the corner at the tip, which has a width narrower than the track width of the protrusion provided on the joint surface of the block. Therefore, there is no risk of a decrease in yield due to defects, and production efficiency can be improved.

In addition, unnecessary parts of the magnetic material and the non-magnetic material filled in the operating gap forming grooves of the pair of blocks are removed.
Since the bonding surface having a predetermined track width is exposed on the block, the track width exposed on the bonding surface of the pair of blocks is equal to the film thickness of the magnetic material deposited on the 1-actuation gap forming groove. And it is determined by the film thickness of the magnetic material.

Therefore, by controlling the film thickness of the magnetic material, a highly accurate track width can be obtained.

Furthermore, by cutting a pair of blocks joined with their track widths matched at a predetermined position, that is, leaving the non-parallel sides of the groove for forming the working gap, the working gap, the magnetic material, and the boundary between the blocks are separated. A non-parallel magnetic head is obtained. Therefore, it is possible to provide a magnetic head that is not affected by the contour effect.

[Brief explanation of the drawing]

1 to 7 show an embodiment of the method of manufacturing a magnetic head of the present invention, FIG. 1 is a perspective view of a magnetic head for a floating magnetic disk device manufactured by the method of the present invention, and FIG. 2 is an enlarged view of part n in Figure 1, Figures 3 (A) to (G)
4 is an explanatory diagram showing one manufacturing process of the magnetic head of the present invention.
The figure is a partially enlarged plan view of the block showing the groove for forming an operating gap, FIG. 5 is a partially enlarged perspective view of the slider block,
Figure 6 is a partially enlarged perspective view of the C core block, Figure 7 (A
) to (C) are partially enlarged plan views of the block showing modified examples of the working gap forming groove. Figure 8 is a perspective view of a magnetic head manufactured by the conventional method, Figure 9 is a partial plan view of the same magnetic head manufactured by the conventional method, and Figures 1θ (A) to (H) are conventional magnetic heads. FIG. 3 is an explanatory diagram showing a head manufacturing process. 1...Slider block, 2...C core block,
12, 22... Groove for forming an operating gap, 13.23.
...Joint surface, 20...Coil winding groove, 3...Gap, 4...Magnetic material, 5...Working gap, 6...
・Non-magnetic material, 7.. Cutting position, 70.. Cutting width, t.
...Track width.

Claims (1)

[Claims] 1. A method for manufacturing a magnetic head, characterized by comprising the steps (a) to (h) below. (a) A step of providing a working gap forming groove having at least non-parallel sides that are not parallel to the joint surfaces of the blocks on the joint surfaces of a pair of blocks made of a non-magnetic material. (b) A step of providing a coil winding groove on the joint surface of at least one of the pair of blocks so as to intersect with the working gap forming groove, before and after the step (a). . (c) A step of depositing a magnetic material for forming a magnetic circuit on at least the groove surface for forming the working gap among the bonding surfaces of the pair of blocks. (d) A step of filling a non-magnetic material into the working gap forming groove whose surface is coated with the magnetic material. (e) removing unnecessary parts of the non-magnetic material and magnetic material;
A step of exposing a bonding surface having a predetermined track width in a portion of the magnetic material. (F) Forming a gap of a required thickness on the joint surface of at least one of the pair of blocks. (g) A step of joining the joining surfaces of the pair of blocks by matching the track widths of the magnetic material portions through a gap. (H) Cutting the joined pair of blocks, leaving the non-parallel sides of the working gap forming grooves, to obtain at least one magnetic head.