JPH06124561A - Magnetic head slider and its production and hard disk driving device - Google Patents

Abstract

PURPOSE:To provide the magnetic head slider and process for production which obviate the clogging of a winding groove by inflow of glass and enable the easy coil winding in the winding groove and the hard disk driving device. CONSTITUTION:A yoke 36 consisting of a ferromagnetic oxide and a slider body 2 are butted against each other and the winding groove 4 is formed between the butt surfaces. This yoke 36 is reinforced by coating its both flanks with the first glass 33. The second glass 22 having the softening temp. lower than the softening temp. of the first glass 33 is disposed on the butt surfaces of the slider body 2. The slider body is then heated to a temp. at which the first glass 33 does not melt and the second glass 22 melts to join the butt surfaces, by which the magnetic head slider 14 is formed. This magnetic head slider is equipped in the supporting mechanism of the hard disk driving device.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head slider in a hard disk drive (HDD) device in which a slider body formed of a ferromagnetic oxide and a winding yoke are butted against each other and integrally joined, and a method of manufacturing the same. And a hard disk drive device equipped with the magnetic head slider.

[0002]

2. Description of the Related Art As shown in FIG. 12, such a head slider (14) is a flat slider body made of ferromagnetic oxide.
(2) and a winding portion (3) including a yoke (36) (36) made of a ferromagnetic oxide and glass-bonded to the tip of the main body. Parallel air bearings (5) with a certain height extending in the same direction
(5), and the track portion (6) including the gap spacer (64) and the winding groove (4) are formed at the joint portion between the main body and the yoke.

In the above magnetic head slider, the width t of the winding yoke (36) is substantially equal to the width w of the air bearing portions (5) and (5). The width w of the air bearing part (5) is 40
Since the width is about 0 μm, the width t of the yoke, that is, the width of the ferromagnetic oxide forming the yoke is too large, and the inductance of the magnetic head increases. In order to improve the high frequency characteristics in response to the higher recording density, it is necessary to reduce the inductance as much as possible, and the conventional yoke shape cannot handle it.

A slider in which the width t of the yoke (36) is smaller than the width w of the air bearing portions (5) (5) has also been proposed (Japanese Patent Laid-Open No. 2-249120). However, when the width t of the yoke (36) is smaller than the width w of the air bearing portion (5), the width t of the yoke is 200 μm because of the strength of the yoke (36).
There is a problem that the strength is weakened when the degree is below the limit, cracks and cracks easily enter the yoke and the joint between the yoke and the slider body in the manufacturing process, and the yield is remarkably reduced.

The applicant has previously proposed a magnetic head slider 14 having the structure shown in FIG. 13 (Japanese Patent Laid-Open No. 3-28600).
3). In the magnetic head slider (14), the width t of the yoke (36) is made smaller than the width w of the air bearing portion (5), and both sides or one side surface of the yoke (36) is covered with glass (33) to make it wide. The winding portion (3) is formed to enhance the strength of the yoke (36) and strengthen the joint between the yoke (36) and the slider body (2). This Magnetic Head Slider (14)
During the manufacturing process, the slider body (2) and the winding yoke (3
When the glass (33) is joined by melting and melting the glass (33), the glass (33) flows into the winding groove (4), and the opening of the winding groove (4) is closed. Since the width is narrowed, there is a problem that it is difficult to wind the coil around the completed magnetic head slider (14).

The present invention provides a magnetic head slider (14) capable of preventing the winding groove (4) of the magnetic head slider (14) from being filled with glass and easily winding a coil, a manufacturing method thereof, and a hard disk drive device. To clarify.

[0007]

[Means for Solving the Problems]

(Structure) The magnetic head slider (14) is a slider body made of a ferromagnetic oxide and having an air bearing portion (5).
(2) and the winding yoke (36) made of ferromagnetic oxide,
Joining with a gap spacer (64) interposed, at least one of the slider body (2) and the winding yoke (36),
A structure in which a winding groove (4) having an opening is formed in the joint surface,
One side or both sides of the yoke (36) are covered with glass (33) to form a winding portion (3), and the slider body (2) faces the first glass (33) of the yoke (36). A second glass (22) having a lower softening point than the first glass (33) is provided, and the second glass (2
The yoke (36) and the slider body (2) are integrally joined by 2).

The magnetic head slider comprises a large substrate (1) formed of a ferromagnetic oxide and processed into a slider body.
A winding groove (4) is formed on the abutting surface (13) of either or both of 1) and a small substrate (12) formed of a ferromagnetic oxide and processed into a winding yoke. Groove-shaped notches that are orthogonal to the winding groove (4) on the respective abutting surfaces (13) of both boards and that penetrate the front and back surfaces with a gap narrower than the processing width of the winding portion (3) including the yoke. (21) Step of forming (31), the notch (31) on the winding part (3) side is filled with the first glass (33), and the slider body is formed.
The notch (21) on the (2) side is filled with a second glass (22) having a softening point lower than that of the first glass (33), and a gap spacer (64) is provided on the abutting surfaces (13) (13). The two substrates (11) and (12) are butted against each other, and the second glass (22) is melted, but the first glass (33) is heated to a temperature at which it is not melted, and the two substrates (11) and (12) are bonded. Then
The process of forming the welded wafer (1), the front surface of the small substrate (12) is scraped off until the first glass (33) at the bottom of the notch (31) is exposed, and the outer shape processing such as air bearing processing and track processing is performed. It is manufactured by carrying out a series of steps for performing.

The hard disk drive device (7) is rotatably supported by the main body of the device and supports the magnetic head slider (14) having the above-described structure with respect to the hard disk (71) which is rotating at a high speed by the rotating mechanism. ), And separate them from each other.

(Operation and Effect) Magnetic head slider (1
In 4), the slider body (2) and the winding yoke (36) are connected by two types of glass (33) (22) having different softening points,
Since the softening point of the second glass (22) is set lower than that of the first glass (33), the slider body (2) and the winding yoke are
When the (36) and (36) are heated in close contact with each other, the first glass (33) having a large facing area with respect to the winding groove (4) is not softened but the second glass (22) is softened to both Can be joined. Therefore, the first glass (33) does not flow into the winding groove (4) of the magnetic head slider (14), and it is possible to avoid closing the opening of the winding groove (4) and reducing the diameter of the winding. It becomes easy to wind the coil around the portion (3).

[0011]

EXAMPLE As shown in FIG. 2, a hard disk drive device (7) rotatably supports a plurality of hard disks (71) in parallel on a device body (73) and is driven to rotate at a high speed by a rotation mechanism (not shown). is doing. A head support mechanism (14) with a magnetic head slider (14) attached to the tip corresponding to each hard disk (71) is provided in the main body (73) of the device, and a positioning circuit is driven by the control circuit to move the head on the track. Almost stationary. The magnetic head slider (14) floats above the hard disk (71) (several tens of μm) by the air pressure caused by the high speed rotation of the hard disk (71), and a signal is recorded on or reproduced from the hard disk (71).

The magnetic head slider 14 has the structure shown in FIG. 1 and is made of a ferromagnetic oxide.
(5) having a slider body (2) and a winding yoke (36) made of a ferromagnetic oxide and bonded to the slider body, and the slider body (2) and the yoke (36) are opposed to each other. A winding groove (4) is formed through the mating surface. One or both side surfaces of the yoke (36) are covered with the first glass (33) to form the winding part (3), and the yoke (36) and the slider body are formed.
The second glass (22) is bonded to the second glass (22) having a softening point lower than that of the first glass (33).

The magnetic head slider (14) of the present invention
Is manufactured by the process of FIGS. As shown in FIG. 3, a pair of large and small substrates (11) and (12) made of a ferromagnetic oxide such as Mn-Zn single crystal ferrite have gap depth regulating grooves ( 41) Grind (41) with a diamond grindstone or the like. Also, the abutting surface (13) of the small substrate (12)
Is orthogonal to the gap depth regulating groove (41), has a gap narrower than the processing width of the winding portion (3) described later, and is deeper than the thickness of the yoke (36) after the final processing, Open the notch (31). The width t of the ridge (32) remaining between the notches (31) and (31) is determined by the inductance required for the yoke (36) formed by post-processing. Also, the abutting surface (1) of the large substrate (11)
In 3), a groove-shaped notch (21) having the same width as the groove-shaped notch (31) and for shallow junction is formed at a position facing the groove-shaped notch (31) formed in the small substrate (12). Open.

As shown in FIG. 4, the first glass (33) is filled in the gap depth regulating groove (41) and the groove-shaped notch (31) of the small substrate (12) to make the gap depth of the large substrate (11). Restriction groove (41) and groove notch (2
1) is filled with the second glass (22) having a lower softening point than the first glass (33). The first glass (33) reinforces the yoke (36) of the magnetic head slider (14) in FIG. 1 and is a high melting point glass, and the second glass (22) is a slider body (see FIG. 1). It is a low-melting glass that is bonded to the contact surface of 2) and the winding part (3) by interposing them, and the components and characteristics of each glass material are shown in Table 1. However, the coefficient of linear thermal expansion is
The average coefficient of linear thermal expansion between room temperature and 300 ° C., the softening point is the temperature at which the viscosity reaches ^10.76 poise, and the filling temperature is the maximum history temperature of the glass filling process according to the manufacturing method of the present invention.

[0015]

[Table 1]

The abutting surfaces of both substrates (11) and (12) are mirror-polished, and a nonmagnetic thin film of SiO ₂ is sputtered on the abutting surfaces of both substrates or one of the substrates to a thickness of 0.2 μm to form a gap. Spacer (64) is formed, and groove-shaped notches on both substrates (11) and (12) as shown in FIG.
Butt the ridges (24) (32) between (21) (31) so that they match.
The second glass (22) is softened, but the first glass (33) is heated while being controlled to a temperature at which it is not softened, and the two substrates (11) and (12) are bonded together by the melting point of the second glass (22) to be integrated. To form a welded wafer (1).

Next, as shown in FIG. 6, the front surface of the welded wafer (1) on the side of the small substrate (12) is ground and removed while leaving a predetermined thickness of the yoke (36) to expose the first glass. Further York (36)
Wafer to limit the width t _o of the winding part (13) including
On the small board (12) side of (1), cut through the upper and lower surfaces (35) (3
5) is established.

Next, as shown in FIG. 7, the air bearing (5)
(5) The air inflow end (51) and the air outflow end (52) are ground to be sloped. After patterning the part that should become the track part (6) by photolithography, both sides of the track part (6) are shaved off by ion trimming etc. to form a recess (61), and the predetermined track width is regulated. To do. As indicated by the one-dot chain line L, the wafer (1) is sliced in units of one slider to obtain the head slider shown in FIG.

In the magnetic head slider obtained by the above manufacturing method, both sides of the yoke (36) are covered with the first glass (33) (33) to increase the width t _o of the winding portion (3). However, since the width t of the yoke itself can be reduced, the width of the ferromagnetic oxide occupying the winding portion (3) is reduced to reduce the inductance,
It can support high recording density. First side of the yoke
Since the glass (33) is welded to the second glass (22) of the slider body (2), the joining strength between the yoke (36) and the slider body (2) is increased, and both sides of the yoke are covered with glass. Therefore, the mechanical strength of the yoke can be sufficiently secured.

Moreover, the winding yoke (36) and the slider body
Joining with (2) is performed by softening and fusing the second glass (22), and at this time, the first glass (33) has a high melting point and does not melt. Therefore, since the first glass (33) does not flow into the winding groove (4) and the opening of the winding groove (4) is not blocked, the coil winding around the magnetic head slider (14) is easy. Can be done.

In the practice of the present invention, the second glass
The winding part (3) may be constructed by covering only the inside of the yoke (36) or only the outside of the yoke with (22). Even in these cases, since the width t of the yoke itself can be made small, the inductance can be reduced and high recording density can be accommodated, and one side of the yoke can be reinforced by the glass (4) to prevent the yoke from being damaged.

Further, the winding groove (4) is provided with a concave groove only on the abutting surface of either the large substrate (11) or the small substrate (12), and the concave groove is omitted on the other substrate. You can also Similarly, the gap depth regulating groove (41) also has a large substrate (11) or a small substrate (1).
It is also possible to open only in either one of 2) and omit the gap depth regulating groove to the other substrate. Furthermore, large and small substrates (1
1) Before joining (12), a ferromagnetic metal thin film such as sendust is formed on the abutting surface of either one of the substrates or both by sputtering or the like, and the gap spacer is formed.
By joining the two substrates via (6), a so-called MIG head slider having a high recording density, which has a ferromagnetic metal thin film on one side or both sides of the gap, can be formed. In the embodiment, the winding portion (3) is formed on each of the air outflow ends of the two air bearings (5) (5), but it is possible to form the winding portion on only one of them. Of course.

FIGS. 8 and 9 show a method of another embodiment of the present invention in which the regulation of the track width is formed by the same means as the conventional one. After the steps of FIGS. 3 to 5 are completed, as shown in FIG. 8, the track width regulating grooves (15) and (15) are formed by dry etching such as diamond grindstone, chemical etching, ion beam etching, etc. Part (65) remains, and then the abutting surface (13) of the large substrate (11)
Glass with a lower melting point than the second glass (22)
3) is melt-filled into the track width regulation groove (15) and the surface is polished. Table 1 shows an example of the composition and characteristics of the low melting point glass (63).

Next, as shown in FIG. 9, the front surface of the welded wafer (1) on the side of the small substrate (12) is ground and removed while leaving a predetermined yoke thickness to expose the first glass (33). Also, the yoke (36)
Wafer to limit the width t _o of the winding part (3) including
A cutout (35) is opened through the upper and lower surfaces on the side of the small substrate (12) of (1). The air bearings (5) (5) and the air inflow end (51) and the outflow end (52) are ground to be slopes. Next, the above wafer (1)
Is sliced into one slider unit to obtain a head slider.

The magnetic head slider thus obtained also has a large width t _{o of} the winding portion (3) in the same manner as described above.
Since the side surfaces of the yoke (36) are covered with the glass (33) (33), the joining strength between the yoke (36) and the slider body (12) is large, and the mechanical strength of the yoke can be sufficiently secured.
Further, since the width t of the yoke itself can be reduced, the inductance can be reduced and high recording density can be dealt with.

The above description of the embodiments is for explaining the present invention, and should not be construed as limiting the invention described in the claims or limiting the scope. The configuration of each part of the present invention is not limited to the above-mentioned embodiment, and it goes without saying that various modifications can be made within the technical scope described in the claims.

[Brief description of drawings]

FIG. 1 is a perspective view of a slider of the present invention.

FIG. 2 is a perspective view of a hard disk drive device having a magnetic head slider.

FIG. 3 is a perspective view showing a state in which a pair of substrates is grooved in the magnetic head slider manufacturing process of the invention.

FIG. 4 is a perspective view showing a state in which a groove is filled with glass in the same as above.

FIG. 5 is a perspective view showing a state in which a pair of substrates are joined together in the above.

FIG. 6 is a perspective view of the same as above, in which the front surface is polished to expose the glass of the small substrate and a cutout for determining the width of the winding portion is formed.

FIG. 7 is a perspective view showing a state in which an air bearing portion and a track portion are formed in the above.

FIG. 8 is a perspective view of a glass-filled wafer of a slider of the second embodiment.

FIG. 9 is a perspective view of the completed magnetic head slider of the above.

FIG. 10 is a perspective view showing a state in which a pair of substrates has been grooved in a conventional magnetic head manufacturing process.

FIG. 11 is a perspective view showing a state in which a pair of substrates is filled with glass in the same as above.

FIG. 12 is a perspective view of a conventional magnetic head slider.

FIG. 13 is a perspective view of a magnetic head slider previously proposed by the applicant.

[Explanation of symbols]

 (11) Large board (12) Small board (15) Track width regulation groove (2) Slider body (22) Second glass (3) Winding part (32) Ridge (33) First glass (36) Yoke ( 4) Winding groove (5) Air bearing part (6) Track part (64) Gap spacer (7) Hard disk drive device

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] February 4, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] Claim 2

[Correction method] Change

[Correction content]

[Procedure Amendment 2]

[Document name to be amended] Statement

[Name of item to be corrected] 0005

[Correction method] Change

[Correction content]

[0005] Applicant has previously proposed a magnetic head slider (14) of the structure shown in FIG. 13 (Japanese Patent Application Rights 3-28600
3). In the magnetic head slider (14), the width t of the yoke (36) is made smaller than the width w of the air bearing portion (5), and both sides or one side surface of the yoke (36) is covered with glass (33) to make it wide. The winding portion (3) is formed to enhance the strength of the yoke (36) and strengthen the joint between the yoke (36) and the slider body (2). This Magnetic Head Slider (14)
During the manufacturing process, the slider body (2) and the winding yoke (3
When the glass (33) is joined by melting and melting the glass (33), the glass (33) flows into the winding groove (4), and the opening of the winding groove (4) is closed. Since the width is narrowed, there is a problem that it is difficult to wind the coil around the completed magnetic head slider (14).

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction content]

The magnetic head slider comprises a large substrate (1) formed of a ferromagnetic oxide and processed into a slider body.
A gap depth regulating groove (41) is formed in the abutting surface (13) of either or both of 1) and a small substrate (12) formed of a ferromagnetic oxide and processed into a winding yoke. At the same time, the gap depth regulating groove (41) is formed on the abutting surface (13) of both substrates.
Of the groove-like notches (21) (31) which are orthogonal to the wire and which penetrate the upper and lower surfaces at intervals smaller than the processing width of the winding part (3) including the yoke. Filling the notch (31) with the first glass (33) and filling the notch (21) on the slider body (2) side with the second glass (22) having a lower softening point than the first glass (33). After forming the winding groove (4) on the butting surface (13) , the two substrates (11) and (12) are butted against each other via the gap spacer (64), and the second glass (22) is melted, The first glass (33) is heated to a temperature at which it does not melt to bond both substrates (11) and (12) to form a welded wafer (1), the front surface of the small substrate (12) is cut out (31)
While scraping until the first glass (33) at the bottom of is exposed,
It is manufactured by carrying out a series of steps for performing outer shape processing such as air bearing processing and track processing.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0011

[Correction method] Change

[Correction content]

[0011]

EXAMPLE As shown in FIG. 2, a hard disk drive device (7) rotatably supports a plurality of hard disks (71) in parallel on a device body (73) and is driven to rotate at a high speed by a rotation mechanism (not shown). is doing. A head support mechanism (72) with a magnetic head slider (14) attached to the tip corresponding to each hard disk (71) is provided in the device main body (73), and a positioning mechanism is driven by a control circuit to move the track on the track. Almost stationary. Magnetic head slider (14) by air pressure caused by the high speed of the hard disk (71), a hard disk (71) emerged (number 10 n m) on, the recording or reproduction of a signal to the hard disk (71) is carried out .

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0016

[Correction method] Change

[Correction content]

The abutting surfaces of both substrates (11) and (12) are mirror-polished, and winding grooves (4) are formed on the abutting surfaces of both substrates or one of the substrates.
After the formation, a non-magnetic thin film such as SiO2 is sputtered to a thickness of 0.2 μm to form a gap spacer (64), and the groove-shaped notches (21) (31) of both substrates (11) (12) are formed as shown in FIG. Between) (24) (32)
Are matched so that the second glass (22) is softened, but the first glass (33) is heated while being controlled to a temperature at which it does not soften, and both substrates (11) are heated by the melting point of the second glass (22). (12)
Are bonded and integrated to form a welded wafer (1).

[Procedure correction 6]

[Document name to be amended] Statement

[Correction target item name] 0017

[Correction method] Change

[Correction content]

Next, as shown in FIG. 6, the front surface of the welded wafer (1) on the side of the small substrate (12) is ground and removed while leaving a predetermined thickness of the yoke (36) to expose the first glass. Further York (36)
The width of the winding part (3) including
On the small board (12) side of (1), cut through the upper and lower surfaces (35) (3
5) is established.

[Procedure Amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0018

[Correction method] Change

[Correction content]

Next, as shown in FIG. 7, the air bearing (5)
(5) The air inflow end (51) and the air outflow end (52) are ground to be sloped. After patterning by photolithography on the part that should become the track part (6), ion
Both sides of the track portion (6) are scraped off by a ring or the like to form a recess (61), and a predetermined track width is regulated. As indicated by the one-dot chain line L, the wafer (1) is sliced in units of one slider to obtain the head slider shown in FIG.

[Procedure Amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0021

[Correction method] Change

[Correction content]

In the practice of the present invention, the first glass
The winding part (3) may be formed by covering only the inside of the yoke (36) or only the outside of the yoke with (33) . Even in these cases, since the width t of the yoke itself can be made small, the inductance can be reduced and high recording density can be accommodated, and one side of the yoke can be reinforced by the glass (4) to prevent the yoke from being damaged.

[Procedure Amendment 9]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 6

[Correction method] Change

[Correction content]

[Figure 6]

[Procedure Amendment 10]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 7

[Correction method] Change

[Correction content]

[Figure 7]

[Procedure Amendment 11]

[Document name to be corrected] Drawing

[Correction target item name] Figure 8

[Correction method] Change

[Correction content]

[Figure 8]

Claims (3)

[Claims] 1. An air bearing portion made of a ferromagnetic oxide.
The slider body (2) having the (5) and the winding yoke (36) made of a ferromagnetic oxide are butt-joined with each other with a gap spacer (64) interposed, and the slider body (2) or the winding is wound. In a magnetic head slider in which a winding groove (4) opening to the abutting surface (13) is formed on at least one of the wire yokes (36), one side or both side surfaces of the yoke (36) is attached to the first glass ( 33), the winding part (3) is formed, and the slider body (2) is covered.
A second glass (22) having a lower softening point than the first glass (33) is provided on the abutting surface (13) of the first glass (33), and the yoke (36) and the slider body (2) are integrated by the second glass (22). A floating magnetic head slider that is joined. 2. A large substrate (11) formed of a ferromagnetic oxide and processed into a slider body, and a small substrate (12) formed of ferromagnetic oxide and processed into a winding yoke. A winding groove (4) is formed on one or both abutting surfaces (13), and windings including a yoke are formed on the abutting surfaces (13) of both substrates at right angles to the winding groove (4). The step of forming groove-shaped notches (21) (31) penetrating both the front and back sides with an interval narrower than the working width of the wire portion (3), the first glass (not shown) in the notch (31) of the winding portion (3). 33) and the notch (21) of the slider body (2) is filled with the second glass (22) having a lower softening point than the first glass (33), the abutting surfaces (13) (13) The two substrates (11) and (12) are butted against each other via the gap spacer (64), and the second glass (22) is melted, but the first glass (33) is heated to a temperature at which the two substrates (11) and (12) are not melted. 11) (12) is bonded to form a bonded wafer (1) The front surface of the small substrate (12) is shaved off until the first glass (33) at the bottom of the notch (31) is exposed, and the outer surface processing such as air bearing processing and track processing is performed. Method for manufacturing magnetic head slider. 3. A rotation mechanism for driving a hard disk (71) rotatably supported by a main body (73) of the apparatus, and a magnetic head slider (14) supported at a tip thereof, and a magnetic head slider ( Support mechanism (72) that moves the (71) closer and away, and the magnetic head slider (14) for the hard disk (71)
The magnetic head slider (14) comprises a slider body (2) made of a ferromagnetic oxide and having an air bearing portion (5) and a ferromagnetic oxide. The winding yoke (36) is abutted and joined with the gap spacer (64) interposed, and the slider body (1
2) Alternatively, at least one of the winding yokes (36) is provided with a winding groove (4) having an opening on a joint surface,
One side surface or both side surfaces of (36) is covered with the first glass (33) to form a winding part (3), and the abutting surface (13) of the slider body (2) is covered with the first glass (33). A hard disk drive device characterized in that a second glass (22) having a low softening point is provided, and the yoke (36) and the slider body (2) are integrally joined by the second glass (22).